Substrate rotating device
By designing the substrate rotation device, the symmetrically arranged first rotating shaft and second rotating shaft and gear set are synchronously driven, the problem of unstable rotation of the flat-side wafer during the immersion process is solved, and the stable and smooth wafer rotation is achieved, which improves the immersion effect.
Patent Information
- Application Number
- CN202422298258.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-20
AI Technical Summary
The prior art is difficult to effectively and securely rotate wafers with incomplete circular edges, especially in batch wet processes when the wafer is immersed in a liquid tank.
A substrate rotating device is designed, including a bracket, a plurality of first rotating shafts and a second rotating shaft. The first rotating shaft and the second rotating shaft are driven to rotate through the driving module. The first rotating shaft and the second rotating shaft are arranged symmetrically and support the substrate. The gear set connects the first rotating shaft and the second rotating shaft to achieve synchronous rotation, ensuring that the flat-side wafer is stable supported during the rotation process.
The smooth and steady rotation of the flat-side wafer is achieved, which avoids slippage and ensures the effective soaking effect of the wafer during the liquid reaction.
Smart Images
Figure CN223140763U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a device for rotating a substrate, and particularly to a rotating device for batch wet processes of wafers. Background Art
[0002] With the continuous improvement of people's living standards, the importance of electronic products in people's lives has become increasingly high. Facing the increasingly huge market demand for electronic products, major manufacturers are also committed to improving the market competitiveness of their brands.
[0003] For example, in the batch wet process of wafers, the wafers are immersed in a chemical solution tank to allow the wafers to react with the chemical solution. During the immersion period, the wafers can be continuously rotated to improve the immersion effect. Among them, how to effectively and steadily rotate wafers with incomplete circular edges is indeed an important issue in the industry. Summary of the Utility Model
[0004] One object of the utility model is to provide a substrate rotating device that can rotate flat-edge wafers smoothly and steadily.
[0005] According to an embodiment of the utility model, a substrate rotating device includes a bracket, a plurality of first rotating shafts, a plurality of second rotating shafts, and a driving module. The first rotating shafts are parallel to each other and are respectively rotatably connected to the bracket, and there is at least a first horizontal distance between the first rotating shafts. The second rotating shafts are respectively parallel to the first rotating shafts and are rotatably connected to the bracket, and there is at least a second horizontal distance between the second rotating shafts, and the second horizontal distance is greater than the first horizontal distance. The driving module is disposed on the bracket and is connected to the first rotating shafts and the second rotating shafts, and the driving module is configured to drive the first rotating shafts and the second rotating shafts to rotate. The first rotating shafts and the second rotating shafts are configured to support and drive at least one substrate to rotate.
[0006] In one or more embodiments of the utility model, at least a part of the above-mentioned first rotating shafts is located between the second rotating shafts.
[0007] In one or more embodiments of the utility model, the above-mentioned first rotating shafts and second rotating shafts are symmetrically arranged.
[0008] In one or more embodiments of the utility model, the above-mentioned first rotating shafts and second rotating shafts are arranged in a circular track.
[0009] In one or more embodiments of the utility model, the center of the above-mentioned circular track has a first vertical distance relative to the first rotating shafts, the second rotating shafts have a second vertical distance relative to the first rotating shafts, and the second vertical distance is less than or equal to the first vertical distance.
[0010] In one or more embodiments of the present utility model, each of the above-mentioned first rotating shafts has a first diameter, each of the second rotating shafts has a second diameter, and the first diameter is equal to the second diameter.
[0011] In one or more embodiments of the present utility model, the above-mentioned driving module includes a gear set and a driving assembly. The gear set is disposed on the bracket and mechanically connects the first rotating shaft and the second rotating shaft. The driving assembly is connected to the bracket and configured to drive the gear set.
[0012] In one or more embodiments of the present utility model, the above-mentioned gear set includes a plurality of first gears, a plurality of second gears, a third gear, and a plurality of fourth gears. The first gears are respectively concentrically connected to the ends of the corresponding ones of the first rotating shafts. The second gears are respectively concentrically connected to the ends of the corresponding ones of the second rotating shafts. The third gear is connected to the driving assembly and meshes with the first gears. The fourth gears are respectively meshed between one of the first gears and the corresponding one of the second gears.
[0013] In one or more embodiments of the present utility model, each of the above-mentioned first gears has a first pitch diameter, each of the second gears has a second pitch diameter, and the first pitch diameter is equal to the second pitch diameter.
[0014] In one or more embodiments of the present utility model, the above-mentioned driving assembly further includes a first sector gear, a second sector gear, a driving motor, and a transmission rod. The first sector gear is concentrically connected to the third gear. The second sector gear meshes with the first sector gear. The driving motor is connected to the bracket. The transmission rod is connected between the driving motor and the second sector gear.
[0015] The above embodiments of the present utility model have at least the following advantages: Even if the substrate is a flat-edge wafer, during the process of rotating the flat-edge wafer by the substrate rotating device, the flat-edge wafer will be supported by at least two of the first rotating shaft and the second rotating shaft. Therefore, the substrate rotating device can rotate the flat-edge wafer smoothly and stably. Description of the Drawings
[0016] Figure 1 FIG. is a perspective view showing a substrate rotating device according to an embodiment of the present utility model.
[0017] Figure 2 FIG. is a perspective view showing the substrate rotating device along Figure 1 wherein the susceptor and the wafer are omitted.
[0018] Figure 3 FIG. is a sectional view taken along line Figure 1 A-A.
[0019] Figure 4 FIG. is a sectional view taken along line Figure 2 B-B.
[0020] Figure 5 To show a cross-sectional view along line C-C Figure 4 of the substrate.
[0021] Figure 6 To show a cross-sectional view along line A-A Figure 1 of the substrate, where the substrate is a flat-edge wafer.
[0022] Among them, the reference numerals are explained as follows:
[0023] 100: Substrate rotation device
[0024] 110: Bracket
[0025] 120: First rotating shaft
[0026] 130: Second rotating shaft
[0027] 140: Driving module
[0028] 141: Gear set
[0029] 1411: First gear
[0030] 1412: Second gear
[0031] 1413: Third gear
[0032] 1414: Fourth gear
[0033] 142: Driving combination
[0034] 1421: First sector gear
[0035] 1422: Second sector gear
[0036] 1423: Driving motor
[0037] 1424: Transfer rod
[0038] 200: Cassette
[0039] 300: Substrate
[0040] A-A, B-B, C-C: Lines
[0041] C: Center
[0042] DH1: First horizontal distance
[0043] DH2: Second horizontal distance
[0044] DV1: First vertical distance
[0045] DV2: Second vertical distance
[0046] EC: Rounded edge
[0047] ES: Flat edge
[0048] G: Gap
[0049] L: Circular trajectory
[0050] P1: Diameter of the first section of the circle
[0051] P2: Diameter of the second section of the circle
[0052] X1: First diameter
[0053] X2: Second diameter Detailed implementation manners
[0054] Multiple implementation manners of the present utility model will be disclosed hereinafter with reference to the accompanying drawings. For the sake of clear illustration, many practical details will be described together in the following description. However, it should be understood that these practical details are not used to limit the present utility model. That is to say, in some implementation manners of the present utility model, these practical details are not necessary. In addition, for the sake of simplifying the drawings, some conventional structures and elements in the prior art will be illustrated in a simple schematic manner in the drawings, and in all the drawings, the same reference numerals will be used to represent the same or similar elements. And if possible in implementation, the features of different embodiments can be applied interactively.
[0055] Unless otherwise defined, all the terms (including technical and scientific terms) used herein have their ordinary meanings, and their meanings can be understood by those skilled in the art. Further, the definitions of the above terms in commonly used dictionaries should be interpreted as having the same meanings consistent with the relevant fields of the present utility model in the content of this specification. Unless specifically defined otherwise, these terms will not be construed as idealized or overly formal meanings.
[0056] Please refer to Figures 1 - 2 . Figure 1 FIG. is a perspective view showing a substrate rotating device 100 according to an implementation manner of the present utility model. Figure 2 It is also a perspective view showing the substrate rotating device 100 along Figure 1 , in which the susceptor 200 and the wafers are omitted. As Figures 1 - 2 shown, the present utility model provides a substrate rotating device 100, which is adapted to place a susceptor (or "wafer cassette") 200 and immerse at least one wafer placed in the susceptor 200 in a chemical solution to perform a batch wet process, so that the wafers react with the chemical solution. For the sake of simplifying the drawings, Figures 1 - 2 the immersion tank and the chemical solution are not shown in all cases.
[0057] Specifically, in this implementation manner, as Figures 1 - 2As shown, the substrate rotating device 100 includes a bracket 110, a plurality of first rotating shafts 120, a plurality of second rotating shafts 130, and a driving module 140. The first rotating shafts 120 are parallel to each other and are respectively rotatably connected to the bracket 110. There is at least a first horizontal distance DH1 between the first rotating shafts 120. The second rotating shafts 130 are respectively parallel to the first rotating shafts 120 and are rotatably connected to the bracket 110. There is at least a second horizontal distance DH2 between the second rotating shafts 130, and the second horizontal distance DH2 is greater than the first horizontal distance DH1. The driving module 140 is disposed on the bracket 110 and is connected to the first rotating shafts 120 and the second rotating shafts 130. The driving module 140 is configured to drive the first rotating shafts 120 and the second rotating shafts 130 to rotate, and the first rotating shafts 120 and the second rotating shafts 130 are configured to support and drive at least one substrate 300 to rotate. The substrate 300 is, for example, the aforementioned wafer. Further, the dimension range of the first horizontal distance DH1 can be 55 ± 5 mm, and the dimension range of the second horizontal distance DH2 can be 118 ± 5 mm; or the dimension range of the first horizontal distance DH1 can be 55 ± 5 mm, and the dimension range of the second horizontal distance DH2 can be 162 ± 5 mm.
[0058] Please refer to Figure 3 。 Figure 3 For showing a cross-sectional view along Figure 1 the line A-A. In this embodiment, as Figure 3 shown, at least a part of the first rotating shafts 120 is located between the second rotating shafts 130. More specifically, the first rotating shafts 120 and the second rotating shafts 130 are arranged in a circular trajectory L to fit the outer edge of the substrate 300, and allow the susceptor 200 carrying the substrate 300 to be taken and placed relative to the bracket 110 from above and below the drawing; in other words, the bracket 110 can hold the aforementioned susceptor 200, and the susceptor 200 can accommodate the substrate 300. In fact, when the substrate 300 is supported by two first rotating shafts 120 at the same time, there may be a gap G between each of the second rotating shafts 130 and the substrate 300, and the range of the gap G is between 0.5 mm and 1.0 mm, but the present invention is not limited thereto.
[0059] Furthermore, as Figure 3As shown, the center C of the circular trajectory L has a first vertical distance DV1 relative to the first rotating shaft 120, and the second rotating shaft 130 has a second vertical distance DV2 relative to the first rotating shaft 120, and the second vertical distance DV2 is less than or equal to the first vertical distance DV1. In this way, when the substrate 300 is placed on the bracket 110 as the susceptor 200 descends, the substrate 300 can pass between the second rotating shafts 130 and reach the first rotating shaft 120. Among them, the dimension range of the first vertical distance DV1 can be 50 ± 5 mm, and the dimension range of the second vertical distance DV2 can be 45 ± 5 mm; or the dimension range of the first vertical distance DV1 can be 76 ± 5 mm, and the dimension range of the second vertical distance DV2 can be 55 ± 5 mm.
[0060] Please refer to Figures 4 - 5 . Figure 4 To show a cross-sectional view along Figure 2 the line B-B. Figure 5 To show a cross-sectional view along Figure 4 the line C-C. In the present embodiment, as Figures 4 - 5 shown, the drive module 140 includes a gear set 141 and a drive assembly 142. The gear set 141 is disposed on the bracket 110 and mechanically connects the first rotating shaft 120 and the second rotating shaft 130, and the drive assembly 142 is connected to the bracket 110 and configured to drive the gear set 141.
[0061] More specifically, as Figure 4 shown, the gear set 141 includes two first gears 1411, two second gears 1412, a third gear 1413, and two fourth gears 1414. The first gears 1411 are respectively concentrically connected to the ends of the corresponding one of the first rotating shafts 120, and the other end of the first rotating shaft 120 is rotatably connected to the bracket 110 (please see Figures 1 - 2 ). The second gears 1412 are respectively concentrically connected to the ends of the corresponding one of the second rotating shafts 130, and the other end of the second rotating shaft 130 is rotatably connected to the bracket 110 (please see Figures 1 - 2 ). The third gear 1413 is connected to the drive assembly 142 and meshes with the first gears 1411. The fourth gears 1414 are respectively meshed between one of the first gears 1411 and the corresponding one of the second gears 1412.
[0062] On the other hand, as Figures 1 - 2 , Figure 5 shown, the drive assembly 142 further includes a first sector gear 1421 (please see Figure 5 ), a second sector gear 1422 (please see Figure 5 ), a drive motor 1423 (please see Figures 1 - 2) and a transfer rod 1424. The first sector gear 1421 is concentrically connected to the third gear 1413. The second sector gear 1422 meshes with the first sector gear 1421. The drive motor 1423 (see Figures 1 - 2 ) is connected to the connecting bracket 110, and the transfer rod 1424 is connected between the drive motor 1423 and the second sector gear 1422.
[0063] When the substrate rotating device 100 is started, the drive motor 1423 drives the transfer rod 1424 to rotate together with the second sector gear 1422, so as to drive the first sector gear 1421 to rotate together with the third gear 1413. At this time, the two first gears 1411 meshing with the third gear 1413 also rotate with the third gear 1413. Since each fourth gear 1414 meshes between a first gear 1411 and a second gear 1412, each second gear 1412 also rotates with the first gear 1411 through the fourth gear 1414. Since only the fourth gear 1414 meshes between the first gear 1411 and the second gear 1412, the first gear 1411 and the second gear 1412 both rotate in the same direction.
[0064] Furthermore, as Figure 4 shown, each of the first gears 1411 has a first pitch diameter P1, each of the second gears 1412 has a second pitch diameter P2, and the first pitch diameter P1 is equal to the second pitch diameter P2. In this way, the first gear 1411 and the second gear 1412 rotate at the same speed.
[0065] Moreover, as Figure 4 shown, each of the first rotating shafts 120 has a first diameter X1, each of the second rotating shafts 130 has a second diameter X2, and the first diameter X1 is equal to the second diameter X2. In this way, when the first gear 1411 and the second gear 1412 rotate in the same direction and at the same speed, the first rotating shaft 120 and the second rotating shaft 130 also rotate in the same direction and at the same speed, which is beneficial to driving the substrate 300 to rotate.
[0066] Please refer to Figure 6 . Figure 6 To show a cross-sectional view along the Figure 1 line A-A, where the substrate 300 is a flat-edge wafer. In this embodiment, as Figure 6 shown, the substrate rotating device 100 is rotating the flat-edge wafer, and the flat-edge wafer is a wafer with an incomplete circular edge. For example, the edge of the flat-edge wafer is as Figure 6As shown, it is composed of the connected circular edge EC and flat edge ES. It should be noted that when the flat-edge wafer rotates and leaves one of the first rotating shafts 120 and is only supported by the other of the first rotating shafts 120, that is, when the circular edge EC of the flat-edge wafer leaves one of the first rotating shafts 120, the circular edge EC of the flat-edge wafer will be supported by one of the second rotating shafts 130 to maintain the support for the flat-edge wafer. In other words, during the rotation of the flat-edge wafer, the flat-edge wafer will be supported by at least one first rotating shaft 120 and at least one second rotating shaft 130 at the same time. Therefore, the substrate rotating device 100 can rotate the flat-edge wafer smoothly and stably, and is not easy to slip, so as to control and predict the turning position of the flat edge ES of the flat-edge wafer. Finally, in the present utility model, the element names contain terms such as "horizontal" and "vertical", which are only used to distinguish different marks or objects and do not limit their specific directions; moreover, the use of ordinal terms (such as "first", "second", "third", etc.) is also used to distinguish the element names themselves, and does not mean any superiority or order between the element names, or the time sequence of performing actions.
[0067] In summary, the technical solutions disclosed in the above embodiments of the present utility model have at least the following advantages: Even if the substrate is a flat-edge wafer, during the rotation of the flat-edge wafer by the substrate rotating device, the flat-edge wafer will be supported by at least two of the first rotating shaft and the second rotating shaft. Therefore, the substrate rotating device can rotate the flat-edge wafer smoothly and stably.
[0068] Although the present utility model has been disclosed as above in the embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make various changes and modifications without departing from the concept and scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to what is defined by the claims.
Claims
1. A substrate rotation device, characterized in that, Comprising: A bracket; A plurality of first rotating shafts, parallel to each other and respectively rotatably connected to the bracket, and there is at least a first horizontal distance between the plurality of first rotating shafts; A plurality of second rotating shafts, respectively parallel to the plurality of first rotating shafts and rotatably connected to the bracket, and there is at least a second horizontal distance between the plurality of second rotating shafts, and the second horizontal distance is greater than the first horizontal distance; And A driving module, arranged on the bracket and connected to the plurality of first rotating shafts and the plurality of second rotating shafts, and the driving module is configured to drive the plurality of first rotating shafts and the plurality of second rotating shafts to rotate, Wherein, the plurality of first rotating shafts and the plurality of second rotating shafts are configured to support and drive at least one substrate to rotate.
2. The substrate rotating device according to claim 1, wherein At least part of the plurality of first rotating shafts is located between the plurality of second rotating shafts.
3. The substrate rotating device according to claim 1, wherein The plurality of first rotating shafts and the plurality of second rotating shafts are symmetrically arranged.
4. The substrate rotating device according to claim 1, wherein The plurality of first rotating shafts and the plurality of second rotating shafts are arranged along a circular trajectory.
5. The substrate rotating device according to claim 4, wherein The center of the circular trajectory has a first vertical distance relative to the plurality of first rotating shafts, and the plurality of second rotating shafts have a second vertical distance relative to the plurality of first rotating shafts, and the second vertical distance is less than or equal to the first vertical distance.
6. The substrate rotating device according to claim 1, wherein, Each of the plurality of first rotating shafts has a first diameter, and each of the plurality of second rotating shafts has a second diameter, and the first diameter is equal to the second diameter.
7. The substrate rotating device according to claim 1, wherein The driving module comprises: A gear set, arranged on the bracket and mechanically connected to the plurality of first rotating shafts and the plurality of second rotating shafts; and A driving combination, connected to the bracket and configured to drive the gear set.
8. The substrate rotation device according to claim 7, wherein, The gear set comprises: A plurality of first gears, respectively concentrically connected to one end of the corresponding one of the plurality of first rotating shafts; A plurality of second gears, respectively concentrically connected to one end of the corresponding one of the plurality of second rotating shafts; A third gear, connected to the driving combination and meshing with the plurality of first gears; and A plurality of fourth gears, respectively meshing between one of the plurality of first gears and the corresponding one of the plurality of second gears.
9. The substrate rotating device according to claim 8, wherein, Each of the plurality of first gears has a first pitch diameter, and each of the plurality of second gears has a second pitch diameter, and the first pitch diameter is equal to the second pitch diameter.
10. The substrate rotating device according to claim 8, characterized in that, The driving combination further comprises: A first sector gear, concentrically connected to the third gear; A second sector gear, meshing with the first sector gear; A driving motor, connected to the bracket; and A transmission rod, connected between the driving motor and the second sector gear.