Turnover device for semiconductor processing

Abstract

The utility model discloses a turnover device for semiconductor processing, which comprises a processing table, two bearing plates, a clamping mechanism and a limiting mechanism, the processing table is provided with a chute, and the periphery of the chute is provided with a plurality of positioning holes; the bearing plate is connected into the sliding groove in a sliding mode. The clamping mechanism comprises a horizontal pushing end and a clamping end; any bearing plate is provided with the horizontal pushing end, the telescopic end of the horizontal pushing end is rotationally connected with the clamping end, and the two clamping ends form a clamping area; the limiting mechanism comprises a first limiting end and a second limiting end, and the first limiting end is arranged on the bearing plate. The turnover device for workpiece machining has the advantages that the technical problem that in the prior art, a turnover device for workpiece machining is single in workpiece adjusting angle, and consequently the workpiece machining efficiency of workers cannot be effectively improved is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor parts processing equipment, in particular to a turning device for semiconductor processing. Background Art

[0002] Semiconductor is a material with conductivity between insulator and conductor. Its conductivity is easy to control and can be used as a component material for information processing. From the perspective of science and technology or economic development, semiconductors are very important. Many electronic products, such as computers, mobile phones, and digital recorders, use the change of semiconductor conductivity to process information. Common semiconductor materials include silicon, germanium, gallium arsenide, etc.

[0003] In Chinese utility model CN218556254U, a "flipping device for semiconductor component processing" is proposed. The device includes a base, a movable seat is slidably arranged on the top of the base, and two clamping seats are arranged on the top of the movable seat, one of which is fixedly connected to the movable seat by screws, and the other clamping seat is slidably installed on the top of the movable seat; through the arrangement of structures such as guide plates, cranks and push rods, one side of the workpiece is processed, the crank is grasped and rotated, and the processing angle of the workpiece is adjusted. In this process, the movable seat is moved as a whole by the thrust of the push rod, thereby changing the relative position of the workpiece and the processing component. After flipping, the processing part is directly below the processing component without the need for further adjustment. The device mainly solves the problem of low efficiency in existing semiconductor component processing. Although the device can adjust the position of the workpiece, the adjustment method is relatively single and can only rotate the workpiece. When the orientation of the workpiece needs to be changed, the staff needs to change the current processing position, which invisibly reduces the working efficiency of the device. Utility Model Content

[0004] The purpose of the utility model is to overcome the above-mentioned technical deficiencies and provide a flipping device for semiconductor processing, so as to solve the technical problem that the flipping device for workpiece processing in the prior art has a relatively single adjustment angle for the workpiece, resulting in the inability to effectively improve the workpiece processing efficiency of the staff.

[0005] In order to achieve the above technical purpose, the utility model adopts the following technical solutions:

[0006] In a first aspect, the utility model provides a semiconductor processing flipping device, comprising:

[0007] A processing table, wherein a slide groove is provided on the processing table, and a plurality of positioning holes are provided on the outer periphery of the slide groove;

[0008] Two bearing plates, the bearing plates are slidably connected in the slide grooves;

[0009] The clamping mechanism includes a horizontal pushing end and a clamping end; the horizontal pushing end is provided on any one of the bearing plates, and the clamping end is rotatably connected to the telescopic end of the horizontal pushing end, and the two clamping ends form a clamping area; and,

[0010] The limiting mechanism includes a first limiting end and a second limiting end. The first limiting end is provided on the bearing plate, the end of the first limiting end extends into the positioning hole, and the second limiting end is connected to the horizontal pushing end and is used for limiting the clamping end.

[0011] In some embodiments, any one of the bearing plates includes a slider and a vertical plate. The slider is slidably connected in the chute, and the vertical plate is connected to the top of the slider. The horizontal pushing end and the first limiting end are provided on the vertical plate.

[0012] In some embodiments, the horizontal pushing end includes an electric telescopic rod and a disc body; the electric telescopic rod is installed on the vertical plate, and the telescopic end of the electric telescopic rod is connected to the disc body. The clamping end is rotatably connected to the end of the disc body facing away from the electric telescopic rod.

[0013] In some embodiments, a notch is formed in the disc body, and the second limiting end is provided on the notch.

[0014] In some embodiments, the clamping end includes a clamping frame; the clamping frame is rotatably connected to the disc body through a rotating shaft. A screw rod is provided on the clamping frame, the end of the screw rod extends into the interior of the clamping frame and is connected to a screw sleeve, and the lower end of the screw sleeve is connected to a clamping plate.

[0015] In some embodiments, a plurality of limiting holes are circumferentially arranged on one side of the clamping frame facing the second limiting end.

[0016] In some embodiments, the first limiting end includes a first block, a positioning column, a first spring strip and a first handle; the first block is installed on the vertical plate, the positioning column penetrates through the vertical plate, an annular block is provided on the positioning column, and the first spring strip is wound around the outer periphery of the positioning column on the annular block. One end of the first spring strip is connected to the annular block, and the other end is connected to the first block. The end of the positioning column extends into the positioning hole, and the top of the positioning column is connected to the first handle.

[0017] In some embodiments, the second limiting end includes a second block, a second spring strip, a limiting post and a second handle; the second block is connected to the disc body through the second spring strip, and a limiting post is connected to one side of the second block facing the clamping frame, one end of the limiting post extends into the limiting hole, and one end of the second handle penetrates through the notch and is connected to the second block.

[0018] In some embodiments, the processing table is a circular table body.

[0019] In some embodiments, a power supply block is installed on the bearing plate, and the power supply block is electrically connected to the horizontal pushing end.

[0020] Compared with the prior art, a turnover device for semiconductor processing provided by the present utility model includes a chute opened on the processing table and positioning holes arranged on the outer periphery of the chute. There are two bearing plates which are slidably connected in the chute, and a horizontal pushing end is arranged on each bearing plate. The horizontal pushing end penetrates through the bearing plate, and a clamping end is rotatably connected to the telescopic end. The two clamping ends form a clamping area on the processing table for clamping the workpiece to be processed. A rotatable clamping end is arranged on the telescopic end, which is convenient for turning over the clamped workpiece. And through the bearing plate that can rotate on the processing table, the orientation of the workpiece can be adjusted at the same time. In order to prevent the bearing plate and the clamping end from shifting during the processing, a first limiting end is arranged on the bearing plate, and the bearing plate is limited by the cooperation of the first limiting end and the positioning hole. And a second limiting end is arranged on the horizontal pushing end, and the clamping end can be limited by the second limiting end, so as to prevent the workpiece from shifting during the processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a three-dimensional schematic diagram of the turnover device for semiconductor processing provided by the embodiment of the present utility model;

[0022] Figure 2 is an overall schematic diagram of the turnover device for semiconductor processing provided by the embodiment of the present utility model;

[0023] Figure 3 is a side schematic diagram of the turnover device for semiconductor processing provided by the embodiment of the present utility model;

[0024] Figure 4 is a top view of the turnover device for semiconductor processing provided by the embodiment of the present utility model;

[0025] Figure 5 is the turnover device for semiconductor processing provided by the embodiment of the present utility model Figure 3 in which the enlarged schematic diagram at A is shown.

[0026] Description of the reference numerals: 1. Processing table; 11. Slide groove; 12. Positioning hole; 2. Bearing plate; 21. Slide block; 22. Vertical plate; 3. Clamping mechanism; 31. Horizontal pushing end; 311. Electric telescopic rod; 312. Disk body; 313. Notch; 32. Clamping end; 321. Clamping frame; 3211. Limit hole; 33. Screw rod; 34. Screw sleeve; 35. Clamping plate; 4. Limiting mechanism; 41. First limiting end; 411. First block; 412. Positioning column; 4121. Ring-shaped block; 413. First spring strip; 414. First handle; 42. Second limiting end; 421. Second block; 422. Second spring strip; 423. Limit column; 424. Second handle. Detailed implementation manners

[0027] In order to make the objectives, technical solutions and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0028] In order to solve the technical problem in the prior art that the workpiece turning device for workpiece processing has a relatively single angle adjustment for the workpiece, resulting in the inability to effectively improve the workpiece processing efficiency of the staff, the present utility model provides a turning device for semiconductor processing, which can adjust the workpiece at multiple angles, thereby improving the workpiece processing efficiency of the staff.

[0029] It should be noted that the turning device for semiconductor processing described in the present utility model is used in but not limited to the semiconductor processing field, etc. For the convenience of description, in the present utility model, only the turning device for semiconductor processing applied to semiconductor processing equipment is taken as an example for description, and the principle of the turning device for semiconductor processing applied to other types of equipment is substantially the same as that applied to semiconductor processing equipment, which will not be elaborated here one by one.

[0030] Please refer to Figure 1 , Figure 1Schematic structural diagram of a flipping device for semiconductor processing in an embodiment of the present utility model. The flipping device for semiconductor processing includes a processing table 1, two bearing plates 2, a clamping mechanism 3, and a limiting mechanism 4. A sliding groove 11 is formed on the processing table 1, and a plurality of positioning holes 12 are formed on the outer periphery of the sliding groove 11; the bearing plates 2 are slidably connected in the sliding groove 11; the clamping mechanism 3 includes a horizontal pushing end 31 and a clamping end 32; a horizontal pushing end 31 is provided on any one of the bearing plates 2, and a clamping end 32 is rotatably connected to the telescopic end of the horizontal pushing end 31, and the two clamping ends 32 form a clamping area; and the limiting mechanism 4 includes a first limiting end 41 and a second limiting end 42. The first limiting end 41 is provided on the bearing plate 2, and the end of the first limiting end 41 extends into the positioning hole 12, and the second limiting end 42 is connected to the horizontal pushing end 31 and is used to limit the clamping end 32.

[0031] In this embodiment, a sliding groove 11 is formed on the processing table 1, and positioning holes 12 are provided on the outer periphery of the sliding groove 11. The number of bearing plates 2 is two, which are slidably connected in the sliding groove 11. A horizontal pushing end 31 is provided on each bearing plate 2. The horizontal pushing end 31 penetrates the bearing plate 2, and a clamping end 32 is rotatably connected to the telescopic end. The two clamping ends 32 form a clamping area on the processing table 1 for clamping the workpiece to be processed. A rotatable clamping end 32 is provided on the telescopic end, which is convenient for flipping the clamped workpiece. And through the bearing plate 2 that can rotate on the processing table 1, the orientation of the workpiece can be adjusted at the same time. In order to prevent the bearing plate 2 and the clamping end 32 from shifting during the processing, a first limiting end 41 is provided on the bearing plate 2, and the bearing plate 2 is limited by the cooperation of the first limiting end 41 and the positioning hole 12. And a second limiting end 42 is provided on the horizontal pushing end 31, and the clamping end 32 can be limited by the second limiting end 42, so as to prevent the workpiece from shifting during the processing.

[0032] In one of the embodiments, please refer to Figure 2 , to improve the moving efficiency of the bearing plate 2, any one of the bearing plates 2 includes a slider 21 and a vertical plate 22. The slider 21 is slidably connected in the sliding groove 11, and a vertical plate 22 is connected to the top of the slider 21. The horizontal pushing end 31 and the first limiting end 41 are provided on the vertical plate 22. The processing table 1 is a circular table body, and a power supply block is installed on the bearing plate 2, and the power supply block is electrically connected to the horizontal pushing end 31.

[0033] In this embodiment, the slider 21 is slidably connected in the sliding groove 11, the upper end of the slider 21 is connected to the vertical plate 22, the horizontal pushing end 31 and the power supply block are installed on the vertical plate 22. The power supply block is used to supply power to the horizontal pushing end 31, and the processing table 1 is set as a circular table body, which is convenient for the entire slider 21 to slide in the sliding groove 11.

[0034] In one embodiment, refer to Figure 1 - Figure 3 , to improve the clamping efficiency of the clamping end 32, the horizontal pushing end 31 includes an electric telescopic rod 311 and a disc body 312; the electric telescopic rod 311 is installed on the vertical plate 22, and the telescopic end of the electric telescopic rod 311 is connected with the disc body 312. One end of the disc body 312 facing away from the electric telescopic rod 311 is rotatably connected with the clamping end 32. The clamping end 32 includes a clamping frame 321; the clamping frame 321 is rotatably connected to the disc body 312 through a rotating shaft. A screw rod 33 is arranged on the clamping frame 321. The end of the screw rod 33 extends into the clamping frame 321 and is connected with a screw sleeve 34. The lower end of the screw sleeve 34 is connected with a clamping plate 35.

[0035] In this embodiment, the telescopic end of the electric telescopic rod 311 is connected with the disc body 312. The clamping frame 321 is rotatably connected to the disc body 312 through a rotating shaft. A groove is opened inside the clamping frame 321 for placing the workpiece to be processed. The staff adjusts the screw rod 33 to drive the threaded sleeve to move downward through the screw rod 33, and makes the clamping plate 35 clamp the workpiece. During the clamping process, since the clamping frame 321 is rotatably connected to the disc body 312, the workpiece can be flipped.

[0036] In one embodiment, refer to Figure 1 - Figure 5 , to ensure the stability of the bearing plate 2 and the clamping end 32 during operation, a notch 313 is opened on the disc body 312. A second limiting end 42 is arranged on the notch 313. A plurality of limiting holes 3211 are circumferentially arranged on one side of the clamping frame 321 facing the second limiting end 42. The first limiting end 41 includes a first block 411, a positioning column 412, a first spring strip 413 and a first handle 414; the first block 411 is installed on the vertical plate 22, and the positioning column 412 penetrates through the vertical plate 22. An annular block 4121 is arranged on the positioning column 412. The first spring strip 413 is wound around the outer circumference of the positioning column 412 on the annular block 4121. One end of the first spring strip 413 is connected to the annular block 4121, and the other end is connected to the first block 411. The end of the positioning column 412 extends into the positioning hole 12. The top of the positioning column 412 is connected with the first handle 414. The second limiting end 42 includes a second block 421, a second spring strip 422, a limiting column 423 and a second handle 424; the second block 421 is connected to the disc body 312 through the second spring strip 422. A limiting column 423 is connected to one side of the second block 421 facing the clamping frame 321. One end of the limiting column 423 extends into the limiting hole 3211. One end of the second handle 424 penetrates through the notch 313 and is connected to the second block 421.

[0037] In this embodiment, in order to enhance the stability of the slider 21, a first block 411 is provided on the vertical plate 22. One end of the positioning column 412 in the axial direction penetrates through the first block 411 and extends into the positioning hole 12. An annular block 4121 is provided on the positioning column 412. A first spring strip 413 is provided on the annular block 4121. The lower end of the first spring strip 413 is connected to the annular block 4121, and the upper end is connected to the first block 411. By pushing the annular block 4121 with the first spring strip 413, the lower end of the positioning column 412 is urged to engage in the positioning hole 12. When it is necessary to move the entire carrier plate 2, it is necessary to pull the entire positioning column 412 through the first handle 414, so that the annular block 4121 on the positioning column 412 squeezes the first spring strip 413, so that the positioning column 412 moves away from the positioning hole 12. At this time, the staff can push the vertical plate 22 to perform a circular motion on the processing table 1 through the slider 21. In order to enhance the stability of the clamping frame 321, a notch 313 is opened on the disk body 312. One end of the second handle 424 penetrates through the notch 313 and is connected to a second block 421. A limiting column 423 is provided on the second block 421. The limiting column 423 extends into the limiting hole 3211 on the back of the clamping frame 321. A plurality of second spring strips 422 are provided between the second block 421 and the disk body 312. By pushing the second block 421 with the second spring strip 422, the limiting column 423 on the second block 421 is urged to extend into the limiting hole 3211 of the clamping frame 321, so that the clamping frame 321 cannot rotate. When it is necessary to rotate the clamping frame 321, only need to pull the second block 421 through the second handle 424 to squeeze the second spring strip 422, so that the limiting column 423 moves away from the limiting hole 3211, and then the clamping frame 321 can be rotated, so as to achieve the effect of workpiece flipping. And the number of the limiting holes 3211 is at least five, so that different flipping directions of the workpiece can be adjusted.

[0038] For a better understanding of the present invention, the following is combined with Figures 1 to 5A detailed description of the technical solution of the present utility model is as follows: The staff places the workpiece to be processed in the clamping frame 321, and drives the nut sleeve 34 to move downward through the screw 33, so as to make the clamping plate 35 press on the workpiece. After the pressing is completed, the staff can adjust the orientation of the workpiece according to the actual situation. By pulling the first handle 414, the first positioning column 412 and the annular block 4121 thereof are pushed upward to squeeze the first spring strip 413 to deform, and the positioning column 412 is made to move away from the positioning hole 12. At this time, the staff can drive the bearing plate 2 to slide in the sliding groove 11. When it moves to the designated position, stop pulling the first handle 414. The first spring strip 413 starts to reset and pushes the annular block 4121 to drive the positioning column 412 to move downward, so that the positioning column 412 extends into the positioning hole 12, thus completing the limitation of the bearing plate 2. When the staff needs to flip the clamped workpiece, then pull the second handle 424, so that the second block 421 squeezes the second spring strip 422, and the limiting column 423 is made to move away from the limiting hole 3211 on the back of the clamping frame 321. At this time, the staff can drive the clamping frame 321 to rotate, so as to drive the workpiece to flip. In this embodiment, there are two bearing plates 2 and clamping frames 321 respectively. Subsequently, for the convenience of the staff's operation, the first limiting end 41 and the second limiting end 42 can be provided only on one bearing plate 2 and clamping frame 321 to improve the operation efficiency of the staff.

[0039] The specific embodiments of the present utility model described above do not constitute a limitation on the protection scope of the present utility model. Any other corresponding changes and deformations made according to the technical concept of the present utility model shall be included in the protection scope of the claims of the present utility model.

Claims

1. A turning device for semiconductor processing, characterized in that, Including: A processing table, on which a sliding groove is provided, and a plurality of positioning holes are provided on the outer periphery of the sliding groove; Two bearing plates, which are slidably connected in the sliding groove; A clamping mechanism, which includes a horizontal pushing end and a clamping end; the horizontal pushing end is provided on any one of the bearing plates, and the clamping end is rotatably connected to the telescopic end of the horizontal pushing end, and the two clamping ends form a clamping area; And, A limiting mechanism, which includes a first limiting end and a second limiting end, the first limiting end is provided on the bearing plate, the end of the first limiting end extends into the positioning hole, and the second limiting end is connected to the horizontal pushing end and is used for limiting the clamping end.

2. The flipping device for semiconductor processing according to claim 1, wherein: Any one of the bearing plates includes a slider and a vertical plate, the slider is slidably connected in the sliding groove, and the vertical plate is connected to the top of the slider, and the horizontal pushing end and the first limiting end are provided on the vertical plate.

3. A turnover device for semiconductor processing according to claim 2, characterized in that: The horizontal pushing end includes an electric telescopic rod and a disc body; the electric telescopic rod is installed on the vertical plate, and the telescopic end of the electric telescopic rod is connected to the disc body, and the clamping end is rotatably connected to the end of the disc body facing away from the electric telescopic rod.

4. A flipping device for semiconductor processing according to claim 3, characterized in that: A notch is provided on the disc body, and the second limiting end is provided on the notch.

5. A flipping device for semiconductor processing according to claim 4, characterized in that: The clamping end includes a clamping frame; the clamping frame is rotatably connected to the disc body through a rotating shaft, a screw rod is provided on the clamping frame, the end of the screw rod extends into the interior of the clamping frame and is connected to a screw sleeve, and a clamping plate is connected to the lower end of the screw sleeve.

6. A flipping device for semiconductor processing according to claim 5, characterized in that: A plurality of limiting holes are circumferentially arranged on one side of the clamping frame facing the second limiting end.

7. A flipping device for semiconductor processing according to claim 2, characterized in that: The first limiting end includes a first block, a positioning column, a first spring strip and a first handle; the first block is installed on the vertical plate, the positioning column penetrates through the vertical plate, an annular block is provided on the positioning column, and the first spring strip is wound around the outer periphery of the positioning column on the annular block, one end of the first spring strip is connected to the annular block, the other end is connected to the first block, the end of the positioning column extends into the positioning hole, and the first handle is connected to the top of the positioning column.

8. A turnover device for semiconductor processing according to claim 6, characterized in that: The second limiting end includes a second block, a second spring strip, a limiting column and a second handle; the second block is connected to the disc body through the second spring strip, and a limiting column is connected to one side of the second block facing the clamping frame, one end of the limiting column extends into the limiting hole, and one end of the second handle penetrates through the notch and is connected to the second block.

9. A flipping device for semiconductor processing according to claim 1, characterized in that: The processing table is a circular table body.

10. A flipping device for semiconductor processing according to claim 1, characterized in that: A power supply block is installed on the bearing plate, and the power supply block is electrically connected to the horizontal pushing end.

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