Evaporation device special for film coating

Abstract

The utility model relates to the technical field of glass coating, and discloses a special evaporation device for coating, which comprises a preheater for preheating a precursor, an evaporator for evaporating and gasifying the precursor, a heater for heating process gas, a hot oil circulating system for providing a heat source and a plurality of storage tanks for storing different precursors, the storage tanks are respectively communicated with the preheater, the preheater and the heater are respectively communicated with the evaporator, the evaporator is connected with the coating device, and the hot oil circulating system is respectively connected with the preheater and the evaporator. According to the special evaporation device for glass coating, the evaporation efficiency and the evaporation effect of a precursor are effectively improved, the hot oil circulating system serves as a heat source, stable heat supply of the evaporation device is guaranteed, evaporation operation of the multi-component precursor can be carried out at the same time through the arrangement of the multiple storage tanks, and the production efficiency is improved. And the use requirements of different coating processes are met, and the maintenance period and the service life of the evaporation device and the coating device are prolonged due to the arrangement of the four-way valve.

Description

Technical Field

[0001] The utility model relates to the technical field of glass coating, in particular to a special evaporation device for coating. Background Art

[0002] Online glass coating generally refers to guiding the mixed gas, mixed liquid, and powder of materials to the hot glass surface by a coater inside the tin bath or in the annealing furnace, so that the materials react on the hot glass surface to form a functional film layer, thereby forming coated glass with various functions. Online glass coating is generally divided into chemical vapor deposition method, liquid spraying method, powder spraying method, etc. To meet different performance requirements, the structure and film materials of the film layer will vary, and the precursors used are also different. Precursors usually appear in solid and liquid forms. When in use, the solid and liquid precursors need to be vaporized into gas by an evaporation device to meet the requirements of the coating process. At the same time, most precursors have strong corrosiveness and toxicity, and leakage of precursors and precursor vapors should be avoided as much as possible during use.

[0003] Currently, most of the evaporation devices used for glass coating are those used in the distillation process of the chemical industry. There are few special evaporation devices for the glass coating process in the existing technology, resulting in the evaporation device not being able to adapt well to the evaporation of a wide variety of precursors, and the evaporation efficiency and effect of the precursors need to be further improved.

[0004] Based on this, developing a special evaporation device for coating and applying it to actual production is an urgent problem to be solved currently. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a special evaporation device for coating aiming at the above problems, so as to solve the problems of poor applicability of the evaporation device used in the current glass coating process, inability to adapt well to the evaporation of various precursors, and poor evaporation efficiency and evaporation effect of the precursors.

[0006] To solve the above technical problems, the technical solution adopted by the utility model is as follows:

[0007] A special evaporation device for coating includes a preheater for preheating the precursor, an evaporator for evaporating and gasifying the precursor, a heater for heating the process gas, a hot oil circulation system for providing heat source, and several storage tanks for storing different precursors. The several storage tanks are respectively connected to the preheater, the preheater and the heater are respectively connected to the evaporator, the evaporator is connected to the coater, and the hot oil circulation system is respectively connected to the preheater and the evaporator.

[0008] Preferably, the preheater includes a shell, and a preheating coil for conveying the precursor is arranged inside the shell. The preheating coil is spiral, and an oil inlet and an oil return port for connecting the hot oil circulation system are arranged on the shell.

[0009] Preferably, the oil inlet is located at a lower position of the housing, and the oil return port is located at an upper position of the housing.

[0010] Preferably, the evaporator includes a cylinder body, upper and lower ends of the cylinder body are respectively connected with an upper cover and a lower cover, a plurality of evaporation tubes for evaporating and gasifying the precursor are arranged in the cylinder body, the bottom ends of the evaporation tubes are communicated with a heater through an air inlet pipe, the top ends of the evaporation tubes are communicated with a preheater through a feed pipe, and the cylinder body is communicated with a hot oil circulation system.

[0011] Preferably, the air inlet pipe is connected to the evaporation tubes through a gas distributor, the gas distributor is a plate-like structure fixedly connected to the evaporation tubes, distribution holes corresponding to the evaporation tubes are formed in the plate-like structure, a gas deflector is further arranged at the end of the air inlet pipe, the gas deflector is a hollow hemispherical structure, an air inlet hole for communicating with the air inlet pipe is formed in the center of the bottom plate of the gas deflector, and a plurality of air outlet holes are uniformly distributed on the bottom plate.

[0012] Preferably, the feed pipe supplies the preheated precursor into each evaporation tube through a material distributor, the material distributor is suspended and installed at the upper end of the evaporation tubes, the material distributor includes a distribution plate for precursor distribution, discharge ports corresponding to the evaporation tubes are formed in the distribution plate, a collecting hopper for collecting the precursor is arranged on the distribution plate, and material distribution grooves respectively communicating the collecting hopper and the discharge ports are formed in the distribution plate.

[0013] Preferably, Pall rings are filled in the evaporation tubes, the Pall rings are made of a plate, the plate is folded to form an included angle of 40-50°, and through holes are densely arranged at intervals on the plate.

[0014] Preferably, the upper cover is a sandwich structure with a heating cavity, and the heating cavity is communicated with the hot oil circulation system.

[0015] Preferably, an air outlet pipeline is connected to the upper cover, the air outlet pipeline is connected to a coating device through a four-way valve, and the four-way valve is further respectively communicated with a compensation pipeline for supplying compensation gas and a waste discharge pipeline for waste gas treatment and collection.

[0016] Preferably, the evaporation device further includes a measuring instrument, the measuring instrument includes a mass flowmeter for precursor measurement and an orifice flowmeter for process gas measurement.

[0017] The beneficial effects of the present utility model are as follows:

[0018] The utility model provides a special evaporation device for glass coating. By providing a preheater and an evaporator to preheat the precursor and process gas respectively, the evaporation efficiency and evaporation effect of the precursor are effectively improved. The hot oil circulation system serves as a heat source to ensure stable heat supply to the evaporation device. The provision of multiple storage tanks allows for simultaneous evaporation of multiple component precursors, meeting the requirements of different coating processes and improving the applicability of the evaporation device. The provision of a gas distributor and a gas diverter ensures the uniformity of the process gas and stabilizes the gas supply pressure. At the same time, the flow field of the process gas is evenly distributed, so that the pressure and concentration of the process gas entering each evaporation tube are consistent, ensuring the evaporation effect of the precursor. The provision of a material distributor improves the distribution accuracy of the precursor and ensures the evaporation and gasification effect. The provision of a four-way valve extends the maintenance period and service life of the evaporation device and the coating device, ensuring the stability of the coating process. The exhaust pipeline effectively recovers and treats toxic and harmful gases, meets emission standards, and is more environmentally friendly. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0020] Figure 1 It is a structural diagram of the present utility model.

[0021] Figure 2 It is a structural schematic diagram of the evaporator in this utility model.

[0022] Figure 3 for Figure 2 Schematic diagram of the structure of the gas diverter from above.

[0023] Figure 4 for Figure 2 Schematic diagram of the top view of the material distributor.

[0024] Figure 5 for Figure 2 Schematic diagram of the structure of the ball ring.

[0025] Figure 6 for Figure 5 Left view of .

[0026] In the figure: 10 - preheater; 11 - housing; 12 - preheating coil; 13 - oil inlet; 14 - oil return port; 15 - purging gas source; 20 - evaporator; 21 - cylinder body; 22 - upper cover; 221 - heating cavity; 222 - gas outlet pipeline; 223 - four-way valve; 224 - compensation pipeline; 225 - waste discharge pipeline; 23 - lower cover; 231 - sewage discharge valve; 24 - evaporation tube bundle; 241 - Pall ring; 242 - through hole; 25 - intake pipe; 251 - gas distributor; 252 - distribution hole; 253 - gas deflector; 254 - intake hole; 255 - outlet hole; 256 - bottom plate; 26 - material distributor; 261 - distribution plate; 262 - discharge port; 263 - hopper; 264 - material distribution groove; 27 - feed pipe; 30 - heater; 40 - hot oil circulation system; 50 - coater; 60 - storage tank; 70 - process gas source; 81 - mass flow meter; 82 - orifice flow meter.

[0027] The direction of fluid flow is shown by the arrows in the figure. Specific embodiments

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0029] As Figures 1-6 shown, a special evaporation device for coating includes a preheater 10 for preheating the precursor, an evaporator 20 for evaporating and gasifying the precursor, a heater 30 for heating the process gas, a hot oil circulation system 40 for providing heat source, and a number of storage tanks 60 for storing different precursors. The number of storage tanks 60 are respectively connected to the preheater, the preheater 10 and the heater 30 are respectively connected to the evaporator 20, and the evaporator 20 is connected to the coater 50. The mixed process gas formed by the gasified precursor and the process gas is supplied into the coater 50, and then the glass coating operation can be performed. The hot oil circulation system 40 is respectively connected to the preheater 10 and the evaporator 20 to circulate and supply heat energy to the preheater 10 and the evaporator 20. When in use, the hot oil circulation system 40 is started to supply heat energy to the preheater 10 and the evaporator 20. The precursor is introduced from the storage tank 60 into the preheater 10 for preheating in advance, which is beneficial to the efficient gasification of the precursor after entering the evaporator 20. The process gas composed of nitrogen, air, oxygen, etc. is supplied into the heater 30 by the process gas source 70 for heating. The process gas heated to a predetermined temperature enters the evaporator 20 to be mixed with the precursor to form a mixed process gas, completing the evaporation and gasification operation of the precursor.

[0030] This embodiment provides a special evaporation device for glass coating. By setting a preheater 10 and an evaporator 20 to heat the precursor and process gas in advance respectively, the evaporation efficiency and evaporation effect of the precursor are effectively improved; the hot oil circulation system 40 is used as a heat source to ensure the stable heat supply of the evaporation device; the setting of multiple storage tanks 60 enables the evaporation operation of multi-component precursors simultaneously, meeting the usage requirements of different coating processes.

[0031] Preferably, in order to simplify the device configuration, in this embodiment, the heater 30 adopts an electric heating method to avoid problems such as complex pipeline layout and inconvenient maintenance caused by using the hot oil circulation system 40 for heating.

[0032] Preferably, as Figure 1 shown, the preheater 10 includes a housing 11. Inside the housing 11, there is a preheating coil 12 for transporting the precursor. The preheating coil 12 is spirally arranged inside the housing 11 to increase the preheating area of the preheating coil 12 and improve the preheating efficiency of the precursor. An oil inlet 13 and an oil return port 14 communicating with the hot oil circulation system 40 are provided on the housing 11. The hot oil of the hot oil circulation system 40 is introduced into the housing 11 through the oil inlet 13 to heat the preheating coil 12, and the hot oil after heating flows back to the hot oil circulation system 40 through the oil return port 14 to realize the preheating of the precursor in advance.

[0033] Preferably, the oil inlet 13 is located at a lower position of the housing 11, and the oil return port 14 is located at an upper position of the housing eleven, so that the hot oil supplied by the hot oil circulation system 40 circulates in the housing 11 in a direction of flowing in from the bottom and out from the top, in order to conform to the flowing direction of the precursor in the preheating coil 12 of flowing in from the bottom and out from the top, ensuring the preheating efficiency.

[0034] As a preferred embodiment, as Figures 1-2 shown, the evaporator 20 includes a cylinder body 21. The upper and lower ends of the cylinder body 21 are respectively connected with an upper cover 22 and a lower cover 23. Inside the cylinder body 21, there are several evaporation tubes 24 for evaporating and gasifying the precursor. The bottom end of the evaporation tubes 24 is connected to the heater 30 through an inlet pipe 25 to collect the process gas supplied by the heater 30. The top end of the evaporation tubes 24 is connected to the preheater 10 through a feed pipe 27 to collect the preheated liquid precursor and evenly distribute it to each evaporation tube 24 for evaporation and gasification, and mix with the process gas in the evaporation tubes 24 to form a mixed process gas for supplying to the coater 50. The cylinder body 21 is connected to the hot oil circulation system 40 to supply heat energy to the evaporation tubes 24.

[0035] Preferably, as Figures 1-3As described above, the intake pipe 25 is connected to the evaporation tube bank 24 through a gas distributor 251. The gas distributor 251 is a plate-like structure fixedly connected to the evaporation tube bank 24. Distribution holes 252 are provided in the plate-like structure corresponding to the evaporation tube bank 24. The process gas entering the cylinder body 21 enters each evaporation tube 24 through the distribution holes 252. Further, a gas deflector 253 is provided at the end of the intake pipe 25 for mixing and equalizing the process gas. The gas deflector 253 is a hollow hemispherical structure. An intake hole 254 for connecting the intake pipe 25 is provided at the center of the bottom plate 256 of the gas deflector 253. A number of outlet holes 255 are evenly distributed on the bottom plate 256. During use, the process gas entering the cylinder body 21 from the intake pipe 25 enters the gas deflector 253 through the intake hole 254, is fully mixed and pressure-stabilized in the hollow chamber of the gas deflector 253, and is stably and evenly discharged from the gas deflector 253 through the downwardly provided outlet holes 255. The process gas discharged from the gas deflector 253 rises stably and finally enters each evaporation tube 24 through the distribution holes 252 of the gas distributor 251. In this embodiment, the settings of the gas distributor 251 and the gas deflector 253 ensure the uniformity of the process gas and stabilize the gas supply pressure. At the same time, the flow field of the process gas is evenly distributed, so that the pressure and concentration of the process gas entering each evaporation tube 24 tend to be consistent, so as to ensure the evaporation effect of the precursor.

[0036] Preferably, as Figure 2 , 4 shown, the feed pipe 27 supplies the preheated precursor into each evaporation tube 24 through a material distributor 26 for evaporation and gasification of the precursor. The material distributor 26 is suspended and installed at the upper end of the evaporation tube bank 24. The material distributor 26 includes a distribution plate 261 for precursor distribution. Discharge ports 262 are provided in the distribution plate 261 corresponding to each evaporation tube 24. An aggregate hopper 263 for collecting the precursor is provided on the distribution plate 261. Material distribution grooves 264 respectively connecting the aggregate hopper 263 and the discharge ports 262 are also provided on the distribution plate 261. During use, the preheated liquid precursor is supplied into the aggregate hopper 263 of the material distributor 26 through the feed pipe 27, is split into corresponding discharge ports 262 through a plurality of material distribution grooves 264, and finally enters each evaporation tube 24 through the discharge ports 262 for evaporation and gasification, and is fully mixed with the process gas supplied from bottom to top to form a mixed process gas. The material distributor 26 needs to be accurately leveled during installation to ensure that the precursor flow rates flowing through each material distribution groove 264 and entering the evaporation tube 24 are the same. The setting of the material distributor 26 improves the distribution accuracy of the precursor and ensures the evaporation and gasification effect.

[0037] Preferably, as Figure 2 , 5As shown in Fig. 6, the evaporation tube 24 is filled with Pall rings 241 to increase the evaporation area and improve the evaporation efficiency. The Pall rings 241 are made of a plate with a length of 10 - 30 mm, a width of 5 - 15 mm, and a thickness of 0.1 - 0.3 mm, and the plate is folded to form an angle of 40 - 50°. Through holes 242 with a diameter of 0.1 - 0.3 mm are densely arranged on the plate at intervals of 1 - 2 mm. The material of the Pall rings 241 is preferably 316L stainless steel or Hastelloy. The Pall rings 241 in this embodiment are convenient to obtain materials, simple to manufacture, and have a remarkable application effect, greatly improving the evaporation efficiency of the precursor.

[0038] Preferably, as Figure 2 shown, the upper cover 22 is a sandwich structure with a heating cavity 221. The heating cavity 221 is connected to the hot oil circulation system 40 to heat the upper cover 22, so as to play a role in keeping the mixed process gas warm and avoiding the influence of temperature on the properties of the mixed process gas.

[0039] An air outlet pipe 222 is connected to the upper cover 22 for outputting the mixed process gas. The air outlet pipe 222 is connected to the coater 50 through a four-way valve 223. The four-way valve 223 is also respectively connected to a compensation pipe 224 for supplying compensation gas and a waste discharge pipe 225 for waste gas treatment and collection. During normal coating operation, the four-way valve 223 is switched to the coating position. At this time, the mixed process gas supplied by the air outlet pipe 222 is supplied to the coater 50 through the four-way valve 223 to perform the coating operation, and the compensation gas supplied by the compensation pipe 224 is discharged to the waste discharge pipe 225. During non-coating operation, the four-way valve 223 is switched to the compensation position. At this time, the compensation gas is supplied into the coater 50 to empty the residual mixed process gas in the coater 50, avoiding corrosion of the coater 50, or generation of deposition and colloid, and at the same time avoiding the backflow of high-temperature gas in the tin bath. At this time, the mixed process gas is discharged to the waste discharge pipe 225 for recovery and treatment. In this embodiment, the setting of the four-way valve 223 extends the maintenance period and service life of the evaporation device and the coater 50, ensuring the stability of the coating process. The waste discharge pipe 225 effectively recovers and treats toxic and harmful gases and discharges them up to standard, being more friendly to the environment.

[0040] Preferably, a sewage discharge valve 231 is provided at the bottom of the lower cover 23.

[0041] Preferably, as Figure 1 shown, a purge gas source 15 is connected to the inlet end of the preheater 10. After the coating is completed, the purge gas source 15 supplies nitrogen to the preheater 10 and the evaporator 20 in sequence to empty the residual precursor. The nitrogen carrying the precursor is finally recovered and treated through the waste discharge pipe 225, further extending the maintenance period and service life of the evaporation device.

[0042] Preferably, the evaporation device further includes a metering instrument for precisely metering the precursor and process gas. The metering instrument includes a mass flowmeter 81 for metering the precursor, and the mass flowmeter 81 is preferably a Coriolis flowmeter; the metering instrument further includes an orifice flowmeter 82 for metering the process gas.

[0043] Preferably, each exposed pipeline in the present utility model is provided with a heat preservation structure to reduce heat dissipation, maintain process stability, and achieve the purpose of energy conservation and environmental protection. The heat preservation structure can be a heat preservation layer wrapped outside the pipeline, or a heat tracing tape wound on the outer wall of the pipeline.

[0044] The specific embodiments of the present utility model disclosed above are only examples, but the present utility model is not limited thereto. For those of ordinary skill in the art, any modifications made without departing from the principle of the present utility model should be regarded as falling within the protection scope of the present utility model.

Claims

1. An evaporation device dedicated for coating, characterized in that: It includes a preheater (10) for preheating the precursor, an evaporator (20) for evaporating and gasifying the precursor, a heater (30) for heating the process gas, a hot oil circulation system (40) for providing a heat source, and several storage tanks (60) for storing different precursors. The several storage tanks (60) are respectively connected to the preheater (10), the preheater (10) and the heater (30) are respectively connected to the evaporator (20), the evaporator (20) is connected to a coating machine (50), and the hot oil circulation system (40) is respectively connected to the preheater (10) and the evaporator (20).

2. The evaporation device for coating special use according to claim 1, characterized in that: The preheater (10) includes a housing (11), and a preheating coil (12) for conveying the precursor is arranged in the housing (11). The preheating coil (12) is in a spiral shape, and an oil inlet (13) and an oil return port (14) for connecting the hot oil circulation system (40) are arranged on the housing (11).

3. The evaporation device for coating special use according to claim 2, characterized in that: The oil inlet (13) is located at a lower position of the housing (11), and the oil return port (14) is located at an upper position of the housing (11).

4. The evaporation device for coating special use according to claim 1, characterized in that: The evaporator (20) includes a cylinder body (21), an upper cover (22) and a lower cover (23) are respectively connected to the upper and lower ends of the cylinder body (21), and several evaporation tubes (24) for evaporating and gasifying the precursor are arranged in the cylinder body (21). The bottom end of the evaporation tube (24) is connected to the heater (30) through an air inlet pipe (25), the top end of the evaporation tube (24) is connected to the preheater (10) through a feed pipe (27), and the cylinder body (21) is connected to the hot oil circulation system (40).

5. The evaporation device for special coating according to claim 4, characterized in that: The air inlet pipe (25) is connected to the evaporation tube (24) through a gas distributor (251). The gas distributor (251) is a plate-like structure fixedly connected to the evaporation tube (24). Distribution holes (252) corresponding to the evaporation tubes (24) are opened on the plate-like structure. A gas deflector (253) is also arranged at the end of the air inlet pipe (25). The gas deflector (253) is a hollow hemispherical structure. An air inlet hole (254) for connecting the air inlet pipe (25) is opened at the center of the bottom plate (256) of the gas deflector (253), and several air outlet holes (255) are evenly distributed on the bottom plate (256).

6. The evaporation device for coating special use according to claim 4, characterized in that: The feed pipe (27) feeds the preheated precursor into each evaporation tube (24) through a material distributor (26). The material distributor (26) is suspended and installed at the upper end of the evaporation tube (24). The material distributor (26) includes a distribution plate (261) for precursor distribution. Discharge ports (262) corresponding to each evaporation tube (24) are opened on the distribution plate (261). An aggregate hopper (263) for collecting the precursor is arranged on the distribution plate (261). Material distribution grooves (264) respectively connecting the aggregate hopper (263) and the discharge ports (262) are also opened on the distribution plate (261).

7. The evaporation device for coating special use according to claim 4, characterized in that: Baur rings (241) are filled in the evaporation tubes (24). The Baur rings (241) are made of a plate, and the plate is folded in half to form an angle of 40 - 50°. Through holes (242) are densely arranged at intervals on the plate.

8. The evaporation device for coating special use according to claim 4, characterized in that: The upper cover (22) is a sandwich structure with a heating cavity (221), and the heating cavity (221) is connected to the hot oil circulation system (40).

9. The evaporation device for coating special use according to claim 4, characterized in that: An air outlet pipeline (222) is connected to the upper cover (22). The air outlet pipeline (222) is connected to a coating device (50) through a four-way valve (223). The four-way valve (223) is also respectively connected to a compensation pipeline (224) for supplying compensation gas and a waste discharge pipeline (225) for waste gas treatment and collection.

10. The evaporation device for special coating according to claim 1, characterized in that: The evaporation device further includes a metering instrument. The metering instrument includes a mass flowmeter (81) for precursor metering and an orifice flowmeter (82) for process gas metering.

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