Axial static rigidity detection equipment for main shaft with air bearing

Abstract

The utility model discloses a main shaft axial static rigidity detection device with an air bearing, comprising a main shaft fixing assembly having a structure for fixing a main shaft at a predetermined position; the pressure applying and pressure detecting assembly is arranged below the two carrying plates of the main shaft fixing assembly and is provided with a force applying device and a pressure detecting device, and the force applying device is used for applying pressure coaxial with the axis of the main shaft to the lower end of the main shaft at a preset position; the displacement detection assembly is arranged on the side of the spindle at a preset position and used for detecting the displacement of the lower end of the spindle or the preset position below the spindle; and the control assembly is connected with the pressure applying and pressure detecting assembly and is used for controlling the action of the pressure applying and pressure detecting assembly. According to the utility model, after the main shaft is fixed by the main shaft fixing assembly, the force application device is used for driving the weighing sensor to jack and determining the applied pressure at the same time, only the force application device needs to be controlled to act, the operation is convenient, and meanwhile, the distance measuring sensor is used for deformation detection, so that the detection precision is higher.

Description

Technical Field

[0001] The utility model relates to the field of spindle detection, in particular to an axial static rigidity detection device for a spindle with an air bearing in semiconductor device processing equipment. Background Art

[0002] In semiconductor device processing equipment such as thinning machines and dicing machines, the spindle is an important component. The axial static rigidity of the spindle is an important parameter affecting the long-term and stable operation of the equipment. Therefore, it is necessary to detect the axial static rigidity of the spindle, and various detection devices have been developed to achieve the corresponding purpose.

[0003] The utility model patent with the authorization announcement number CN216116709U discloses a spindle rigidity detection device, which moves a pressure sensor towards the spindle by manually operating a driving device. This operation method has low efficiency and is difficult to accurately control the force application situation each time. At the same time, a dial indicator is used for detection in this structure, and the detection accuracy can only reach 0.01 mm, with relatively low accuracy. Summary of the Utility Model

[0004] The purpose of the utility model is to solve the above problems existing in the prior art, and provide an axial static rigidity detection device for a spindle with an air bearing.

[0005] The purpose of the utility model is achieved through the following technical solutions:

[0006] An axial static rigidity detection device for a spindle with an air bearing, comprising:

[0007] A spindle fixing component, which has a structure for fixing the spindle at a predetermined position;

[0008] A pressure application and pressure detection component, which is arranged below the two carrier plates of the spindle fixing component, and has a force application device and a pressure detection device for applying a pressure coaxial with the axis of the spindle to the lower end of the spindle at a predetermined position;

[0009] A displacement detection component, which is arranged on the side of the spindle at a predetermined position for detecting the displacement amount of the lower end of the spindle or a predetermined position below the spindle;

[0010] A control component, connected to the pressure application and pressure detection component, for controlling the actions of the pressure application and pressure detection component;

[0011] A display device, connected to the pressure application and pressure detection component and the displacement detection component, at least for displaying the detection results.

[0012] Preferably, the main shaft fixing assembly includes two fixing brackets arranged with a gap therebetween. The two fixing brackets include carrier plates arranged with a gap therebetween for supporting the main shaft, and pressing mechanisms are detachably arranged on the two carrier plates respectively.

[0013] Preferably, the carrier plate is connected to the bracket of the fixing bracket by a set of set screws.

[0014] Preferably, the main shaft force applicator pressure detection assembly includes a force applying device, and a weighing sensor is arranged on the top of the cylinder.

[0015] Preferably, the top of the load button of the weighing sensor is a flat surface, and a spherical surface is below the flat surface.

[0016] Preferably, the force applying device is arranged on a horizontal adjusting plate, and the horizontal adjusting plate is arranged on the base so as to be adjustable in position along the distribution direction of the two brackets.

[0017] Preferably, the displacement detection assembly includes a connecting block, the connecting block is connected to a mounting plate located on its side, the mounting plate is connected to the connecting block in a height-adjustable manner, and a distance measuring sensor is arranged on one side of the mounting plate facing the pressing and pressure detection assembly.

[0018] Preferably, the distance measuring sensor is a laser displacement sensor.

[0019] Preferably, the control assembly includes a gas circuit system connected to the force applying device of the main shaft force applicator pressure detection assembly, and the gas circuit system includes a foot valve for controlling the on / off of the pipeline of the gas circuit system.

[0020] Preferably, a manual pressure regulating valve is further arranged on the pipeline of the gas circuit system.

[0021] The advantages of the technical solution of the present utility model are mainly reflected in:

[0022] After the main shaft is fixed by using the main shaft fixing assembly of the present utility model, the weighing sensor is driven by the force applying device to perform jacking and at the same time determine the applied pressure. It only needs to control the action of the force applying device, which is convenient to operate. At the same time, the present utility model uses a distance measuring sensor to perform deformation detection, and can have higher detection accuracy. Especially when a laser displacement sensor is used, its detection accuracy can reach ±0.05 microns, and the detection accuracy is greatly improved.

[0023] The main shaft fixing assembly of the present utility model can conveniently adjust the position of the main shaft, and at the same time can effectively keep the main shaft and the weighing sensor concentric by adjusting the position of the force applying device, thereby effectively ensuring the accuracy of the test. At the same time, through the shape design of the load button of the weighing sensor, it can ensure to the greatest extent that the force pressing on the main shaft is in the vertical direction, which is beneficial to ensuring the accuracy of the test.

[0024] The utility model adopts a foot valve to control the action of the force applying device, which can effectively reduce the operation difficulty. At the same time, the manual pressure regulating valve can be used to adjust the applied pressure, which can effectively ensure that the pressure applied in each test is consistent. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a perspective view of the detection device of the utility model;

[0026] Figure 2 is a partial schematic view of the detection device of the utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] The purpose, advantages and features of the utility model will be illustrated and explained by the non-restrictive description of the preferred embodiments below. These embodiments are only typical examples of applying the technical solution of the utility model, and all technical solutions formed by equivalent replacement or equivalent transformation fall within the scope of protection required by the utility model.

[0028] In the description of the solution, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of description and simplification of the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0029] The following describes the spindle axial static rigidity detection device with an air bearing disclosed by the utility model in conjunction with the drawings. As shown in the Figure 1 drawings, it includes a base 200, and the base 200 can be various feasible structures, such as a table. At the same time, feet or universal wheels are provided at the bottoms of the four legs of the base 200. The base 200 is provided with:

[0030] a spindle fixing assembly 300, which has a structure for fixing the spindle 100 at a predetermined position;

[0031] a pressure applying and pressure detecting assembly 400, which is arranged below the two carrier plates 310 of the spindle fixing assembly 300, and which has a force applying device 410 for applying a pressure coaxial with the axis of the spindle 100 at the lower end of the spindle 100 at a predetermined position and a pressure detecting device 420.

[0032] The spindle axial static rigidity detection device with an air bearing further includes:

[0033] A displacement detection component 500 is provided on the side of the spindle 100 at a predetermined position for detecting the displacement amount of the lower end of the spindle or a predetermined position below the spindle.

[0034] A control component 600 is connected to the pressing and pressure detection component and is used to control the operation of the pressing and pressure detection component 400.

[0035] A display device 700 is connected to the pressing and pressure detection component 400 and the displacement detection component 500, and is at least used to display the detection results.

[0036] During testing, the spindle 100 is fixed at the spindle fixing component 300 and the spindle 100 is coaxial with the pressure detection device 420 of the pressing and pressure detection component. The control component 600 is used to control the pressing and pressure detection component to apply pressure to the lower end of the spindle 100, and the displacement detection component 500 is used to detect the displacement amount of the lower end of the spindle 100. The axial static rigidity of the spindle 100 is calculated based on the pressure and the displacement amount, specifically by dividing the pressure by the displacement amount.

[0037] As shown in the appendix Figure 1 The spindle fixing component 300 includes two fixing frames 320 arranged with a gap. The two fixing frames 320 include carrier plates 310 arranged with a gap for supporting the spindle 100, and pressing mechanisms 330 are respectively arranged on the two carrier plates 310. The fixing frame 320 includes a bracket and a carrier plate 310 arranged at the top of the bracket. The carrier plate 310 and the L-shaped plate of the bracket are in a Z shape, and a number of reinforcing plates are arranged between the two plate members of the L-shaped plate and between the carrier plate 310 and the vertical plate of the L-shaped plate. The pressing mechanism 330 includes an L-shaped pressing block 331. A perforation is formed on the pressing block 331, and a threaded hole corresponding to the perforation is arranged on the carrier plate 310. When the air bearing of the spindle 100 is arranged between the two carrier plates 310, the position of the spindle 100 is moved to make the spindle 100 coaxial with the pressure detection device 420, and then the protruding part of the pressing block 331 is pressed on the top of the air bearing, and a bolt 332 is passed through the perforation and screwed into the threaded hole, so that the spindle 100 is tightly fixed at the carrier plate 310 through the pressing block 331.

[0038] At the same time, in order to facilitate the adjustment of the angle of the spindle 100, the carrier plate 310 is connected to the bracket of the fixing frame 320 by a set of set screws. By screwing the set screws at different positions, the inclination angle of the spindle 100 can be adjusted, so as to ensure that the axis of the spindle 100 extends along the vertical direction.

[0039] The force application device 410 can be a known device capable of generating linear motion, such as a cylinder, a hydraulic cylinder, an electric cylinder or other feasible devices. And, the telescopic rod of the force application device 410 extends in the vertical direction. The pressure detection device 420 is concentrically installed at the top of the telescopic rod of the force application device 410. A weighing sensor is provided at the top of the pressure detection device 420, and the weighing sensor is cylindrical, as shown in the appendix Figure 2 As shown, the top of the load button 421 of the weighing sensor is a plane, and a spherical surface is below the plane.

[0040] Furthermore, in order to facilitate the concentricity of the force application device 410 and the main shaft 100, the force application device 410 is arranged on a horizontal adjustment plate 430. The horizontal adjustment plate 430 is arranged on the base 200 so as to be adjustable in position along the distribution direction of the two brackets. Specifically, in the horizontal adjustment plate 430 and the base plate of the base 200, a strip-shaped hole extending along the distribution direction of the brackets is provided on one, and a through hole matching the strip-shaped hole is provided on the other. The horizontal adjustment plate 430 and the base plate are fastened by bolts and nuts passing through the strip-shaped hole and the through hole.

[0041] Furthermore, the displacement detection assembly 500 includes a connection block 510. The connection block 510 is connected above the air bearing of the main shaft 100. The connection block 510 is connected to a mounting plate 520 located on its side. The mounting plate 520 is connected to the connection block 510 in a height-adjustable manner, and the structure of its height adjustment can refer to the horizontal adjustment plate 430, which will not be elaborated here. A distance measuring sensor 530 located below the carrier plate 310 is provided on the side of the mounting plate 520 facing the pressure application and pressure detection assembly 400. The distance measuring sensor 530 is a laser displacement sensor. Of course, the distance measuring sensor can also be fixed on the base.

[0042] The control assembly 600 includes a gas circuit system connected to the force application device 410 of the force application and pressure detection assembly. The gas circuit system includes a foot valve 620 for controlling the on-off of the pipeline 610 of the gas circuit system. The foot valve 620 is arranged on the ground. At the same time, in order to facilitate the control of the pressure applied during the test, a manual pressure regulating valve 630 is also provided on the pipeline 610 of the gas circuit system. Further, the weighing sensor of the pressure application and pressure detection assembly 400 and the distance measuring sensor 530 of the displacement detection assembly 500 are connected to the display device 700.

[0043] There are still many implementation manners of the present utility model. All technical solutions formed by equivalent transformation or equivalent substitution fall within the protection scope of the present utility model.

Claims

1. The axial static stiffness detection equipment for a spindle with an air bearing, characterized in that: including a main shaft fixing component having a structure for fixing the main shaft at a predetermined position; a pressing and pressure detecting component disposed below two carrier plates of the main shaft fixing component, having a force applying device and a pressure detecting device for applying a pressure coaxial with the axis of the main shaft to the lower end of the main shaft at the predetermined position; a displacement detecting component disposed on the side of the main shaft at the predetermined position for detecting the displacement amount of the lower end of the main shaft or a predetermined position below the main shaft; a control component connected to the pressing and pressure detecting component for controlling the operation of the pressing and pressure detecting component; a display device connected to the pressing and pressure detecting component and the displacement detecting component for at least displaying the detection result.

2. The axial static rigidity detection device for the spindle with an air bearing according to claim 1, characterized in that: The main shaft fixing component includes two fixing frames disposed with a gap therebetween. The two fixing frames include carrier plates disposed with a gap therebetween for supporting the main shaft, and pressing mechanisms are detachably disposed on the two carrier plates respectively.

3. The axial static rigidity detection device of the spindle with an air bearing according to claim 2, characterized in that: The carrier plate is connected to the bracket of the fixing frame by a set of set screws.

4. The axial static rigidity detection device for the spindle with an air bearing according to claim 1, characterized in that: The pressure detecting device is a load cell.

5. The axial static rigidity detection device for the spindle with an air bearing according to claim 4, characterized in that: The top of the load button of the load cell is a plane, and a spherical surface is below the plane.

6. The axial static rigidity detection device for the spindle with an air bearing according to claim 4, characterized in that: The force applying device is disposed on a horizontal adjusting plate, and the horizontal adjusting plate is disposed on the base so as to be adjustable in position along the distribution direction of the two brackets.

7. The axial static rigidity detection device for the spindle with an air bearing according to claim 1, characterized in that: The displacement detecting component includes a connecting block. The connecting block is connected to a mounting plate located at its side. The mounting plate is connected to the connecting block so as to be adjustable in height, and a distance measuring sensor is disposed on one side of the mounting plate facing the pressing and pressure detecting component.

8. The axial static rigidity detection device for the spindle with an air bearing according to claim 7, characterized in that: The distance measuring sensor is a laser displacement sensor.

9. The axial static rigidity detection device for the spindle with an air bearing according to any one of claims 1-8, characterized in that: The control component includes a gas circuit system connected to the force applying device of the main shaft force applying machine pressure detecting component. The gas circuit system includes a foot valve for controlling the on / off of the pipeline of the gas circuit system.

10. The axial static rigidity detection device for the spindle with an air bearing according to claim 9, characterized in that: A manual pressure regulating valve is further disposed on the pipeline of the gas circuit system.

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