Reliable etching disc convenient to clean

Abstract

The utility model relates to the technical field of etching disc cleaning, in particular to a reliable and convenient-to-clean etching disc, which comprises an etching disc and a mounting component, mounting columns are symmetrically arranged at two ends of the etching disc respectively, positioning holes are arranged on the mounting columns, a group of mounting columns are rotatably inserted and pulled in mounting holes of a support part, and the support part is arranged on the mounting part. An adjusting part is slidably arranged in the mounting part shaft cavity, another group of mounting columns are rotatably inserted in the adjusting part assembling hole, a threaded rod is arranged in the mounting part threaded hole, the threaded rod is in contact connection with the adjusting part in a matched mode, a transmission shaft is rotatably arranged in the adjusting part shaft cavity, and one end of the transmission shaft is of a polygonal structure; the polygonal structure of the transmission shaft is matched and connected with the mounting column positioning hole in a plugging manner; the mounting piece is arranged on the mounting assembly; the driving assembly is arranged on the mounting assembly, and the driving assembly is used for providing rotation power for the etching disc; the cleaning efficiency is high, and the cleaning sufficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of etching disc cleaning, in particular to an etching disc that is reliable and easy to clean. Background Art

[0002] An etching disc is a device used to hold a wafer during the etching process of a wafer. Its main function is to place the wafer in the etching cavity of an etching machine and perform etching with etching gas. During the etching process, the etching disc plays a role in fixing and protecting the wafer. At the same time, the etching gas acts on the wafer from above to etch the wafer. This etching method can precisely control the etching depth and shape to meet different wafer etching requirements.

[0003] During the etching process, the etching disc will be contaminated by substances such as etching gas, residues, and wafer materials. These contaminants will accumulate on the surface of the etching disc, resulting in an increase in the surface roughness of the etching disc, making it prone to scratches and chips, thus affecting the etching effect and product quality of the wafer. Therefore, the etching disc needs to be cleaned regularly to ensure its surface is smooth and clean, effectively protect the wafer, and extend the service life of the etching disc.

[0004] However, in the actual use process of the above device, the traditional cleaning method of immersing the etching disc in a cleaning solution has low cleaning efficiency and cannot fully clean the etching disc. Summary of the Utility Model

[0005] To solve the above technical problems, the utility model provides an etching disc that is reliable and easy to clean, with high cleaning efficiency and improved cleaning adequacy.

[0006] A reliable and easy-to-clean etching disc of the utility model includes:

[0007] An etching disc and a mounting assembly. Installation columns are symmetrically arranged at both ends of the etching disc. Positioning holes are provided on the installation columns. A set of installation columns is rotationally inserted into the internal mounting holes of the support member. The support member is arranged on the mounting member. An adjusting member is slidably arranged inside the shaft cavity of the mounting member. Another set of installation columns is rotationally inserted into the assembly hole of the adjusting member. A threaded rod is arranged inside the threaded hole of the mounting member. The threaded rod is in contact connection with the adjusting member in a matching manner. A transmission shaft is rotatably arranged inside the shaft cavity of the adjusting member. One end of the transmission shaft is provided with a multi-faceted structure. The multi-faceted structure of the transmission shaft is in plug-in connection with the positioning hole of the installation column. The mounting member is arranged on the mounting assembly;

[0008] A driving assembly, which is arranged on the mounting assembly and is used to provide rotational power for the etching disc.

[0009] Furthermore, the installation component includes a moving part and a lifting component. The installation component is arranged inside the fixing hole of the moving part. The inner groove of the moving part is slidably arranged on the positioning slide rail. The positioning slide rail is arranged on the fixing part. The lifting component is arranged on the fixing part. The lifting component is used to adjust the height of the etching disk.

[0010] Preferably, the lifting assembly includes an assembly part arranged on a fixed part, a threaded column is rotatably arranged in the inner hole of the assembly part, the threaded column is arranged in the threaded through hole of the movable part, the threaded column is coaxially arranged at the output end of the servo motor, and the servo motor is arranged on the assembly part.

[0011] Furthermore, the fixing member is provided with a plurality of groups of mounting through holes.

[0012] Preferably, the driving assembly includes a transmission shaft arranged in the fixing hole of the moving part, a driving gear is coaxially arranged on the transmission shaft, a driven gear is coaxially arranged on the transmission shaft, the driven gear is meshingly connected with the driving gear, the transmission shaft is coaxially arranged at the output end of the driving motor, and the driving motor is arranged on the moving part.

[0013] Furthermore, an isolating member is provided on the moving member, and the driving gear and the driven gear are located inside the cavity of the isolating member.

[0014] Preferably, an adjusting piece is coaxially arranged on the threaded rod.

[0015] Furthermore, an adjusting rod is arranged on the adjusting member.

[0016] Compared with the prior art, the utility model has the following beneficial effects: the etching disk can be quickly disassembled and assembled through the mounting posts symmetrically arranged at both ends of the etching disk, which not only simplifies the cleaning process but also improves the cleaning efficiency; the positioning holes on the mounting posts match the multi-faceted structure of the transmission shaft, so that the etching disk can be rotated through the transmission shaft, and the etching disk is provided with rotational power through the driving assembly, and the impact intensity with the cleaning liquid is increased through the rotation of the etching disk; the connection position of the adjusting part and the mounting part is locked through the threaded rod, which is convenient for fixing and disassembling the etching disk; the device is arranged on the mounting assembly through the mounting part, and the cleaning efficiency is high, and the cleaning adequacy is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front view structural schematic diagram of the utility model;

[0018] Figure 2 It is a schematic diagram of the axonometric structure of the utility model;

[0019] Figure 3 It is a schematic diagram of the top view structure of the utility model;

[0020] Figure 4 It is a schematic diagram of the parts structure of the utility model;

[0021] Reference numerals in the drawings: 1, etching disc; 2, mounting post; 3, support member; 4, mounting member; 5, adjusting member; 6, threaded rod; 7, transmission shaft; 8, moving member; 9, positioning slide rail; 10, fixing member; 11, assembly member; 12, threaded post; 13, servo motor; 14, transmission shaft; 15, driving gear; 16, driven gear; 17, driving motor; 18, isolating member; 19, adjusting member; 20, adjusting rod. Detailed implementation manners

[0022] The following combines the drawings and embodiments to further describe in detail the specific implementation manners of the present invention. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0023] As Figures 1 to 4 shown, a reliable and easy-to-clean etching disc of the present invention includes:

[0024] The etching disc 1 and the mounting assembly. Mounting posts 2 are symmetrically arranged at both ends of the etching disc 1. Positioning holes are provided on the mounting posts 2. A set of mounting posts 2 are rotatably inserted into the mounting holes of the support member 3. The support member 3 is arranged on the mounting member 4. An adjusting member 5 is slidably arranged inside the shaft cavity of the mounting member 4. Another set of mounting posts 2 are rotatably inserted into the assembly holes of the adjusting member 5. A threaded rod 6 is arranged in the threaded hole of the mounting member 4. The threaded rod 6 is in contact connection with the adjusting member 5 in a matching manner. A transmission shaft 7 is rotatably arranged inside the shaft cavity of the adjusting member 5. One end of the transmission shaft 7 is provided with a multi-faceted structure. The multi-faceted structure of the transmission shaft 7 is in plug connection with the positioning hole of the mounting post 2. The mounting member 4 is arranged on the mounting assembly;

[0025] The driving assembly is arranged on the mounting assembly and is used to provide rotational power for the etching disc 1. The etching disc 1 realizes quick disassembly and assembly through the mounting posts 2 symmetrically arranged at both ends, which not only simplifies the cleaning process but also improves the cleaning efficiency. The positioning hole on the mounting post 2 matches the multi-faceted structure of the transmission shaft 7, so that the etching disc 1 rotates through the transmission shaft 7. The driving assembly provides rotational power for the etching disc 1. The rotation of the etching disc 1 increases the impact intensity with the cleaning liquid. The connection position between the adjusting member 5 and the mounting member 4 is locked by the threaded rod 6, which is convenient for fixing and disassembling the etching disc 1. The device is arranged on the mounting assembly through the mounting member 4, with high cleaning efficiency and improved cleaning sufficiency.

[0026] As Figures 1 to 4As shown, as a preferred solution, the installation component includes a moving part 8 and a lifting component, the installation part 4 is arranged inside the fixing hole of the moving part 8, the inner groove of the moving part 8 is slidably arranged on the positioning slide rail 9, the positioning slide rail 9 is arranged on the fixing part 10, and the lifting component is arranged on the fixing part 10, and the lifting component is used to adjust the height of the etching disk 1; the setting of the lifting component provides the etching disk 1 with an adjustment function in the vertical direction. This design makes it easy for the etching disk 1 to be immersed in the cleaning liquid and removed from the cleaning liquid. The moving trajectory of the moving part 8 and the fixing part 10 is limited by the positioning slide rail 9. The fixing part 10 not only serves as the basic support of the positioning slide rail 9, but also carries the lifting component, thereby ensuring the stability and reliability of the entire system.

[0027] like Figures 1 to 4 As shown, as a preferred solution, the lifting component includes an assembly part 11 arranged on the fixed part 10, a threaded column 12 is rotatably arranged in the inner hole of the assembly part 11, the threaded column 12 is arranged in the threaded through hole of the movable part 8, the threaded column 12 is coaxially arranged at the output end of the servo motor 13, the servo motor 13 is arranged on the assembly part 11, and a plurality of groups of mounting through holes are arranged on the fixed part 10; the threaded column 12 is rotatably supported on the fixed part 10 through the assembly part 11, and the design of the coaxial arrangement of the threaded column 12 and the servo motor 13 ensures the stability and accuracy of the lifting action. The use of the servo motor 13 can realize the precise control of the lifting height of the etching disk 1, the cooperation of the threaded column 12 and the threaded through hole of the movable part 8, and the principle of lead screw transmission are used to make the lifting movement more stable and controllable, and the plurality of groups of mounting through holes arranged on the fixed part 10 are convenient for the installation and fixation of the entire lifting component.

[0028] like Figures 1 to 4 As shown, as a preferred solution, the drive assembly includes a transmission shaft 14 arranged in the fixing hole of the moving member 8, a driving gear 15 is coaxially arranged on the transmission shaft 14, a driven gear 16 is coaxially arranged on the transmission shaft 7, the driven gear 16 is meshed and connected with the driving gear 15, the transmission shaft 14 is coaxially arranged at the output end of the driving motor 17, the driving motor 17 is arranged on the moving member 8, and an isolating member 18 is arranged on the moving member 8, and the driving gear 15 and the driven gear 16 are located inside the cavity of the isolating member 18; the meshing transmission design of the driving gear 15 and the driven gear 16 makes the power transmission more stable, the design of the transmission shaft 14 coaxially arranged at the output end of the driving motor 17 simplifies the power transmission path, avoids additional transmission links, and reduces the failure points, the driving motor 17 is arranged on the moving member 8, so that the overall structure is more compact, easy to integrate and maintain, and the isolating member 18 arranged on the moving member 8 not only protects the driving gear 15 and the driven gear 16, prevents external impurities from entering the transmission system, but also effectively reduces the noise generated when the gears are meshed.

[0029] like Figures 1 to 4As shown, as a preferred solution, an adjusting member 19 is coaxially arranged on the threaded rod 6; the adjusting member 19 reduces the difficulty of rotating the threaded rod 6 and improves the convenience of disassembling and assembling the etching disc 1.

[0030] As Figures 1 to 4 shown, as a preferred solution, an adjusting rod 20 is arranged on the adjusting member 5; the adjusting rod 20 reduces the difficulty of adjusting the connection position between the adjusting member 5 and the mounting member 4 and increases the operation convenience.

[0031] As Figures 1 to 4 shown, as a preferred solution, its working process is as follows:

[0032] Insert the mounting post 2 at one end of the etching disc 1 into the mounting hole of the support member 3, and then drive the position of the adjusting member 5 through the adjusting rod 20 to insert the other set of mounting posts into the positioning holes of the adjusting member 5. At the same time, ensure that the positioning holes on the mounting post 2 match the multi-faceted structure of the transmission shaft 7. Then, adjust the threaded rod 6 through the adjusting member 19 to lock the connection position between the adjusting member 5 and the mounting member 4. Drive the threaded column 12 to rotate through the servo motor 13, drive the moving member 8 to move downward along the positioning slide rail 9, immerse the etching disc 1 in the cleaning liquid. Start the driving motor 17, the output end of which drives the transmission shaft 14 to rotate. The driving gear 15 on the transmission shaft 14 meshes with the driven gear 16 on the transmission shaft 7, thereby driving the etching disc 1 to rotate. The driving gear 15 on the transmission shaft 14 meshes with the driven gear 16 on the transmission shaft 7, thereby driving the etching disc 1 to rotate. After the cleaning is completed, reverse the rotation of the servo motor 13 to move the etching disc 1 out of the cleaning liquid.

[0033] For a reliable and easy-to-clean etching disc of the present utility model, its installation method, connection method or setting method are all common mechanical methods, and any method that can achieve its beneficial effects can be implemented.

[0034] The above are only the preferred embodiments of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present utility model, several improvements and modifications can be made, and these improvements and modifications should also be regarded as the protection scope of the present utility model.

Claims

1. A reliable and easy-to-clean etching disc, characterized in that, Comprising: An etching disc and a mounting assembly. Mounting posts are symmetrically arranged at both ends of the etching disc. Positioning holes are provided on the mounting posts. One set of the mounting posts is rotatably inserted into the internal mounting holes of the support member. The support member is arranged on the mounting member. An adjusting member is slidably arranged in the shaft cavity of the mounting member. Another set of mounting posts is rotatably inserted into the assembly holes of the adjusting member. A threaded rod is arranged in the threaded hole of the mounting member. The threaded rod is in contact connection with the adjusting member in a matching manner. A transmission shaft is rotatably arranged in the shaft cavity of the adjusting member. One end of the transmission shaft is provided with a multi-faceted structure. The multi-faceted structure of the transmission shaft is in plug connection with the positioning holes of the mounting posts. The mounting member is arranged on the mounting assembly; A driving assembly, which is arranged on the mounting assembly and is used to provide rotational power for the etching disc.

2. The reliable and easy-to-clean etching disc according to claim 1, characterized in that, The mounting assembly includes a moving member and a lifting assembly. The mounting member is arranged inside the fixing hole of the moving member. The inner groove of the moving member is slidably arranged on the positioning slide rail. The positioning slide rail is arranged on the fixing member. The lifting assembly is arranged on the fixing member and is used to adjust the height of the etching disc.

3. The reliable and easy-to-clean etching disc according to claim 2, wherein, The lifting assembly includes an assembly member arranged on the fixing member. A threaded column is rotatably arranged in the inner hole of the assembly member. The threaded column is arranged in the threaded through hole of the moving member. The threaded column is coaxially arranged at the output end of the servo motor. The servo motor is arranged on the assembly member.

4. The reliable and easy-to-clean etching disc according to claim 3, characterized in that Multiple mounting through holes are provided on the fixing member.

5. The etching disc according to claim 2, characterized in that, The driving assembly includes a transmission shaft arranged in the fixing hole of the moving member. A driving gear is coaxially arranged on the transmission shaft. A driven gear is coaxially arranged on the transmission shaft. The driven gear is in meshing transmission connection with the driving gear. The transmission shaft is coaxially arranged at the output end of the driving motor. The driving motor is arranged on the moving member.

6. The etching disc according to claim 5, which is reliable and easy to clean, is characterized in that An isolating member is arranged on the moving member. The driving gear and the driven gear are located inside the cavity of the isolating member.

7. The etch disc as claimed in claim 1, wherein An adjusting member is coaxially arranged on the threaded rod.

8. A reliable and easy-to-clean etching disc as claimed in claim 1, wherein, An adjusting rod is arranged on the adjusting member.

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