Thermal field isolation assembly and single crystal furnace

Abstract

The utility model provides a thermal field isolation component and a single crystal furnace, the thermal field isolation component is arranged in a furnace body, the thermal field isolation component is barrel-shaped, and a heat reflecting layer of the thermal field isolation component is arranged on the outer side of a heating system of the single crystal furnace and is used for uniformly reflecting heat to the center of a thermal field; the composite heat insulation layer is arranged on the outer side of the heat reflection layer in a sleeving manner and comprises at least two heat insulation layers; and the protective layer is arranged on the outer side of the composite heat insulation layer in a sleeving mode and used for protecting the thermal field isolation assembly. In the operation process of the single crystal furnace, the generated high-temperature heat is reflected back into the thermal field by the heat reflecting layer, so that the temperature uniformity in the thermal field is improved. Meanwhile, the composite thermal insulation layer is used for efficiently insulating the thermal field, so that the energy consumption of single crystal furnace equipment is reduced. The protective layer protects the composite thermal insulation layer from being corroded and damaged by the external environment, and the service life of the thermal field isolation assembly is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of thermal field isolation of single crystal furnaces, in particular to a thermal field isolation component and a single crystal furnace. Background Art

[0002] With the explosive growth of single crystal furnace installations in China, large-scale single crystal furnace equipment has become the general trend, and the size of the heat field used in conjunction with it has also increased accordingly. As the size of the heat field increases and the feed rate increases, the thermal insulation performance of the heat field and the structural performance of its corresponding components are also receiving increasing attention.

[0003] In the currently existing single crystal furnace equipment, the component structure of its thermal field part usually adopts a design that combines a carbon-carbon insulation barrel and insulation felt. Due to the relatively poor thermal insulation properties of the raw materials of each component, and the different tightness of the insulation felt wrapped around the insulation barrel due to different operator techniques and actual working conditions, the thermal insulation performance of the thermal field of each single crystal furnace equipment is different, and the power variation between different single crystal furnace equipment fluctuates greatly. This not only becomes a major problem that makes it impossible to standardize the working conditions and performance of the thermal field, but also causes an increase in the overall energy consumption of the single crystal furnace equipment, restricting the overall performance and work efficiency of the single crystal furnace equipment. Utility Model Content

[0004] The purpose of the embodiments of the present invention is to provide a thermal field isolation component and a single crystal furnace, so as to solve the problem of poor thermal field isolation effect of existing single crystal furnaces.

[0005] The embodiment of the present utility model adopts the following technical solution: a thermal field isolation component is applied to the furnace body of a single crystal furnace, the single crystal furnace emits heat to form a thermal field, the thermal field isolation component is arranged in the furnace body, the thermal field isolation component is barrel-shaped, and includes, from the inside to the outside:

[0006] a heat reflection layer, which is arranged on the outside of the heating system of the single crystal furnace and is used to uniformly reflect heat toward the center of the thermal field;

[0007] A composite heat-insulating layer, which is sleeved on the outer side of the heat-reflecting layer, and the composite heat-insulating layer includes at least two heat-insulating layers;

[0008] A protective layer is sleeved on the outside of the composite thermal insulation layer, and is used to protect the thermal field isolation component.

[0009] In some embodiments, the heat reflective layer is a metal barrel, and the inner surface of the metal barrel is provided with a metal oxide coating or metal foil.

[0010] In some embodiments, the composite thermal insulation layer includes a ceramic fiber layer and a nano-aerogel layer, and the nano-aerogel layer is attached to the outer peripheral surface of the ceramic fiber layer and covers the outer peripheral surface of the ceramic fiber layer.

[0011] In some embodiments, the protective layer is a ceramic coating or a metal coating, and the ceramic coating or the metal coating is sprayed on the outer peripheral surface of the composite thermal insulation layer.

[0012] In some embodiments, the thermal field isolation assembly further includes a filling layer, which is filled between the heat reflecting layer and the composite thermal insulation layer, and between the composite thermal insulation layer and the protective layer. The filling layer is used to prevent the heat of the thermal field from radiating outward.

[0013] In some embodiments, the filling layer is a graphite felt layer, and the thickness of the graphite felt layer is respectively greater than the thickness of the heat reflection layer, the thickness of the composite thermal insulation layer, and the thickness of the protective layer.

[0014] In some embodiments, the thickness of the heat reflective layer is 8 mm to 12 mm, the thickness of the composite thermal insulation layer is 8 mm to 12 mm, the thickness of the protective layer is 8 mm to 12 mm, and the thickness of the graphite felt layer is 45 mm to 55 mm.

[0015] An embodiment of the present application also provides a single crystal furnace, comprising a thermal field isolation assembly as described in any of the above embodiments.

[0016] The beneficial effects of the embodiments of the present utility model are:

[0017] During single crystal furnace operation, the high-temperature heat generated is reflected back into the heat field by the heat reflector layer, improving temperature uniformity within the field. Simultaneously, the composite thermal insulation layer effectively insulates the field, reducing energy consumption within the single crystal furnace. The protective layer protects the composite thermal insulation layer from erosion and damage from the external environment, extending the service life of the thermal field isolation components. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0019] Figure 1 This is a schematic structural diagram of the thermal field isolation component of the utility model;

[0020] Figure 2 This is a schematic diagram of the top view of the thermal field isolation component of the utility model;

[0021] Figure 3 For this utility model Figure 2 Schematic diagram of the cross-sectional structure of AA.

[0022] Reference numerals: 1. heat-reflecting layer; 2. composite heat-insulating layer; 3. protective layer; 4. filling layer. DETAILED DESCRIPTION

[0023] Various aspects and features of the present application are described herein with reference to the accompanying drawings.

[0024] It should be understood that various modifications may be made to the embodiments of the present application. Therefore, the above description should not be considered as limiting, but merely as an example of an embodiment. Other modifications within the scope and spirit of the present application will occur to those skilled in the art.

[0025] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present application and, together with the general description of the present application given above and the detailed description of the embodiments given below, serve to explain the principles of the present application.

[0026] These and other characteristics of the present application will become apparent from the following description of a preferred form of embodiment given as a non-limiting example with reference to the accompanying drawings.

[0027] It should also be understood that although the present application has been described with reference to certain specific examples, those skilled in the art will readily be able to implement many other equivalent forms of the present application.

[0028] The above and other aspects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings.

[0029] Specific embodiments of the present application will be described hereinafter with reference to the accompanying drawings; however, it should be understood that the embodiments described are merely examples of the present application and may be implemented in a variety of ways. Familiar and / or repetitive functions and structures are not described in detail to avoid obscuring the present application with unnecessary or redundant details. Therefore, the specific structural and functional details described herein are not intended to be limiting, but rather serve merely as a basis and representative basis for the claims to teach those skilled in the art to variously utilize the present application with substantially any suitable detailed structure.

[0030] This specification may use the phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments," which may all refer to one or more of the same or different embodiments according to the present application.

[0031] To solve the problems in the background technology, the present application provides a thermal field isolation component, which is applied to the furnace body of a single crystal furnace. The heating system of the single crystal furnace dissipates heat to form a thermal field, and the thermal field isolation component is arranged in the furnace body. Of course, the thermal field isolation component can also be applied to other equipment as needed. During the operation of the single crystal furnace, the heating system dissipates heat to form a thermal field. The thermal field isolation component is used to reduce the outward dissipation of heat from the thermal field, improve the concentration of the thermal field of the single crystal furnace, and improve the thermal utilization rate of the single crystal furnace.

[0032] like Figure 1 As shown, the thermal field isolation component is barrel-shaped and includes a heat reflection layer 1, a composite heat insulation layer 2 and a protective layer 3 from the inside to the outside.

[0033] Heat-reflecting layer 1 is located outside the single crystal furnace's heating system to evenly reflect heat toward the center of the heat field. During furnace operation, the heating system heats the graphite heaters and quartz crucibles within the heat field. The resulting high-temperature heat is reflected back into the heat field by heat-reflecting layer 1, improving temperature uniformity within the field and ensuring the furnace's performance.

[0034] The heat reflective layer 1 can be constructed of a metal barrel. To enhance its heat reflectivity, a highly reflective metal oxide coating or metal foil can be applied to the inner surface of the barrel. The metal foil can be evenly applied to the inner surface of the barrel, or the metal oxide coating can be evenly sprayed onto the inner surface of the barrel. The metal foil can also be attached to the inner wall of the furnace using hot pressing to form the heat reflective layer 1.

[0035] The composite heat-insulating layer 2 is also a barrel-shaped structure. The composite heat-insulating layer 2 is sleeved on the outside of the heat-reflecting layer 1. The composite heat-insulating layer 2 includes at least two heat-insulating layers to improve the heat-insulating effect.

[0036] For example, the composite thermal insulation layer 2 may include two thermal insulation layers, one comprising a high-temperature-resistant ceramic fiber layer and the other comprising a nano-aerogel layer having low thermal conductivity. The two thermal insulation layers are tightly combined. For example, the nano-aerogel layer may be attached to and cover the outer circumference of the ceramic fiber layer. The ceramic fiber layer and the nano-aerogel layer may be woven or sprayed to form the composite thermal insulation layer 2.

[0037] It is understandable that the composite thermal insulation layer 2 may also include more than three thermal insulation layers, which may be specifically configured according to actual production needs.

[0038] The ceramic fiber layer of the composite thermal insulation layer 2 may be, but is not limited to, high-temperature resistant materials such as alumina fiber or silicon nitride fiber; the nanoaerogel layer may be, but is not limited to, low-thermal-conductivity materials such as silica nanoaerogel. Of course, it is understood that the ceramic fiber layer may also be made of other high-temperature resistant materials such as oxide fibers, and the nanoaerogel layer may also be made of other low-thermal-conductivity materials such as oxide nanoaerogel. These examples are merely illustrative and do not constitute a limitation on the scope of the claims.

[0039] The composite thermal insulation layer 2 adopts a multi-layer structure, and through the synergistic effect of the high-temperature resistant ceramic fiber layer and the low thermal conductivity nano aerogel layer, it achieves efficient thermal insulation of the thermal field and significantly reduces the energy consumption of the single crystal furnace equipment.

[0040] The protective layer 3 is also barrel-shaped and is sleeved on the outside of the composite thermal insulation layer 2. The protective layer 3 is used to protect the thermal field isolation component.

[0041] Protective layer 3 may be, but is not limited to, a high-temperature, corrosion-resistant ceramic coating or metal coating. The ceramic coating may be sprayed onto the outer surface of composite thermal insulation layer 2. Protective layer 3 protects composite thermal insulation layer 2 from erosion and damage from the external environment, thereby extending the service life of the thermal field isolation assembly.

[0042] During single crystal furnace operation, the high-temperature heat generated is reflected back into the thermal field by heat reflective layer 1, improving temperature uniformity within the field. Simultaneously, composite thermal insulation layer 2 effectively insulates the field, reducing energy consumption within the single crystal furnace. Protective layer 3 protects composite thermal insulation layer 2 from erosion and damage from the external environment, extending the service life of the thermal field isolation assembly.

[0043] In some embodiments, combined Figure 2 and Figure 3 The thermal field isolation component also includes a filling layer 4, which is filled between the heat reflecting layer 1 and the composite thermal insulation layer 2, and between the composite thermal insulation layer 2 and the protective layer 3. The filling layer 4 is used to prevent the heat of the thermal field from radiating outward, and better plays a role in blocking and dissipating the heat of the thermal field.

[0044] The filling layer 4 may be, but is not limited to, a graphite felt layer, the thickness of which is greater than the thickness of the heat reflective layer 1, the thickness of the composite heat insulation layer 2, and the thickness of the protective layer 3. For example, in some embodiments, the thickness of the heat reflective layer 1 is 8 mm to 12 mm, the thickness of the composite heat insulation layer 2 is 8 mm to 12 mm, the thickness of the protective layer 3 is 8 mm to 12 mm, and the thickness of the graphite felt layer is 45 mm to 55 mm.

[0045] Of course, it is understandable that the thickness of the protective layer 3, the thickness of the heat reflecting layer 1, the thickness of the composite insulation layer 2 and the thickness of the protective layer 3 can also be set according to actual production needs. This is only used as an example and does not constitute a limitation on the scope of protection of the claims.

[0046] The present application also provides a single crystal furnace comprising a thermal field isolation assembly as described in any of the above embodiments. The thermal field isolation assembly significantly improves the thermal performance and production efficiency of the single crystal furnace equipment, reduces energy consumption and costs, and has broad market application prospects. It also improves the production efficiency and quality of single crystal silicon and other crystals, and reduces raw material contamination.

[0047] The above describes in detail several embodiments of the present invention, but the present invention is not limited to these specific embodiments. Those skilled in the art can make various variations and modifications based on the concept of the present invention, and these variations and modifications should fall within the scope of protection claimed by the present invention.

Claims

1. A thermal field isolation component, characterized in that: The heat isolation component is applied to a furnace body of a single crystal furnace, wherein the single crystal furnace emits heat to form a thermal field. The thermal field isolation component is arranged in the furnace body. The thermal field isolation component is barrel-shaped and includes, from the inside to the outside: a heat reflection layer, which is arranged on the outside of the heating system of the single crystal furnace and is used to uniformly reflect heat toward the center of the thermal field; A composite heat-insulating layer, which is sleeved on the outer side of the heat-reflecting layer, and the composite heat-insulating layer includes at least two heat-insulating layers; A protective layer is sleeved on the outside of the composite thermal insulation layer, and is used to protect the thermal field isolation component.

2. The thermal field isolation assembly according to claim 1, characterized in that: The heat reflection layer is a metal barrel, and the inner surface of the metal barrel is provided with a metal oxide coating or metal foil.

3. The thermal field isolation assembly according to claim 1, characterized in that: The composite heat-insulating layer comprises a ceramic fiber layer and a nano-aerogel layer. The nano-aerogel layer is attached to the outer peripheral surface of the ceramic fiber layer and covers the outer peripheral surface of the ceramic fiber layer.

4. The thermal field isolation assembly according to claim 1, characterized in that: The protective layer is a ceramic coating or a metal coating, and the ceramic coating or the metal coating is sprayed on the outer peripheral surface of the composite heat insulation layer.

5. The thermal field isolation assembly according to claim 1, characterized in that: The thermal field isolation assembly further includes a filling layer, which is filled between the heat reflecting layer and the composite heat insulation layer, and between the composite heat insulation layer and the protective layer. The filling layer is used to prevent the heat of the thermal field from radiating outward.

6. The thermal field isolation assembly according to claim 5, characterized in that: The filling layer is a graphite felt layer, and the thickness of the graphite felt layer is respectively greater than the thickness of the heat reflection layer, the thickness of the composite heat insulation layer, and the thickness of the protective layer.

7. The thermal field isolation assembly according to claim 6, characterized in that: The thickness of the heat reflection layer is 8 mm to 12 mm, the thickness of the composite heat insulation layer is 8 mm to 12 mm, the thickness of the protective layer is 8 mm to 12 mm, and the thickness of the graphite felt layer is 45 mm to 55 mm.

8. A single crystal furnace, characterized in that: The thermal field isolation assembly comprises the thermal field isolation assembly as claimed in any one of claims 1 to 7.

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