Grinding pad surface defect detection device

Abstract

The utility model discloses a grinding pad surface defect detection device, which comprises a box body, a detection device and a control device, wherein the top of the box body is open; the bearing table is a light-transmitting plate, and the bearing table is arranged at the top of the box body; the lamp strip comprises a plurality of lamp pieces which are connected in parallel; the lamp strip plate is arranged in the box body, a plurality of holes are uniformly formed in the lamp strip plate at intervals, the lamp strip is connected with the lamp strip plate, and the lamp parts are arranged in the holes of the lamp strip plate. When the grinding pad surface defect detection device is used for grinding pad surface defect detection, the grinding pad can be placed on the bearing table, light generated by the lamp strip penetrates through the bearing table to irradiate the grinding pad, workers can visually detect the surface defects of the grinding pad conveniently, and the defect identification accuracy and the detection efficiency are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor preparation, in particular to a grinding pad surface defect detection device. Background Art

[0002] Polishing is one of the main processes in semiconductor preparation. The main equipment for semiconductor polishing is the chemical mechanical polisher (CMP). The chemical mechanical polisher controls the rotation of the polishing pad to polish the surface of the wafer, thereby eliminating surface defects of the wafer and improving the flatness of the wafer. In order to ensure the polishing effect, it is necessary to ensure that the surface of the polishing pad is free of defects during the polishing process, so it is necessary to detect the surface defects of the polishing pad. The detection of the polishing pad is mainly through the human eye observing the small defects on the polishing pad by illuminating the light, but there is currently a lack of dedicated detection devices, resulting in insufficient observation brightness and low defect recognition. Utility Model Content

[0003] In order to solve at least one technical problem in the prior art, the embodiment of the utility model provides a polishing pad defect detection device. The technical solution is as follows:

[0004] A device for detecting surface defects of a grinding pad, comprising:

[0005] A box body, wherein the box body is a top-open structure;

[0006] A carrying platform, which is a light-transmitting plate and is disposed on the top of the box;

[0007] A light strip, the light strip comprising a plurality of light elements connected in parallel;

[0008] A light strip board is arranged in the box, a plurality of holes are evenly spaced on the light strip board, the light strip is connected to the light strip board, and the lamp components are arranged in the holes of the light strip board.

[0009] Furthermore, the device also includes:

[0010] A baffle is disposed outside the box and close to an edge of the supporting platform.

[0011] Furthermore, the top of the box body includes: a top panel, the top panel is provided with an open opening, the edge of the top panel has a bearing portion recessed into the box body, the bearing portion includes: a recessed section and a receiving section, the recessed section is connected to the rounded corner of the top panel, the connection angle between the recessed section and the receiving section is an acute angle, and the receiving section is arranged parallel to the bearing platform.

[0012] Furthermore, the top of the box body is an inclined surface, the supporting platform is arranged on the box body along the top of the box body, and the light strip plate is arranged parallel to the supporting platform.

[0013] Further, the box body includes a front baffle, a rear baffle, and side baffles. The side baffles are connected to both sides of the front baffle and the rear baffle. The front baffle, the rear baffle, and the side baffles each include a top plate and a vertical plate. The top plates of the front baffle, the rear baffle, and the side baffles enclose the top panel.

[0014] Further, the top panel is inclined and arranged at the top of the box body. The height of the front baffle is less than the height of the rear baffle. The light strip board is arranged parallel to the carrier table.

[0015] Further, the box body includes a bottom baffle and a bottom plate. The bottom baffle is connected to the lower sides of the front baffle, the rear baffle, and the side baffles through a connecting frame. The bottom plate is arranged under the bottom baffle through a support frame.

[0016] Further, the front end of the light strip board close to the front baffle is connected to the support frame, the rear end of the light strip board close to the rear baffle is connected to the connecting frame, and light strip side plates are arranged on both sides of the light strip board. The light strip side plates are connected between the light strip board and the bottom plate.

[0017] Further, an air exhaust port is provided on the bottom baffle connected to the rear baffle, and an exhaust fan is installed at the air exhaust port.

[0018] Further, a guide rail assembly is provided on the inner side of the side baffle close to the box body. The guide rail assembly includes a guide rail and a guide rail mounting member. The guide rail is connected to the side baffle through the guide rail mounting member. A light strip switch and a fan switch are installed on the guide rail. The light strip switch is electrically connected to the light strip, and the fan switch is electrically connected to the exhaust fan.

[0019] The beneficial effects brought by the technical solution provided by the embodiment of the present invention at least include:

[0020] In the surface defect detection device for a grinding pad disclosed in the present invention, a light-transmitting carrier table is arranged on the top of the box body, and a light strip and a light strip board are arranged inside the box. During detection, the grinding pad can be placed on the carrier table, and the light generated by the light strip passes through the carrier table and irradiates on the grinding pad, which is convenient for the staff to visually detect the surface defects of the grinding pad, improving the accuracy of defect identification and the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for description in the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 It is a three-dimensional structural schematic diagram of the detection device disclosed in the embodiment of the utility model;

[0023] Figure 2 It is a schematic diagram of the structure of the light strip plate and the light strip side plate disclosed in the embodiment of the utility model;

[0024] Figure 3 It is a schematic diagram of the top structure of the box body disclosed in the embodiment of the utility model;

[0025] Figure 4 It is a schematic diagram of the front baffle structure disclosed in the embodiment of the utility model;

[0026] Figure 5 It is a schematic diagram of the rear baffle structure disclosed in the embodiment of the utility model;

[0027] Figure 6 It is a schematic diagram of the side baffle structure disclosed in the embodiment of the utility model;

[0028] Figure 7 It is another three-dimensional structural schematic diagram of the detection device disclosed in the embodiment of the utility model;

[0029] Figure 8 It is a schematic diagram of the skeleton structure disclosed in the embodiment of the utility model;

[0030] Figure 9 It is a schematic diagram of the cross-sectional structure of a grinding pad surface defect detection device disclosed in an embodiment of the utility model.

[0031] In the figure: 1 box; 2 bearing platform; 3 light strip board; 4 stop bar;

[0032] 11 top panel; 12 bearing part; 13 front baffle; 14 rear baffle; 15 side baffle; 16 guide rail assembly; 17 frame; 18 bottom baffle; 19 bottom plate; 31 hole; 32 light strip side panel;

[0033] 121 recessed section; 122 receiving section; 131 front top plate; 132 front vertical plate; 141 rear top plate; 142 rear vertical plate; 151 side top plate; 12 side vertical plate; 171 connecting frame; 172 supporting frame; 181 exhaust vent. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] like Figure 1 As shown, the utility model provides a polishing pad surface defect detection device, comprising: a box 1, a carrier 2, a light strip, and a light strip board 3. The top of the box 1 is provided with an opening, the carrier 2 is a light-transmitting board, and the carrier 2 is arranged at the opening at the top of the box 1. The box 1 is provided with a light strip board 3, such as Figure 2 As shown, a plurality of holes 31 are provided on the light strip plate 3, and the plurality of holes 31 are evenly spaced apart. The light strip includes a plurality of lamp components connected in parallel, and the light strip is connected to the light strip plate 3, and the lamp components are arranged in the holes 31 of the light strip plate 3. Furthermore, the holes 31 on the light strip plate 3 may be arranged in a spiral array, a concentric circular array, a rectangular array, etc., to ensure that the light can be evenly irradiated on the carrier 2. The carrier 2 may be a transparent plate with good light transmittance. Exemplarily, the carrier 2 may be a glass panel, and white light-transmitting films are attached to the reverse sides of the glass panel to protect the glass surface and reduce the light intensity. During inspection, the polishing pad is placed on the carrier 2, which can facilitate the staff to visually observe the surface defects on the polishing pad. The light components in the box 1 shine through the carrier 2 onto the polishing pad, and the surface defects on the polishing pad can be clearly presented. Furthermore, as Figure 1 As shown, a barrier strip 4 is provided on the carrier 2 to prevent the grinding pad from sliding off the carrier 2. Figure 1 and Figure 3 As shown, the top of the box body 1 includes: a top panel 11, the top panel 11 is provided with an opening, and the edge of the top panel 11 has a bearing portion 12 recessed into the box body 1. The bearing portion 12 is used to install the bearing platform 2, and the bearing portion 12 is recessed inward so that when the bearing platform 2 is installed at the opening on the top panel 11, the bearing platform 2 and the top panel 11 are coplanar. Figures 4 - 6 As shown, the bearing portion 12 includes: a recessed section 121 and a receiving section 122. The recessed section 121 is connected to the top panel 11 with a rounded corner. The connection angle between the recessed section 121 and the receiving section 122 is an acute angle to prevent the bearing platform 2 from sliding off the bearing portion 12. The receiving section 122 is arranged parallel to the bearing platform 2.

[0036] like Figure 3As shown, the box body 1 includes: a front baffle 13, a rear baffle 14 and a side baffle 15. The front baffle 13 and the rear baffle 14 are arranged opposite to each other, and the side baffle 15 has two sides connected to the front baffle 13 and the rear baffle 14 respectively. The front baffle 13, the rear baffle 14 and the side baffle 15 all include a top plate and a vertical plate, as shown in FIG. Figures 4 - 6 As shown, the front baffle 13 includes a front top plate 131 and a front vertical plate 132 connected at an angle, the rear baffle 14 includes a rear top plate 141 and a rear vertical plate 142 connected at an angle, and the side baffle 15 includes a rear top plate 151 and a rear vertical plate 152 connected at an angle. The front top plate 131, the rear top plate 141 and the side top plates 151 are arranged to form the top panel 11. Figures 4 - 6 As shown, the front top plate 131, the rear top plate 141 and the side top plate 151 all have a bearing portion 12, and the bearing portion 12 includes: a recessed section 121 and a receiving section 122. The connection between the recessed section 121 and the front top plate 131, the rear top plate 141 and the side top plate 151 is rounded, and the connection angle between the recessed section 121 and the receiving section 122 is an acute angle. The receiving section 122 is arranged parallel to the bearing platform 2. It should be noted that the top panel 11 of the box body 1 can be independently arranged or surrounded by multiple components as described above, and the utility model does not limit it.

[0037] like Figure 1 , Figure 7 and Figure 8 As shown, the box body 1 also includes: a skeleton 17, a bottom baffle 18 and a bottom plate 19. The skeleton 17 includes a connecting frame 171 and a supporting frame 172. There are four bottom baffles 18, and the four bottom baffles 18 are respectively connected to the front baffle 13, the rear baffle 14 and the two side baffles 15. The connecting frame 171 and the supporting frame 172 are connected by columns. The connecting frame 171 is a rectangular frame structure, which is used to connect the bottom baffle 18 with the front baffle 13, the bottom baffle 18 with the rear baffle 14, and the bottom baffle 18 with the side baffles 15. The bottom plate 19 is provided with a structure arranged on the lower side of the bottom baffle 18, and the bottom plate 19 is connected to the bottom baffle 18, which is used to block the open bottom surface surrounded by the bottom baffle 18. The supporting frame 172 is arranged below the connecting frame 171 and is also a rectangular frame structure, which is connected to the bottom plate 19 and the bottom baffle 18. Exemplarily, the skeleton 17 can be composed of square tubes. As Figure 2 As shown, light strip side panels 32 are provided on both sides of the light strip board 3, and the light strip side panels 32 are connected between the light strip board 3 and the bottom plate 19 to support the light strip board 3. Further, in order to facilitate movement, universal wheels can be provided under the column to drive the detection device to move as a whole.

[0038] As a feasible way, the front baffle 13, rear baffle 14 and side baffles 15 of the box body 1 are all connected to the inner side surfaces of their respective corresponding bottom baffles 18. The front baffle 13, rear baffle 14 and side baffles 15 form the upper structure of the box body 1, and the bottom baffles 18 corresponding to the front baffle 13, rear baffle 14 and side baffles 15 respectively form the lower structure of the box body. A rotating member is provided on the connecting frame 171, and the front baffle 13, rear baffle 14 and side baffles 15 are all connected to their respective corresponding bottom baffles 18 through the rotating member. The upper structure of the box body 1 surrounded by the front baffle 13, rear baffle 14 and side baffles 15 can rotate relative to the lower structure of the box body 1 with the rotating member as the axis. Specifically, the lower structure of the box body 1 is fixed, and the operator can control the upper structure of the box body 1 to tilt forward in the direction of the front baffle 13 or backward in the direction of the rear baffle 14 according to the operation needs. When the operator needs to stand on one side of the front baffle 13 to observe the surface defects of the polishing pad, the upper structure of the box body 1 can be controlled to tilt forward in the direction of the front baffle 13; when the operator can stand on one side of the rear baffle 14 to observe the surface defects of the polishing pad, the upper structure of the box body 1 can be controlled to tilt backward in the direction of the rear baffle 14. Further, a locking member can also be provided on the connecting frame 171 for cooperating with the rotating member to lock and fix the upper structure of the box body 1 at any rotated angle. Stopping strips 4 are provided at one end of the bearing platform 2 close to the front baffle 13 and one end of the rear baffle 14. The above-mentioned stopping strips 4 are provided at positions close to the edges at both ends of the bearing platform 2, and can block the polishing pad when the upper structure of the box body 1 tilts forward in the direction of the front baffle 13 or backward in the direction of the rear baffle 14. When the upper structure of the box body 1 tilts forward in the direction of the front baffle 13, the polishing pad is likely to slide off from the front baffle 13, and the stopping strip 4 at one end close to the front baffle 13 can block the polishing pad; when the upper structure of the box body 1 tilts backward in the direction of the rear baffle 14, the polishing pad is likely to slide off from the rear baffle 14, and the stopping strip 4 at one end close to the rear baffle 14 can block the polishing pad.

[0039] As another feasible way, as Figure 1 shown, the top of the box body 1 has an inclined structure, and the bearing platform 2 is arranged on the box body 1 along the inclined top of the box body 1. Further, the top panel 11 is inclined and arranged on the top of the box body 1. As Figures 4 - 6 shown, the front vertical plate 132 and the rear vertical plate 142 are both rectangular plates, the height of the front baffle 13 is less than the height of the rear baffle 14, and the side vertical plate 152 is a trapezoidal plate to form a structure with an inclined top panel. The light strip board 3 is parallel to the bearing platform 2 to ensure that the light shines evenly on the bearing platform 2. As Figure 9 shown, the front end of the light strip board 3 close to the front baffle 13 is connected to the support frame 172, and the rear end of the light strip board 3 close to the rear baffle 14 is connected to the connecting frame 171 to ensure the inclined angle of the light strip board 3. The stopping strip 4 is arranged close to the end of the bearing platform 2 that inclines towards the box body 1.

[0040] As Figure 7As shown, an air outlet 181 is provided on the bottom baffle 18 connected to the rear baffle 14, and an exhaust fan is installed at the air outlet 181. As Figure 7 shown, a guide rail assembly 16 is provided on the inner side of the side baffle 15 close to the box body 1. The guide rail assembly 16 includes: a guide rail and a guide rail mounting member, and the guide rail is connected to the side baffle 15 through the guide rail mounting member. A lamp strip switch and a fan switch are installed on the guide rail. The lamp strip switch is electrically connected to the lamp strip, and the fan switch is electrically connected to the exhaust fan. The exhaust fan is provided in the present utility model to reduce the temperature inside the box body 1, and the lamp strip switch and the fan switch are arranged on the side baffle 15, which is convenient for the staff to operate.

[0041] The technical solutions provided in this application have been introduced in detail above. Specific examples are used in this article to elaborate on the principles and implementation manners of this application. The descriptions of the above embodiments are only used to help understand the method and its core idea of this application; at the same time, for those of ordinary skill in the art, according to the idea of this application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to this application.

[0042] Any combination of the above all optional technical solutions can form an optional embodiment of the present invention, which will not be elaborated here one by one.

[0043] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A grinding pad surface defect detection device, characterized in that include: A box body, wherein the box body is a top-open structure; A carrying platform, which is a light-transmitting plate and is disposed on the top of the box; A light strip, the light strip comprising a plurality of light elements connected in parallel; A light strip board is arranged in the box, a plurality of holes are evenly spaced on the light strip board, the light strip is connected to the light strip board, and the lamp components are arranged in the holes of the light strip board.

2. The surface defect detection device for a polishing pad according to claim 1, wherein, The device also includes: A baffle is disposed outside the box and close to an edge of the supporting platform.

3. The grinding pad surface defect detection device according to claim 1, wherein The box body includes: a top panel, the top panel is provided with an open mouth, the edge of the top panel has a bearing portion recessed into the box body, the bearing portion includes: a recessed section and a receiving section, the recessed section is connected to the rounded corner of the top panel, the connection angle between the recessed section and the receiving section is an acute angle, and the receiving section is arranged parallel to the bearing platform.

4. The surface defect detection device for a polishing pad according to claim 3, characterized in that The box body includes: a front baffle, a rear baffle and a side baffle, the side baffle is connected to both sides of the front baffle and the rear baffle, the front baffle, the rear baffle and the side baffle each include a top plate and a vertical plate, and the top plates of the front baffle, the rear baffle and the side baffle are arranged to form the top panel.

5. The grinding pad surface defect detection device according to claim 4, characterized in that The top panel is tiltedly arranged on the top of the box body, the height of the front baffle is less than the height of the rear baffle, and the light strip plate is arranged parallel to the supporting platform.

6. The surface defect detection device for a polishing pad according to claim 4, characterized in that, The box body comprises: a bottom baffle and a bottom plate, wherein the bottom baffle is connected to the lower sides of the front baffle, the rear baffle and the side baffles through a connecting frame, and the bottom plate is arranged on the lower side of the bottom baffle through a supporting frame.

7. The surface defect detection device for the polishing pad according to claim 6, characterized in that, The front end of the light strip board close to the front baffle is connected to the support frame, and the rear end of the light strip board close to the rear baffle is connected to the connecting frame. Light strip side panels are arranged on both sides of the light strip board, and the light strip side panels are connected between the light strip board and the bottom plate.

8. The surface defect detection device for a polishing pad according to claim 6, wherein An air outlet is arranged on the bottom baffle plate connected to the rear baffle plate, and an exhaust fan is installed at the air outlet.

9. The grinding pad surface defect detection device according to claim 8, wherein, A guide rail assembly is provided on the inner side of the side baffle close to the box body, and the guide rail assembly includes: a guide rail and a guide rail mounting member. The guide rail is connected to the side baffle through the guide rail mounting member. A light strip switch and a fan switch are installed on the guide rail. The light strip switch is electrically connected to the light strip, and the fan switch is electrically connected to the exhaust fan.

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