Servo electro-hydraulic actuator and multi-axis motion control system

Abstract

The utility model provides a servo electro-hydraulic actuator and a multi-axis motion control system, and the servo electro-hydraulic actuator comprises an execution part, a main valve control part, a detection sensor and an axis motion controller; wherein the execution part comprises a main valve body and a main valve element, a first valve cavity and a second valve cavity are formed in the main valve body, and the main valve element is constructed to move in the first direction and the second direction under the control of the pressure difference between hydraulic oil in the first valve cavity and hydraulic oil in the second valve cavity; the main valve control part is constructed to be used for controlling the pressure of hydraulic oil in the first valve cavity and the pressure of hydraulic oil in the second valve cavity; the detection sensor is configured to be used for detecting motion parameters of the main valve element; the shaft motion controller is configured to receive a control instruction including a target parameter and control the main valve control part at least based on the motion parameter, obtained by the detection sensor, of the main valve element so that the motion parameter of the main valve element can reach the target parameter.

Description

Technical Field

[0001] The present disclosure relates to the field of hydraulic equipment, and more precisely, to a servo electro-hydraulic actuator; the present disclosure also relates to a multi-axis motion control system. Background Art

[0002] With the increasing degree of industrial automation, the market has high expectations for mechatronics. However, the closed-loop control procedures of existing servo electro-hydraulic actuators are cumbersome and require real-time debugging based on load conditions.

[0003] Therefore, it is urgent to invent a servo electro-hydraulic actuator that is more convenient to use. Utility Model Content

[0004] In order to solve the problems existing in the prior art, the present disclosure provides a servo electro-hydraulic actuator.

[0005] According to a first aspect of the present disclosure, there is provided a servo electro-hydraulic actuator, comprising:

[0006] an actuator, the actuator comprising a main valve body and a main valve core, the main valve body being formed with a first valve cavity and a second valve cavity, the main valve core being configured to move in a first direction and a second direction controlled by a pressure difference between hydraulic oil in the first valve cavity and hydraulic oil in the second valve cavity;

[0007] a main valve control portion configured to control the hydraulic oil pressure in the first valve chamber and the hydraulic oil pressure in the second valve chamber;

[0008] a detection sensor configured to detect a motion parameter of the main valve core;

[0009] An axis motion controller is configured to receive control instructions including target parameters and control the main valve control unit based at least on the motion parameters of the main valve core obtained by the detection sensor so that the motion parameters of the main valve core reach the target parameters.

[0010] In one embodiment of the present disclosure, the detection sensor includes a position sensor configured to obtain the position of the main valve core;

[0011] The axis motion controller is configured to receive a control instruction including a target position and control the main valve control unit based on at least the position of the main valve core acquired by the position sensor so that the position of the main valve core is at the target position.

[0012] In one embodiment of the present disclosure, the axis motion controller is configured to accept control instructions including a target moving direction and a target speed, and obtain the moving direction and moving speed of the main valve core at least based on the position of the main valve core continuously obtained by the position sensor, and control the main valve control unit so that the moving direction of the main valve core is the target moving direction and the moving speed reaches the target speed.

[0013] In one embodiment of the present disclosure, the detection sensor includes a first pressure sensor and a second pressure sensor, the first pressure sensor being configured to obtain the hydraulic oil pressure in the first valve chamber, and the second pressure sensor being configured to obtain the hydraulic oil pressure in the second valve chamber;

[0014] The axis motion controller is configured to accept control instructions including a target pressure, and obtain a current pressure difference between the hydraulic oil in the first valve chamber and the second valve chamber based at least on the hydraulic oil pressure in the first valve chamber obtained by the first pressure sensor and the hydraulic oil pressure in the second valve chamber obtained by the second pressure sensor, and use the current pressure difference to control the main valve control unit so that the current pressure difference between the hydraulic oil in the first valve chamber and the second valve chamber reaches the target pressure.

[0015] In one embodiment of the present disclosure, the axis motion controller is configured to accept control instructions including a target position and a target pressure, and obtain a current pressure difference between the hydraulic oil in the first valve chamber and the second valve chamber based at least on the position of the main valve core obtained by the position sensor, the hydraulic oil pressure in the first valve chamber obtained by the first pressure sensor, and the hydraulic oil pressure in the second valve chamber obtained by the second pressure sensor; and control the main valve control unit based on the position of the main valve core and the current pressure difference so that the position of the main valve core is at the target position and the current pressure difference between the hydraulic oil in the first valve chamber and the second valve chamber reaches the target pressure.

[0016] In one embodiment of the present disclosure, the detection sensor includes a force sensor, which is disposed at an outer end of the main valve core and is configured to obtain the force between the main valve core and an external object;

[0017] The axis motion controller is configured to receive control instructions including a target force, and control the main valve control unit based at least on the force between the main valve core and the external object obtained by the force sensor, so that the force between the main valve core and the external object reaches the target force.

[0018] In one embodiment of the present disclosure, the axis motion controller is configured to accept control instructions including a target position and a target force, and control the main valve control unit based at least on the position of the main valve core obtained by the position sensor and the force between the main valve core and the external object obtained by the force sensor, so that the position of the main valve core is at the target position and the force between the main valve core and the external object reaches the target force.

[0019] In one embodiment of the present disclosure, the main valve control unit includes a solenoid reversing valve, a reversing valve sensor and a reversing valve controller;

[0020] The electromagnetic reversing valve at least includes a reversing valve body, a reversing valve core, and a first electromagnet and a second electromagnet disposed on both sides of the reversing valve core; the reversing valve core is configured to be controlled by the first electromagnet and the second electromagnet to move between a first position and a second position. In the first position, external hydraulic oil flows into the first valve chamber, and the hydraulic oil in the second valve chamber is discharged to the outside. In the second position, external hydraulic oil flows into the second valve chamber, and the hydraulic oil in the first valve chamber is discharged to the outside.

[0021] The reversing valve sensor is configured to obtain the position of the reversing valve core, and the reversing valve controller is configured to receive a control signal from the axis motion controller, and control the reversing valve core to move to a target position based on the position of the reversing valve core obtained by the reversing valve sensor.

[0022] In one embodiment of the present disclosure, a reversing valve cavity is formed in the reversing valve body, and at least an oil supply port, a first oil outlet, a second oil outlet, and a pressure relief port are formed in the reversing valve cavity, wherein the first oil outlet is in communication with the first valve cavity, and the second oil outlet is in communication with the second valve cavity;

[0023] In the first position, the oil supply port is connected to the first oil outlet, and the pressure relief port is connected to the second oil outlet. The hydraulic oil in the oil supply port flows into the first valve chamber through the first oil outlet, and the hydraulic oil in the second valve chamber flows out through the second oil outlet and the pressure relief port.

[0024] In the second position, the oil supply port is connected to the second oil outlet, and the pressure relief port is connected to the first oil outlet. The hydraulic oil in the oil supply port flows to the second valve chamber through the second oil outlet, and the hydraulic oil in the first valve chamber flows out through the first oil outlet and the pressure relief port.

[0025] According to a second aspect of the present disclosure, a multi-axis motion control system is provided, comprising a master controller and at least two of the servo electro-hydraulic actuators, wherein the master controller is connected to signals of each of the servo electro-hydraulic actuators and is configured to obtain a master control signal and control each of the servo electro-hydraulic actuators separately based on the master control signal.

[0026] The present disclosure provides a servo electro-hydraulic actuator, comprising an actuator, a main valve control unit, a detection sensor and an axis motion controller; wherein the actuator comprises a main valve body and a main valve core, a first valve cavity and a second valve cavity are formed in the main valve body, and the main valve core is constructed to move along a first direction and a second direction under the control of the pressure difference between the hydraulic oil in the first valve cavity and the hydraulic oil in the second valve cavity; the main valve control unit is constructed to control the hydraulic oil pressure in the first valve cavity and the hydraulic oil pressure in the second valve cavity; the detection sensor is configured to detect the motion parameters of the main valve core; the axis motion controller is configured to accept a control instruction including a target parameter, and control the main valve control unit based on at least the motion parameters of the main valve core obtained by the detection sensor, so that the motion parameters of the main valve core reach the target parameters.

[0027] That is, during the operation of the servo electro-hydraulic actuator disclosed herein, the axis motion controller can accept control instructions including target parameters, and control the main valve control unit based at least on the motion parameters of the main valve core obtained by the detection sensor. The main valve control unit can control the hydraulic oil pressure in the first valve chamber and the hydraulic oil pressure in the second valve chamber, and then control the main valve core to move in the first direction and the second direction, so that the motion parameters of the main valve core reach the target parameters and meet the control requirements.

[0028] Compared to existing servo electro-hydraulic control devices, the servo electro-hydraulic actuator disclosed herein combines an actuator, a main valve control unit, a detection sensor, and an axis motion controller. The axis motion controller controls the main valve control unit, which in turn controls the actuator's output. The detection sensor acquires the motion parameters of the main valve core, enabling closed-loop control through feedback. This servo electro-hydraulic actuator eliminates the need for complex wiring between on-site and remote control cabinets, saving workload and improving control reliability.

[0029] The servo electro-hydraulic actuator disclosed herein has large output thrust, short full stroke time, no overshoot, and smooth operation. It integrates the simplicity of electric operation, the speed of hydraulic transmission, the reliability of electronic control, and the flexibility of user configuration. It has the advantages of fast response speed, high control accuracy, large output power, and compact structure. In addition, the servo electro-hydraulic actuator disclosed herein is combined with advanced closed-loop control algorithms to meet various high-precision, high-difficulty, and complex control requirements. It has incomparable advantages in some application occasions and working environments, and can therefore be widely used in metallurgy, military industry, flexible machine tools and other industries; the servo electro-hydraulic actuator disclosed herein can also be suitable for harsh working conditions such as high pressure difference and high viscosity media.

[0030] Other features and advantages of the present disclosure will become apparent from the following detailed description of exemplary embodiments of the present disclosure with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0032] Figure 1 is a structural diagram of a servo electro-hydraulic actuator provided by an embodiment of the present disclosure;

[0033] Figure 2 is another structural schematic diagram of the servo electro-hydraulic actuator provided by an embodiment of the present disclosure;

[0034] Figure 3 is a partial structural diagram of a servo electro-hydraulic actuator provided by an embodiment of the present disclosure;

[0035] Figure 4 is a schematic diagram of the logical structure of the servo electro-hydraulic actuator provided by an embodiment of the present disclosure;

[0036] Figure 5 is a schematic diagram of the logical structure of the servo electro-hydraulic actuator provided by an embodiment of the present disclosure;

[0037] Figure 6 is a schematic diagram of the logical structure of the servo electro-hydraulic actuator provided by an embodiment of the present disclosure;

[0038] Figure 7 is a schematic diagram of the logical structure of the servo electro-hydraulic actuator provided by an embodiment of the present disclosure;

[0039] Figure 8 is a schematic diagram of the logical structure of the servo electro-hydraulic actuator provided by an embodiment of the present disclosure;

[0040] Figures 1 to 8 The corresponding relationship between the component names and reference numerals is as follows:

[0041] 10. Actuator; 11. Main valve body; 12. Main valve core; 13. First valve chamber; 14. Second valve chamber; 20. Main valve control unit; 21. Solenoid reversing valve; 22. Reversing valve sensor; 23. Reversing valve controller; 31. Position sensor; 32. First pressure sensor; 33. Second pressure sensor; 34. Force sensor; 40. Axis motion controller; 50. Main controller. DETAILED DESCRIPTION

[0042] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values of the parts and steps set forth in these embodiments do not limit the scope of the present disclosure. In all examples shown and discussed herein, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiments may have different values.

[0043] The following description sets forth numerous specific details to facilitate a thorough understanding of the present disclosure. However, the present disclosure can be implemented in many other ways than those described herein, and those skilled in the art may make similar generalizations without violating the scope of the present disclosure. Therefore, the present disclosure is not limited to the specific implementations disclosed below. Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but, where appropriate, such techniques, methods, and apparatus should be considered part of the specification.

[0044] The terms used in one or more embodiments of the present disclosure are for the purpose of describing specific embodiments only and are not intended to limit one or more embodiments of the present disclosure. The singular forms "a", "the", and "the" used in one or more embodiments of the present disclosure and the appended claims are also intended to include plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used in one or more embodiments of the present disclosure refers to and includes any or all possible combinations of one or more associated listed items.

[0045] It should be understood that although the terms first, second, etc. may be used to describe various information in one or more embodiments of the present disclosure, such information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of one or more embodiments of the present disclosure, the first may also be referred to as the second, and similarly, the second may also be referred to as the first. Depending on the context, the word "if" as used herein may be interpreted as "at the time of" or "when" or "in response to determination". In this article, "upper", "lower", "front", "back", "left", "right", etc. are only used to indicate the relative positional relationship between the relevant parts, rather than to limit the absolute position of these relevant parts. In this article, "equal", "same", etc. are not strict mathematical and / or geometric limitations, but also include errors that can be understood by those skilled in the art and are allowed by manufacturing or use. Unless otherwise stated, the numerical ranges herein include not only the entire range within its two endpoints, but also several sub-ranges contained therein.

[0046] The present disclosure provides a servo electro-hydraulic actuator, comprising an actuator, a main valve control unit, a detection sensor and an axis motion controller; wherein the actuator comprises a main valve body and a main valve core, a first valve cavity and a second valve cavity are formed in the main valve body, and the main valve core is constructed to move along a first direction and a second direction under the control of the pressure difference between the hydraulic oil in the first valve cavity and the hydraulic oil in the second valve cavity; the main valve control unit is constructed to control the hydraulic oil pressure in the first valve cavity and the hydraulic oil pressure in the second valve cavity; the detection sensor is configured to detect the motion parameters of the main valve core; the axis motion controller is configured to accept a control instruction including a target parameter, and control the main valve control unit based on at least the motion parameters of the main valve core obtained by the detection sensor, so that the motion parameters of the main valve core reach the target parameters.

[0047] That is, during the operation of the servo electro-hydraulic actuator disclosed herein, the axis motion controller can accept control instructions including target parameters, and control the main valve control unit based at least on the motion parameters of the main valve core obtained by the detection sensor. The main valve control unit can control the hydraulic oil pressure in the first valve chamber and the hydraulic oil pressure in the second valve chamber, and then control the main valve core to move in the first direction and the second direction, so that the motion parameters of the main valve core reach the target parameters and meet the control requirements.

[0048] Compared to existing servo electro-hydraulic control devices, the servo electro-hydraulic actuator disclosed herein combines an actuator, a main valve control unit, a detection sensor, and an axis motion controller. The axis motion controller controls the main valve control unit, which in turn controls the actuator's output. The detection sensor acquires the motion parameters of the main valve core, enabling closed-loop control through feedback. This servo electro-hydraulic actuator eliminates the need for complex wiring between on-site and remote control cabinets, saving workload and improving control reliability.

[0049] The servo electro-hydraulic actuator disclosed herein has large output thrust, short full stroke time, no overshoot, and smooth operation. It integrates the simplicity of electric operation, the speed of hydraulic transmission, the reliability of electronic control, and the flexibility of user configuration. It has the advantages of fast response speed, high control accuracy, large output power, and compact structure. In addition, the servo electro-hydraulic actuator disclosed herein is combined with advanced closed-loop control algorithms to meet various high-precision, high-difficulty, and complex control requirements. It has incomparable advantages in some application occasions and working environments, and can therefore be widely used in metallurgy, military industry, flexible machine tools and other industries; the servo electro-hydraulic actuator disclosed herein can also be suitable for harsh working conditions such as high pressure difference and high viscosity media.

[0050] For ease of understanding, refer to Figures 1 to 8 , the specific structure and working principle of the servo electro-hydraulic actuator disclosed in the present invention are explained in detail with reference to an embodiment.

[0051] like Figure 1 and Figure 2 As shown, the present disclosure provides a servo electro-hydraulic actuator, including an actuator 10, a main valve control unit 20, a detection sensor and an axis motion controller 40; wherein the actuator 10 includes a main valve body 11 and a main valve core 12, and a first valve chamber 13 and a second valve chamber 14 are formed in the main valve body 11, and the main valve core 12 is constructed to move along a first direction and a second direction under the control of the pressure difference between the hydraulic oil in the first valve chamber 13 and the hydraulic oil in the second valve chamber 14; the main valve control unit 20 is constructed to control the hydraulic oil pressure in the first valve chamber 13 and the hydraulic oil pressure in the second valve chamber 14; the detection sensor is configured to detect the motion parameters of the main valve core 12; the axis motion controller 40 is configured to receive a control instruction including a target parameter, and control the main valve control unit 20 based on at least the motion parameters of the main valve core 12 obtained by the detection sensor, so that the motion parameters of the main valve core 12 reach the target parameters.

[0052] That is, during the operation of the servo electro-hydraulic actuator disclosed herein, the axis motion controller 40 can accept control instructions including target parameters, and control the main valve control unit 20 based on at least the motion parameters of the main valve core 12 obtained by the detection sensor. The main valve control unit 20 can control the hydraulic oil pressure in the first valve chamber 13 and the hydraulic oil pressure in the second valve chamber 14, and then control the main valve core 12 to move in the first direction and the second direction, so that the motion parameters of the main valve core 12 reach the target parameters and meet the control requirements.

[0053] Compared to existing servo electro-hydraulic control devices, the servo electro-hydraulic actuator disclosed herein combines an actuator 10, a main valve control unit 20, a detection sensor, and an axis motion controller 40. The axis motion controller 40 controls the main valve control unit 20, which in turn controls the output of the actuator 10. The detection sensor can also obtain the motion parameters of the main valve core 12, thereby achieving closed-loop control through feedback. The servo electro-hydraulic actuator disclosed herein avoids complex wiring between on-site and remote control cabinets, saving workload and improving control reliability.

[0054] The servo electro-hydraulic actuator disclosed herein has large output thrust, short full stroke time, no overshoot, and smooth operation. It integrates the simplicity of electric operation, the speed of hydraulic transmission, the reliability of electronic control, and the flexibility of user configuration. It has the advantages of fast response speed, high control accuracy, large output power, and compact structure. In addition, the servo electro-hydraulic actuator disclosed herein is combined with advanced closed-loop control algorithms to meet various high-precision, high-difficulty, and complex control requirements. It has incomparable advantages in some application occasions and working environments, and can therefore be widely used in metallurgy, military industry, flexible machine tools and other industries; the servo electro-hydraulic actuator disclosed herein can also be suitable for harsh working conditions such as high pressure difference and high viscosity media.

[0055] Specifically, in the closed-loop control logic of the servo electro-hydraulic actuator disclosed in the present invention, after the axis motion controller 40 receives the control instructions including the target parameters and the motion parameters of the main valve core 12 obtained based on the detection sensor, it can make a real-time comparison between the target parameters and the motion parameters of the main valve core 12 obtained by the detection sensor, and perform a closed-loop operation on their deviations. The calculation result is used as the control signal of the main valve control unit 20 to change the hydraulic oil flow entering the first valve chamber 13 and the second valve chamber 14, so that the valve core moves in the direction of eliminating the deviation until the deviation reaches a preset value.

[0056] Specifically, such as Figure 4 As shown, in one embodiment of the present disclosure, the reversing valve control unit includes an electromagnetic reversing valve 21, a reversing valve sensor 22 and a reversing valve controller 23; the electromagnetic reversing valve 21 includes at least a reversing valve body, a reversing valve core and a first electromagnet and a second electromagnet arranged on both sides of the reversing valve core; the reversing valve core is constructed to be controlled by the first electromagnet and the second electromagnet to move between a first position and a second position. When it is in the first position, the external hydraulic oil flows to the first valve chamber 13, and the hydraulic oil in the second valve chamber 14 is discharged to the outside. When it is in the second position, the external hydraulic oil flows to the second valve chamber 14, and the hydraulic oil in the first valve chamber 13 is discharged to the outside. The reversing valve sensor 22 is configured to obtain the position of the reversing valve core, and the reversing valve controller 23 is configured to receive a control signal from the axis motion controller 40, and control the reversing valve core to move to the target position based on the position of the reversing valve core obtained by the reversing valve sensor 22.

[0057] In this way, during the operation of the main valve control unit 20 of the servo electro-hydraulic actuator disclosed in the present invention, the reversing valve controller 23 can receive the control signal from the axis motion controller 40, and control the first electromagnet and the second electromagnet based on the position of the reversing valve core obtained by the reversing valve sensor 22, and then control the reversing valve core to move between the first position and the second position, thereby controlling the reversing valve core to move to the target position, and then controlling the flow state of the hydraulic oil in the first valve chamber 13 and the second valve chamber 14.

[0058] Specifically, in one embodiment of the present disclosure, a reversing valve cavity is formed in the main valve body 11, and at least an oil supply port, a first oil outlet, a second oil outlet and a pressure relief port are formed in the reversing valve cavity, the first oil outlet is connected to the first valve cavity 13, and the second oil outlet is connected to the second valve cavity 14; in the first position, the oil supply port is connected to the first oil outlet, and the pressure relief port is connected to the second oil outlet, the hydraulic oil of the oil supply port flows to the first valve cavity 13 through the first oil outlet, and the hydraulic oil of the second valve cavity 14 flows out through the second oil outlet and the pressure relief port; in the second position, the oil supply port is connected to the second oil outlet, and the pressure relief port is connected to the first oil outlet, the hydraulic oil of the oil supply port flows to the second valve cavity 14 through the second oil outlet, and the hydraulic oil of the first valve cavity 13 flows out through the first oil outlet and the pressure relief port.

[0059] In this way, the solenoid reversing valve 21 disclosed in the present invention can achieve the purpose of controlling the flow of hydraulic oil in the first valve chamber 13 and the second valve chamber 14 by controlling the main valve core 12 to move between the first position and the second position, and control the main valve core 12 to move in the first direction and the second direction through the pressure difference of the hydraulic oil in the first valve chamber 13 and the second valve chamber 14.

[0060] like Figure 1 and Figure 4 As shown, in one embodiment of the present disclosure, the detection sensor includes a position sensor 31, which is configured to obtain the position of the main valve core 12; the axis motion controller 40 is configured to accept a control instruction including a target position, and control the main valve control unit 20 based at least on the position of the main valve core 12 obtained by the position sensor 31, so that the position of the main valve core 12 is at the target position.

[0061] That is, during the operation of the servo electro-hydraulic actuator disclosed herein, the axis motion controller 40 is able to accept control instructions including the target position, and control the main valve control unit 20 based at least on the position of the main valve core 12 obtained by the position sensor 31, so that the position of the main valve core 12 is located at the target position, thereby achieving effective control of the position of the valve core.

[0062] Furthermore, in one embodiment of the present disclosure, the axis motion controller 40 is configured to accept control instructions including a target moving direction and a target speed, and obtain the moving direction and moving speed of the main valve core 12 based at least on the position of the main valve core 12 continuously obtained by the position sensor 31, and control the main valve control unit 20 so that the moving direction of the main valve core 12 is the target moving direction and the moving speed reaches the target speed.

[0063] That is, during the operation of the servo electro-hydraulic actuator disclosed in the present invention, the axis motion controller 40 is able to accept control instructions including the target movement direction and target speed, and obtain the movement direction and movement speed of the main valve core 12 based at least on the position of the main valve core 12 continuously obtained by the position sensor 31, and control the main valve control unit 20 so that the movement direction of the main valve core 12 is the target movement direction, and the movement speed reaches the target speed, thereby realizing effective control of the movement direction and movement speed of the valve core.

[0064] It can be understood that the axis motion controller 40 of the servo electro-hydraulic actuator disclosed in the present invention can also obtain the acceleration direction and value of the main valve core 12 based on the position of the main valve core 12 continuously obtained by the position sensor 31, thereby realizing effective control of the acceleration of the main valve core 12. The principle is similar and will not be repeated here.

[0065] like Figure 1 and Figure 5As shown, in one embodiment of the present disclosure, the detection sensor includes a first pressure sensor 32 and a second pressure sensor 33. The first pressure sensor 32 is configured to obtain the hydraulic oil pressure in the first valve chamber 13, and the second pressure sensor 33 is configured to obtain the hydraulic oil pressure in the second valve chamber 14.

[0066] The axis motion controller 40 is configured to receive control instructions including a target pressure, and obtain the current pressure difference between the hydraulic oil in the first valve chamber 13 and the second valve chamber 14 based on at least the hydraulic oil pressure in the first valve chamber 13 obtained by the first pressure sensor 32 and the hydraulic oil pressure in the second valve chamber 14 obtained by the second pressure sensor 33, and use the current pressure difference to control the main valve control unit 20 so that the current pressure difference between the hydraulic oil in the first valve chamber 13 and the second valve chamber 14 reaches the target pressure.

[0067] That is, during the operation of the servo electro-hydraulic actuator disclosed in the present invention, the axis motion controller 40 is able to accept control instructions including target pressure, and obtain the current pressure difference between the hydraulic oil in the first valve chamber 13 and the second valve chamber 14 based on at least the hydraulic oil pressure in the first valve chamber 13 obtained by the first pressure sensor 32 and the hydraulic oil pressure in the second valve chamber 14 obtained by the second pressure sensor 33, and use the current pressure difference to control the main valve control unit 20 so that the current pressure difference between the hydraulic oil in the first valve chamber 13 and the second valve chamber 14 reaches the target pressure, thereby controlling the valve core to output the target pressure outward, thereby achieving effective control of the valve core output pressure.

[0068] Further, such as Figure 6 As shown, in one embodiment of the present disclosure, the axis motion controller 40 is configured to accept a control instruction including a target position and a target pressure, and obtain a current pressure difference between the hydraulic oil in the first valve chamber 13 and the second valve chamber 14 based at least on the position of the main valve core 12 obtained by the position sensor 31, the hydraulic oil pressure in the first valve chamber 13 obtained by the first pressure sensor 32, and the hydraulic oil pressure in the second valve chamber 14 obtained by the second pressure sensor 33; and control the main valve control unit 20 based on the position of the main valve core 12 and the current pressure difference, so that the position of the main valve core 12 is at the target position, and the current pressure difference between the hydraulic oil in the first valve chamber 13 and the second valve chamber 14 reaches the target pressure.

[0069] That is, during the operation of the servo electro-hydraulic actuator disclosed in the present invention, the axis motion controller 40 is able to accept control instructions including a target position and a target pressure, and obtain the current pressure difference between the hydraulic oil in the first valve chamber 13 and the second valve chamber 14 based on at least the position of the main valve core 12 obtained by the position sensor 31, the hydraulic oil pressure in the first valve chamber 13 obtained by the first pressure sensor 32, and the hydraulic oil pressure in the second valve chamber 14 obtained by the second pressure sensor 33; and control the main valve control unit 20 based on the position of the main valve core 12 and the current pressure difference, so that the position of the main valve core 12 is at the target position, and the current pressure difference between the hydraulic oil in the first valve chamber 13 and the second valve chamber 14 reaches the target pressure, so as to control the valve core to output the target pressure to the outside after reaching the target position, thereby realizing effective linkage control of the position of the valve core-output pressure.

[0070] like Figure 3 and Figure 7 As shown, in one embodiment of the present disclosure, the detection sensor includes a force sensor 34, which is arranged at the outer end of the main valve core 12 and is configured to obtain the force between the main valve core 12 and the external object; the axis motion controller 40 is configured to receive a control instruction including a target force, and control the main valve control unit 20 based on at least the force between the main valve core 12 and the external object obtained by the force sensor 34, so that the force between the main valve core 12 and the external object reaches the target force.

[0071] That is, during the operation of the servo electro-hydraulic actuator disclosed herein, the axis motion controller 40 is able to accept control instructions including target force, and control the main valve control unit 20 based at least on the force between the main valve core 12 and the external object obtained by the force sensor 34, so that the force between the main valve core 12 and the external object reaches the target force, thereby realizing effective control of the outward output force of the valve core.

[0072] Further, such as Figure 8 As shown, in one embodiment of the present disclosure, the axis motion controller 40 is configured to accept control instructions including a target position and a target force, and control the main valve control unit 20 based at least on the position of the main valve core 12 obtained by the position sensor 31 and the force between the main valve core 12 and the external object obtained by the force sensor 34, so that the position of the main valve core 12 is at the target position and the force between the main valve core 12 and the external object reaches the target force.

[0073] That is, during the operation of the servo electro-hydraulic actuator disclosed in the present invention, the axis motion controller 40 is able to accept control instructions including the target position and the target force, and control the main valve control unit 20 based at least on the position of the main valve core 12 obtained by the position sensor 31 and the force between the main valve core 12 and the external object obtained by the force sensor 34, so that the position of the main valve core 12 is at the target position, and the force between the main valve core 12 and the external object reaches the target force, thereby controlling the valve core to output the target force outward after reaching the target position, thereby realizing effective linkage control of the position of the valve core-output force.

[0074] It can be understood that when the servo electro-hydraulic actuator disclosed in the present invention is used in conjunction with a rotatable mechanism, an angle sensor can also be provided on the rotatable mechanism to achieve effective control of the rotation angle, rotation speed or rotation torque of the rotatable mechanism, or effective linkage control of at least two of the above three. The principles are similar and will not be repeated here.

[0075] It can be seen that in the servo electro-hydraulic actuator disclosed in the present invention, the axis motion controller 40 is integrated with the main valve control unit 20, and no additional motion controller is required, which can simplify the user's complex external closed-loop control and provide control reliability and accuracy.

[0076] After actual measurement, the servo electro-hydraulic actuator disclosed in the present invention has a repeatability accuracy of 0.5mm to 0.001mm, a positioning time of 50ms to 300ms, a minimum stable speed of 0.01mm / s, a real-time position accuracy of 1mm to 0.01mm, a speed control accuracy of ±0.5% of the operating speed, a pressure control accuracy of ±2bar to ±0.1bar, and a real-time synchronization accuracy of 1mm to 0.01mm. These performances are greatly improved compared to existing servo electro-hydraulic actuators.

[0077] like Figure 2 As shown, the present disclosure also provides a multi-axis motion control system, including a master controller 50 and at least two of the aforementioned servo electro-hydraulic actuators. The master controller 50 is connected to the signals of each servo electro-hydraulic actuator and is configured to obtain a master control signal and control each servo electro-hydraulic actuator based on the master control signal. Specifically, each servo electro-hydraulic actuator can act as a slave axis and achieve multi-axis synchronization or coordinated control by communicating with the master controller 50. In order to avoid communication lag between each servo electro-hydraulic actuator, an internal high-speed bus can be used to communicate with each other to ensure fast communication between each servo electro-hydraulic actuator and the master controller 50.

[0078] The embodiments of the present disclosure have been described above. The above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terms used herein are selected to best explain the principles of the embodiments, their practical applications, or technical improvements in the marketplace, or to enable other persons skilled in the art to understand the embodiments disclosed herein. The scope of the present disclosure is defined by the appended claims.

Claims

1. A servo electro-hydraulic actuator, characterized in that: include: An actuator (10), the actuator (10) comprising a main valve body (11) and a main valve core (12), wherein a first valve chamber (13) and a second valve chamber (14) are formed in the main valve body (11), and the main valve core (12) is configured to move in a first direction and a second direction under the control of a pressure difference between hydraulic oil in the first valve chamber (13) and hydraulic oil in the second valve chamber (14); a main valve control unit (20), the main valve control unit (20) being configured to control the hydraulic oil pressure in the first valve chamber (13) and the hydraulic oil pressure in the second valve chamber (14); a detection sensor configured to detect a motion parameter of the main valve core (12); An axis motion controller (40) is configured to receive a control instruction including a target parameter and control the main valve control unit (20) based at least on the motion parameter of the main valve core (12) obtained by the detection sensor so that the motion parameter of the main valve core (12) reaches the target parameter.

2. The servo electro-hydraulic actuator according to claim 1, characterized in that: The detection sensor comprises a position sensor (31), and the position sensor (31) is configured to obtain the position of the main valve core (12); The axis motion controller (40) is configured to receive a control instruction including a target position, and control the main valve control unit (20) based at least on the position of the main valve core (12) obtained by the position sensor (31) so that the position of the main valve core (12) is located at the target position.

3. The servo electro-hydraulic actuator according to claim 2, characterized in that: The axis motion controller (40) is configured to receive control instructions including a target moving direction and a target speed, and obtain the moving direction and moving speed of the main valve core (12) based on at least the position of the main valve core (12) continuously obtained by the position sensor (31), and control the main valve control unit (20) so that the moving direction of the main valve core (12) is the target moving direction and the moving speed reaches the target speed.

4. The servo electro-hydraulic actuator according to claim 2, characterized in that: The detection sensor comprises a first pressure sensor (32) and a second pressure sensor (33), wherein the first pressure sensor (32) is configured to obtain the hydraulic oil pressure in the first valve chamber (13), and the second pressure sensor (33) is configured to obtain the hydraulic oil pressure in the second valve chamber (14); The axis motion controller (40) is configured to receive a control instruction including a target pressure, and obtain a current pressure difference between the hydraulic oil in the first valve chamber (13) and the second valve chamber (14) based on at least the hydraulic oil pressure in the first valve chamber (13) obtained by the first pressure sensor (32) and the hydraulic oil pressure in the second valve chamber (14) obtained by the second pressure sensor (33), and control the main valve control unit (20) using the current pressure difference so that the current pressure difference between the hydraulic oil in the first valve chamber (13) and the second valve chamber (14) reaches the target pressure.

5. The servo electro-hydraulic actuator according to claim 4, characterized in that: The axis motion controller (40) is configured to receive a control instruction including a target position and a target pressure, and obtain a current pressure difference between the hydraulic oil in the first valve chamber (13) and the second valve chamber (14) based at least on the position of the main valve core (12) obtained by the position sensor (31), the hydraulic oil pressure in the first valve chamber (13) obtained by the first pressure sensor (32), and the hydraulic oil pressure in the second valve chamber (14) obtained by the second pressure sensor (33); and control the main valve control unit (20) based on the position of the main valve core (12) and the current pressure difference, so that the position of the main valve core (12) is located at the target position and the current pressure difference between the hydraulic oil in the first valve chamber (13) and the second valve chamber (14) reaches the target pressure.

6. The servo electro-hydraulic actuator according to claim 2, characterized in that: The detection sensor comprises a force sensor (34), the force sensor (34) being arranged at the outer end of the main valve core (12) and being configured to obtain the force between the main valve core (12) and an external object; The axis motion controller (40) is configured to receive a control instruction including a target force, and control the main valve control unit (20) based on at least the force between the main valve core (12) and the external object obtained by the force sensor (34) so that the force between the main valve core (12) and the external object reaches the target force.

7. The servo electro-hydraulic actuator according to claim 6, characterized in that: The axis motion controller (40) is configured to receive control instructions including a target position and a target force, and control the main valve control unit (20) based at least on the position of the main valve core (12) obtained by the position sensor (31) and the force between the main valve core (12) and an external object obtained by the force sensor (34) so that the position of the main valve core (12) is located at the target position and the force between the main valve core (12) and an external object reaches the target force.

8. The servo electro-hydraulic actuator according to any one of claims 1 to 7, characterized in that: The main valve control unit (20) includes an electromagnetic reversing valve (21), a reversing valve sensor (22) and a reversing valve controller (23); The electromagnetic reversing valve (21) comprises at least a reversing valve body, a reversing valve core, and a first electromagnet and a second electromagnet arranged on both sides of the reversing valve core; the reversing valve core is constructed to be controlled by the first electromagnet and the second electromagnet to move between a first position and a second position, and in the first position, the external hydraulic oil flows into the first valve chamber (13), and the hydraulic oil in the second valve chamber (14) is discharged to the outside; in the second position, the external hydraulic oil flows into the second valve chamber (14), and the hydraulic oil in the first valve chamber (13) is discharged to the outside; The reversing valve sensor (22) is configured to obtain the position of the reversing valve core, and the reversing valve controller (23) is configured to receive a control signal from the axis motion controller (40), and control the reversing valve core to move to a target position based on the position of the reversing valve core obtained by the reversing valve sensor (22).

9. The servo electro-hydraulic actuator according to claim 8, characterized in that: A reversing valve cavity is formed in the reversing valve body, and at least an oil supply port, a first oil outlet, a second oil outlet, and a pressure relief port are formed in the reversing valve cavity, wherein the first oil outlet is communicated with the first valve cavity (13), and the second oil outlet is communicated with the second valve cavity (14); In the first position, the oil supply port is connected to the first oil outlet, the pressure relief port is connected to the second oil outlet, the hydraulic oil in the oil supply port flows to the first valve cavity (13) through the first oil outlet, and the hydraulic oil in the second valve cavity (14) flows out through the second oil outlet and the pressure relief port; In the second position, the oil supply port is connected to the second oil outlet, and the pressure relief port is connected to the first oil outlet. The hydraulic oil in the oil supply port flows to the second valve cavity (14) through the second oil outlet, and the hydraulic oil in the first valve cavity (13) flows out through the first oil outlet and the pressure relief port.

10. A multi-axis motion control system, characterized in that: The invention comprises a master controller (50) and at least two servo electro-hydraulic actuators according to any one of claims 1 to 9, wherein the master controller (50) is connected to the signals of each of the servo electro-hydraulic actuators and is configured to obtain a master control signal and control each of the servo electro-hydraulic actuators based on the master control signal.

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