Peripheral pump for conveying liquefied high-purity electronic gas

Abstract

The utility model discloses a peripheral pump for conveying liquefied high-purity electronic gas. The peripheral pump is characterized in that a peripheral pump impeller capable of being in transmission connection with a rotating output end of an external power source is rotatably supported in a pump shell; the pump shell is provided with a liquid inlet, a liquid outlet and a cooling cavity capable of being communicated with a refrigerant outlet and a refrigerant backflow opening of an external refrigeration source. Non-metal gaskets are coaxially arranged on the two sides of the peripheral pump impeller and fixed to the pump shell, and gaps are formed between the end walls of the non-metal gaskets and the end wall of the peripheral pump impeller. By designing the non-metal gasket, the vortex pump impeller does not make contact with the pump shell made of the metal material when rotating, so that metal chippings are avoided, and the phenomenon that the purity of electronic gas is affected due to the existence of the metal chippings when the liquid electronic gas is pumped is prevented; the cooling cavity and an external refrigeration source are used for pre-cooling the pump shell, and liquid electronic gas is prevented from being heated and gasified in the pumping process.

Description

Technical Field

[0001] The utility model relates to the field of electronic gas transportation, and more specifically to a vortex pump for transporting high-purity electronic gas after liquefaction. Background Technique

[0002] Electronic gas is one of the important raw materials in the field of electronics industry. With the rapid development of industries such as photovoltaic power generation and ultra-large-scale integrated circuits, the market demand for electronic gas has increased significantly.

[0003] The quality control of electronic gas mainly includes two aspects, namely system purity control and system sealing performance control; and the sealing performance of the system is more directly related to the stable operation of the equipment.

[0004] At present, it is difficult to purify electronic gas. Tiny purity differences will greatly affect product quality. Especially for metal elements in electronic gas, it is required to be purified to levels 9 - 12. Therefore, the requirement for the sealing performance of the equipment system is particularly important.

[0005] The traditional transportation of electronic gas mainly uses plunger pumps and diaphragm compressors. Plunger pumps are widely used in the transportation of cryogenic liquids. They have controllable flow rate, high head, and are easy to repair. However, there is a problem of pump packing leakage. The applicable media are mostly cryogenic liquefiable inert gases (liquid nitrogen, liquid argon, etc.). When transporting dangerous media such as liquefied silane, there is a safety risk of material explosion after leakage, leaving a safety hazard for the stable operation of the device. Diaphragm compressors have a large transportation volume and stable operation, but they occupy too much space and have a complex structure. Under cryogenic operating conditions, their diaphragms are prone to fatigue and their service life is easily reduced.

[0006] Therefore, how to provide a vortex pump for transporting high-purity electronic gas after liquefaction, enabling it to overcome the above problems, is an urgent problem to be solved by those skilled in the art. Content of the Utility Model

[0007] In view of this, the utility model provides a vortex pump for transporting high-purity electronic gas after liquefaction.

[0008] In order to achieve the above object, the utility model adopts the following technical scheme:

[0009] A vortex pump for conveying liquefied high-purity electronic gas, comprising: a pump casing, a vortex pump impeller and a non-metallic gasket, wherein the vortex pump impeller is rotatably supported in the pump casing, and the vortex pump impeller can be transmission-connected to the rotation output end of an external power source; the pump casing is provided with a liquid inlet and a liquid outlet communicated with the interior thereof, and the axis of the vortex pump impeller is located between the liquid inlet and the liquid outlet; two non-metallic gaskets are coaxially provided, and the vortex pump impeller is arranged between the two non-metallic gaskets, and the vortex pump impeller and the non-metallic gasket are coaxially supported. The pump housing is provided with a plurality of non-metallic gaskets, each of which has a plurality of end walls and a plurality of end walls, and a plurality of end walls are connected to the plurality of refrigerants. The plurality of non-metallic gaskets are connected to the plurality of refrigerants of the pump housing. The plurality of non-metallic gaskets are connected to the plurality of refrigerants of the pump housing.

[0010] It can be seen from the above technical solution that compared with the prior art, the utility model discloses a vortex pump for conveying liquefied high-purity electronic gas. The utility model designs two non-metallic gaskets in the pump casing, so that the vortex pump impeller will not contact the metal pump casing when rotating at high speed, thereby avoiding the generation of metal debris and preventing the vortex pump from mixing with the liquid electronic gas when pumping the liquid electronic gas, and the purity of the electronic gas will not be affected during the pumping process; since a vortex pump impeller is used, this structure has a high pumping efficiency for the liquid electronic gas and consumes less power; by designing a cooling chamber, before starting to pump the liquid electronic gas, the cooling chamber and the external cooling source can be used to pre-cool the pump casing and the vortex pump impeller to prevent the liquid electronic gas from being heated and vaporized during the pumping process.

[0011] Preferably, the pump casing includes a pump casing body and an end cover. One end of the pump casing body is open and removably sealed with the end cover. The pump casing body is provided with the liquid inlet and the liquid outlet communicating with the interior thereof. The vortex pump impeller is rotatably supported within the pump casing body. The two non-metallic gaskets are respectively fixed to the end cover and the pump casing body. The cooling chamber, the first connection port, and the second connection port are integrally formed on the end cover. The vortex pump impeller, cooling chamber, the first connection port, and the second connection port can be securely arranged.

[0012] Preferably, a countersunk hole is formed on the end face of the non-metallic washer, a through hole is coaxially formed on the bottom wall of the countersunk hole, a threaded hole 1 is formed on the end cover, and a threaded hole 2 is formed on the inner wall of the pump casing. One end of bolt 1 passes through the countersunk hole and the through hole on one non-metallic washer in sequence and then screws into the threaded hole 1. One end of bolt 2 passes through the countersunk hole and the through hole on the other non-metallic washer in sequence and then screws into the threaded hole 2. The bolt heads of bolt 1 and bolt 2 are each embedded in their corresponding countersunk holes. The two non-metallic washers can each be reliably fixed to the end cover and the pump casing.

[0013] Preferably, it also includes a magnetic transmission component, which includes a connecting shell, a sealing sleeve, a mounting tube, a bearing, a rotating shaft, a mounting wheel, a magnet block, a connecting shell, a rotating shaft, a mounting tube and a magnet block, the connecting shell is open at both ends, the sealing sleeve is open at one end and closed at the other end, one end of the connecting shell is fixed to the pump shell body, and the other end of the connecting shell is sealed and fixed to the open end of the sealing sleeve; the mounting tube is located in the connecting shell, one end of the mounting tube is fixed to the pump shell body, and a plurality of bearings are coaxially and tightly embedded in the interior of the mounting tube; the pump shell body has a hole and is inserted with the rotating shaft, one end of the rotating shaft is coaxially fixed to the vortex pump impeller, and the other end of the rotating shaft is coaxially fixed to the mounting wheel after coaxially passing through a plurality of bearings, the mounting wheel is coaxially arranged in the sealing sleeve, and a plurality of outer wall of the mounting wheel is evenly fixed circumferentially The magnet block one has a gap between the magnet block one and the inner wall of the sealing sleeve; one end of the connecting shell is open, and the open end of the connecting shell two is sealed and fixed to one end of the connecting shell one provided with the sealing sleeve, and the connecting shell two is internally rotatably supported by the rotating shaft, and the rotating shaft two is coaxially arranged with the rotating shaft, one end of the rotating shaft two is located outside the connecting shell two, and the other end of the rotating shaft two is coaxially fixed with the mounting cylinder; the mounting cylinder is located on the inner side of the connecting shell two, and the sealing sleeve is coaxially limited on the inner side of the mounting cylinder, and the inner side wall of the mounting cylinder is evenly fixed with multiple magnet blocks two in the circumferential direction, and there is a gap between the magnet block two and the outer wall of the sealing sleeve, and the multiple magnet blocks one and the multiple magnet blocks two are respectively positioned opposite to each other, and the magnet block one and the magnet block two have opposite magnetic properties, and the end of the rotating shaft two located on the outer side of the connecting shell two can be transmission connected to the rotation output end of the external power source. The above design ensures that the second rotating shaft can reliably drive the vortex pump impeller to rotate, and on the other hand, external impurities will not enter the pump casing when the second rotating shaft drives the vortex pump impeller to rotate.

[0014] Preferably, there are two first bearings, and the two first bearings are respectively arranged near both ends of the mounting pipe. The first bearings can reliably support the rotation of the first rotating shaft.

[0015] Preferably, the magnetic drive assembly further includes a second bearing. The second connecting shell includes a first shell and a second shell. The first shell has openings at both ends. One end of the first shell is hermetically fixed to one end of the first connecting shell provided with the sealing sleeve, and the other end of the first shell is hermetically fixed to one end of the second shell. The mounting cylinder is located inside the first shell. The second bearing is tightly fitted inside the second shell. The second rotating shaft is coaxially and tightly inserted through the inner ring of the second bearing. One end of the second rotating shaft is coaxially fixed to the mounting cylinder after passing through the second shell, and the other end of the second rotating shaft can be drivingly connected to the rotating output end of an external power source after passing through the second shell; there are multiple second bearings, and the multiple second bearings are arranged in sequence along the length direction of the second rotating shaft. The second rotating shaft and the mounting cylinder can be reliably arranged.

[0016] Preferably, the end face of the non-metallic washer is parallel to the end wall of the vortex pump impeller. This design ensures that there is a small and relatively constant gap between the end face of the non-metallic washer and the end wall of the vortex pump impeller. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained according to the provided drawings without creative efforts.

[0018] Figure 1 is the front view of a vortex pump for transporting liquefied high-purity electronic gas

[0019] Figure 2 is the cross-section of a vortex pump for transporting liquefied high-purity electronic gas Figure 1 ;

[0020] Figure 3 is Figure 1 the partial enlarged view at A in

[0021] Figure 4 is the cross-section of a vortex pump for transporting liquefied high-purity electronic gas Figure 2 .

[0022] In the figure:

[0023] 01 is the pump housing, 010 is the pump housing body, 0100 is the liquid inlet, 0101 is the liquid outlet, 011 is the end cover, 0110 is the cooling chamber, 0111 is the first connection port, 0112 is the second connection port, 02 is the vortex pump impeller, 03 is the non-metallic gasket, 04 is the first bolt, 05 is the second bolt, 06 is the first connection shell, 07 is the sealing sleeve, 08 is the mounting pipe, 09 is the first bearing, 10 is the first rotating shaft, 11 is the mounting wheel, 12 is the first magnet block, 13 is the second connection shell, 130 is the first housing, 131 is the second housing, 14 is the second rotating shaft, 15 is the mounting cylinder, 16 is the second magnet block, 17 is the second bearing. Detailed implementation manners

[0024] The technical solutions in the embodiments of the present utility model will be clearly and completely described below. Apparently, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0025] The present utility model discloses a vortex pump for transporting liquefied high-purity electronic gas. By designing two non-metallic gaskets 03 in the pump housing 01, the vortex pump impeller 02 will not contact the pump housing 01 made of metal material during high-speed rotation, thus avoiding the generation of metal debris and preventing the metal debris from being mixed in the liquid electronic gas when the vortex pump pumps the liquid electronic gas, and the purity of the electronic gas will not be affected during the pumping process. [[ID=IO]]

[0026] Since the non-metallic gasket 03 is adopted, the relative friction generated between the non-metallic gasket 03 and the vortex pump impeller 02 made of metal material is relatively small, there is no direct friction between metal parts, no external leakage of the pump will occur, and the safety during operation is high.

[0027] Since the vortex pump impeller 02 is adopted, this structure has a high pumping efficiency for liquid electronic gas and consumes less power at the same time.

[0028] By designing the cooling chamber 0110, before starting to pump the liquid electronic gas, the pump housing 01 and the vortex pump impeller 02 can be pre-cooled by using the cooling chamber 0110 and an external refrigeration source to prevent the liquid electronic gas from vaporizing due to heat during the pumping process.

[0029] This vortex pump occupies a small space, is suitable for transporting low-density and easily vaporizable media, and its average flow rate is constant during operation.

[0030] By designing a magnetic transmission component, the rotating shaft 2 14 can drive the mounting cylinder 15 to rotate. When the mounting cylinder 15 rotates, it can drive the multiple magnet blocks 2 16 to rotate. When the multiple magnet blocks 2 16 rotate around the rotating shaft 2 14, the multiple magnet blocks 12 will also be driven by the magnet blocks 2 16, thereby realizing the rotation of the mounting wheel 11. When the mounting wheel 11 rotates, it will drive the rotating shaft 10 to rotate, thereby realizing the rotation of the vortex pump impeller 02. Since the mounting tube 08, bearing 1 09, mounting wheel 11 and magnet block 12 are all located in the sealing area jointly defined by the pump casing body 010, connecting casing 1 06 and sealing sleeve 07, therefore, when the rotating shaft 2 14 drives the vortex pump impeller 02 to rotate, external impurities will not enter the pump casing body 010.

[0031] Example

[0032] See attached Figures 1-4 The figure is a schematic diagram of the overall and partial structures of an embodiment of the present invention. The present invention specifically discloses a vortex pump for conveying liquefied high-purity electronic gas, comprising: a pump housing 01, a vortex pump impeller 02, and a non-metallic gasket 03;

[0033] A vortex pump impeller 02 is rotatably supported within the pump housing 01. The vortex pump impeller 02 can be transmission-connected to the rotation output end of an external power source. The external power source referred to here is an electric motor or an internal combustion engine. The electric motor is a variable frequency motor or an industrial frequency motor. The external power source can drive the vortex pump impeller 02 to rotate. The vortex pump impeller 02 is of the prior art. The vortex pump impeller 02 includes an impeller body and blades circumferentially distributed around the outer periphery of the impeller body. The impeller stage number of the vortex pump impeller 02 is 1-10.

[0034] The pump housing 01 is provided with a liquid inlet 0100 and a liquid outlet 0101 communicating with the interior thereof. The axis of the vortex pump impeller 02 is located between the liquid inlet 0100 and the liquid outlet 0101. In this embodiment, the liquid inlet direction of the liquid inlet 0100 and the liquid outlet direction of the liquid outlet 0101 are both perpendicular to the axis of the vortex pump impeller 02. The liquid inlet direction of the liquid inlet 0100 is parallel to the liquid outlet direction of the liquid outlet 0101. When the vortex pump impeller 02 rotates, the liquefied electronic gas can enter the pump housing 01 from the liquid inlet 0100 and be discharged from the pump housing 01 from the liquid outlet 0101.

[0035] There are two non-metallic gaskets 03 coaxially arranged. In this embodiment, the cross-sectional shape of the non-metallic gasket 03 is rectangular. The material of the non-metallic gasket 03 can be polytetrafluoroethylene. The end face of the non-metallic gasket 03 is parallel to the end wall of the vortex pump impeller 02. The vortex pump impeller 02 is arranged between the two non-metallic gaskets 03. The vortex pump impeller 02 and the non-metallic gasket 03 are coaxially arranged. One end wall of each of the two non-metallic gaskets 03 is tightly fixed to the inner wall of the pump casing 01. There is a very small gap between the other end wall of each of the two non-metallic gaskets 03 and the two end walls of the vortex pump impeller 02. The blades, the liquid inlet 0100 and the liquid outlet 0101 of the vortex pump impeller 02 are all located outside the area enclosed by the non-metallic gasket 03. The non-metallic gasket 03 corresponds to the impeller body of the vortex pump impeller 02 in position. When the vortex pump impeller 02 is running at high speed, due to its own deformation or axial movement, the vortex pump impeller 02 may contact the non-metallic gasket 03. Since it is a non-metallic gasket 03, no metal debris will be generated when the vortex pump impeller 02 contacts the non-metallic gasket 03, that is, it is ensured that the transported electronic gas will not be doped with metal debris. While ensuring the pumping capacity, the present application will not pollute the transported electronic gas;

[0036] A cooling cavity 0110 is provided on the casing wall of the pump casing 01. The pump casing 01 is provided with a connection port one 0111 and a connection port two 0112 that are connected to the cooling cavity 0110. The connection port one 0111 and the connection port two 0112 are respectively connected to the refrigerant outlet and the refrigerant return port of an external refrigeration source. After the external refrigeration source cools the refrigerant, it transports it into the cooling cavity 0110. That is, the refrigerant circulates in the cooling cavity 0110. During the process of the refrigerant flowing in the cooling cavity 0110, it will cool the pump casing 01. The purpose of this design is to reduce the temperature of the pump casing 01 and the vortex pump impeller 02, and prevent the liquid electronic gas from vaporizing due to heat during the process of the present application pumping the liquefied electronic gas.

[0037] The pump casing 01 includes a pump casing body 010 and an end cover 011. One end of the pump casing body 010 is open and is detachably sealed with the end cover 011. The pump casing body 010 is provided with a liquid inlet 0100 and a liquid outlet 0101 that communicate with its interior. The vortex pump impeller 02 is rotationally supported inside the pump casing body 010. The two non-metallic gaskets 03 are respectively fixed to the end cover 011 and the pump casing body 010. The cooling cavity 0110, the connection port one 0111 and the connection port two 0112 are integrally formed on the end cover 011.

[0038] A countersunk hole is provided on the end face of the non-metallic washer 03, and a through hole is coaxially provided on the bottom wall of the countersunk hole. A first threaded hole is provided on the end cover 011, and a second threaded hole is provided on the inner wall of the pump housing body 010. One end of the first bolt 04 passes through the countersunk hole and the through hole on a non-metallic washer 03 in sequence and then is screwed into the first threaded hole. One end of the second bolt 05 passes through the countersunk hole and the through hole on another non-metallic washer 03 in sequence and then is screwed into the second threaded hole. The bolt heads of the first bolt 04 and the second bolt 05 are respectively embedded in the corresponding countersunk holes; the two non-metallic washers 03 can be reliably fixed on the end cover 011 and the pump housing body 010 respectively. At the same time, the bolt heads of the first bolt 04 and the second bolt 05 will not contact the vortex pump impeller 02, avoiding the generation of metal debris.

[0039] Further specifically, it further includes a magnetic drive assembly. The magnetic drive assembly includes a first connection shell 06, a sealing sleeve 07, an installation pipe 08, a first bearing 09, a first rotating shaft 10, an installation wheel 11, a first magnet block 12, a second connection shell 13, a second rotating shaft 14, an installation cylinder 15, and a second magnet block 16;

[0040] Both ends of the first connection shell 06 are open. One end of the sealing sleeve 07 is open and the other end is closed. One end of the first connection shell 06 is fixed to the pump housing body 010, and the other end of the first connection shell 06 is hermetically fixed to the open end of the sealing sleeve 07;

[0041] The installation pipe 08 is located inside the first connection shell 06. One end of the installation pipe 08 is fixed to the pump housing body 010. A plurality of first bearings 09 are coaxially and tightly embedded inside the installation pipe 08. The first bearings 09 in this embodiment are sliding bearings;

[0042] The pump housing body 010 is provided with an opening and is inserted with a first rotating shaft 10. One end of the first rotating shaft 10 is coaxially fixed to the vortex pump impeller 02. The other end of the first rotating shaft 10 passes through a plurality of first bearings 09 coaxially and then is coaxially fixed to the installation wheel 11. The installation wheel 11 is coaxially arranged inside the sealing sleeve 07. A plurality of first magnet blocks 12 are circumferentially and uniformly fixed on the outer side wall of the installation wheel 11. There is a gap between the first magnet blocks 12 and the inner side wall of the sealing sleeve 07;

[0043] One end of the connecting shell 2 13 is open, and the open end of the connecting shell 2 13 is sealed and fixed to one end of the sealing sleeve 07 provided with the connecting shell 1 06. The connecting shell 2 13 internally supports the rotating shaft 2 14, and the rotating shaft 2 14 is coaxially arranged with the rotating shaft 10. One end of the rotating shaft 2 14 is located outside the connecting shell 2 13, and the other end of the rotating shaft 2 14 is coaxially fixed to the mounting cylinder 15; the mounting cylinder 15 is located on the inner side of the connecting shell 2 13, and the sealing sleeve 07 is coaxially limited on the inner side of the mounting cylinder 15. A plurality of magnet blocks 2 16 are evenly fixed on the inner side wall of the mounting cylinder 15 in the circumferential direction, and there is a magnet block 2 16 between the outer wall of the sealing sleeve 07 and the magnet block 16. The first magnet block 12 and the second magnet block 16 are respectively positioned opposite to each other, the magnet block 12 and the second magnet block 16 have opposite magnetic properties, and the first magnet block 12 and the second magnet block 16 are respectively magnetically attracted to each other. The end of the second rotating shaft 14 located outside the second connecting shell 13 can be connected to the rotation output end of the external power source. Specifically, the end of the second rotating shaft 14 located outside the second connecting shell 13 can be equipped with a driven gear or a driven pulley, and the rotation output end of the external power source can be correspondingly equipped with a driving gear or a driving pulley. The driven gear is meshed with the driving gear, and the driven pulley and the driving pulley are jointly equipped with a pair of belts.

[0044] The rotating shaft 2 14 can drive the mounting cylinder 15 to rotate. When the mounting cylinder 15 rotates, it can drive the multiple magnet blocks 2 16 to rotate. When the multiple magnet blocks 2 16 rotate around the rotating shaft 2 14, the multiple magnet blocks 12 will also be driven by the magnet blocks 2 16, thereby realizing the rotation of the mounting wheel 11. When the mounting wheel 11 rotates, it will drive the rotating shaft 10 to rotate, thereby realizing the rotation of the vortex pump impeller 02. Since the mounting tube 08, bearing 1 09, mounting wheel 11 and magnet block 12 are all located in the sealing area jointly defined by the pump casing body 010, connecting casing 1 06 and sealing sleeve 07, therefore, when the rotating shaft 2 14 drives the vortex pump impeller 02 to rotate, external impurities will not enter the pump casing body 010.

[0045] There are two bearings 09 in the present application. The two bearings 09 are arranged near the two ends of the mounting tube 08 respectively. The bearings 09 can provide reliable rotation support for the rotating shaft 10.

[0046] Further specifically, the magnetic drive assembly further includes a second bearing 17. The second connecting shell 13 includes a first shell 130 and a second shell 131. The two ends of the first shell 130 are open. One end of the first shell 130 is hermetically fixed to one end of the first connecting shell 06 provided with a sealing sleeve 07. The other end of the first shell 130 is hermetically fixed to one end of the second shell 131. The mounting cylinder 15 is located inside the first shell 130. The second bearing 17 is tightly fitted inside the second shell 131. A second rotating shaft 14 is coaxially and tightly inserted through the inner ring of the second bearing 17. One end of the second rotating shaft 14 is coaxially fixed to the mounting cylinder 15 after passing through the second shell 131. The other end of the second rotating shaft 14 can be drivingly connected to the rotating output end of an external power source after passing through the second shell 131. There are multiple second bearings 17, and the multiple second bearings 17 are arranged in sequence along the length direction of the second rotating shaft 14. In this embodiment, there are two second bearings 17. The above design ensures the reliable arrangement of the second rotating shaft 14 and the mounting cylinder 15.

[0047] When the vortex pump is running:

[0048] First, start the external refrigeration source to circulate the refrigerant in the cooling cavity 0110 for a period of time, that is, pre-cool the pump housing 01 to prevent the liquefied electronic gas from vaporizing in the pump housing 01 when transporting the liquefied electronic gas.

[0049] Secondly, after a period of time from the start of the pre-cooling of the pump housing 01, start the external power source. The external power source starts to drive the vortex pump impeller 02 to rotate, and then starts to pump the liquefied electronic gas.

[0050] This application is suitable for continuous operation under the working condition of a pressure difference of 0.1 - 2.5 MPa. The pumping flow rate is adjusted by adjusting the rotational speed of the vortex pump impeller 02. The flow control range of the vortex pump in this application is 1 - 40 m 3 / h, the head is 5 - 150 m, and the temperature range of the transported medium is 0°C to -196°C. Here, the medium refers to the electronic gas.

[0051] In this specification, each embodiment is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. For the same or similar parts among the embodiments, reference can be made to each other.

[0052] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to these embodiments shown herein, but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A vortex pump for conveying liquefied high-purity electronic gas, characterized in that: include: A pump housing (01), a vortex pump impeller (02) and a non-metallic gasket (03), wherein the vortex pump impeller (02) is rotatably supported in the pump housing (01), and the vortex pump impeller (02) can be transmission-connected to the rotation output end of an external power source; the pump housing (01) is provided with a liquid inlet (0100) and a liquid outlet (0101) communicated with the interior thereof, and the axis of the vortex pump impeller (02) is located between the liquid inlet (0100) and the liquid outlet (0101); two non-metallic gaskets (03) are coaxially provided, and the vortex pump impeller (02) is arranged between the two non-metallic gaskets (03), the vortex pump impeller (02) and the non-metallic gasket (03) are coaxially arranged, and the two non-metallic gaskets (03) are coaxially arranged. One end wall of the ring (03) is tightly fixed to the inner wall of the pump housing (01), and the other end wall of the two non-metallic gaskets (03) each has a gap with the two end walls of the vortex pump impeller (02), and the blades of the vortex pump impeller (02), the liquid inlet (0100) and the liquid outlet (0101) are all located outside the area surrounded by the non-metallic gaskets (03); a cooling cavity (0110) is provided on the shell wall of the pump housing (01), and a connection port 1 (0111) and a connection port 2 (0112) connected to the cooling cavity (0110) are provided on the pump housing (01), and the connection port 1 (0111) and the connection port 2 (0112) are respectively connected to the refrigerant outflow port and the refrigerant return port of the external refrigeration source.

2. A vortex pump for conveying liquefied high-purity electronic gas according to claim 1, characterized in that: The pump casing (01) includes a pump casing body (010) and an end cover (011), one end of the pump casing body (010) is open and is detachably sealed with the end cover (011), the pump casing body (010) is provided with the liquid inlet (0100) and the liquid outlet (0101) communicated with the interior thereof, the vortex pump impeller (02) is rotatably supported inside the pump casing body (010), the two non-metallic gaskets (03) are respectively fixed to the end cover (011) and the pump casing body (010), and the cooling cavity (0110), the connection port 1 (0111) and the connection port 2 (0112) are integrally formed on the end cover (011).

3. A vortex pump for conveying liquefied high-purity electronic gas according to claim 2, characterized in that: A countersunk hole is provided on the end face of the non-metallic washer (03), a through hole is coaxially provided on the bottom wall of the countersunk hole, a threaded hole 1 is provided on the end cover (011), and a threaded hole 2 is provided on the inner wall of the pump casing body (010), one end of bolt 1 (04) is screwed into the threaded hole 1 after passing through the countersunk hole and the through hole on one non-metallic washer (03) in sequence, and one end of bolt 2 (05) is screwed into the threaded hole 2 after passing through the countersunk hole and the through hole on another non-metallic washer (03) in sequence, and the bolt head of bolt 1 (04) and the bolt head of bolt 2 (05) are respectively embedded in the corresponding countersunk hole.

4. A vortex pump for conveying liquefied high-purity electronic gas according to claim 2, characterized in that: It also includes a magnetic transmission component, which includes a connecting shell (06), a sealing sleeve (07), a mounting tube (08), a bearing (09), a rotating shaft (10), a mounting wheel (11), a magnet block (12), a connecting shell (13), a rotating shaft (14), a mounting tube (15) and a magnet block (16). The connecting shell (06) has two openings at both ends, the sealing sleeve (07) has one end open and the other end closed, one end of the connecting shell (06) is fixed to the pump shell body (010), and the other end of the connecting shell (06) is sealed and fixed to the open end of the sealing sleeve (07); the mounting tube (08) is located in the connecting shell (06), one end of the mounting tube (08) is fixed to the pump shell body (010), and a plurality of bearings (09) are coaxially and tightly embedded inside the mounting tube (08); the pump shell body (010) is opened and the rotating shaft (10) is inserted, one end of the rotating shaft (10) is coaxially fixed to the vortex pump impeller (02), and the other end of the rotating shaft (10) is coaxially fixed to the mounting wheel (11) after coaxially passing through a plurality of bearings (09), and the mounting wheel (11) is coaxially arranged in the sealing sleeve (07), and the outer wall of the mounting wheel (11) is circumferentially A plurality of magnet blocks (12) are evenly fixed, and a gap is formed between the magnet block (12) and the inner wall of the sealing sleeve (07); one end of the connecting shell (13) is open, and the open end of the connecting shell (13) is sealed and fixed to one end of the sealing sleeve (07) provided with the connecting shell (06); the connecting shell (13) internally supports the rotating shaft (14), and the rotating shaft (14) is coaxially arranged with the rotating shaft (10), one end of the rotating shaft (14) is located outside the connecting shell (13), and the other end of the rotating shaft (14) is coaxially fixed with the mounting tube (15); The mounting tube (15) is located on the inner side of the second connecting shell (13), the sealing sleeve (07) is coaxially limited on the inner side of the mounting tube (15), and a plurality of the second magnet blocks (16) are evenly fixed on the inner side wall of the mounting tube (15). There is a gap between the second magnet block (16) and the outer side wall of the sealing sleeve (07). The plurality of the first magnet blocks (12) and the plurality of the second magnet blocks (16) are respectively positioned opposite to each other, and the magnet blocks (12) and the second magnet blocks (16) have opposite magnetic properties. The end of the second rotating shaft (14) located on the outer side of the second connecting shell (13) can be connected to the rotating output end of the external power source.

5. A vortex pump for conveying liquefied high-purity electronic gas according to claim 4, characterized in that: There are two bearings (09), and the two bearings (09) are arranged close to the two ends of the mounting tube (08).

6. A vortex pump for conveying liquefied high-purity electronic gas according to claim 4, characterized in that: The magnetic transmission assembly also includes a bearing 2 (17), the connecting shell 2 (13) includes a shell 1 (130) and a shell 2 (131), the shell 1 (130) has openings at both ends, one end of the shell 1 (130) is sealed and fixed with one end of the sealing sleeve (07) provided on the connecting shell 1 (06), the other end of the shell 1 (130) is sealed and fixed with one end of the shell 2 (131), the mounting tube (15) is located on the inner side of the shell 1 (130), and the bearing 2 (17) is tightly embedded in the shell 1 (130). The second rotating shaft (14) is installed inside the second shell (131), and the inner ring of the second bearing (17) is coaxially and tightly penetrated by the second rotating shaft (14). One end of the second rotating shaft (14) is coaxially fixed with the mounting tube (15) after passing through the second shell (131), and the other end of the second rotating shaft (14) can be connected to the rotation output end of the external power source after passing through the second shell (131); a plurality of the second bearings (17) are provided, and the plurality of the second bearings (17) are arranged in sequence along the length direction of the second rotating shaft (14).

7. A vortex pump for conveying liquefied high-purity electronic gas according to claim 1, characterized in that: The end surface of the non-metallic gasket (03) is parallel to the end wall of the vortex pump impeller (02).

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