Locking device and positioning system for graphite boat
By designing a locking device for graphite boats, the first locking mechanism supports the side end of graphite boats and the second locking mechanism locks the nuts, the problems of deformation and loosening of the graphite boats are solved, and the protection and locking accuracy of the battery cells are improved.
Patent Information
- Application Number
- CN202422192961.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-06
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-09-06
AI Technical Summary
During long-term use of graphite boats, the boat leaves are prone to deform and the nuts are prone to loosening, resulting in damage to the battery cell.
A locking device including a first locking mechanism and a second locking mechanism is provided, and a side end of the graphite boat is supported by a first locking mechanism, and a second locking mechanism locks the nut to prevent deformation and loosening.
Effectively prevent graphite boat from deforming and loosening of nuts, avoid damage to the battery cell, improve locking accuracy and installation convenience.
Smart Images

Figure CN223181105U_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the technical field of photovoltaic module production equipment, and particularly relates to a locking device and a positioning system for a graphite boat. Background Art
[0002] The graphite boat is used as a carrier to carry silicon wafers. Generally, the graphite boat includes a plurality of boat leaves arranged in parallel and at intervals, and the plurality of boat leaves are locked by nuts.
[0003] In the prior art, during the long-term use of the graphite boat, the boat leaves are prone to deformation, and the nuts used to connect the boat leaves are prone to loosening, which may cause damage to the battery wafers. Summary of the Utility Model
[0004] The purpose of the embodiments of this application is to provide a locking device and a positioning system for a graphite boat.
[0005] According to the first aspect of the embodiments of this application, a locking device for a graphite boat is provided, including:
[0006] A first locking mechanism, the first locking mechanism includes a first driving component and a clamping component, the clamping component is connected to the driving end of the first driving component for supporting one side of the graphite boat;
[0007] At least one second locking mechanism, the second locking mechanism is arranged on the clamping component, the second locking mechanism includes a second driving component and a locking component, the locking component is connected to the driving end of the second driving component to lock the nut on the graphite boat through the locking component.
[0008] Optionally, the locking component includes a connecting rod and a locking seat, one end of the connecting rod is connected to the driving end of the second driving component, the other end of the connecting rod is slidably connected to the locking seat, an elastic member is arranged between the connecting rod and the locking seat, and the locking seat can move in the first direction through the elastic member.
[0009] Optionally, the second locking mechanism further includes a mounting member, the mounting member is connected to the clamping component;
[0010] A through hole is formed in the mounting member, the second driving component is installed on the mounting member, the locking component passes through the through hole, and the second driving component and the locking component are respectively located on both sides of the mounting member in the first direction.
[0011] Optionally, the clamping component includes a mounting plate and at least one clamping protrusion, the mounting plate includes a first end face and a second end face, the first end face and the second end face are respectively located on both sides of the mounting plate in the first direction, and the clamping protrusion is arranged on the first end face.
[0012] Optionally, the number of the clamping protrusions is two, and the two clamping protrusions are arranged at intervals in the second direction;
[0013] The first direction intersects with the second direction.
[0014] Optionally, the mounting plate is provided with a first groove, and the clamping protrusion is provided with a second groove, and the first groove and the second groove correspond to each other in the first direction;
[0015] The mounting member is arranged on the second end face, and the locking assembly can pass through the first groove and the second groove.
[0016] Optionally, the first locking mechanism further includes:
[0017] A bottom plate, on which a first sliding member is arranged;
[0018] A connecting member, which includes a first mounting end face and a second mounting end face. The first mounting end face is connected to the mounting plate, the second mounting end face is provided with a second sliding member, the second sliding member is slidably connected with the first sliding member in the first direction, and the connecting member is connected to the driving end of the first driving assembly.
[0019] Optionally, the first locking mechanism further includes a first limiting portion and a second limiting portion. The first limiting portion is arranged on the bottom plate, and the second limiting portion is arranged on the connecting member. The second limiting portion can abut against the first limiting portion to limit the movement of the connecting member in the first direction.
[0020] Optionally, the number of the second locking mechanisms is multiple.
[0021] According to the second aspect of the embodiments of the present application, a positioning system for a graphite boat is provided, which includes two locking devices for the graphite boat as described above. The two locking devices are arranged at intervals in the first direction, and a graphite boat is placed between the two locking devices, and the two sides of the graphite boat are clamped by the two locking devices.
[0022] One technical effect of the embodiments of the present application is that the side end of the graphite boat is supported by the first locking mechanism, and the nut on the graphite boat is locked by the second locking mechanism, so as to prevent the graphite boat from deforming and the nut from loosening, and further avoid damaging the battery wafers.
[0023] Through the following detailed description of the exemplary embodiments of the present application with reference to the accompanying drawings, other features and advantages of the present application will become clear. Description of the Drawings
[0024] The accompanying drawings incorporated in and forming a part of this specification illustrate embodiments of the present application and, together with the description thereof, serve to explain the principles of the present application.
[0025] Figure 1 It is a schematic structural diagram of the locking device in the embodiment of the present application;
[0026] Figure 2 It is a schematic structural diagram of the locking device in the embodiment of the present application;
[0027] Figure 3 It is a schematic structural diagram of the locking device in the embodiment of the present application;
[0028] Figure 4 It is a schematic structural diagram of the second locking mechanism in the embodiment of the present application;
[0029] Figure 5 It is a schematic structural diagram of the second locking mechanism in the embodiment of the present application;
[0030] Figure 6 It is a schematic structural diagram of the positioning system in the embodiment of the present application.
[0031] Explanation of reference numerals: Locking device 100; First locking mechanism 1; Clamping assembly 11; Mounting plate 111; First groove 1111; Clamping protrusion 112; Second groove 1121; First driving assembly 12; Bottom plate 13; Connecting piece 14; First mounting end face 141; Second mounting end face 142; First sliding piece 15; Second sliding piece 16; First limiting portion 18; Second limiting portion 19; Second locking mechanism 2; Locking assembly 21; Connecting rod 211; Locking seat 212; Second driving assembly 22; Mounting member 23; Through hole 231; Graphite boat 200; Nut 201. Detailed implementation manners
[0032] Now, various exemplary embodiments of the present application will be described in detail with reference to the accompanying drawings. It should be noted that: Unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and values set forth in these embodiments do not limit the scope of the present application.
[0033] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present application, its application, or its use.
[0034] Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be regarded as part of the specification.
[0035] In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Thus, other examples of the exemplary embodiments may have different values.
[0036] It should be noted that like reference numerals and letters denote like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
[0037] First, it should be noted that the first direction, the second direction, and the third direction mentioned in the embodiments of the present application refer to the directions marked in the attached Figure 1 and the attached Figure 6 figures. Among them, the first direction, the second direction, and the third direction intersect pairwise.
[0038] As Figures 1 - 5 shown, according to the first aspect of the embodiments of the present application, a locking device 100 for a graphite boat 200 is provided, including a first locking mechanism 1 and at least one second locking mechanism 2. The first locking mechanism 1 includes a first driving component 12 and a clamping component 11. The clamping component 11 is connected to the driving end of the first driving component 12 for supporting one side of the graphite boat 200. The second locking mechanism 2 is arranged on the clamping component 11. The second locking mechanism 2 includes a second driving component 22 and a locking component 21. The locking component 21 is connected to the driving end of the second driving component 22 to lock the nut 201 on the graphite boat 200 through the locking component 21.
[0039] The graphite boat 200 is a kind of carrier. Battery wafers are placed inside the graphite boat 200. When the battery wafers are placed inside the graphite boat 200, the battery wafers can be processed or transported. If the nut 201 on the graphite boat 200 becomes loose or the graphite boat 200 is deformed, the battery wafers located inside the graphite boat 200 will be damaged.
[0040] The embodiments of the present application provide a locking device 100 for a graphite boat 200. The locking device 100 can lock the side end of the graphite boat 200 and the nut 201. During the use of the graphite boat 200, damage to the battery wafers caused by deformation or loosening of the nut 201 can be avoided.
[0041] As Figures 1 - 3 shown, the locking device 100 includes a first locking mechanism 1 and at least one second locking mechanism 2.
[0042] Among them, the first locking mechanism 1 includes a first drive component 12 and a clamping component 11; the clamping component 11 is connected to the driving end of the first drive component 12, and the first drive component 12 can drive the clamping component 11 to move along the first direction. In fact, that is to say, the first drive component 12 can drive the clamping component 11 toward or away from the graphite boat 200. When the first drive component 12 drives the clamping component 11 toward the graphite boat 200, the clamping component 11 can collide with one side end of the graphite boat 200.
[0043] To further illustrate, the graphite boat 200 includes a plurality of boat blades arranged at intervals, and the gap between two adjacent boat blades is used to place battery cells. The plurality of boat blades are connected by nuts 201 , so there are one or more nuts 201 at both ends of the graphite boat 200 .
[0044] The second locking mechanism 2 is provided on the clamping assembly 11. When the first driving assembly 12 drives the clamping assembly 11 to approach the graphite boat 200, the second locking mechanism 2 will also approach the graphite boat 200. The second locking mechanism 2 corresponds to the position of the nut 201 on the graphite boat 200. The second locking mechanism 2 can lock the nut 201 on the graphite boat 200. During the use of the graphite boat 200, it can prevent the nut 201 from loosening and causing damage to the battery cell.
[0045] like Figure 4 and Figure 5 As shown, the second locking mechanism 2 includes a second drive assembly 22 and a locking assembly 21. The locking assembly 21 is connected to a driving end of the second drive assembly 22. The second drive assembly 22 can drive the locking assembly 21 to move in a first direction. In other words, the second drive assembly 22 can drive the locking assembly 21 toward or away from the graphite boat 200. When the second drive assembly 22 drives the locking assembly 21 toward the graphite boat 200, the locking assembly 21 can abut against the nut 201 on the graphite boat 200, thereby locking the nut 201 on the graphite boat 200 via the locking assembly 21.
[0046] To further illustrate, since the second locking mechanism 2 is disposed on the clamping assembly 11, the second locking mechanism 2 moves with the clamping assembly 11. If the locking assembly 21 were to abut the nut 201 on the graphite boat 200 solely by relying on the first drive assembly 12, the installation precision of the second locking mechanism 2 and the clamping assembly 11 would be high, making installation complex. Therefore, a second drive assembly 22 is provided, and the locking assembly 21 is connected to the drive end of the second drive assembly 22, so that the locking assembly 21 can be driven independently, thereby reducing the installation precision of the second locking mechanism 2 and the clamping assembly 11 and facilitating installation. Furthermore, the second drive assembly 22 allows the force applied by the locking assembly 21 to the nut 201 to be individually adjusted, thereby improving locking precision.
[0047] Therefore, for the locking device 100 for the graphite boat 200 provided in this application, the side end of the graphite boat 200 is supported by the first locking mechanism 1, and the nut 201 on the graphite boat 200 is locked by the second locking mechanism 2, so that the deformation of the graphite boat 200 and the loosening of the nut 201 can be prevented, and the damage to the battery wafers can be further avoided.
[0048] Among them, the first driving component 12 can adopt a linear motor, a hydraulic cylinder or an electric cylinder; the second driving component 22 can adopt a linear motor, a hydraulic cylinder or an electric cylinder.
[0049] In an optional implementation manner, the locking component 21 includes a connecting rod 211 and a locking seat 212. One end of the connecting rod 211 is connected to the driving end of the second driving component 22, the other end of the connecting rod 211 is slidably connected to the locking seat 212, an elastic member is arranged between the connecting rod 211 and the locking seat 212, and the locking seat 212 can move in the first direction through the elastic member.
[0050] As Figure 4 and Figure 5 shown, the locking component 21 includes a connecting rod 211, a locking seat 212 and an elastic member. Among them, one end of the connecting rod 211 is connected to the driving end of the second driving component 22, the other end of the connecting rod 211 is slidably connected to the locking seat 212, the locking seat 212 can move relative to the connecting rod 211 in the first direction, and an elastic member is arranged between the connecting rod 211 and the locking seat 212. Therefore, when the locking seat 212 moves in the first direction relative to the connecting rod 211 towards the direction close to the second driving component 22, the elastic member will be compressed. Therefore, when the locking seat 212 abuts against the nut 201, the locking member will compress the elastic member in the first direction, and the elastic member will provide a buffering effect for the locking seat 212, so that the contact between the locking seat 212 and the nut 201 is elastic, thereby avoiding the deformation of the graphite boat 200 caused by too large a force of the locking seat 212 on the nut 201.
[0051] Furthermore, the elastic member can be a helical spring or a leaf spring.
[0052] In an optional implementation manner, the second locking mechanism 2 further includes a mounting member 23, and the mounting member 23 is connected to the clamping component 11; a through hole 231 is provided on the mounting member 23, the second driving component 22 is mounted on the mounting member 23, the locking component 21 passes through the through hole 231, and the second driving component 22 and the locking component 21 are respectively located on both sides of the mounting member 23 in the first direction.
[0053] As Figure 1 、 Figure 4 and Figure 5As shown, the second locking mechanism 2 further includes a mounting member 23. The mounting member 23 is plate-shaped and has a through hole 231 formed therein. The second driving assembly 22 is detachably connected to the mounting member 23. The first driving assembly 12 is disposed on one side of the mounting member 23. The locking assembly 21 passes through the through hole 231. Therefore, the second driving assembly 22 and the locking assembly 21 are respectively located on both sides of the mounting member 23 in the first direction. On the one hand, it is convenient to install the second driving assembly 22, and on the other hand, the space occupied by the second locking mechanism 2 can be reduced.
[0054] Further, the mounting member 23 is detachably connected to the clamping assembly 11. When the second locking assembly 21 needs to be repaired or replaced, it is only necessary to remove the mounting member 23 from the clamping assembly 11, which is convenient for repair and replacement.
[0055] In an alternative embodiment, the clamping assembly 11 includes a mounting plate 111 and at least one clamping protrusion 112. The mounting plate 111 includes a first end face and a second end face. The first end face and the second end face are respectively located on both sides of the mounting plate 111 in the first direction. The clamping protrusion 112 is disposed on the first end face.
[0056] As Figures 1 - 3 shown, the clamping assembly 11 includes a mounting plate 111 and at least one clamping protrusion 112. Among them, the mounting plate 111 includes a first end face and a second end face. The first end face and the second end face are respectively located on opposite sides of the mounting plate 111 in the first direction. The clamping protrusion 112 is disposed on the first end face. That is to say, when the clamping assembly 11 approaches the graphite boat 200, the clamping protrusion 112 can directly contact the graphite boat 200. It can be avoided that the mounting plate 111 directly contacts the graphite boat 200. According to the position where the graphite boat 200 needs to be supported, the clamping protrusion 112 is disposed at the corresponding position of the mounting plate 111, so as to realize the support of the graphite boat 200 to prevent the graphite boat 200 from deforming, and it can also avoid the inconvenient contact position on the side end of the graphite boat 200.
[0057] In an alternative embodiment, the number of the clamping protrusions 112 is two, and the two clamping protrusions 112 are spaced apart along the second direction; the first direction and the second direction intersect.
[0058] As Figure 2As shown, the number of the clamping protrusions 112 is two. The two clamping protrusions 112 are arranged at intervals in the second direction. In the second direction, the two clamping protrusions 112 are located at both ends of the mounting plate 111. When the two clamping protrusions 112 contact the side end of the graphite boat 200, that is, in the height direction of the graphite boat 200, they are located above and below the side end of the graphite boat 200, so as to support the graphite boat 200 and avoid the holes in the middle position of the graphite boat 200 at the same time. By arranging the two clamping protrusions 112 at intervals in the second direction, the supporting effect is better.
[0059] In an alternative embodiment, the mounting plate 111 is provided with a first groove 1111, and the clamping protrusion 112 is provided with a second groove 1121. The first groove 1111 and the second groove 1121 correspond to each other in the first direction; the mounting member 23 is arranged on the second end face, and the locking assembly 21 can pass through the first groove 1111 and the second groove 1121.
[0060] As Figure 2 shown, the mounting plate 111 is provided with a first groove 1111, that is to say, the first groove 1111 penetrates through the first end face and the second end face; the clamping protrusion 112 is provided with a second groove 1121, and the second groove 1121 penetrates through the clamping protrusion 112 in the first direction. The positions of the first groove 1111 and the second groove 1121 correspond to each other; since the mounting member 23 is arranged on the second end face, the locking assembly 21 can pass through the first groove 1111 and the second groove 1121 to lock the nut 201 on the graphite boat 200.
[0061] In an alternative embodiment, the first locking mechanism 1 further includes a bottom plate 13 and a connecting member 14. A first sliding member 15 is arranged on the bottom plate 13; the connecting member 14 includes a first mounting end face 141 and a second mounting end face 142. The first mounting end face 141 is connected to the mounting plate 111, and a second sliding member 16 is arranged on the second mounting end face 142. The second sliding member 16 is slidably connected to the first sliding member 15 in the first direction, and the connecting member 14 is connected to the driving end of the first driving component 12.
[0062] As Figures 1 - 3As shown, the first locking mechanism 1 further includes a base plate 13 and a connecting member 14. Among them, the connecting member 14 includes a first mounting end face 141 and a second mounting end face 142. The first mounting end face 141 is connected to the mounting plate 111, and a second sliding member 16 is provided on the second mounting end face 142. A first sliding member 15 is provided on the base plate 13. The second sliding member 16 is slidably connected to the first sliding member 15 so that the connecting member 14 can move relative to the base plate 13 in the first direction. The connecting member 14 is connected to the driving end of the first driving assembly 12, so that the first driving assembly 12 can drive the clamping assembly 11 to move in the first direction. By providing the first sliding member 15 and the second sliding member 16, a guiding effect is provided for the movement of the clamping assembly 11, thereby improving the movement stability of the clamping assembly 11.
[0063] In a specific embodiment, the first sliding member 15 includes a first guide rail and a second guide rail. The first guide rail and the second guide rail are arranged at intervals in the third direction. The length direction of the first guide rail is the same as the first direction, and the length direction of the second guide rail is the same as the first direction. The second sliding member 16 includes a first slider and a second slider. The first slider and the second slider are arranged at intervals in the third direction. The first slider is slidably connected to the first guide rail, and the second slider is slidably connected to the second guide rail. In this embodiment, the first driving assembly 12 is arranged on the base plate 13 and is located between the first guide rail and the second guide rail. The driving end of the second driving assembly 22 is connected to the connecting member 14.
[0064] In another specific embodiment, the first sliding member 15 is a guide rail, and the second sliding member 16 is a slider. The slider is slidably connected to the guide rail.
[0065] As Figure 1 shown, in an alternative embodiment, the first locking mechanism 1 further includes a first limiting portion 18 and a second limiting portion 19. The first limiting portion 18 is provided on the base plate 13, and the second limiting portion 19 is provided on the connecting member 14. The second limiting portion 19 can abut against the first limiting portion 18 to limit the movement of the connecting member 14 in the first direction. When the driving assembly 12 drives the connecting member to move in the first direction and approach the graphite boat 200, when the second limiting portion 19 abuts against the first limiting portion 18, the movement of the connecting member 14 in the first direction can be restricted, thereby avoiding deformation of the graphite boat 200. Therefore, when the first limiting portion 18 abuts against the second limiting portion 19, it is the maximum distance for the connecting member 14 to move in the first direction. If it continues to move in the first direction, the graphite boat 200 will be damaged.
[0066] In an alternative embodiment, the number of the second locking mechanisms 2 is plural, and the plural second locking mechanisms 2 are all arranged on the clamping assembly 11 and are spaced apart from each other. One second locking mechanism 2 is used to lock one or a group of nuts 201. By providing the plural second locking mechanisms 2, the plural nuts 201 on the graphite boat 200 can be locked.
[0067] According to the second aspect of the embodiments of the present application, there is provided a positioning system for a graphite boat 200, which includes two of the above-mentioned locking devices 100 for the graphite boat 200. The two locking devices 100 are spaced apart along a first direction, and the graphite boat 200 is placed between the two locking devices 100. The two sides of the graphite boat 200 are clamped by the two locking devices.
[0068] As Figure 6 shown, the present application further provides a positioning system for a graphite boat 200. The positioning system includes two locking devices 100, which are spaced apart along a first direction. The graphite boat 200 is placed between the two locking devices 100. One of the locking devices 100 can abut against one side of the graphite boat 200, and the other locking device 100 can abut against the other side of the graphite boat 200. Therefore, the two locking devices 100 can clamp the graphite boat 200 on both sides thereof, so as to further prevent the graphite boat 200 from deforming and prevent the nuts 201 from loosening.
[0069] Although some specific embodiments of the present application have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for illustration and not for limiting the scope of the present application. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.
Claims
1. A locking device for a graphite boat, characterized in that, Comprising: A first locking mechanism (1), the first locking mechanism (1) includes a first driving component (12) and a clamping component (11), the clamping component (11) is connected to the driving end of the first driving component (12) for supporting one side of the graphite boat (200); At least one second locking mechanism (2), the second locking mechanism (2) is arranged on the clamping component (11), the second locking mechanism (2) includes a second driving component (22) and a locking component (21), the locking component (21) is connected to the driving end of the second driving component (22) to lock the nut (201) on the graphite boat (200) through the locking component (21).
2. The locking device for a graphite boat according to claim 1, wherein, The locking component (21) includes a connecting rod (211) and a locking seat (212), one end of the connecting rod (211) is connected to the driving end of the second driving component (22), the other end of the connecting rod (211) is slidably connected to the locking seat (212), an elastic member is arranged between the connecting rod (211) and the locking seat (212), and the locking seat (212) can move in a first direction through the elastic member.
3. The locking device for the graphite boat according to claim 1, characterized in that, The second locking mechanism (2) further includes a mounting member (23), the mounting member (23) is connected to the clamping component (11); A through hole (231) is formed in the mounting member (23), the second driving component (22) is mounted on the mounting member (23), the locking component (21) passes through the through hole (231), and the second driving component (22) and the locking component (21) are respectively located on both sides of the mounting member (23) in the first direction.
4. The locking device for the graphite boat according to claim 3, characterized in that, The clamping component (11) includes a mounting plate (111) and at least one clamping protrusion (112), the mounting plate (111) includes a first end face and a second end face, the first end face and the second end face are respectively located on both sides of the mounting plate (111) in the first direction, and the clamping protrusion (112) is arranged on the first end face.
5. The locking device for the graphite boat according to claim 4, characterized in that, The number of the clamping protrusions (112) is two, and the two clamping protrusions (112) are arranged at intervals along a second direction; The first direction and the second direction intersect.
6. The locking device for the graphite boat according to claim 4, characterized in that, A first groove (1111) is formed in the mounting plate (111), a second groove (1121) is formed in the clamping protrusion (112), and the first groove (1111) and the second groove (1121) correspond to each other in the first direction; The mounting member (23) is arranged on the second end face, and the locking component (21) can pass through the first groove (1111) and the second groove (1121).
7. The locking device for the graphite boat according to claim 4, wherein, The first locking mechanism (1) further includes: A bottom plate (13), a first sliding member (15) is arranged on the bottom plate (13); A connecting member (14), the connecting member (14) includes a first mounting end face (141) and a second mounting end face (142), the first mounting end face (141) is connected to the mounting plate (111), a second sliding member (16) is provided on the second mounting end face (142), the second sliding member (16) is slidably connected to the first sliding member (15) in a first direction, and the connecting member (14) is connected to the driving end of the first driving assembly (12).
8. The locking device for a graphite boat according to claim 7, characterized in that, The first locking mechanism (1) further includes a first limiting portion (18) and a second limiting portion (19), the first limiting portion (18) is provided on the bottom plate (13), the second limiting portion (19) is provided on the connecting member, and the second limiting portion (19) can abut against the first limiting portion (18) to limit the movement of the connecting member (14) in the first direction.
9. The locking device for the graphite boat according to claim 1, wherein, The number of the second locking mechanisms (2) is multiple.
10. A positioning system for a graphite boat, characterized in that, Including two locking devices (100) for a graphite boat according to any one of claims 1-9, the two locking devices (100) are arranged at intervals in a first direction, a graphite boat (200) is placed between the two locking devices (100), and the two sides of the graphite boat (200) are clamped by the two locking devices (100).