Probe tracking device and atomic force microscope

Abstract

The utility model relates to the technical field of atomic force microscopes, and discloses a probe tracking device which comprises a probe and a light path assembly. The light path assembly comprises a light source, a rotatable reflecting mirror, a first convex lens and a first convergent mirror; wherein the light source is used for generating detection light, the rotatable reflecting mirror is used for reflecting the detection light, the focus of the first convex lens is located at the position where the rotatable reflecting mirror reflects the detection light, and the first convergent mirror is used for enabling the detection light reflected by the probe to irradiate the position detector. By arranging the first convergent mirror, the reflected detection light can be irradiated to the position detector along a light path different from an incident light path. In the measurement process, the reflected detection light is collected through the light path different from the incident light path, the collection precision is not influenced by the movement of the rotatable reflector, the error of the reflected light beam caused by the tracking movement of the probe is reduced, and the measurement precision of the atomic force microscope is improved. The utility model also discloses an atomic force microscope.

Description

Technical Field

[0001] The present application relates to the technical field of atomic force microscopy, for example, to a probe tracking device and an atomic force microscope. Background Art

[0002] Currently, atomic force microscopes (AFMs) are key devices in the field of nanotechnology, widely used in multiple disciplines for their exceptional surface analysis capabilities. AFMs use optical lever technology to sense the tiny deflections of the microcantilever tip under the action of atomic force. This detection mechanism is not only mature but also boasts extremely high measurement accuracy. In sample-scanning AFMs, the sample must be placed on top of the scanner, which imposes certain limitations on the design of sample-scanning AFMs. In comparison, tip-scanning AFMs offer advantages. However, during the scanning process, key challenges remain: ensuring that the focused light spot on the back of the microcantilever tip remains relatively stationary relative to the tip, and ensuring that the center of the reflected light spot is accurately aligned with the position detector.

[0003] The related art discloses a surface imaging method using a scanning probe microscope, comprising: scanning a probe laterally across a surface so that the probe performs a scanning motion across the surface; deflecting a detection beam onto the probe via a steering mirror, and the detection beam is reflected from the probe in the form of a return beam; moving the steering mirror so that the detection beam performs a tracking motion synchronized with the scanning motion, and maintaining the detection beam deflected onto the probe by the steering mirror; obtaining image measurement values using the return beam, each image measurement value representing a measured height of a corresponding point on the surface; obtaining a related height error measurement value for each point on the surface by comparing a target value of the steering mirror position with the actual position of the steering mirror position, each height error measurement value representing a corresponding error in the measured height; and correcting the image measurement values using the height error measurement values to generate corrected image measurement values.

[0004] During the implementation of the embodiments of the present disclosure, it was found that at least the following problems exist in the related art:

[0005] Related technologies use a rotating mirror to keep the detection beam directed toward the probe, ensuring that the focused light spot on the back of the needle tip remains relatively stationary relative to the needle tip. However, in actual applications, the rotatable mirror must rotate with the probe's displacement to track the needle tip. Related technologies directly use the reflected light beam returning from the probe along the incident light path to obtain the measurement value. However, the movement of the rotatable mirror may affect the accuracy of the reflected light beam collection, resulting in lower accuracy of atomic force microscopy measurements. Utility Model Content

[0006] In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. The summary is not an extensive review, nor is it intended to identify key / critical elements or delineate the scope of protection of these embodiments, but rather serves as a prelude to the detailed description that follows.

[0007] The embodiments of the present disclosure provide a probe tracking device and an atomic force microscope, so as to reduce the error of a reflected light beam caused by the tracking motion of the probe during the measurement process, thereby improving the measurement accuracy of the atomic force microscope.

[0008] In some embodiments, the probe tracking device includes: a probe; an optical path component, including a light source, a rotatable reflector, a first convex lens and a first converging mirror; wherein the light source is used to generate detection light, the rotatable reflector is used to reflect the detection light, the focus of the first convex lens is located at the position where the rotatable reflector reflects the detection light, and the first converging mirror is used to allow the detection light reflected by the probe to be irradiated onto the position detector.

[0009] Optionally, the position detector is arranged at the focus of the first converging mirror, and is used to focus the detection light reflected by the probe onto the position detector.

[0010] Optionally, the probe tracking device further includes: a beam reducer, disposed between the light source and the rotatable reflector.

[0011] Optionally, the probe tracking device further includes: a displacement component for driving the probe to move.

[0012] Optionally, the displacement component includes: a piezoelectric block, and the probe is connected to the piezoelectric block; wherein, when a voltage is applied to the piezoelectric block, the piezoelectric block will deform, thereby driving the probe to displace.

[0013] Optionally, the probe tracking device further includes: a displacement detection device for detecting the displacement of the probe; and a controller connected to the displacement detection device and the displacement assembly, for controlling the displacement assembly to drive the rotatable reflector to rotate according to the displacement of the probe.

[0014] Optionally, the probe tracking device further includes: an observation component for observing the position of the probe and / or detection light.

[0015] Optionally, the observation component includes: an imaging device for converting an optical signal into an electrical signal to generate an image; a half-reflecting half-mirror for transmitting the observation light emitted by the light source to the probe, and reflecting the observation light reflected by the probe to the imaging device.

[0016] Optionally, the probe tracking device further includes: a second converging mirror, disposed between the semi-reflective and semi-transmissive mirror and the imaging device, for imaging the imaging device.

[0017] In some embodiments, an atomic force microscope includes: the probe tracking device described above.

[0018] The probe tracking device and atomic force microscope provided by the embodiments of the present disclosure can achieve the following technical effects:

[0019] The probe tracking device includes a probe and an optical path component. The optical path component includes a light source, a rotatable reflector, a first convex lens and a first converging mirror. The light source is used to generate detection light, the rotatable reflector is used to reflect the detection light, the focus of the first convex lens is located at the position where the rotatable reflector reflects the detection light, and the first converging mirror is used to allow the detection light reflected by the probe to be irradiated onto the position detector. On the basis of realizing probe tracking by reflecting the detection light through the rotatable reflector, by setting the first converging mirror, the reflected detection light can be irradiated onto the position detector along an optical path different from the incident optical path. During the measurement process, the reflected detection light is collected through an optical path different from the incident optical path, and the collection accuracy is not affected by the movement of the rotatable reflector, thereby reducing the error of the reflected light beam caused by the probe tracking movement and improving the measurement accuracy of the atomic force microscope.

[0020] The above general description and the following description are exemplary and explanatory only and are not intended to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] One or more embodiments are exemplarily described by corresponding drawings. These exemplary descriptions and drawings do not limit the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements. The drawings do not constitute a scale limitation. In addition,

[0022] Figure 1 is a schematic structural diagram of a probe tracking device provided by an embodiment of the present disclosure;

[0023] Figure 2 is a schematic structural diagram of an atomic force microscope provided by an embodiment of the present disclosure;

[0024] Figure 3 is a schematic structural diagram of an observation assembly provided by an embodiment of the present disclosure;

[0025] Figure 4 It is a schematic structural diagram of another atomic force microscope provided in an embodiment of the present disclosure.

[0026] Reference numerals:

[0027] 10: Probe; 11: Light source; 12: Rotatable reflector; 13: Beam reducer; 14: First convex lens; 15: First converging mirror; 16: Position detector; 17: First light source; 18: Second light source; 19: First metal cage; 20: Second metal cage; 21: Second converging mirror; 22: Imaging device; 23: Displacement assembly; 24: Half-reflective half-mirror; 25: Detection light; 26: Observation light; 27: Beam splitter; 28: First reflector; 29: Second reflector. DETAILED DESCRIPTION

[0028] In order to be able to understand the features and technical content of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure is described in detail below in conjunction with the accompanying drawings. The accompanying drawings are for reference only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the sake of convenience of explanation, a full understanding of the disclosed embodiments is provided through multiple details. However, one or more embodiments can still be implemented without these details. In other cases, to simplify the drawings, well-known structures and devices can be simplified for display.

[0029] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0030] Combine Figures 1 to 4 As shown, an embodiment of the present disclosure provides a tracking device for a probe 10, comprising: a probe 10 and an optical path assembly. The optical path assembly includes a light source 11, a rotatable reflector 12, a first convex lens 14, and a first converging lens 15. The light source 11 is used to generate detection light 25, the rotatable reflector 12 is used to reflect the detection light 25, the focus of the first convex lens 14 is located at the position where the rotatable reflector 12 reflects the detection light 25, and the first converging lens 15 is used to allow the detection light 25 reflected by the probe 10 to be irradiated onto a position detector 16.

[0031] In the disclosed embodiment, the light source 11 can be of any type, for example, the light source 11 can be a laser and / or a light emitting diode (LED). The laser can provide a highly monochromatic and highly coherent light beam with a pure and consistent wavelength, high brightness, and good directionality, which helps to accurately control the irradiation position on different optical path elements, so that the position detector 16 can receive a stronger light signal, thereby improving the sensitivity of the displacement measurement of the probe 10. Therefore, the laser, as the light source 11 in the tracking device of the atomic force microscope probe 10, helps to achieve high-precision measurement. In addition, the laser is also tunable, and the user can adjust different wavelengths according to the measurement requirements, which increases the flexibility of the measurement.

[0032] In the embodiment of the present disclosure, Figure 1As shown, the dotted line portion represents the position of the probe 10 after the probe 10 is displaced and the position change of the detection light 25 after the rotatable reflector 12 rotates as the probe 10 is displaced. Specifically, as the probe 10 is displaced to the left or right, the rotatable reflector 12 will also rotate as the probe 10 is displaced, causing the detection light 25 to be emitted from the focus of the first convex lens 14 to the corresponding position of the first convex lens 14 in different directions. Then, under the action of the first convex lens 14, the detection light 25 irradiated to the target position of the probe 10 after each rotation of the rotatable reflector 12 is made parallel to each other. In this way, if light passes through the lens from a certain direction, then light passing through the lens from the opposite direction will also follow the same path. Therefore, if light enters the lens from the focus of the convex lens, the light will form a parallel beam on the other side of the lens. The focus of the first convex lens 14 is located on the rotatable reflector 12. The light emitted by the light source 11 is irradiated on the first convex lens 14 and then on the focal position on the rotatable reflector 12. The detection light 25 reflected by the rotatable reflector 12 is emitted from the focal point of the first convex lens 14 and passes through the first convex lens 14. No matter how the rotatable reflector 12 rotates, the detection light 25 passing through the first convex lens 14 is parallel to the main optical axis of the first convex lens 14, so that the detection light 25 irradiated to the target position of the probe 10 after each rotation of the rotatable reflector 12 is parallel to each other.

[0033] In the embodiment of the present disclosure, the first converging mirror 15 can be any type of optical path element that can focus the light beam at its focal point. For example, the first converging mirror 15 can be a convex lens, and the detection light 25 reflected by the probe 10 is transmitted through the convex lens and focused at its focal point. It is only necessary to set the position detector 16 at its optical axis so that the detection light 25 reflected by the probe 10 can be irradiated onto the position detector 16; or, the first converging mirror 15 can be a combination of multiple lenses and reflectors. Specifically, one or more lenses can be used to collect the detection light 25 reflected from the rotatable reflector 12. A wavefront corrector can be set after the lens to optimize the quality of the detection light 25, ensuring that the detection light 25 has a uniform wavefront before entering the subsequent optical element. A reflector is set after the wavefront corrector to adjust the path of the detection light 25 so that the detection light 25 can be accurately aligned with the adjustable focus system, such as an electrically adjustable lens group, to dynamically adjust the focal position so that the detection light 25 is focused on the position detector 16; or other optical path elements that can focus the light beam at its focal point. Among them, the convex lens is simple, cost-effective and easy to adjust the focal length, the optical fiber is compact, has high transmission efficiency and strong anti-interference ability, and the combination of the lens and the reflector provides a high degree of accuracy and position adjustability of the optical path elements. The first converging mirror 15 can be adjusted and set according to measurement requirements and structural requirements.

[0034] In the embodiment of the present disclosure, the target position can be determined as needed. For example, the target position can be the back of the tip of the probe 10, or a local area near the tip of the probe 10, or the side of the probe 10, etc. In the probe 10 tracking device of the atomic force microscope, the target position can be determined according to the specific needs of the measurement. If the target position is set to the back of the tip of the probe 10, it can be used to accurately measure the morphology and properties of the surface of the sample to be measured. If the target position is set to a local area near the tip of the probe 10, high-resolution local analysis can be performed. If the target position is set to the side of the probe 10, it can be used to measure the lateral force or friction force on the surface of the sample to be measured, thereby obtaining more comprehensive and accurate surface information of the sample to be measured.

[0035] In the disclosed embodiment, the position detector 16 may be a four-quadrant position detector, a position-sensitive detector, or other position detector. The four-quadrant position detector, by irradiating the detection light 25 reflected by the probe 10 onto a photodiode divided into four quadrants, can detect minute horizontal and vertical shifts of the reflected detection light 25, thereby determining minute deflections of the probe 10. The position-sensitive detector, on the other hand, detects vertical movement or vibration of the probe 10 by measuring changes in the central position of the reflected detection light 25 on the surface of the position-sensitive detector.

[0036] In the disclosed embodiment, the rotatable reflector 12 can rotate in any direction, for example, about the X-axis, about the Z-axis, or about the Y-axis, or about any other direction. The rotation center of the rotatable reflector 12 is any position on the rotatable reflector 12 where the light source 11 irradiates the rotatable reflector 12, for example, the focal position of an optical path element on the rotatable reflector 12, or the center position of the rotatable reflector 12. As long as the rotatable reflector 12 can reflect the detection light 25 emitted by the light source 11 to the target position of the probe 10, no further details will be given here.

[0037] The probe 10 tracking device provided by the embodiment of the present disclosure includes a probe 10 and an optical path component. The optical path component includes a light source 11, a rotatable reflector 12, a first convex lens 14 and a first converging lens 15. The light source 11 is used to generate detection light 25, the rotatable reflector 12 is used to reflect the detection light 25, the focus of the first convex lens 14 is located at the position where the rotatable reflector 12 reflects the detection light 25, and the first converging lens 15 is used to allow the detection light 25 reflected by the probe 10 to be irradiated onto the position detector 16. On the basis of realizing the tracking of the probe 10 by reflecting the detection light 25 by the rotatable reflector 12, by setting the first converging lens 15, the reflected detection light 25 can be irradiated onto the position detector 16 along an optical path different from the incident optical path. During the measurement process, the reflected detection light 25 is collected through an optical path different from the incident optical path, and the collection accuracy is not affected by the movement of the rotatable reflector 12, thereby reducing the error of the reflected light beam caused by the tracking movement of the probe 10 and improving the measurement accuracy of the atomic force microscope.

[0038] Optionally, the position detector 16 is disposed at the focus of the first converging mirror 15 , and is used to focus the detection light 25 reflected by the probe 10 onto the position detector 16 .

[0039] In the embodiment of the present disclosure, the focus of the first converging mirror 15 is set at the center of the position detector 16. Since the focus of the first converging mirror 15 is the point where the reflected detection light 25 converges, setting the focus of the first converging mirror 15 at the center of the position detector 16 can ensure that the detection light 25 reflected from the probe 10 after each rotation of the rotatable reflector 12 can be irradiated onto the position detector 16.

[0040] In this way, the position detector 16 is arranged at the focus of the first converging lens 15 , and the light beams passing through the first converging lens 15 will all be focused on the position detector 16 , thereby realizing the collection of the detection light 25 reflected by the probe 10 .

[0041] Optionally, the tracking device of the probe 10 further includes a beam reducer 13 . The beam reducer 13 is disposed between the light source 11 and the rotatable reflector 12 .

[0042] In this way, by setting a beam reducer 13 between the light source 11 and the rotatable reflector 12, the light beam emitted from the light source 11 can be concentrated at the focal position of the first convex lens 14 on the rotatable reflector 12, thereby increasing the focal position of the first convex lens 14, that is, the light intensity at the position where the rotatable reflector 12 reflects the detection light 25.

[0043] Optionally, the tracking device for the probe 10 further includes a displacement component 23. The displacement component 23 is used to drive the probe 10 to move.

[0044] In the disclosed embodiment, the displacement assembly 23 can be any device that can displace the probe 10 along different axial directions. For example, piezoelectric ceramics, piezoelectric tubes, piezoelectric stacks and / or flexible suspension systems, piezoelectric stations, etc. Piezoelectric ceramics have a fast response speed and nanometer-level resolution, and can produce precise deformations through the action of an electric field to control the displacement of the probe 10. The piezoelectric tube provides a larger deformation range and good mechanical stability for the displacement of the probe 10, and can be used for large-scale scanning. The piezoelectric stack increases the displacement range of the probe 10 while maintaining high precision through the combination of multiple layers of piezoelectric materials. The flexible suspension system uses the bending or torsion of the elastic element to achieve fine movement of the probe 10, and can be used in applications that need to avoid hard contact.

[0045] Thus, during the imaging process of the atomic force microscope, the probe 10 needs to perform precise scanning on the sample surface to obtain a high-resolution surface topography image. Therefore, it is necessary to provide a displacement component 23 to drive the displacement of the probe 10, thereby providing the probe 10 with precise position control capability in the atomic force microscope.

[0046] Optionally, the displacement component 23 includes a piezoelectric block. The probe 10 is connected to the piezoelectric block. When a voltage is applied to the piezoelectric block, the piezoelectric block will deform, thereby driving the probe 10 to move.

[0047] In the disclosed embodiment, the displacement assembly 23 can be any device that utilizes deformation of a piezoelectric block to drive the displacement of the probe 10. Examples include a scanning tube, a lever-type piezoelectric displacement device, or a bridge-type piezoelectric displacement device. In practical applications, a scanning tube can be used to control the displacement of the probe 10. Specifically, a second metal cage 20 can be provided at the lower end of the scanning tube. The second metal cage 20 is equipped with a clamp, adhesive, or other device for securing the probe 10.

[0048] Thus, in the tracking device for the probe 10 of the atomic force microscope, when a voltage is applied to the piezoelectric block, the piezoelectric block deforms. This deformation can be adjusted by precisely controlling the magnitude and direction of the voltage, thereby achieving fine movement of the probe 10 in the vertical or horizontal direction, allowing the probe 10 to adapt to the microstructure of the surface of the sample being measured. Through the above-mentioned displacement method, the displacement component 23 enables the probe 10 to accurately scan the surface of the sample being measured, improving the quality and resolution of the imaging, while also enhancing the adaptability and flexibility of the atomic force microscope in imaging complex sample surfaces.

[0049] Optionally, the probe tracking device further includes a displacement detection device for detecting the displacement of the probe 10 and a controller. The displacement detection device is connected to the displacement detection device and the displacement assembly 23 and is used to control the displacement assembly 23 to drive the rotatable reflector 12 to rotate according to the displacement of the probe 10.

[0050] In this way, the displacement detection device is responsible for accurately capturing the slightest movement of the probe 10, thereby obtaining the displacement of the probe 10. The displacement detection device transmits the displacement data of the probe 10 to the controller. The controller receives the displacement data transmitted by the displacement detection device and calculates a control instruction based on a preset control algorithm, such as PID control. The control instruction is then sent to the drive device of the displacement assembly 23 to control the displacement assembly 23 to drive the rotation of the rotatable reflector 12, ensuring that the rotatable reflector 12 guides the detection light 25 to the target position of the probe 10.

[0051] Optionally, the tracking device for the probe 10 further includes an observation component, which is used to observe the position of the probe 10 and / or the detection light 25 .

[0052] In the disclosed embodiment, the observation assembly includes any device capable of detecting whether the probe 10 and the detection light 25 are at a specific location on the probe 10. For example, an image of the probe 10 and the detection light 25 can be captured by a charge-coupled device (CCD) camera, a complementary metal-oxide-semiconductor (CMOS) camera, or other device to monitor the location of the probe 10 and the detection light 25 during the measurement process.

[0053] In this way, by setting up an observation component to observe the probe 10 and / or the detection light 25, it is possible to observe in real time whether the detection light 25 is on the back of the needle tip before and during the detection, thereby making real-time adjustments to the optical path elements such as the rotatable reflector 12 so that the detection light 25 is irradiated on the back of the needle tip.

[0054] Optionally, the observation assembly includes an imaging device 22 for converting optical signals into electrical signals to generate images; a half-mirror 24 for transmitting observation light 26 emitted by the light source 11 to the probe 10 and reflecting the observation light 26 reflected by the probe 10 to the imaging device 22.

[0055] In the embodiment of the present disclosure, the imaging device 22 may be a camera. Specifically, the half-mirror mirror 24 reflects the observation light 26 to the camera, thereby achieving imaging to observe whether the detection light 25 is at a specific position of the probe 10 .

[0056] In the embodiment of the present disclosure, the light source 11 that emits the observation light 26 can be a different light source 11 from the light source 11 that emits the detection light 25. In practical applications, when the light source 11 that emits the observation light 26 is different from the light source 11 that emits the detection light 25, a second light source 18 that emits the observation light 26 can be set at any position, as long as the observation light 26 emitted by the second light source 18 can pass through the half-reflecting half-mirror 24 and irradiate the probe 10 and the imaging device 22. Specifically, in combination with Figure 2As shown, the second light source 18 and the half-reflecting half-mirror 24 can be arranged in sequence from top to bottom directly above the probe 10. The second light source 18 can be an LED. A first metal cage 19 is provided at the upper end of the scanning tube. The half-reflecting half-mirror 24 can be arranged in the first metal cage 19. The first metal cage 19, the scanning tube, and the second metal cage 20 are all provided with an optical path for the observation light 26 to pass through. In this way, the observation light 26 can be directly transmitted to the probe 10 from directly above the probe 10. The observation light 26 reflected from the probe 10 can return to the half-reflecting half-mirror 24 through the incident optical path and be reflected by the half-reflecting half-mirror 24 to the imaging device 22. Alternatively, the second light source 18 and the half-reflecting half-mirror 24 may not be arranged directly above the probe 10, but may be arranged in sequence from far to near on the side of the probe 10, and the observation light 26 is transmitted to the probe 10 from the optical path corresponding to the side.

[0057] In other embodiments, the light source 11 that emits the observation light 26 may be the same light source 11 as the light source 11 that emits the detection light 25. In practical applications, when the light source 11 that emits the observation light 26 is the same as the first light source 17 that emits the detection light 25, one or more optical path elements may be provided to transmit the observation light 26 emitted by the first light source 17 to the probe 10 through a light path different from the incident light path of the detection light 25 via a half-reflecting half-mirror 24, and the observation light 26 reflected from the probe 10 is reflected via the half-reflecting half-mirror 24 to the imaging device 22. A combination of multiple optical path elements may be provided to illuminate the observation light 26 emitted by the first light source 17 to the position of the second light source 18 in the above-mentioned disclosed embodiments. Specifically, in combination with Figure 4 As shown, a beam splitter 27, such as a cube beam splitter or a polarization beam splitter, can be set at the first light source 17 to split the light beam emitted by the first light source 17 into a detection light 25 for detecting the light path and an observation light 26 for observing the light path. Then, a first reflector 28 can be set to guide the observation light 26 to the position of the second light source 18, and then an optical path element can be set to adjust the size and direction of the observation light 26, such as a lens or a second reflector 29, so that the observation light 26 is irradiated to the probe 10 in the same manner as the above-mentioned disclosed embodiment. For example, the same irradiation angle and the same optical path channel in the scanning tube related structure are used to irradiate the observation light 26 from the position of the second light source 18 to the probe 10, and a CCD camera or a CMOS camera is placed on the reflected light path of the half-reflecting half-mirror 24, so that the half-reflecting half-mirror 24 receives the observation light 26 reflected from the probe 10 to generate an image. The specific scheme will not be repeated here.

[0058] In this way, by setting a half-reflective half-mirror 24, part of the observation light 26 emitted by the light source 11 passes through to the probe 10, and at the same time, part of the observation light 26 reflected by the probe 10 is reflected to the imaging device 22, so that the observation light 26 can be effectively irradiated onto the probe 10, and the light reflected by the probe 10 can be captured by the imaging device 22. The imaging device 22 converts the light signal reflected from the surface of the sample to be tested into an electrical signal, and then generates a visual image, so that it can monitor in real time whether the detection light 25 is located on the back of the tip of the probe 10 during the scanning process, thereby enhancing the dynamic control of the probe 10 and ensuring the accuracy and reliability of the test process.

[0059] Optionally, the tracking device of the probe 10 further includes a second converging mirror 21. The second converging mirror 21 is disposed between the semi-reflective mirror 24 and the imaging device 22, and is used for the imaging device 22 to form an image.

[0060] In the embodiment of the present disclosure, the second converging lens 21 can be a convex lens, or a combination of a reflector and a convex lens, as long as the observation light 26 can be imaged on the imaging device 22. In practical applications, the second converging lens 21 can be a convex lens, a composite lens system composed of multiple lenses, or other optical path elements that can be used for imaging by an imaging device.

[0061] In this way, since the imaging device 22 relies on the received light signal to generate an image, by setting the second converging mirror 21 between the half-reflecting half-mirror 24 and the imaging device 22, the observation light 26 irradiated from the half-reflecting half-mirror 24 can be adjusted to make the imaging device 22 form an image.

[0062] In some embodiments, the atomic force microscope includes: the above-mentioned probe 10 tracking device. In this way, the light source 11 emits detection light 25, and the detection light 25 is concentrated by the beam reducer 13 at the focal position of the first convex lens 14, that is, the position where the rotatable reflector 12 reflects the detection light 25. Therefore, no matter how the rotatable reflector 12 rotates, the detection light 25 transmitted by the first convex lens 14 is a parallel light beam. At this time, the rotation of the rotatable reflector 12 is controlled so that the detection light 25 reflected by the rotatable reflector 12 passes through the first convex lens 14 and then illuminates the back of the probe 10 tip, and then is reflected from the back of the probe 10 tip. Since the detection light 25 reflected after each rotation of the rotatable reflector 12 is parallel to each other, the detection light 25 reflected by the probe 10 each time is also parallel to each other. First converging mirror 15 may be a convex lens. After the detection light 25 reflected from probe 10 passes through first converging mirror 15, the reflected detection light 25 is parallel to one another. Therefore, regardless of how rotatable reflector 12 rotates, the reflected detection light 25 will be focused on position detector 16 after passing through first converging mirror 15. Therefore, using the aforementioned probe 10 tracking device, other optical path components do not need to be moved; only the rotatable reflector 12 needs to be rotated to achieve real-time tracking of probe 10, ensuring that the detection light 25 is at the target position (the back side) of probe 10.

[0063] The above description and the accompanying drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Unless expressly required, individual components and functions are optional, and the order of operations may vary. Portions and features of some embodiments may be included in or replace portions and features of other embodiments. The embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A probe tracking device, characterized in that: include: probe; An optical path assembly includes a light source, a rotatable reflector, a first convex lens, and a first converging lens; wherein the light source is used to generate detection light, the rotatable reflector is used to reflect the detection light, the focus of the first convex lens is located at the position where the rotatable reflector reflects the detection light, so that the detection light irradiated toward the target position of the probe after each rotation of the rotatable reflector is parallel to each other, and the first converging lens is used to irradiate the detection light reflected by the probe onto the position detector; The displacement component is used to drive the probe to move.

2. The device according to claim 1, characterized in that The position detector is arranged at the focus of the first converging mirror and is used for focusing the detection light reflected by the probe onto the position detector.

3. The device according to claim 1, characterized in that Also includes: The beam reducer is arranged between the light source and the rotatable reflector.

4. The device according to claim 1, characterized in that The displacement components include: The probe is connected to the piezoelectric block; when a voltage is applied to the piezoelectric block, the piezoelectric block will deform, thereby driving the probe to move.

5. The device according to claim 1, characterized in that Also includes: A displacement detection device, used to detect the displacement of the probe; The controller is connected to the displacement detection device and the displacement assembly, and is used for controlling the displacement assembly to drive the rotatable reflector to rotate according to the displacement of the probe.

6. The device according to any one of claims 1 to 3, characterized in that Also includes: A viewing assembly for viewing the position of the probe and / or detection light.

7. The device according to claim 6, characterized in that The observation components include: An imaging device for converting optical signals into electrical signals to generate images; The half-reflecting half-mirror is used to transmit the observation light emitted by the light source to the probe, and reflect the observation light reflected by the probe to the imaging device.

8. The device according to claim 7, characterized in that Also includes: The second converging mirror is arranged between the semi-reflective and semi-transmissive mirror and the imaging device, and is used for imaging by the imaging device.

9. An atomic force microscope, characterized in that The probe tracking device comprises the probe tracking device according to any one of claims 1 to 8.

Images