Optical element replacement mechanism and semiconductor detection equipment

Abstract

The utility model provides an optical element replacement mechanism and a semiconductor detection device. The optical element replacement mechanism comprises a storage member, a first driving mechanism, a second driving mechanism and a pushing member. A storage cavity is formed in the storage part, and the storage cavity is used for storing a plurality of stacked optical elements; the second driving mechanism is used for driving the pushing piece to reciprocate, so that the loading part can enter and exit from the storage cavity; the first driving mechanism is used for driving the multiple optical elements to move so that any optical element can be pushed into the loading part when the loading part enters the storage cavity, and the pushing piece can be driven by the second driving mechanism to convey the optical elements to the outside of the storage cavity and take the optical elements back to the storage cavity. According to the optical element replacing mechanism provided by the utility model, the optical element does not need to be clamped by a mechanical arm, and meanwhile, a bearing disc of the optical element does not need to be used, so that collision among all parts can be reduced, and the service life of equipment can be effectively prolonged.

Description

Technical Field

[0001] The present application relates to an optical element replacement mechanism, and more particularly to an optical element replacement mechanism and a semiconductor detection device. Background Art

[0002] Semiconductor devices all need to use a carrier plate to fix optical elements such as filter wafers. In practical applications, considering different detection requirements, optical elements often need to be replaced.

[0003] To solve the above problems, the prior art replaces optical elements by providing an optical element replacement mechanism on one side of the optical path. However, currently, an end effector is usually used to replace the optical element located in the optical path, and the carrier plate needs to be adjusted accordingly when replacing the optical element. The existing carrier plates are usually made of silicon carbide material, which is relatively brittle. When replacing optical elements frequently and quickly, the end effector is likely to collide with the carrier plate, generating a collision load, which easily causes the carrier plate to break.

[0004] In view of this, the present utility model is specifically proposed. Summary of the Utility Model

[0005] The present application provides an optical element replacement mechanism and a semiconductor detection device to solve the technical problem that the current replacement of optical elements easily causes the carrier plate to break.

[0006] The first aspect of the present utility model provides an optical element replacement mechanism, including a storage member, a first driving mechanism, a second driving mechanism, and a pushing member; the storage member is formed with a storage cavity for storing a plurality of optically stacked elements; the pushing member has a loading portion, and the second driving mechanism is configured to drive the pushing member to reciprocate so that the loading portion can enter and exit the storage cavity; the first driving mechanism is configured to drive the plurality of optical elements to move so that when the loading portion enters the storage cavity, any one of the optical elements is pushed into the loading portion, allowing the pushing member to transport the optical element outside the storage cavity under the drive of the second driving mechanism and bring the optical element back into the storage cavity.

[0007] In this solution, the loading part of the pusher can load optical elements. When loading the empty loading part, the second driving mechanism can first push the empty loading part of the pusher into the storage cavity. Subsequently, under the action of the first driving mechanism, any one of the multiple optical elements can be pushed into the loading part, thereby completing the loading of the empty loading part. After the optical element is loaded onto the loading part, the loading part is in the loaded state, and the second driving mechanism can push the loaded loading part out of the storage cavity so that the optical element on the loading part can be used. Of course, based on the fact that the second driving mechanism can drive the pusher to move reciprocally, when the optical element on the loading part needs to be replaced, the second driving mechanism can also push the loading part loaded with the optical element into the storage cavity. After entering the storage cavity, the first driving mechanism drives the multiple optical elements in the storage cavity to move, so as to push any one of the optical elements in the storage cavity into the loading part. At the same time, the original optical element on the loading part is ejected from the loading part, thereby completing the replacement of the optical element. In the above process, whether it is the loading process or the replacement process, there is no need for a robotic arm to clamp the optical element, nor is it necessary to use a carrier plate for the optical element, which can reduce the collision between components and effectively extend the service life of the equipment.

[0008] In a further solution of the present utility model, the storage member includes: a cylinder body having a storage cavity formed therein, and a plurality of optical elements are stacked along the axial direction of the cylinder body in the storage cavity; and a guiding portion extending outward from the peripheral wall of the cylinder body, and the guiding portion is formed with a guiding channel; wherein, the pusher is arranged to move along the guiding channel after being pushed out of the storage cavity under the action of the second driving mechanism, so as to push the optical element in the loading part to a predetermined position.

[0009] By introducing the design of the guiding portion and the guiding channel, the working efficiency and stability of the optical element replacement mechanism are effectively improved. Specifically, the cylinder body provides an orderly storage space, enabling a plurality of optical elements to be stacked along its axial direction, which is convenient for management and replacement. The guiding portion extends outward from the peripheral wall of the cylinder body, and the formed guiding channel provides a clear moving path for the pusher. When the pusher is pushed out of the storage cavity under the action of the second driving mechanism, it can accurately move along the guiding channel to a predetermined position. This design not only ensures that the optical element can be accurately pushed to the required position, avoiding errors and collisions caused by unclear paths, but also improves the automation level and working efficiency of the overall equipment.

[0010] In a further solution of the present utility model, the loading part is a hole penetrating the pusher. The hole is arranged to receive any one of the optical elements pushed in by the first driving mechanism when it is coaxial with the plurality of stacked optical elements in the storage cavity; the cylinder body is provided with an insertion hole, and the insertion hole is opposite to the guiding channel position to allow the pusher to be inserted into the storage cavity from outside the cylinder body through the insertion hole and enter the guiding channel.

[0011] In this solution, by adding insertion holes, the entire pusher can be inserted into the storage cavity inside the cylinder from outside the storage cavity and enter the guiding channel from the storage cavity, thus being able to define the moving direction of the entire pusher and improving the stability of the entire structure.

[0012] In a further solution of the present utility model, a notch is provided at one end of the guiding portion away from the cylinder body. The notch penetrates the guiding portion in the up-and-down direction, and the opening direction faces away from the cylinder body, so that when the loading portion moves to the notch, the optical elements inside the loading portion are exposed from the guiding portion.

[0013] In this solution, by providing a notch on the guiding portion and making the notch penetrate the guiding portion in the up-and-down direction, when the loading portion on the pusher moves to the position of the notch, the optical elements inside the loading portion will be exposed from the notch, and at this time, the optical elements enter the optical path and can work normally.

[0014] In a further solution of the present utility model, a through hole is provided at one end of the guiding portion away from the cylinder body. The through hole penetrates the guiding portion in the up-and-down direction, so that when the loading portion moves to the through hole, the optical elements inside the loading portion are exposed from the guiding portion.

[0015] In this solution, by providing a through hole on the guiding portion and making the through hole penetrate the guiding portion in the up-and-down direction, when the loading portion on the pusher moves to the position of the through hole, the optical elements inside the loading portion will be exposed from the through hole, and at this time, the optical elements enter the optical path and can work normally.

[0016] In a further solution of the present utility model, the optical element replacement mechanism further includes a pressing mechanism for pressing a plurality of axially stacked optical elements.

[0017] In this solution, the pressing mechanism ensures that the plurality of optical elements are closely attached in the axial direction by applying uniform and appropriate pressure, reducing the loosening or displacement of the elements caused by vibration or external impact, thereby enhancing the stability of the entire optical system. Simplify the installation process: The pressing mechanism provides a simple installation method, enabling a plurality of optical elements to be quickly and accurately axially stacked and fixed, improving the installation efficiency.

[0018] In a further aspect of the present utility model, the axial direction of the cylinder body is arranged in the up-and-down direction. The pressing mechanism includes a counterweight block, which is arranged on the uppermost optical element to press a plurality of optical elements. The first driving mechanism is used to push the lowermost optical element to move along the axial direction of the cylinder body. The pressing mechanism includes an elastic member, and both ends of the elastic member respectively abut against the storage member and the outermost optical element to press a plurality of optical elements. Or the pressing mechanism further includes a pressing motor and a pressing block, and the pressing motor is used to drive the pressing block to move towards a plurality of optical elements to press a plurality of optical elements.

[0019] In a further aspect of the present utility model, the pushing member includes: a main body portion provided with a loading portion, and a part of the loading portion is inserted into the storage cavity; and a stop portion located outside the cylinder body and connected to one end of the main body portion away from the loading portion for connecting to the second driving mechanism, and when the loading portion is pushed by the optical element to a predetermined position, it abuts against the outside of the cylinder body to form a limit stop.

[0020] In this solution, by partially inserting the loading portion into the storage cavity, the pushing member can accurately push the optical element out of the storage cavity. This design ensures the stability and accuracy of the optical element during the pushing process, avoiding possible damage or misalignment. When the loading portion is pushed by the optical element to a predetermined position, the stop portion can abut against the outside of the cylinder body to form a limit stop. This design ensures the precise position control of the optical element during the pushing process, avoiding over-pushing or under-pushing.

[0021] In a further aspect of the present utility model, the first driving mechanism includes a supporting plate, a first lead screw, a first motor, and a first nut seat; the supporting plate is arranged in the storage cavity and is used to support a plurality of optical elements stacked along the axial direction of the cylinder body. The first lead screw is connected to the supporting plate and is threadedly connected to the first nut seat. The first motor drives the first nut seat to rotate, so that the first lead screw drives the supporting plate to move in the first direction; the second driving mechanism includes a second motor, a second lead screw, and a second nut seat. The second nut seat is arranged on the pushing member and is threadedly connected to the second lead screw. The second motor drives the second lead screw to rotate, so that the second nut seat drives the pushing member to move in the second direction.

[0022] The second aspect of the present utility model provides a semiconductor detection device, including an optical module and the optical element replacement mechanism provided in the first aspect of the present utility model; the second driving mechanism is used to drive the pushing member to move, so as to push the optical element in the storage member into the optical path of the optical module.

[0023] In summary, the optical element replacement mechanism and the semiconductor detection device provided by the present application have at least the following beneficial effects:

[0024] In the optical element replacement mechanism of the present application, the loading part of the pushing member can load optical elements. When loading the empty loading part, the second driving mechanism can first push the empty loading part of the pushing member into the storage cavity, and then under the action of the first driving mechanism, any one of the multiple optical elements can be pushed into the loading part, thereby completing the loading of the empty loading part. After the optical element is loaded onto the loading part, the loading part is in the loaded state, and the second driving mechanism can push the loaded loading part out of the storage cavity so that the optical element on the loading part can be used. Of course, based on the fact that the second driving mechanism can drive the pushing member to reciprocate, when the optical element on the loading part needs to be replaced, the second driving mechanism can also push the loading part loaded with the optical element into the storage cavity, and after entering the storage cavity, drive the multiple optical elements in the storage cavity to move by the first driving mechanism to push any one of the optical elements in the storage cavity into the loading part, and at the same time, the original optical element on the loading part is ejected from the loading part, thus completing the replacement of the optical element. In the above process, whether it is the loading process or the replacement process, there is no need for a robotic arm to clamp the optical element, nor is it necessary to use a carrier plate for the optical element, so that the collision between components can be reduced, and the service life of the equipment can be effectively improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative efforts.

[0026] Figure 1 Structural schematic diagram of the optical element replacement mechanism provided by the embodiment of the present application;

[0027] Figure 2 Structural schematic diagram of the optical element replacement mechanism after removing part of the optical module provided by the embodiment of the present application;

[0028] Figure 3 Structural schematic diagram of the storage member provided by the embodiment of the present application;

[0029] Figure 4 Structural schematic diagram of the pushing member provided by the embodiment of the present application;

[0030] Figure 5 Structural schematic diagram of the filter provided by the embodiment of the present application.

[0031] Among them, Figure 1 The cylinder is cut open, Figure 2 The cylinder and the guiding part are cut open.

[0032] The reference numerals are as follows:

[0033] 100, storage member; 110, cylinder; 110A, storage cavity; 110B, insertion hole; 120, guiding portion; 120A, guiding channel; 120B, notch;

[0034] 200, second driving mechanism; 210, second motor; 220, second nut seat; 230, second lead screw;

[0035] 300, first driving mechanism; 310, first motor; 320, first lead screw; 330, supporting plate;

[0036] 400, optical element; 410, filter; 411, outer frame; 412, sheet body;

[0037] 500, pressing mechanism; 510, counterweight;

[0038] 600, pushing member; 610, stopping portion; 620, main body portion; 620A, loading portion;

[0039] 10, optical element replacement mechanism; 20, optical module; 21, camera; 22, objective lens; 30, wafer; X, up - down direction. Detailed implementation manners

[0040] In the description of the present application, it should be understood that when terms such as "up - down direction", "up", "down", "inside", "outside", "axial direction" are used to indicate the orientation or positional relationship, without special instructions, it is understood as the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, so it should not be construed as a limitation to the present application.

[0041] In addition, features limited by "first" and "second" are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Features limited by "first" and "second" may explicitly or implicitly include at least one of the limited features. When the description of "a plurality" appears, generally it means at least two, such as two, three, etc., unless otherwise specifically and clearly limited.

[0042] In this application, unless otherwise clearly specified or limited, terms such as "installed", "connected", "coupled", "fixed", etc. shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection, it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0043] In the description of this specification, terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc., mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0044] Please refer to Figure 1 - Figure 2 , the first aspect of the present utility model provides an optical element replacement mechanism 10, including a storage member 100, a first driving mechanism 300, a second driving mechanism 200, and a pushing member 600; the storage member 100 forms a storage cavity 110A, and the storage cavity 110A is used to store a plurality of stacked optical elements 400; the pushing member 600 is provided with a loading portion 620A, and the second driving mechanism 200 is used to drive the pushing member 600 to reciprocate, so that the loading portion 620A can enter and exit the storage cavity 110A; the first driving mechanism 300 is used to drive the plurality of optical elements 400 to move, so that when the loading portion 620A enters the storage cavity 110A, any one of the optical elements 400 is pushed into the loading portion 620A, to allow the pushing member 600 to transport the optical element 400 to the outside of the storage cavity 110A under the drive of the second driving mechanism 200, and bring the optical element 400 back into the storage cavity 110A.

[0045] In this solution, the loading part 620A of the pusher 600 can load the optical element 400. When loading the empty loading part 620A, the second driving mechanism 200 can first push the empty loading part 620A of the pusher 600 into the storage cavity 110A. Subsequently, under the action of the first driving mechanism 300, any one of the multiple optical elements 400 can be pushed into the loading part 620A, thereby completing the loading of the empty loading part 620A. After the optical element 400 is loaded onto the loading part 620A, the loading part 620A is in the loaded state. The second driving mechanism 200 can push the loaded loading part 620A out of the storage cavity 110A so that the optical element 400 on the loading part 620A can be used. Of course, based on the fact that the second driving mechanism 200 can drive the pusher 600 to reciprocate, when the optical element 400 on the loading part 620A needs to be replaced, the second driving mechanism 200 can also push the loading part 620A loaded with the optical element 400 into the storage cavity 110A. After entering the storage cavity 110A, the first driving mechanism 300 drives the multiple optical elements 400 in the storage cavity 110A to move, so as to push any one of the optical elements 400 in the storage cavity 110A into the loading part 620A. At the same time, the original optical element 400 on the loading part 620A is ejected from the loading part 620A, thereby completing the replacement of the optical element 400. In the above process, whether it is the loading process or the replacement process, there is no need for a robotic arm to clamp the optical element 400, and there is no need to use a carrier plate for the optical element 400, so that the collision between components can be reduced, and the service life of the equipment can be effectively improved.

[0046] It should be noted that the optical element 400 mentioned in the present utility model can be components such as a filter, a wave plate, a polarizer, and a diaphragm that need to be replaced in the optical path.

[0047] Please further refer to Figure 3 - Figure 4 , in a further embodiment of the present utility model, the storage member 100 includes: a cylinder body 110, forming a storage cavity 110A, and multiple optical elements 400 are stacked along the axial direction of the cylinder body 110 in the storage cavity 110A; and a guiding part 120, extending outward from the peripheral wall of the cylinder body 110, and the guiding part 120 forms a guiding channel 120A; wherein, the pusher 600 is arranged to move along the guiding channel 120A after being pushed out of the storage cavity 110A under the action of the second driving mechanism 200, so as to push the optical element 400 in the loading part 620A to a predetermined position.

[0048] By introducing the design of the guiding part 120 and the guiding channel 120A, the working efficiency and stability of the optical element replacement mechanism 10 are effectively improved. Specifically, the cylinder body 110 provides an orderly storage space, enabling multiple optical elements 400 to be stacked axially along it, which is convenient for management and replacement. The guiding part 120 extends outward from the peripheral wall of the cylinder body 110, and the formed guiding channel 120A provides a clear moving path for the pushing member 600. When the pushing member 600 is pushed out from the storage cavity 110A under the action of the second driving mechanism 200, it can accurately move along the guiding channel 120A to a predetermined position. This design not only ensures that the optical element 400 can be accurately pushed to the required position, avoiding errors and collisions caused by unclear paths, but also improves the automation degree and working efficiency of the overall device.

[0049] Furthermore, through the arrangement of the guiding part 120, the optical element 400 can be very thin. It only needs to control the thickness of the pushing member 600 and the thickness of the guiding channel 120A. Both the guiding part 120 and the pushing member 600 can provide a certain supporting effect for the optical element 400 to avoid damage to the optical element 400. In practical applications, it can be made to be more than 1 mm to ensure the strength of the optical element 400 itself.

[0050] In a further embodiment of the present invention, the loading part 620A is a hole penetrating the pushing member 600. When the hole is coaxial with the multiple stacked optical elements 400 in the storage cavity 110A, it can ensure that the multiple optical elements 400 in the storage cavity 110A can reciprocate axially along the cylinder body 110 under the action of the first driving mechanism 300, so as to push any one of the optical elements 400 in the storage cavity 110A into the hole. After the hole receives the optical element 400, under the action of the second driving mechanism 200, the hole wall of the hole can act on the optical element 400 in the hole to drive the optical element 400 to move. Thus, after the hole and the optical element 400 in it are pushed out from the storage cavity 110A, they move along the guiding channel 120A, and further push the optical element 400 in the hole to a predetermined position.

[0051] In a further embodiment of the present invention, the cylinder body 110 is provided with an insertion hole 110B, which is opposite to the guiding channel 120A in position, to allow the pushing member 600 to be inserted into the storage cavity 110A from the outside of the cylinder body 110 through the inserted hole 110B and enter the guiding channel 120A.

[0052] In this solution, by adding the insertion hole 110B, the entire pusher 600 can be inserted into the storage cavity 110A inside the cylinder 110 from outside the storage cavity 110A and enter the guiding channel 120A from the storage cavity 110A, thus being able to define the moving direction of the entire pusher 600 and improving the stability of the entire structure.

[0053] Specifically, the pusher 600 is generally plate-shaped and has the same extending direction as the guiding channel 120A, so it can move within the guiding channel 120A. When it is necessary to minimize the thickness of the optical element 400, the thickness of the pusher 600 will be the same as that of the optical element 400. Therefore, while the guiding channel 120A supports the optical element 400, it will also support the pusher 600.

[0054] In an alternative embodiment of the present utility model (this embodiment does not provide a diagram), a notch 120B is provided at one end of the guiding part 120 away from the cylinder 110. The notch 120B penetrates the guiding part 120 in the up-down direction X, and the opening direction faces away from the cylinder 110, so that when the loading part 620A moves to the notch 120B, the optical element 400 inside the loading part 620A is exposed from the guiding part 120.

[0055] In this solution, by providing the notch 120B on the guiding part 120 and making the notch 120B penetrate the guiding part 120 in the up-down direction X, when the loading part 620A on the pusher 600 moves to the position of the notch 120B, the optical element 400 inside the loading part 620A will be exposed from the guiding part 120 through the notch 120B. At this time, the optical element 400 can enter the optical path and work normally.

[0056] In an alternative embodiment of the present utility model, a through hole is provided at one end of the guiding part 120 away from the cylinder 110. The through hole penetrates the guiding part 120 in the up-down direction X, so that when the loading part 620A moves to the through hole, the optical element 400 inside the loading part 620A is exposed from the guiding part 120.

[0057] In this solution, by providing the through hole on the guiding part 120 and making the through hole penetrate the guiding part 120 in the up-down direction X, when the loading part 620A on the pusher 600 moves to the position of the through hole, the optical element 400 inside the loading part 620A will be exposed from the guiding part 120 through the through hole. At this time, the optical element 400 can enter the optical path and work normally.

[0058] In a further embodiment of the present utility model, the optical element replacement mechanism 10 further includes a pressing mechanism 500 for pressing a plurality of axially stacked optical elements 400.

[0059] In this solution, the pressing mechanism 500 ensures that multiple optical elements 400 are closely fitted in the axial direction by applying uniform and appropriate pressure, reducing the looseness or displacement of the elements caused by vibration or external shock, thereby enhancing the stability of the entire optical system. Simplify the installation process: The pressing mechanism 500 provides a simple installation method, enabling multiple optical elements 400 to be quickly and accurately stacked and fixed axially, improving the installation efficiency.

[0060] Regarding the specific form of the pressing mechanism 500, the present utility model provides multiple embodiments. In one way, the axial direction of the cylinder is set along the up-down direction X. The pressing mechanism 500 includes a counterweight 510, which is arranged on the uppermost optical element 400 to press multiple optical elements 400. The first driving mechanism 300 is used to push the lowermost optical element 400 to move along the axial direction of the cylinder. Specifically, when the first driving mechanism 300 drives the optical element 400 to rise, the counterweight 510 rises together with the optical element 400; when the first driving mechanism 300 descends, multiple optical elements 400 fall under the action of the counterweight 510, thereby ensuring that multiple optical elements 400 are always closely stacked together during the movement.

[0061] In an alternative embodiment of the pressing mechanism 500 (this embodiment is not provided with a diagram), the pressing mechanism 500 includes an elastic member, and both ends of the elastic member respectively abut against the storage member 100 and the outermost optical element 400 to press multiple optical elements 400. In an alternative embodiment of the pressing mechanism 500 (this embodiment is not provided with a diagram), the pressing mechanism 500 further includes a pressing motor and a pressing block. The pressing motor is used to drive the pressing block to move towards multiple optical elements 400 to press multiple optical elements 400.

[0062] In a further embodiment of the present utility model, the pushing member 600 includes: a main body portion 620, provided with a loading portion 620A, and a part of it is inserted into the storage cavity 110A; and a stop portion 610, located outside the cylinder 110, connected to one end of the main body portion 620 away from the loading portion 620A, for connecting to the second driving mechanism 200, and when the loading portion 620A is pushed by the optical element 400 to a predetermined position, it abuts against the outside of the cylinder 110 to form a limit stop.

[0063] In this solution, by inserting a part of the loading portion 620A into the storage cavity 110A, the pushing member 600 can accurately push the optical element 400 out of the storage cavity 110A. This design ensures the stability and accuracy of the optical element 400 during the pushing process, avoiding possible damage or misalignment. When the loading portion 620A is pushed to a predetermined position by the optical element 400, the stop portion 610 can abut against the outside of the cylinder body 110 to form a limit stop. This design ensures the precise position control of the optical element 400 during the pushing process, avoiding over-pushing or under-pushing situations.

[0064] Please continue to refer to Figure 2 , in a further embodiment of the present utility model, the first driving mechanism 300 includes a supporting plate 330, a first lead screw 320, a first motor 310, and a first nut seat; the supporting plate 330 is disposed in the storage cavity 110A and is used to support a plurality of optical elements 400 stacked along the axial direction of the cylinder body 110. The first lead screw 320 is connected to the supporting plate 330 and is threadedly connected to the first nut seat. The first motor 310 drives the first nut seat to rotate, so that the first lead screw 320 drives the supporting plate 330 to move along the axial direction of the cylinder body; the second driving mechanism 200 includes a second motor 210, a second lead screw 230, and a second nut seat 220. The second nut seat 220 is disposed on the pushing member 600 and is threadedly connected to the second lead screw 230. The second motor 210 drives the second lead screw 230 to rotate, so that the second nut seat 220 drives the pushing member 600 to move reciprocally.

[0065] It should be noted that the above embodiments are specific implementation solutions for the two linear movements of the first driving mechanism 300 and the second driving mechanism 200. Those skilled in the art can also adjust the linear movement solutions according to requirements. In Figure 2 the provided embodiment, the first nut seat is installed in the first motor 310, so it cannot be directly seen in the figure.

[0066] Furthermore, please refer to Figure 5 , when the optical element 400 is a filter 410, in a further embodiment of the present utility model, the filter 410 includes an outer frame 411 and a sheet body 412. In a further embodiment of the present utility model, the sheet body 412 is disposed within the outer frame 411 in a further embodiment of the present utility model. The outer frame 411 mainly serves to support the sheet body 412, and a pattern is provided on the sheet body 412.

[0067] Specifically, when the filters 410 are stacked in the storage cavity 110A, the stacking direction, which is the axial direction of the cylinder body 110, the extending direction of the guiding channel 120A must be parallel to the direction of the sheet body 412, the direction of the first lead screw 320 is parallel to the sheet body 412, and the direction of the second lead screw 230 is perpendicular to the sheet body 412.

[0068] In the second aspect of the present utility model, a semiconductor detection device is provided, including an optical module 20 and the optical element replacement mechanism 10 provided in the first aspect of the present utility model; a second driving mechanism 200 is used to drive the pusher 600 to move, so as to push the optical element 400 in the storage member 100 into the optical path of the optical module 20.

[0069] Further, in a further embodiment of the present utility model, the optical module 20 includes a camera 21 and an objective lens 22. The second driving mechanism 200 is used to drive the pusher 600 to move, so as to move the optical element 400 on the pusher 600 into the optical path between the camera 21 and the objective lens 22, and is used for detecting the wafer 30.

[0070] In this solution, the occupation of the space around the optical path can be reduced by the optical element replacement mechanism 10. Specifically, only the guiding portion 120 needs to be set long enough to extend to the periphery of the optical path, and the cylinder 110, the first driving mechanism 300 and the second driving mechanism 200 can all be arranged away from the optical path, thereby facilitating the arrangement of other components around the optical path.

[0071] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present application.

Claims

1. An optical element replacement mechanism, characterized in that, it includes a storage member (100), a first driving mechanism (300), a second driving mechanism (200) and a pushing member (600); the storage member (100) forms a storage cavity (110A), and the storage cavity (110A) is used for storing a plurality of optical elements (400) arranged in layers; the pushing member (600) has a loading portion (620A), and the second driving mechanism (200) is used to drive the pushing member (600) to reciprocate, so that the loading portion (620A) can enter and exit the storage cavity (110A); the first driving mechanism (300) is used to drive a plurality of the optical elements (400) to move, so that when the loading portion (620A) enters the storage cavity (110A), any one of the optical elements (400) is pushed into the loading portion (620A), to allow the pushing member (600) to transport the optical element (400) outside the storage cavity (110A) under the drive of the second driving mechanism (200), and bring the optical element (400) back into the storage cavity (110A).

2. The optical element replacement mechanism according to claim 1, wherein The storage member (100) includes: a cylinder body (110) that forms the storage cavity (110A), and a plurality of the optical elements (400) are arranged in layers along the axial direction of the cylinder body (110) in the storage cavity (110A); and a guiding portion (120) that extends outward from the peripheral wall of the cylinder body (110), and the guiding portion (120) forms a guiding channel (120A); wherein, the pushing member (600) is arranged to move along the guiding channel (120A) after being pushed out of the storage cavity (110A) under the action of the second driving mechanism (200), so as to push the optical element (400) in the loading portion (620A) to a predetermined position.

3. The optical element replacement mechanism according to claim 2, characterized in that, the loading portion (620A) is a hole penetrating through the pushing member (600), and the hole is arranged to receive any one of the optical elements (400) pushed by the first driving mechanism (300) when being coaxial with a plurality of the optical elements (400) arranged in layers in the storage cavity (110A); and / or the cylinder body (110) is provided with an insertion hole (110B), and the insertion hole (110B) is opposite to the position of the guiding channel (120A), to allow the pushing member (600) to be inserted into the storage cavity (110A) from outside the cylinder body (110) through the insertion hole (110B) and enter the guiding channel (120A).

4. The optical element replacement mechanism according to claim 2, characterized in that, One end of the guiding portion (120) away from the cylinder body (110) is provided with a notch (120B). The notch (120B) penetrates through the guiding portion (120) in the up-down direction (X), and the opening direction faces away from the cylinder body (110), so that when the loading portion (620A) moves to the notch (120B), the optical element (400) in the loading portion (620A) is exposed from the guiding portion (120).

5. The optical element replacement mechanism according to claim 2, characterized in that One end of the guiding portion (120) away from the cylinder body (110) is provided with a through hole. The through hole penetrates through the guiding portion (120) in the up-down direction (X), so that when the loading portion (620A) moves to the through hole, the optical element (400) in the loading portion (620A) is exposed from the guiding portion (120).

6. The optical element replacement mechanism according to claim 2, characterized in that, The optical element replacement mechanism further includes a pressing mechanism (500) for pressing a plurality of the optical elements (400) stacked along the axial direction.

7. The optical element replacement mechanism according to claim 6, characterized in that The axial direction of the cylinder body (110) is arranged in the up-down direction (X). The pressing mechanism (500) includes a counterweight (510) disposed on the uppermost optical element (400) to press a plurality of the optical elements (400), and the first driving mechanism (300) is used to push the lowermost optical element (400) to move along the axial direction of the cylinder body (110); (Feature A) The pressing mechanism (500) includes an elastic member, and two ends of the elastic member respectively abut against the storage member (100) and the outermost optical element (400) to press a plurality of the optical elements (400); (Feature B) or The pressing mechanism (500) includes a pressing motor and a pressing block. The pressing motor is used to drive the pressing block to move towards a plurality of the optical elements (400) to press a plurality of the optical elements (400) (Feature C).

8. The optical element replacement mechanism according to any one of claims 2-7, characterized in that, The pushing member (600) includes: A main body portion (620) provided with the loading portion (620A), and a part of the main body portion is inserted into the storage cavity (110A); and A stop portion (610) located outside the cylinder body (110), connected to one end of the main body portion (620) away from the loading portion (620A) for connecting to the second driving mechanism (200), and when the loading portion (620A) is pushed by the optical element (400) to the predetermined position, it abuts against the outside of the cylinder body (110) to form a limit stop.

9. The optical element replacement mechanism according to claim 1, characterized in that The first driving mechanism (300) includes a supporting plate (330), a first lead screw (320), a first motor (310) and a first nut seat; The supporting plate (330) is disposed in the storage cavity (110A) and is used for supporting a plurality of the optical elements (400) stacked along the axial direction of the cylinder body (110). The first lead screw (320) is connected to the supporting plate (330) and is threadedly connected to the first nut seat. The first motor (310) drives the first nut seat to rotate, so that the first lead screw (320) drives the supporting plate (330) to move along the axial direction; and / or The second driving mechanism (200) includes a second motor (210), a second lead screw (230), and a second nut seat (220). The second nut seat (220) is disposed on the pushing member (600) and is threadedly connected to the second lead screw (230). The second motor (210) drives the second lead screw (230) to rotate, so that the second nut seat (220) drives the pushing member (600) to reciprocate.

10. A semiconductor detection device, characterized in that, It includes an optical module (20) and the optical element replacement mechanism (10) according to any one of claims 1-9; The second driving mechanism (200) is used to drive the pushing member (600) to move, so as to push the optical element (400) in the storage member (100) into the optical path of the optical module (20).

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