Inner rubber cup height measuring device

Abstract

The utility model provides an inner glue cup height measuring device, and relates to the technical field of wafer gluing processing. The height measuring device for the inner rubber cup comprises a mounting seat, a supporting plate and a height measuring rod, the supporting plate is fixedly arranged at the top of the mounting base, the height measuring rod comprises a rod body, a measuring probe and a display screen, the rod body penetrates through the supporting plate in the vertical direction, the display screen is located at the end, away from the mounting base, of the rod body, the measuring probe is located at the end, away from the display screen, of the rod body, and the display screen is used for displaying height information measured by the measuring probe. The height measuring device for the inner rubber cup can quickly and efficiently measure the height of each part of the inner rubber cup so as to ensure that the height of each part of the inner rubber cup is within a preset height range, and the wafer gluing efficiency and reliability are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer gluing processing, in particular to a device for measuring the height of an inner glue cup. Background Art

[0002] In the field of semiconductor production, photoresist coating is a process of applying photoresist to semiconductor wafers. It belongs to the photolithography process and together with the exposure and development systems, it constitutes the most critical and most repeated process in the entire semiconductor manufacturing process. It has an important impact on improving product integration and yield.

[0003] The glue coating equipment has therefore become one of the important equipment for completing this process. It consists of a suction cup and a glue cup. The suction cup is used to adsorb the wafer to ensure that the wafer will not move during the glue coating process; the glue cup is arranged around the suction cup, usually including an inner glue cup and an outer glue cup. The inner glue cup is arranged around the edge of the suction cup, and the height of the inner glue cup is lower than the height of the suction cup. It is used to accurately deliver the glue to a specific position on the wafer surface; the outer glue cup is arranged around the edge of the inner glue cup, and the height of the outer glue cup is higher than the height of the inner glue cup. It mainly undertakes the function of storing a large amount of glue.

[0004] During glue application, the outer and inner cups need to be replaced due to glue depletion or contamination. However, when replacing the inner cup, the inner cup may be higher or closer to the height of the suction cup. This may interfere with the suction cup's ability to secure the wafer during glue application and, when the suction cup rotates at high speed, may cause the wafer to break due to contact between the inner cup and the wafer surface. Therefore, a device is urgently needed that can quickly and efficiently measure the height of the inner cup at various locations to ensure that the height of each location is within a preset range. Utility Model Content

[0005] The purpose of the utility model is to provide a device for measuring the height of an inner rubber cup, which can set a mounting base on the suction cup of a glue coating device. When the suction cup drives the mounting base to rotate, the height of each part of the inner rubber cup is quickly and efficiently measured by a height measuring rod to ensure that the height of each part of the inner rubber cup is within a preset height range.

[0006] The embodiment of the present utility model is achieved as follows:

[0007] In one aspect of the utility model, a device for measuring the height of an inner rubber cup is provided, comprising a mounting seat, a support plate and a height measuring rod; the support plate is fixedly arranged on the top of the mounting seat, the height measuring rod comprises a rod body, a measuring probe and a display screen, the rod body passes through the support plate in a vertical direction, the display screen is located at the end of the rod body away from the mounting seat, the measuring probe is located at the end of the rod body away from the display screen, and the display screen is used to display height information measured by the measuring probe.

[0008] Optionally, a through slot is provided in the middle of the support plate along the length direction of the plate, and the rod body of the height measuring rod can be inserted into the through slot and slide along the through slot.

[0009] Optionally, a plurality of insertion holes are provided in the middle of the support plate along the length direction of the plate, and the plurality of insertion holes are evenly spaced, and the rod body of the height measuring rod can be inserted into the insertion holes.

[0010] Optionally, the support plate includes a first fixed plate and a second fixed plate, the first fixed plate and the second fixed plate are located in the same plane and are connected by a telescopic rod; the first fixed plate is fixedly connected to the support plate, the height measuring rod is located at the end of the second fixed plate, and the second fixed plate can drive the height measuring rod through the telescopic rod to adjust the relative distance with the first fixed plate.

[0011] Optionally, the rod body of the height measuring rod includes a main body and an abutment portion connected to each other, the abutment portion and the main body are columnar, and the end face diameter of the abutment portion is larger than the end face diameter of the main body; the main body is penetrated through the support plate, and the side of the abutment portion facing the main body can abut against the plate surface of the support plate.

[0012] Optionally, the body of the height measuring rod and the abutment portion are telescopically connected.

[0013] Optionally, a connecting shaft is vertically provided on a side of the mounting seat facing the support plate, and the mounting seat is connected to the support plate via the connecting shaft.

[0014] Optionally, there are multiple connecting shafts, and the multiple connecting shafts are evenly distributed on the surface of the mounting seat.

[0015] Optionally, an adsorption member is provided on the plate surface of the mounting seat facing away from the support plate.

[0016] Optionally, the inner rubber cup height measuring device further includes a calibration base, the surface of the calibration base has a groove adapted to the mounting seat, and the mounting seat can be clamped in the groove.

[0017] The beneficial effects of the utility model include:

[0018] The present application provides a device for measuring the height of an inner rubber cup, comprising a mounting base, a support plate, and a height measuring rod. The mounting base can be placed on the suction cup of a glue coating device, and when the suction cup rotates, it can drive the mounting base to rotate synchronously. The support plate is fixedly arranged on the top of the mounting base. The height measuring rod includes a rod body, a measuring probe, and a display screen. The rod body is vertically inserted into the support plate. The display screen is located at the end of the rod body away from the mounting base. The measuring probe is located at the end of the rod body away from the display screen. The measuring probe is used to measure the height of the inner rubber cup. When the suction cup drives the mounting base to rotate, the measuring probe can rotate synchronously with the mounting base and sequentially measure the height of multiple points of the inner rubber cup. The display screen is used to display the height information measured by the measuring probe. The above-mentioned inner rubber cup height measuring device can quickly and efficiently measure the height of each point of the inner rubber cup to ensure that the height of each point of the inner rubber cup is within a preset height range, thereby improving the efficiency and reliability of wafer glue coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 This is a schematic diagram of the structure of the inner rubber cup height measuring device provided by an embodiment of the present utility model;

[0021] Figure 2 This is a second structural diagram of the inner rubber cup height measuring device provided by an embodiment of the present utility model;

[0022] Figure 3 The third structural diagram of the inner rubber cup height measuring device provided by the embodiment of the present utility model;

[0023] Figure 4 This is the fourth structural diagram of the inner rubber cup height measuring device provided in an embodiment of the present utility model.

[0024] Icon: 100-Inner rubber cup height measuring device; 110-Mounting seat; 120-Support plate; 121-Through slot; 122-Socket; 130-Height measuring rod; 131-Rod body; 1311-Main body; 1312-Abutment part; 132-Display screen; 140-Connecting shaft; 150-Calibration base. DETAILED DESCRIPTION

[0025] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0029] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0030] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0031] Please refer to Figure 1 The present embodiment provides an inner rubber cup height measuring device 100, comprising a mounting base 110, a support plate 120 and a height measuring rod 130; the support plate 120 is fixedly arranged on the top of the mounting base 110, and the height measuring rod 130 comprises a rod body 131, a measuring probe and a display screen 132. The rod body 131 is vertically penetrated through the support plate 120, and the display screen 132 is located at the end of the rod body 131 away from the mounting base 110. The measuring probe is located at the end of the rod body 131 away from the display screen 132. The display screen 132 is used to display height information measured by the measuring probe.

[0032] Specifically, the inner rubber cup height measurement device 100 consists of a mounting base 110, a support plate 120, and a height measuring rod 130. The mounting base 110 is mounted on the suction cup of the glue coating equipment, and the inner rubber cup is positioned around the edge of the suction cup. The support plate 120 is fixed to the side of the mounting base 110 facing away from the suction cup, with the surface of the support plate 120 parallel to the suction cup, that is, the support plate 120 extends horizontally. The height measuring rod 130 is passed through the support plate 120. The setting of the support plate 120 can not only improve the stability of the setting of the height measuring rod 130, but also when the suction cup rotates, the mounting seat 110 can also drive the height measuring rod 130 to rotate synchronously through the support plate 120, thereby realizing the height measurement of multiple points of the inner rubber cup. The operator can clearly and intuitively obtain the height measurement values of the multiple points of the inner rubber cup through the display screen 132, and judge whether the height measurement values of these points are within the preset height range. If it exceeds the preset height range, the operator needs to adjust the installation height of the inner rubber cup, and measure the height of the multiple points of the adjusted inner rubber cup again until these points are within the preset height range. At this time, the inner rubber cup will not contact the wafer surface and cause damage to the wafer, thereby improving the reliability and efficiency of the gluing process.

[0033] It should be noted that, in one embodiment of the present application, first, in order to improve the accuracy of the measurement, the inner rubber cup height measuring device 100 also includes a calibration base 150, which is a stable table; the surface of the calibration base 150 has a groove that is compatible with the mounting base 110, and the mounting base 110 can be clamped in the groove. Before placing the mounting base 110 on the suction cup, the mounting base 110, the support plate 120, and the height measuring rod 130 can be placed in the groove of the calibration base 150, and the height measuring rod 130 can be zeroed and calibrated. By setting the calibration base 150, not only the accuracy of the measurement can be improved, but also the measurement efficiency can be improved, the repeated measurements caused by measurement errors can be reduced, and the measurement time can be saved.

[0034] Second, to improve the mounting stability of the inner cup height measuring device 100 and the suction cup of the glue coating equipment, a suction member (not shown) is provided on the surface of the mounting base 110 facing away from the support plate 120. When the mounting base 110 is placed on the suction cup of the glue coating equipment, the suction member adheres to the suction cup, improving the stability of the connection between the inner cup height measuring device 100 and the suction cup. This prevents the mounting base 110 from slipping due to an unstable connection with the suction cup when the suction cup rotates, thereby improving measurement efficiency.

[0035] Third, if Figure 2 As shown, a connecting shaft 140 is perpendicularly provided on one side of the mounting base 110 facing the support plate 120, and the mounting base 110 is connected to the support plate 120 via the connecting shaft 140. The provision of the connecting shaft 140 allows the mounting base 110 and the support plate 120 to be detachably connected, facilitating component replacement and improving the reliability of the inner rubber cup height measuring device 100.

[0036] Wherein, optionally, Figure 2 As shown, in order to further improve the connection stability between the mounting base 110 and the support plate 120 , there are multiple connecting shafts 140 , and the multiple connecting shafts 140 are evenly distributed on the surface of the mounting base 110 .

[0037] The inner rubber cup height measuring device 100 provided in the present application includes a mounting base 110, a support plate 120 and a height measuring rod 130. The mounting base 110 can be placed on the suction cup of the glue coating equipment. When the suction cup rotates, it can drive the mounting base 110 to rotate synchronously; the support plate 120 is fixedly arranged on the top of the mounting base 110, and the height measuring rod 130 includes a rod body 131, a measuring probe and a display screen 132. The rod body 131 is vertically penetrated by the support plate 120, and the display screen 132 is located at the end of the rod body 131 away from the mounting base 110. The measuring probe is located at the end of the rod body 131 away from the display screen 132. The measuring probe is used to measure the height of the inner rubber cup; when the suction cup drives the mounting base 110 to rotate, the measuring probe can rotate synchronously with the mounting base 110 and measure the heights of multiple points of the inner rubber cup in sequence. The display screen 132 is used to display the height information measured by the measuring probe. The inner rubber cup height measuring device 100 can quickly and efficiently measure the height of each part of the inner rubber cup to ensure that the height of each part of the inner rubber cup is within a preset height range, thereby improving the efficiency and reliability of wafer glue coating.

[0038] Since the diameters of the inner rubber cups of different glue coating devices may be different, in order to improve the applicability of the inner rubber cup height measuring device 100, Figure 3 As shown, in one embodiment of the present application, a through slot 121 is provided in the middle of the support plate 120 along the length direction of the plate, and the rod body 131 of the height measuring rod 130 can be inserted into the through slot 121 and slide along the through slot 121 .

[0039] Specifically, if Figure 3 As shown, a through slot 121 is provided in the middle of the support plate 120, and the rod body 131 of the height measuring rod 130 can be inserted into the through slot 121. For inner rubber cups of different diameters, the height measuring rod 130 can slide in the through slot 121 to adjust its relative position with the inner rubber cup to ensure alignment with the side wall of the inner rubber cup.

[0040] Of course, in addition to the above embodiments, Figure 4 As shown, in another embodiment of the present application, a plurality of insertion holes 122 are opened in the middle of the support plate 120 along the length direction of the plate, and the plurality of insertion holes 122 are evenly spaced, and the rod body 131 of the height measuring rod 130 can be inserted into the insertion hole 122.

[0041] Specifically, if Figure 4 As shown, a plurality of insertion holes 122 are provided in the middle of the support plate 120 along the length direction of the plate, and there is a preset interval between the plurality of insertion holes 122. For inner rubber cups of different diameters, the height measuring rod 130 can be inserted into different insertion holes 122 to adjust its relative position with the inner rubber cup to ensure alignment with the side wall of the inner rubber cup.

[0042] Of course, in addition to the above-mentioned embodiment, in another possible embodiment of the present application, the support plate 120 includes a first fixed plate and a second fixed plate (not shown in the figure), and the first fixed plate and the second fixed plate are located in the same plane and are connected by a telescopic rod; the first fixed plate is fixedly connected to the support plate 120, and the height measuring rod 130 is located at the end of the second fixed plate, and the second fixed plate can drive the height measuring rod 130 to adjust the relative distance with the first fixed plate through the telescopic rod.

[0043] Specifically, the support plate 120 includes a first fixed plate and a second fixed plate (not shown in the figure), wherein the first fixed plate is fixedly connected to the support plate 120, and the second fixed plate is provided with a telescopic rod at one end facing the first fixed plate, and the end of the telescopic rod is fixedly connected to the first fixed plate, and the second fixed plate can adjust the relative distance between the second fixed plate and the first fixed plate through the telescopic rod; the height measuring rod 130 is located at the end of the second fixed plate. For inner rubber cups of different diameters, the height measuring rod 130 can adjust its relative position with the inner rubber cup through the relative distance between the second fixed plate and the first fixed plate to ensure alignment with the side wall of the inner rubber cup.

[0044] It should be noted that the present application does not impose any restrictions on the specific adjustment method for aligning the height measuring rod 130 with the side wall of the inner rubber cup. As long as the height measuring rod 130 can be moved quickly and stably to a position aligned with the side wall of the inner rubber cup, the present application does not impose any restrictions on this.

[0045] For example, Figure 2 、 Figure 3 and Figure 4 As shown, the rod body 131 of the height measuring rod 130 includes a main body 1311 and an abutting portion 1312 that are connected to each other. The abutting portion 1312 and the main body 1311 are columnar, and the end face diameter of the abutting portion 1312 is larger than the end face diameter of the main body 1311; the main body 1311 is penetrated by the support plate 120, and the side of the abutting portion 1312 facing the main body 1311 can abut against the plate surface of the support plate 120.

[0046] Specifically, if Figure 2 、 Figure 3 and Figure 4 As shown, the rod body 131 of the height measuring rod 130 includes a main body 1311 and abutting portion 1312. The abutting portion 1312 and the main body 1311 are both cylindrical, and the end face diameter of the abutting portion 1312 facing the main body 1311 is larger than the end face diameter of the main body 1311. Therefore, when the main body 1311 is passed through the support plate 120, the end face of the abutting portion 1312 can abut against the plate surface of the support plate 120 to increase the bearing area of the height measuring rod 130 and the support plate 120, thereby improving the stability of the connection between the height measuring rod 130 and the support plate 120, and preventing the height measuring rod 130 from shaking left and right or shifting in position after being inserted into the support plate 120, thereby improving the measurement efficiency and the accuracy of the measurement results.

[0047] Optionally, since the heights of the inner rubber cups of different glue coating devices may be different, in order to improve the applicability of the inner rubber cup height measuring device 100 , the body 1311 and the abutment portion 1312 of the height measuring rod 130 may be telescopically connected.

[0048] Specifically, in a specific embodiment of the present application, the body 1311 and the abutment portion 1312 can be threadedly connected. The side wall of the body 1311 is provided with an external thread. Correspondingly, the abutment portion 1312 has a circular hole, and the circular hole is provided with an internal thread that matches the external thread. The body 1311 can be threadedly connected to the abutment portion 1312 to adjust the length of the body 1311 extending from the abutment portion 1312.

[0049] Alternatively, in another specific embodiment of the present application, the body 1311 and the abutting portion 1312 may be connected by a snap-fit connection. The side wall of the body 1311 is vertically provided with a plurality of spaced slots. Correspondingly, the abutting portion 1312 has a circular hole, and a snap fits in the circular hole. The body 1311 can be snap-fitted with the abutting portion 1312 through the snap of the slot to adjust the length of the body 1311 extending beyond the abutting portion 1312.

[0050] Alternatively, in another specific embodiment of the present application, a driving motor is provided between the abutting portion 1312 and the main body 1311 , and the driving motor can adjust the length of the main body 1311 extending from the abutting portion 1312 .

[0051] It should be noted that the present application does not impose any restrictions on the specific setting method of the telescopic connection between the main body 1311 and the abutment part 1312. In addition to the above-mentioned method, it can also be other telescopic connection methods, such as hydraulic adjustment, etc. The present application does not impose any restrictions on this, as long as the length of the shaft 131 of the height measuring rod 130 can be adjusted through the telescopic adjustment of the abutment part 1312 and the main body 1311.

[0052] The method of using the inner rubber cup height measuring device 100 provided in this application is as follows:

[0053] First, the mounting base 110 is placed on the suction cup of the glue coating equipment, so that the height measuring rod 130 is opposite the side wall of the inner rubber cup. When the suction cup rotates, it can synchronously drive the mounting base 110, the support plate 120, and the height measuring rod 130 to rotate. At this time, the height measuring rod 130 can contact the side wall of the inner rubber cup and measure the height there. Optionally, the suction cup drives the mounting base 110 to rotate 120 degrees each time, so that the height measuring rod 130 measures the height of the side wall of the inner rubber cup at three different points. The operator can determine whether the height values of the three different points are within the preset height range based on the measured values on the display screen 132 of the height measuring rod 130. If the preset height range is exceeded, the installation height of the inner rubber cup is adjusted, and the side wall heights of the inner rubber cup are measured again at the three different points until the side wall heights of the three different points are all within the preset height range.

[0054] It should be noted that the present application does not impose any restrictions on the specific number of points at which the height measuring rod 130 measures the inner rubber cup. In addition to the three points mentioned above, there can also be four points (in this case, the suction cup drives the mounting base 110 to rotate 90° each time), six points (in this case, the suction cup drives the mounting base 110 to rotate 60° each time), etc. The more measuring points, the higher the measurement accuracy. The present application does not impose any restrictions on the specific number of measuring points.

[0055] The above description is merely an optional embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

[0056] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

Claims

1. A device for measuring the height of an inner rubber cup, characterized in that: The invention comprises a mounting seat (110), a support plate (120) and a height measuring rod (130); the support plate (120) is fixedly arranged on the top of the mounting seat (110); the height measuring rod (130) comprises a rod body (131), a measuring probe and a display screen (132); the rod body (131) is vertically penetrated through the support plate (120); the display screen (132) is located at the end of the rod body (131) away from the mounting seat (110); the measuring probe is located at the end of the rod body (131) away from the display screen (132); and the display screen (132) is used to display height information measured by the measuring probe.

2. The inner plastic cup height measuring device according to claim 1, characterized in that: A through slot (121) is provided in the middle of the support plate (120) along the length direction of the plate, and a rod body (131) of the height measuring rod (130) can be inserted into the through slot (121) and slide along the through slot (121).

3. The inner plastic cup height measuring device according to claim 1, characterized in that: A plurality of insertion holes (122) are provided in the middle of the support plate (120) along the length direction of the plate. The plurality of insertion holes (122) are evenly spaced, and the rod body (131) of the height measuring rod (130) can be inserted into the insertion holes (122).

4. The inner plastic cup height measuring device according to claim 1, characterized in that: The support plate (120) comprises a first fixing plate and a second fixing plate, wherein the first fixing plate and the second fixing plate are located in the same plane and are connected via a telescopic rod; the first fixing plate is fixedly connected to the support plate (120), the height measuring rod (130) is located at an end of the second fixing plate, and the second fixing plate can drive the height measuring rod (130) via the telescopic rod to adjust the relative distance with the first fixing plate.

5. The inner plastic cup height measuring device according to any one of claims 1 to 4, characterized in that: The rod body (131) of the height measuring rod (130) comprises a main body (1311) and an abutting portion (1312) connected to each other; the abutting portion (1312) and the main body (1311) are columnar, and the end face diameter of the abutting portion (1312) is larger than the end face diameter of the main body (1311); the main body (1311) is penetrated by the support plate (120), and the side of the abutting portion (1312) facing the main body (1311) can abut against the plate surface of the support plate (120).

6. The inner plastic cup height measuring device according to claim 5, characterized in that: The body (1311) of the height measuring rod (130) and the abutting portion (1312) are telescopically connected.

7. The inner plastic cup height measuring device according to claim 1, characterized in that: A connecting shaft (140) is vertically provided on one side of the mounting seat (110) facing the support plate (120), and the mounting seat (110) is connected to the support plate (120) via the connecting shaft (140).

8. The inner plastic cup height measuring device according to claim 7, characterized in that: There are multiple connecting shafts (140), and the multiple connecting shafts (140) are evenly distributed on the surface of the mounting seat (110).

9. The inner plastic cup height measuring device according to claim 1, characterized in that: A suction piece is provided on the plate surface of the mounting seat (110) facing away from the support plate (120).

10. The inner plastic cup height measuring device according to claim 1, characterized in that: The inner rubber cup height measuring device (100) further comprises a calibration base (150), the surface of the calibration base (150) having a groove adapted to the mounting seat (110), and the mounting seat (110) can be clamped in the groove.

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