Evaporation boat baffle for vacuum coating machine

Abstract

The evaporation boat baffle plate for the vacuum coating machine comprises a baffle plate (1), a cooling assembly and a telescopic assembly, the baffle plate (1) is positioned in the coating machine and is used for shielding unstable ions; the cooling assembly is connected with the baffle (1) and used for cooling the baffle (1). A movable section of the telescopic assembly penetrates into the coating machine and is connected with the baffle (1), and a fixed section of the telescopic assembly is positioned outside the coating machine and is used for changing the positions of the baffle (1) and the cooling coil (3) in the coating machine. The baffle is good in moving capacity, high in bearing capacity, high in stability and suitable for supporting baffles with water-cooling accessories and the like, and the situation that the baffles deform due to overheating can be avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of coating equipment, and in particular relates to an evaporation boat baffle for a vacuum coating machine. Background Art

[0002] Magnetron sputtering is an advanced physical vapor deposition technology that uses magnetic fields to control the movement of charged particles, thereby achieving efficient and uniform thin film deposition. It boasts advantages such as low deposition temperature, high-quality thin films, excellent uniformity, and fast deposition speeds, making it widely used in various industrial coating applications. Existing evaporation methods used in coating processes primarily include electric heating and ion beam bombardment. However, both methods generate film material molecules during the evaporation process, which can sputter onto the film material and cause product instability. Furthermore, when using an ion beam, shielding the ion beam is necessary during ion source preheating or parameter switching to prevent unstable ions from bombarding the substrate or film layer. This necessitates the installation of baffles on the side of the evaporation path above the evaporation boat. Since the baffles must be removed for coating operations during actual operation, a baffle with a certain degree of mobility is required. Existing techniques typically employ movable connection structures such as hydraulics or bending to provide a certain degree of mobility. However, both methods suffer from the disadvantage that the movable joints become difficult to move due to the coating during the sputtering process. Furthermore, for larger coating machines, the movable connection structure required has a long travel and relatively poor load-bearing capacity. Therefore, this movable connection structure is difficult to support heavy baffles with accessories such as water cooling. Therefore, there is an urgent need for a baffle with good mobility and strong load-bearing capacity that is suitable for supporting accessories such as water cooling. Summary of the Invention

[0003] In response to the problems existing in the above-mentioned prior art, the utility model provides an evaporation boat baffle for a vacuum coating machine. The baffle has good mobility, strong load-bearing capacity and strong stability. It is suitable for supporting baffles with water cooling and other accessories, and can avoid deformation due to overheating of the baffle.

[0004] In order to achieve the above-mentioned object, the utility model provides an evaporation boat baffle for a vacuum coating machine, comprising a baffle, a cooling assembly and a telescopic assembly;

[0005] The baffle is located inside the coating machine and serves as a shielding plate above the evaporation boat;

[0006] The cooling assembly is connected to the baffle and is used to cool the baffle;

[0007] The movable section of the telescopic assembly penetrates into the interior of the coating machine and is connected to the baffle, and the fixed section is located outside the coating machine and is used to change the position of the baffle and the cooling coil in the coating machine.

[0008] Furthermore, in order to make the baffle more structurally stable and more resistant to deformation, so as to avoid the situation where normal use is affected by thermal deformation, the baffle has a double-layer structure, with the upper layer being the cooling layer and the lower layer being the supporting frame layer.

[0009] Furthermore, in order to ensure the vacuum effect of the coating chamber and avoid vacuum leakage, the movable section of the telescopic assembly is a telescopic rod, which extends into the coating chamber through an installation port opened on the coating machine, and a dynamic sealing ring that seals with the telescopic rod is installed at the installation port on the coating machine.

[0010] Furthermore, to prevent the telescopic rod from being properly extended or retracted due to sputtered particles being deposited on it, the telescopic assembly also includes a bellows within the coating chamber. This bellows is sleeved onto the exterior of the telescopic rod, with one end connected to the end of the rod near the baffle and the other end connected to the coating machine. By sleeved onto the telescopic rod, the bellows moves synchronously with the extension and retraction of the rod, effectively preventing sputtered particles from being deposited on the rod during the coating process.

[0011] Furthermore, to prevent the front section of the bellows from failing to properly extend and retract due to excessive splashing during long-term use, thereby effectively extending the bellows' service life, the telescoping assembly further includes a sleeve that fits over the exterior of the end of the bellows near the baffle. Because the end of the bellows near the baffle is more susceptible to concentrated splashing than the rest of the bellows, fitting the sleeve over the exterior of this easily splashed portion effectively protects the front section of the bellows, thereby ensuring the bellows' proper telescoping performance.

[0012] Furthermore, in order to facilitate the assembly and replacement of the sleeve, the sleeve is composed of two symmetrical semicircular tubes.

[0013] Furthermore, in order to conveniently control the movement process of the baffle, the telescopic assembly further includes a slide and a driving mechanism;

[0014] The fixed section of the telescopic assembly is a slide fixedly connected to the outside of the coating machine;

[0015] The slider is slidably mounted on the slide and connected to the other end of the telescopic rod;

[0016] The driving mechanism is connected to the slider and is used to drive the slider to move back and forth along the length direction of the slide.

[0017] Furthermore, in order to ensure the cooling effect, the cooling assembly includes a cooling coil, which is installed on the back of the baffle.

[0018] Furthermore, in order to stably and reliably drive the movement of the baffle, there are two telescopic components, which are respectively connected to the two ends of the baffle in the length direction.

[0019] Furthermore, to avoid the additional water supply pipeline from occupying more space in the coating chamber, and to prevent particles from splashing onto the water supply pipeline and affecting subsequent use of the water supply pipeline, the cooling assembly further includes two water supply pipelines. The two water supply pipelines are respectively installed in the telescopic rods of the two telescopic assemblies. At the same time, the ends of the two water supply pipelines located inside the coating machine are respectively connected to the ends of the cooling coil, and the ends of the two water supply pipelines located outside the coating machine are respectively connected to the water source and the water collection tank. The two water supply pipelines are connected to the ends of the cooling coil, which facilitates cooling by supplying coolant to the cooling coil during the baffle shielding process.

[0020] In the present invention, the cooling assembly is connected to the baffle, which can facilitate the cooling and heat removal of the baffle during the sputtering operation, thus effectively preventing the baffle from being deformed due to overheating. By connecting the movable section of the telescopic assembly to the baffle, the position of the baffle can be moved by telescopic means, thereby quickly switching the baffle between the blocking state and the non-blocking state. At the same time, since the carrying capacity of the telescopic assembly is better than that of the traditional movable connection structure, it can effectively support the baffle with accessories such as water cooling. The baffle has good mobility, strong carrying capacity, and strong stability. It is suitable for supporting baffles with accessories such as water cooling, and can avoid deformation of the baffle due to overheating. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural diagram of the utility model;

[0022] Figure 2 It is a partial schematic diagram of the present utility model.

[0023] In the figure: 1. baffle, 2. telescopic rod, 3. cooling coil, 4. cooling layer, 5. frame support layer, 6. dynamic sealing ring, 7. bellows, 8. sleeve, 9. slide, 10. slider, etc. DETAILED DESCRIPTION

[0024] The present invention will be further described below with reference to the accompanying drawings.

[0025] like Figure 1 and Figure 2 As shown, the present invention provides an evaporation boat baffle for a vacuum coating machine, comprising a baffle 1, a cooling assembly and a telescopic assembly;

[0026] The baffle 1 is located inside the coating machine and serves as a shield above the evaporation boat;

[0027] The cooling assembly is connected to the baffle 1 and is used to cool the baffle 1;

[0028] The movable section of the telescopic assembly penetrates into the interior of the coating machine and is connected to the baffle 1, and the fixed section is located outside the coating machine and is used to change the position of the baffle 1 and the cooling coil 3 in the coating machine.

[0029] In order to make the baffle more stable in structure and more resistant to deformation, and to avoid the situation where normal use is affected by thermal deformation, the baffle 1 has a double-layer structure, with the upper layer being the cooling layer 4 and the lower layer being the supporting frame layer 5.

[0030] In order to ensure the vacuum effect of the coating chamber and avoid vacuum leakage, the movable section of the telescopic assembly is the telescopic rod 2, which extends into the coating chamber through an installation port opened on the coating machine, and a dynamic sealing ring 6 that seals with the telescopic rod 2 is installed at the installation port on the coating machine.

[0031] To prevent sputtered particles from plating onto the telescopic rod and causing it to malfunction, the telescopic assembly also includes a bellows 7 within the coating chamber. This bellows 7 is sleeved onto the exterior of the telescopic rod 2, with one end connected to the end of the rod 2 near the baffle 1 and the other end connected to the coating machine. By sleeved onto the telescopic rod, the bellows moves synchronously with the extension and retraction of the rod, effectively preventing sputtered particles from plating onto the rod during the coating process.

[0032] In order to prevent the front section of the bellows from being unable to expand and contract normally due to excessive sputtering during long-term use, and to effectively extend the service life of the bellows, the telescopic assembly further includes a sleeve 8, which is sleeved onto the outside of the end of the bellows 7 near the baffle 1. Since the end of the bellows near the baffle is more susceptible to concentrated sputtering than the rest of the bellows, and the bellows becomes brittle after being coated with a large number of particles, resulting in the inability to expand and contract normally, or even damage, thus sleeved onto the outside of the portion of the bellows that is easily sputtered, the front section of the bellows can be effectively protected, thereby ensuring the normal expansion and contraction performance of the bellows. At the same time, it can also effectively prevent the bellows from becoming brittle and breaking due to the sputtering of particles, which would affect the normal coating operation.

[0033] To facilitate assembly and replacement of the sleeve, the sleeve 8 is composed of two symmetrical semicircular tubes. Preferably, the junction of the two semicircular tubes is fixedly connected by multiple bolts, thereby forming a stable cylindrical structure. This allows for quick removal and replacement of the sleeve by simply disassembling and assembling the bolts.

[0034] To facilitate control of the movement of the baffle, the telescopic assembly further includes a slide 9 and a drive mechanism. The fixed section of the telescopic assembly is the slide 9, which is fixedly connected to the exterior of the coating machine. The slider 10 is slidably mounted on the slide 9 and connected to the other end of the telescopic rod 2. The drive mechanism is connected to the slider 10 and is used to drive the slider 10 to reciprocate along the length of the slide 9. Preferably, the drive mechanism can be a manual pull or push plate, or an automated drive mechanism such as a motor. An automated drive mechanism such as a motor is preferred, as it allows the slider to automatically reciprocate on the slide, facilitating precise and automated control of the movement of the baffle.

[0035] In order to ensure the cooling effect, the cooling assembly includes a cooling coil 3 , which is installed on the back of the baffle 1 .

[0036] In order to stably and reliably drive the movement of the baffle, there are two telescopic components, which are respectively connected to the two ends of the baffle 1 in the length direction.

[0037] As a preferred embodiment, the telescopic rod consists of a thin sleeve and a thick sleeve, and the thin sleeve is slidably mounted inside the thick sleeve.

[0038] In order to avoid the additional water supply pipeline from occupying more space in the coating chamber, and at the same time, to avoid particles sputtering onto the water supply pipeline and affecting the subsequent use of the water supply pipeline, the cooling assembly also includes two water supply pipelines; the two water supply pipelines are respectively arranged in the telescopic rods 2 in the two telescopic components, and at the same time, the two water supply pipelines are located inside the coating machine at one end and are respectively connected to the two ends of the cooling coil 3, and the two water supply pipelines are located outside the coating machine at one end and are respectively connected to the water source and the water collecting tank.

[0039] In the present invention, the cooling assembly is connected to the baffle, which can facilitate the cooling and heat removal of the baffle during the sputtering operation, thus effectively preventing the baffle from being deformed due to overheating. By connecting the movable section of the telescopic assembly to the baffle, the position of the baffle can be moved by telescopic means, thereby quickly switching the baffle between the blocking state and the non-blocking state. At the same time, since the carrying capacity of the telescopic assembly is better than that of the traditional movable connection structure, it can effectively support the baffle with accessories such as water cooling. The baffle has good mobility, strong carrying capacity, and strong stability. It is suitable for supporting baffles with accessories such as water cooling, and can avoid deformation of the baffle due to overheating.

Claims

1. A baffle for an evaporation boat used in a vacuum coating machine, comprising a baffle (1), characterized in that: Also included are a cooling assembly and a telescopic assembly; The baffle (1) is located inside the coating machine and serves as a shielding plate above the evaporation boat; The cooling assembly is connected to the baffle (1) and is used to cool the baffle (1); The movable section of the telescopic assembly penetrates into the interior of the coating machine and is connected to the baffle (1), and the fixed section is located outside the coating machine and is used to change the position of the baffle (1) and the cooling coil (3) in the coating machine.

2. The evaporation boat baffle for a vacuum coating machine according to claim 1, characterized in that: The baffle (1) has a double-layer structure, with the upper layer being a cooling layer (4) and the lower layer being a supporting frame layer (5).

3. The evaporation boat baffle for a vacuum coating machine according to claim 2, characterized in that: The movable section of the telescopic assembly is a telescopic rod (2), and the telescopic rod (2) extends into the film coating chamber through an installation opening provided on the coating machine, and a dynamic sealing ring (6) is installed at the installation opening on the coating machine to seal with the telescopic rod (2).

4. The evaporation boat baffle for a vacuum coating machine according to claim 3, characterized in that: The telescopic assembly further comprises a bellows (7) located in the coating chamber. The bellows (7) is sleeved on the outside of the telescopic rod (2), and one end of the bellows is connected to the end of the telescopic rod (2) close to the baffle (1), and the other end of the bellows is connected to the coating machine.

5. The evaporation boat baffle for a vacuum coating machine according to claim 4, characterized in that: The telescopic assembly further comprises a sleeve (8), which is sleeved on the outside of the bellows (7) at one end close to the baffle (1).

6. The evaporation boat baffle for a vacuum coating machine according to claim 5, characterized in that: The sleeve (8) is composed of two symmetrical semicircular tubes.

7. The evaporation boat baffle for a vacuum coating machine according to claim 6, characterized in that: The telescopic assembly further comprises a slide (9) and a driving mechanism; The fixed section of the telescopic assembly is a slide (9) fixedly connected to the outside of the coating machine; The slider (10) is slidably mounted on the slide (9) and is connected to the other end of the telescopic rod (2); The driving mechanism is connected to the slider (10) and is used to drive the slider (10) to move back and forth along the length direction of the slide (9).

8. The evaporation boat baffle for a vacuum coating machine according to claim 1, characterized in that: The cooling assembly comprises a cooling coil (3), which is mounted on the back of the baffle (1).

9. The evaporation boat baffle for a vacuum coating machine according to claim 8, characterized in that: There are two telescopic components, which are respectively connected to both ends of the baffle (1) in the length direction.

10. The evaporation boat baffle for a vacuum coating machine according to claim 9, characterized in that: The cooling assembly further comprises two water supply pipes; the two water supply pipes are respectively arranged in the telescopic rods (2) in the two telescopic assemblies, and at the same time, one end of the two water supply pipes located inside the coating machine is respectively connected to the two ends of the cooling coil (3), and one end of the two water supply pipes located outside the coating machine is respectively connected to the water source and the water collecting tank.

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