Micro-arc oxidation device and semiconductor film preparation system

Abstract

The utility model discloses a micro-arc oxidation device and a semiconductor film preparation system, and the micro-arc oxidation device comprises an electrolytic tank, a pulse power supply, a monitoring module and a controller. The electrolytic tank is provided with a stirrer and an ultrasonic generator, and a constant-temperature cooling module is mounted on the side wall of the electrolytic tank; the pulsed power supply is mounted on one side of the electrolytic tank; the cathode of the pulsed power supply is connected with the electrolytic tank; the monitoring module comprises a conductivity probe, a photometer probe, a conductivity meter and an ultraviolet spectrometer; the controller is electrically connected with the constant-temperature cooling module and the monitoring module. The change of solute in the electrolyte is monitored through the ultraviolet spectrograph and the conductivity meter, accurate control over the concentration of the electrolyte and the nano-particles in the electrolyte is achieved, reaction conditions and reaction parameters can be automatically detected and regulated, accurate regulation and doping of the nano-particles in the semiconductor film growth process are achieved, and the yield of the semiconductor film is improved. The operation is simple and convenient, the controllability is strong, and the yield is high.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor thin films, and particularly relates to a micro-arc oxidation device and a semiconductor thin film preparation system. Background Art

[0002] In the preparation process of semiconductor sensors, doping and modifying the surface of the original transition metal oxide semiconductor with metal elements can further improve the sensing performance. Traditional doping methods such as ion implantation and chemical synthesis have high requirements for cost and process. The micro-arc oxidation method uses high voltage and high-temperature plasma discharge to in-situ grow an oxide film on the metal surface; by adding transition metal nanoparticles to the electrolyte, nanoparticle doping can be achieved while the film is growing, and transient high-temperature sintering and phase transformation can be achieved during the high-temperature plasma discharge process in the micro-arc oxidation process.

[0003] Existing micro-arc oxidation devices do not perform real-time monitoring and control of process parameters and reaction conditions, and have poor controllability and repeatability; during the micro-arc oxidation reaction process, parameters such as the electrolyte composition concentration, nanoparticle composition, and solution temperature change dynamically, and these will all affect the reaction process and reaction rate, affecting the composition of the finally formed semiconductor thin film, resulting in unstable film composition, low thickness uniformity, large physical property differences, and a high defective product rate of the produced semiconductor sensors. Summary of the Utility Model

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a micro-arc oxidation device and a semiconductor thin film preparation system, which can precisely control the micro-arc oxidation reaction, provide more stable reaction conditions, and are beneficial to the stable progress of nanoparticle doping and semiconductor thin film growth.

[0005] On the one hand, an embodiment of the utility model provides a micro-arc oxidation device, including an electrolytic cell, a pulse power supply, a monitoring module, and a controller. The electrolytic cell is provided with a stirrer and an ultrasonic generator. The stirrer is located in the middle of the electrolytic cell, the ultrasonic generator is arranged at the bottom of the electrolytic cell, and a constant temperature cooling module is installed on the side wall of the electrolytic cell; the pulse power supply is installed on one side of the electrolytic cell, and the negative electrode of the pulse power supply is connected to the electrolytic cell; the monitoring module includes a conductivity probe, a photometer probe, a conductivity meter, and an ultraviolet spectrometer. The conductivity probe is connected to the conductivity meter, the photometer probe is connected to the ultraviolet spectrometer, and the pulse power supply is connected to the electrolytic cell through a wire to form a discharge path; the controller is electrically connected to the constant temperature cooling module and the monitoring module respectively.

[0006] The embodiment of the utility model has at least the following beneficial effects:

[0007] The micro-arc oxidation device provided by the present utility model includes an electrolytic cell, a pulse power supply, a monitoring module, and a controller. The monitoring module includes a conductivity probe, a photometer probe, a conductivity meter, and an ultraviolet spectrometer. By monitoring the changes of solutes in the electrolyte through the ultraviolet spectrometer and the conductivity meter, precise control of the concentrations of the electrolyte and nanoparticles in the electrolyte can be achieved, and the reaction conditions and reaction parameters can be automatically detected and regulated, thereby reducing the differences caused by the difficult control of reaction conditions, realizing precise regulation and doping of nanoparticles during the growth process of semiconductor thin films, ensuring the consistency of the composition structure and performance of the prepared semiconductor thin films, being simple to operate, having strong controllability and repeatability, improving the yield rate and preparation efficiency.

[0008] According to some embodiments of the present utility model, a first sampler is installed above the electrolytic cell, and the first sampler is used to add nanoparticles into the electrolytic cell.

[0009] According to some embodiments of the present utility model, a second sampler is installed above the electrolytic cell, and the second sampler is used to add electrolyte into the electrolytic cell.

[0010] According to some embodiments of the present utility model, the electrolytic cell is provided with a water inlet valve, and the water inlet valve is installed at the top of the electrolytic cell.

[0011] According to some embodiments of the present utility model, the electrolytic cell is provided with a liquid level gauge, the liquid level gauge is arranged on the side wall of the electrolytic cell, and the liquid level gauge is used to detect the liquid position in the electrolytic cell in real time.

[0012] According to some embodiments of the present utility model, the pulse power supply is a DC pulse power supply.

[0013] According to some embodiments of the present utility model, the electrolytic cell is of a barrel-shaped structure.

[0014] According to some embodiments of the present utility model, the electrolytic cell is made of stainless steel material.

[0015] According to some embodiments of the present utility model, the monitoring module further includes an audible and visual alarm, and the audible and visual alarm is electrically connected to the controller.

[0016] On the other hand, an embodiment of the present utility model provides a semiconductor thin film preparation system, and the semiconductor thin film preparation system includes the above-mentioned micro-arc oxidation device.

[0017] The additional aspects and advantages of the present utility model will be partially given in the following description, partially become obvious from the following description, or be understood through the practice of the present utility model. Description of the Drawings

[0018] The above and / or additional aspects and advantages of the present utility model will become obvious and readily understandable from the description of the embodiments in conjunction with the following drawings, where:

[0019] Figure 1 is a schematic structural diagram of a micro-arc oxidation device according to an embodiment of the present utility model;

[0020] Figure 2 is a block diagram of a micro-arc oxidation device according to an embodiment of the present utility model;

[0021] Figure 3 is a schematic structural diagram of a semiconductor thin film preparation system according to an embodiment of the present utility model.

[0022] Reference numerals:

[0023] Electrolytic cell 100, stirrer 110, ultrasonic generator 120, constant temperature cooling module 130, water inlet valve 140, liquid level gauge 150, first sampler 160, second sampler 170, pulse power supply 200, monitoring module 300, conductivity probe 310, photometer probe 320, conductivity meter 330, ultraviolet spectrometer 340, acoustic-optic alarm 350, controller 400, semiconductor specimen 500, control terminal 600, control module 610, display module 620. Detailed Description of the Embodiment

[0024] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements with the same or similar functions throughout. The embodiments described by referring to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0025] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.

[0026] In the description of the present utility model, the meaning of "a number of" is one or more, the meaning of "a plurality of" is two or more, greater than, less than, exceeding, etc. are understood as not including the present number, and "above", "below", "within", etc. are understood as including the present number. If there is a description of "first", "second", etc., it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or the sequence relationship of the indicated technical features.

[0027] In the description of the present utility model, unless otherwise clearly defined, terms such as "set", "installed", "connected", and "linked" should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present utility model in combination with the specific content of the technical solution.

[0028] The technical solution of the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0029] Please refer to Figure 1 and Figure 2 , this embodiment discloses a micro-arc oxidation device, which includes an electrolytic cell 100, a pulse power supply 200, a monitoring module 300, and a controller 400. The electrolytic cell 100 is provided with a stirrer 110 and an ultrasonic generator 120. The stirrer 110 is located at the middle position of the electrolytic cell, and the ultrasonic generator 120 is arranged at the bottom of the electrolytic cell 100. A constant temperature cooling module 130 is installed on the side wall of the electrolytic cell 100; the pulse power supply 200 is installed on one side of the electrolytic cell 100, and the negative electrode of the pulse power supply 200 is connected to the electrolytic cell 100; the monitoring module 300 includes a conductivity probe 310, a photometer probe 320, a conductivity meter 330, and an ultraviolet spectrometer 340. The conductivity probe 310 is connected to the conductivity meter 330, and the photometer probe 320 is connected to the ultraviolet spectrometer 340. The pulse power supply 200 is connected to the electrolytic cell 100 through a wire to form a discharge path; the controller 400 is electrically connected to the constant temperature cooling module 130 and the monitoring module 300 respectively.

[0030] Please refer to Figure 1 , a first sampler 160 is installed above the electrolytic cell 100, and the first sampler 160 is used to add nanoparticles into the electrolytic cell. A second sampler 170 is installed above the electrolytic cell 100, and the second sampler 170 is used to add electrolytes into the electrolytic cell. The electrolyte includes sodium phosphate and potassium hydroxide, and the nanoparticles are niobium oxide nanoparticles. The controller 400 controls the first sampler 160 and the second sampler 170 to automatically add nanoparticles and electrolytes.

[0031] Please refer to Figure 1 , the electrolytic cell 100 is provided with a water inlet valve 140, and the water inlet valve 140 is installed at the top of the electrolytic cell 100. The electrolytic cell 100 is provided with a liquid level gauge 150, and the liquid level gauge 150 is arranged on the side wall of the electrolytic cell 100. The liquid level gauge is used to detect the liquid position in the electrolytic cell 100 in real time. According to the liquid level condition of the electrolytic cell 100, the water inlet valve 140, the first sampler 160, and the second sampler 170 are opened to supplement the electrolyte into the electrolytic cell 100.

[0032] Please refer to Figure 1 and Figure 2, the pulse power supply 200 is a DC pulse power supply. The DC pulse power supply can change the output waveform and power by adjusting parameters such as duty cycle and frequency, achieve precise control, and improve the load capacity.

[0033] Please refer to Figure 1 and Figure 2 , the electrolytic cell 100 is of a barrel structure. The electrolytic cell 100 is made of stainless steel material, which improves the load capacity and corrosion resistance and extends the service life.

[0034] Please refer to Figure 1 and Figure 2 , the monitoring module 300 further includes an audible and visual alarm 350, and the audible and visual alarm 350 is electrically connected to the controller 400. When replenishing the electrolyte in the electrolytic cell 100, if there is no water in the water inlet valve 140, the first sampler 160 cannot add nanoparticles, or the second sampler 170 cannot add electrolytes, etc., the audible and visual alarm 350 will give an audible and visual alarm to remind the operator.

[0035] Please refer to Figure 3 , this embodiment further discloses a semiconductor thin film preparation system, including a control terminal 600 and the above micro-arc oxidation device; the control terminal 600 includes a control module 610 and a display module 620, the control module 610 is electrically connected to the display module 620, and the control module 610 is communicatively connected to the controller 400. Input the micro-arc oxidation reaction parameters on the display module 620, and transmit them to the controller 400 through the control module 610, so as to remotely control the semiconductor thin film preparation process.

[0036] During use, pour the prepared electrolyte into the electrolytic cell, turn on the constant temperature cooling module 130, the ultrasonic generator 120 and the stirrer 110, connect the semiconductor specimen through a wire and immerse it in the electrolyte, the positive pole of the pulse power supply 200 is connected to the semiconductor specimen 500, and the negative pole of the pulse power supply 200 is connected to the electrolytic cell 100, thus forming a discharge path. Adjust the electrical parameters such as current, frequency, and duty cycle through the pulse power supply 200, set the ultraviolet-visible absorption peak intensity, conductivity, and liquid level control threshold in the electrolyte through the controller 400, and then turn on the power supply to carry out the micro-arc oxidation reaction, thereby completing the preparation of the nanoparticle-doped semiconductor thin film.

[0037] The micro-arc oxidation device and semiconductor thin film preparation system provided in this embodiment. The micro-arc oxidation device includes an electrolytic cell 100, a pulse power supply 200, a monitoring module 300, and a controller 400. The monitoring module 300 includes a conductivity probe 310, a photometer probe 320, a conductivity meter 330, and an ultraviolet spectrometer 340; by monitoring the changes of solutes in the electrolyte through the ultraviolet spectrometer 340 and the conductivity meter 330, precise control of the concentrations of electrolytes and nanoparticles in the electrolyte is achieved, and the reaction conditions and parameters can be automatically detected and regulated, thereby reducing the differences caused by the difficult control of reaction conditions, realizing precise regulation and doping of nanoparticles during the growth process of the semiconductor thin film, ensuring the consistency of the composition structure and performance of the prepared thin film, being simple to operate, having strong controllability and repeatability, improving the yield rate and preparation efficiency.

[0038] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art to which the present invention pertains, various changes can also be made without departing from the gist of the present invention.

Claims

1. A micro-arc oxidation device, characterized in that Comprising: An electrolytic cell (100), the electrolytic cell (100) being provided with a stirrer (110) and an ultrasonic generator (120), the stirrer (110) being located at the middle position of the electrolytic cell, the ultrasonic generator (120) being arranged at the bottom of the electrolytic cell (100), and a constant temperature cooling module (130) being installed on the side wall of the electrolytic cell (100); A pulse power supply (200), the pulse power supply (200) being installed on one side of the electrolytic cell (100), and the negative electrode of the pulse power supply (200) being connected to the electrolytic cell (100); A monitoring module (300), the monitoring module (300) including a conductivity probe (310), a photometer probe (320), a conductivity meter (330), and an ultraviolet spectrometer (340), the conductivity probe (310) being connected to the conductivity meter (330), the photometer probe (320) being connected to the ultraviolet spectrometer (340), and the pulse power supply (200) being connected to the electrolytic cell (100) through a wire to form a discharge path; A controller (400), the controller (400) being electrically connected to the constant temperature cooling module (130) and the monitoring module (300) respectively.

2. The micro-arc oxidation device according to claim 1, characterized in that, A first sampler (160) is installed above the electrolytic cell (100), and the first sampler (160) is used to add nanoparticles into the electrolytic cell.

3. The micro-arc oxidation device according to claim 2, characterized in that A second sampler (170) is installed above the electrolytic cell (100), and the second sampler (170) is used to add electrolytes into the electrolytic cell.

4. The micro-arc oxidation device according to claim 1, wherein, The electrolytic cell (100) is provided with a water inlet valve (140), and the water inlet valve (140) is installed at the top of the electrolytic cell (100).

5. The micro-arc oxidation device according to claim 1, characterized in that, The electrolytic cell (100) is provided with a liquid level gauge (150), the liquid level gauge (150) is arranged on the side wall of the electrolytic cell (100), and the liquid level gauge is used to detect the liquid position in the electrolytic cell (100) in real time.

6. The micro-arc oxidation device according to claim 1, characterized in that, The pulse power supply (200) is a DC pulse power supply.

7. The micro-arc oxidation device according to claim 1, characterized in that, The electrolytic cell (100) is of a barrel-shaped structure.

8. The micro-arc oxidation device according to claim 1, characterized in that, The electrolytic cell (100) is made of stainless steel material.

9. The micro-arc oxidation device according to claim 1, wherein, The monitoring module (300) further includes an audible and visual alarm (350), and the audible and visual alarm (350) is electrically connected to the controller (400).

10. A semiconductor thin film preparation system, characterized in that, The semiconductor thin film preparation system includes the micro-arc oxidation device according to any one of claims 1 to 9.

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