Microscopic imaging system

Abstract

The utility model belongs to the technical field of film thickness measurement, and discloses a microscopic imaging system, in the microscopic imaging system, a base is detachably connected to a rack, a light splitting sheet is arranged on the base, a film thickness meter comprises a light source and a spectrograph, the light source can emit light to the surface of a film to be measured, the light emitted by the surface of the film to be measured can pass through the light splitting sheet, and the spectrograph is arranged on the base. The light splitting sheet is configured to divide light into two parts, one part of the light is emitted to the spectrograph, relevant data are acquired through the spectrograph, parameters such as the thickness of a to-be-measured film can be obtained through analysis, and the other part of the light is emitted to the image acquisition system; the microscopic imaging system can measure the thickness of the film to be measured and photograph the surface of the film to be measured at the same time, the base is detachably connected to the rack, the microscope and the film thickness measuring module are convenient to disassemble and assemble, the film thickness measuring module can be installed according to actual requirements, or the film thickness measuring module can be disassembled, and the film thickness measuring module can be conveniently assembled and disassembled according to actual requirements. And other equipment is connected instead, so that the assembling flexibility is higher.

Description

Technical Field

[0001] The utility model relates to the technical field of film thickness measurement, in particular to a microscopic imaging system. Background Art

[0002] At present, the measurement of film thickness and refractive index can be achieved by film thickness meter, refer to Figure 1 Existing film thickness meters generally include a light source 1, a spectrometer 2, and a focusing lens 4, all connected by a Y-shaped optical fiber 3. In the film thickness meter, broadband white light emitted by the light source 1 enters the focusing lens 4 via the Y-shaped optical fiber 3. The focusing lens 4 focuses the white light into a measurement spot with a millimeter diameter, which is incident perpendicularly on the surface of the sample to be measured. The reflected light is then reflected from the upper and lower surfaces of the sample to be measured. The reflected light then enters the spectrometer 2 via the focusing lens 4 and the Y-shaped optical fiber 3. By analyzing the interference peaks and valleys generated by the upper and lower surfaces of the sample to be measured, the thickness and optical constants of the film layer can be obtained.

[0003] In addition, microscopic observation and photography of the surface of the sample to be tested are usually achieved through a microscope, refer to Figure 2 The light reflected by the object plane 7 of the sample to be measured passes through the objective lens 5 and the tube lens 6 of the microscope in sequence and forms an image plane 8. The camera is set at the position where the image plane 8 is located to collect images.

[0004] However, the measurement of film thickness and refractive index and the photography of film surface need to be performed by two different devices, which makes it impossible to observe the status and position of the test points on the sample surface in real time. Utility Model Content

[0005] The utility model provides a microscopic imaging system to solve the problem in the prior art that the measurement of film thickness and refractive index and the photographing of the film surface need to be performed by two different devices respectively, and the state and position of the test points on the sample surface cannot be observed in real time.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] Microscopic imaging system, including microscope, film thickness measurement module and image acquisition system;

[0008] The microscope includes a frame and a stage, wherein the stage is arranged on the frame and is used to support the film to be tested;

[0009] The film thickness measurement module includes a base, a spectrometer and a film thickness meter. The base is detachably connected to the frame. The spectrometer is arranged on the base. The film thickness meter includes a light source and a spectrometer. The light source can emit light toward the surface of the film to be measured. The light emitted through the surface of the film to be measured can pass through the spectrometer. The spectrometer is configured to split the light into two parts, one part of the light is emitted toward the spectrometer, and the other part of the light is emitted toward the image acquisition system.

[0010] As a preferred solution for the microscopic imaging system, the film thickness meter also includes a Y-shaped optical fiber and a collimating mirror probe, the Y-shaped optical fiber has a first connector, a second connector and a third connector, the first connector is connected to the light source, the second connector is connected to the spectrometer, the third connector is connected to the collimating mirror probe, and the collimating mirror probe is connected to the base.

[0011] As a preferred solution for the microscopic imaging system, the base has a first connecting end, a second connecting end, and a third connecting end. The first connecting end is detachably connected to the frame, the second connecting end is connected to the collimating mirror probe, and the third connecting end is connected to the image acquisition system.

[0012] As a preferred solution for the microscopic imaging system, the frame has a frame connecting end, the first connecting end is detachably connected to the frame connecting end, the frame connecting end and the third connecting end are both C-type interfaces, and the second connecting end is fixedly connected to the collimating mirror probe.

[0013] As a preferred solution of the microscopic imaging system, the second connecting end, the beam splitter, the first connecting end and the stage are arranged in sequence along a first direction, the beam splitter forms an angle with the first direction, the light emitted by the light source can pass through the second connecting end, the beam splitter and the first connecting end in sequence along the first direction, and be emitted toward the surface of the film to be tested, the light emitted through the surface of the film to be tested can be emitted toward the beam splitter through the first connecting end in the opposite direction of the first direction, the beam splitter can transmit a part of the light and reflect another part of the light, and make the transmitted light emitted toward the second connecting end and the reflected light emitted toward the third connecting end.

[0014] As a preferred solution of the microscopic imaging system, the angle between the beam splitter and the first direction is 45°, and the reflected light is emitted toward the third connecting end along a second direction, which is perpendicular to the first direction.

[0015] As a preferred solution of the microscopic imaging system, a convex lens is provided between the beam splitter and the third connecting end.

[0016] As a preferred solution for the microscopic imaging system, the microscope also includes an objective lens and a tube lens, and the objective lens and the tube lens are both arranged on the frame. The light emitted by the light source can pass through the tube lens and the objective lens in sequence and be emitted toward the surface of the film to be tested. The light emitted through the surface of the film to be tested can pass through the objective lens and the tube lens in sequence and be emitted toward the beam splitter.

[0017] As a preferred solution of the microscopic imaging system, the microscope further includes an eyepiece disposed on the frame.

[0018] As a preferred embodiment of the microscopic imaging system, the microscope further comprises an objective lens converter movably mounted on the frame, wherein a plurality of objective lenses are provided, and the plurality of objective lenses are all mounted on the objective lens converter, and the objective lens converter is capable of moving relative to the frame so that the light directed toward the film to be measured and the light emitted through the surface of the film to be measured pass only through one of the objective lenses.

[0019] The beneficial effects of the utility model are:

[0020] The present invention provides a microscopic imaging system, comprising a microscope, a film thickness measurement module, and an image acquisition system. The microscope comprises a frame and a stage, the stage being mounted on the frame and used to support a film to be measured. The film thickness measurement module comprises a base, a spectrometer, and a film thickness meter. The base is detachably connected to the frame, the spectrometer being mounted on the base, and the film thickness meter comprising a light source and a spectrometer. The light source is capable of emitting light toward the surface of the film to be measured, and the light emitted from the surface of the film to be measured can pass through the spectrometer. The spectrometer is configured to split the light into two parts. One part of the light is directed toward the spectrometer, which collects relevant data and, after analysis, can obtain parameters such as the thickness of the film to be measured. The other part of the light is directed toward the image acquisition system and can be used to take photos with an image acquisition system such as a camera. In addition, the measurement spot of the film thickness measurement module can be reduced in size after being focused by the microscope, enabling film thickness measurement of the surface microstructure of the film to be measured. This microscopic imaging system can simultaneously measure the thickness of the film to be measured and take pictures of the surface of the film to be measured, and the base can be detachably connected to the frame, which facilitates the disassembly and assembly between the microscope and the film thickness measurement module. At the same time, the film thickness measurement module can be installed according to actual needs, or the film thickness measurement module can be removed and directly connected to other equipment such as the image acquisition system, which has high assembly flexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural diagram of a film thickness meter in the prior art;

[0022] Figure 2 It is a schematic diagram of the optical path of a microscope in the prior art;

[0023] Figure 3This is a schematic structural diagram of a microscope in an embodiment of the present utility model;

[0024] Figure 4 This is a structural diagram of a film thickness measurement module in an embodiment of the present utility model;

[0025] Figure 5 This is a schematic structural diagram of a film thickness meter in an embodiment of the present utility model;

[0026] Figure 6 Schematic diagram of the optical path of the microscopic imaging system in the embodiment of the present utility model.

[0027] In the picture:

[0028] 1. Light source; 2. Spectrometer; 3. Y-shaped optical fiber; 4. Focusing lens; 5. Objective lens; 6. Tube lens; 7. Object plane; 8. Image plane;

[0029] 100, microscope; 110, frame; 111, support frame; 112, observation head; 113, frame connection end; 120, stage; 121, light transmission hole; 130, objective lens; 140, tube lens; 150, eyepiece; 160, objective lens converter; 170, main unit; 171, condenser;

[0030] 200, film thickness measurement module; 210, base; 211, first connection end; 212, second connection end; 213, third connection end; 220, beam splitter; 230, film thickness meter; 231, light source; 232, spectrometer; 233, Y-shaped optical fiber; 234, collimating lens probe; 240, convex lens;

[0031] 301. Object plane; 302. Image plane. DETAILED DESCRIPTION

[0032] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0033] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0034] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0035] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are used to refer to positions or locations based on the positions or locations shown in the accompanying drawings. These terms are intended solely to facilitate description and simplify operation, and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0036] Currently, film thickness and refractive index measurements are performed using film thickness meters, while microscopic observation and photography of the sample surface are typically performed using microscopes. However, these two separate devices, measuring film thickness and refractive index and photographing the film surface, require in-depth observation of the state and position of the test points on the sample surface.

[0037] In response to the above problems, this embodiment provides a microscopic imaging system to solve the problem in the prior art that the measurement of film thickness and refractive index and the photography of the film surface need to be performed by two different devices respectively, and the state and position of the test points on the sample surface cannot be observed in real time. It can be used in the field of film thickness measurement technology.

[0038] Reference Figure 3-Figure 6The microscopic imaging system includes a microscope 100, a film thickness measurement module 200 and an image acquisition system. In this embodiment, the image acquisition system is a camera, wherein the camera is specifically a CCD (Charge Coupled Device) camera. The CCD camera can be used to receive video streams, upload the received images to a terminal device such as a computer in real time, and take pictures through software stored in the terminal device. The microscope 100 includes a frame 110 and a stage 120. The stage 120 is arranged on the frame 110 and is used to support the film to be measured; the film thickness measurement module 200 includes a base 210, a spectrometer 220 and a film thickness meter 230. The base 210 is detachably connected to the frame 110. The spectrometer 220 is arranged on the base 210. The film thickness meter 230 includes a light source 231 and a spectrometer 232. The light source 231 can emit light to the surface of the film to be measured. The light emitted from the surface of the film to be measured can pass through the spectrometer 220. The spectrometer 220 is configured to split the light into two parts. One part of the light is emitted to the spectrometer 232. Relevant data is collected by the spectrometer 232. After analysis, parameters such as the thickness of the film to be measured can be obtained. The other part of the light is emitted to the image acquisition system and can be used for taking pictures by an image acquisition system such as a camera. Furthermore, after being focused by the microscope 100, the measurement spot of the film thickness measurement module 200 can be reduced to a smaller size (e.g., tens or hundreds of microns), enabling thickness measurement of the surface microstructure of the film to be measured. This microscopic imaging system can simultaneously measure the thickness of the film to be measured and photograph the surface of the film to be measured. The base 210 is detachably connected to the frame 110, facilitating assembly and disassembly of the microscope 100 and the film thickness measurement module 200. The film thickness measurement module 200 can be installed as needed, or removed and directly connected to other equipment such as an image acquisition system, providing greater assembly flexibility.

[0039] Continue to refer to Figure 3-Figure 6 The film thickness meter 230 also includes a Y-shaped optical fiber 233 and a collimating mirror probe 234. The Y-shaped optical fiber 233 has a first connector, a second connector and a third connector. The first connector is connected to the light source 231, the second connector is connected to the spectrometer 232, and the third connector is connected to the collimating mirror probe 234. The collimating mirror probe 234 is connected to the base 210, thereby realizing the connection between the light source 231, the spectrometer 232 and the collimating mirror probe 234 through the Y-shaped optical fiber 233.

[0040] Continue to refer to Figure 3-Figure 6The base 210 has a first connection end 211, a second connection end 212, and a third connection end 213. The first connection end 211 is detachably connected to the frame 110, thereby realizing a detachable connection between the base 210 and the frame 110. The second connection end 212 is connected to the collimating mirror probe 234, and the third connection end 213 is connected to the image acquisition system, so that the base 210 can be simultaneously connected to the frame 110, the collimating mirror probe 234 and the image acquisition system, simplifying the connection structure.

[0041] Continue to refer to Figure 3-Figure 6 The frame 110 has a frame connection end 113, and a first connection end 211 is detachably connected to the frame connection end 113. Both the frame connection end 113 and the third connection end 213 are C-type interfaces. C-type interfaces are widely used in various imaging interfaces, especially in microscope imaging systems, and their specific structure and principles are not described in detail. In addition, the second connection end 212 is fixedly connected to the collimating lens probe 234, thereby forming a single unit with the base 210 and the film thickness meter 230, so that both can be installed on the microscope 100 or removed simultaneously.

[0042] Continue to refer to Figure 3-Figure 6 The second connection end 212, the beam splitter 220, the first connection end 211 and the stage 120 are sequentially arranged along the first direction, the beam splitter 220 forms an angle with the first direction, and the light emitted by the light source 231 can pass through the second connection end 212, the beam splitter 220 and the first connection end 211 in sequence along the first direction and be emitted to the surface of the film to be tested. The light emitted from the surface of the film to be tested can be emitted to the beam splitter 220 through the first connection end 211 in the opposite direction of the first direction. The beam splitter 220 can transmit a part of the light and reflect another part of the light, and make the transmitted light emitted to the second connection end 212 and enter the collimating mirror probe 234, and the reflected light emitted to the third connection end 213 and enter the image acquisition system. In this embodiment, the first direction is the vertical downward direction, that is, Figure 4 In the X direction, the opposite direction of the first direction is the vertical upward direction, which is Figure 4 The X' direction in .

[0043] Continue to refer to Figure 3-Figure 6 The angle between the beam splitter 220 and the first direction is 45°, and the reflected light is emitted toward the third connection end 213 along the second direction, which is perpendicular to the first direction, while the projected light is still transmitted in the opposite direction of the first direction. In this embodiment, the second direction is parallel to the horizontal plane, specifically Figure 4 In the Y direction, in addition, the base 210 is a rectangular parallelepiped as a whole, and the angle between the beam splitter 220 and the first direction is set to 45 degrees to facilitate the arrangement of each connection end.

[0044] Continue to refer to Figure 3-Figure 6A convex lens 240 is provided between the beam splitter 220 and the third connection end 213. Since the image acquisition system is indirectly connected to the frame 110 through the base 210, its optical path will become longer. By providing the convex lens 240, the increase in the optical path can be compensated so that the surface of the film to be measured can be clearly imaged in the image acquisition system.

[0045] Continue to refer to Figure 3-Figure 6 The microscope 100 further includes an objective lens 130 and a tube lens 140, both of which are mounted on a housing 110. Light emitted from a light source 231 can sequentially pass through the tube lens 140 and the objective lens 130 and be emitted toward the surface of the film to be measured. Light emitted from the surface of the film to be measured can sequentially pass through the objective lens 130 and the tube lens 140 and be emitted toward the beam splitter 220. Furthermore, the microscope 100 further includes an eyepiece 150 mounted on the housing 110, through which a user can observe the image of the film to be measured formed by the objective lens 150.

[0046] Optionally, the frame 110 includes a support frame 111 and an observation head 112 disposed on the support frame 111 , and the eyepiece 150 , the objective lens converter 160 and the frame connection end 113 are all disposed on the observation head 112 .

[0047] Optionally, the microscope 100 further includes a mainframe 170 , which is disposed on the support frame 111 , and the mainframe 170 is disposed at one end of the stage 120 along the first direction.

[0048] Optionally, a condenser 171 is provided between the main unit 170 and the stage 120, and the stage 120 has a light hole 121. The main unit 170 is used to emit light. After the light is condensed by the condenser 171, it is emitted to the surface of the film to be tested through the light hole 121, so that the microscope 100 can be used as an ordinary optical microscope.

[0049] Continue to refer to Figure 3-Figure 6 The microscope 100 further includes an objective lens converter 160 movably mounted on the frame 110. A plurality of objective lenses 130 are provided, and the plurality of objective lenses 130 are all disposed on the objective lens converter 160. The objective lens converter 160 can move relative to the frame 110 so that the light directed toward the film to be measured and the light emitted from the surface of the film to be measured pass through only one of the objective lenses 130, that is, one of the objective lenses 130 is connected to the optical path, while the other objective lenses 130 are not connected to the optical path. Objective lenses 130 of different parameters and models can be installed on the objective lens converter 160, and users can select according to actual conditions.

[0050] In the microscopic imaging system provided in this embodiment, the propagation path of light is as follows: first, light is emitted by the light source 231, and the light emitted by the light source 231 enters through the first connector of the Y-shaped optical fiber 233, then passes through the third connector and the collimating lens probe 234 in sequence to enter the beam splitter 220, then passes through the sleeve lens 140 and the objective lens 130 in sequence along the first direction, and finally is emitted to the surface of the film to be measured, that is, the object plane 301. After being reflected by the surface of the film to be measured, the light passes through the objective lens 130 and the sleeve lens 140 in sequence to reach the position of the beam splitter 220. The beam splitter 220 can transmit part of the light and reflect another part of the light. The light transmitted by the beam splitter 220 is emitted to the second connecting end 212 in the opposite direction of the first direction and enters the collimating lens probe 234. Then, the light passes through the Y-shaped optical fiber 233 and enters the spectrometer 232. The spectrometer 232 collects relevant data, and the parameters such as the thickness of the film to be measured can be obtained through analysis. In addition, the light reflected by the beam splitter 220 is emitted along the second direction toward the third connection end 213 and forms an image plane 302 after passing through the convex lens 240. The image acquisition system is arranged at the position of the image plane 302 and is used to acquire relevant image data.

[0051] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A microscopic imaging system, characterized in that: It comprises a microscope (100), a film thickness measurement module (200), and an image acquisition system; The microscope (100) comprises a frame (110) and a stage (120), wherein the stage (120) is arranged on the frame (110) and is used to support a film to be tested; The film thickness measurement module (200) comprises a base (210), a spectrometer (220) and a film thickness meter (230), wherein the base (210) is detachably connected to the frame (110), the spectrometer (220) is arranged on the base (210), and the film thickness meter (230) comprises a light source (231) and a spectrometer (232), wherein the light source (231) can emit light toward the surface of the film to be measured, and the light emitted through the surface of the film to be measured can pass through the spectrometer (220), and the spectrometer (220) is configured to split the light into two parts, one part of the light being emitted toward the spectrometer (232), and the other part of the light being emitted toward the image acquisition system.

2. The microscopic imaging system according to claim 1, wherein: The film thickness meter (230) further includes a Y-shaped optical fiber (233) and a collimating mirror probe (234), wherein the Y-shaped optical fiber (233) has a first connector, a second connector, and a third connector, wherein the first connector is connected to the light source (231), the second connector is connected to the spectrometer (232), the third connector is connected to the collimating mirror probe (234), and the collimating mirror probe (234) is connected to the base (210).

3. The microscopic imaging system according to claim 2, characterized in that: The base (210) has a first connecting end (211), a second connecting end (212), and a third connecting end (213); the first connecting end (211) is detachably connected to the frame (110); the second connecting end (212) is connected to the collimating mirror probe (234); and the third connecting end (213) is connected to the image acquisition system.

4. The microscopic imaging system according to claim 3, characterized in that: The frame (110) has a frame connection end (113), the first connection end (211) is detachably connected to the frame connection end (113), the frame connection end (113) and the third connection end (213) are both C-type interfaces, and the second connection end (212) is fixedly connected to the collimating mirror probe (234).

5. The microscopic imaging system according to claim 3, characterized in that: The second connecting end (212), the beam splitter (220), the first connecting end (211) and the stage (120) are arranged in sequence along a first direction, the beam splitter (220) forms an angle with the first direction, the light emitted by the light source (231) can pass through the second connecting end (212), the beam splitter (220) and the first connecting end (211) in sequence along the first direction and be emitted toward the surface of the film to be tested, the light emitted through the surface of the film to be tested can be emitted toward the beam splitter (220) through the first connecting end (211) in the opposite direction of the first direction, and the beam splitter (220) can transmit a portion of the light and reflect another portion of the light, and the transmitted light is emitted toward the second connecting end (212) and the reflected light is emitted toward the third connecting end (213).

6. The microscopic imaging system according to claim 5, characterized in that: The angle between the beam splitter (220) and the first direction is 45°, and the reflected light is emitted toward the third connecting end (213) along a second direction, and the second direction is perpendicular to the first direction.

7. The microscopic imaging system according to claim 3, characterized in that: A convex lens (240) is provided between the beam splitter (220) and the third connecting end (213).

8. The microscopic imaging system according to any one of claims 1 to 7, characterized in that: The microscope (100) further comprises an objective lens (130) and a sleeve lens (140), wherein the objective lens (130) and the sleeve lens (140) are both arranged on the frame (110), and the light emitted by the light source (231) can pass through the sleeve lens (140) and the objective lens (130) in sequence and be emitted toward the surface of the film to be measured, and the light emitted from the surface of the film to be measured can pass through the objective lens (130) and the sleeve lens (140) in sequence and be emitted toward the beam splitter (220).

9. The microscopic imaging system according to claim 8, characterized in that: The microscope (100) further includes an eyepiece (150) disposed on the frame (110).

10. The microscopic imaging system according to claim 8, characterized in that: The microscope (100) further comprises an objective lens converter (160) movably arranged on the frame (110), a plurality of objective lenses (130) are provided, and the plurality of objective lenses (130) are all arranged on the objective lens converter (160), and the objective lens converter (160) is movable relative to the frame (110) so that light directed toward the film to be measured and light emitted through the surface of the film to be measured only pass through one of the objective lenses (130).

Images