MFC hanger dust-free workshop conveying equipment
By setting up conveying components and liquid tanks between the ordinary workshop and the dust-free workshop, the automatic transfer of MFC hangers is achieved, which solves the problem of low manual transport efficiency, improves production efficiency and prevents pollutants from entering the dust-free workshop.
Patent Information
- Application Number
- CN202422765563.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-13
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-11-13
AI Technical Summary
During the semiconductor manufacturing process, the transport of MFC mounts requires manual operation, resulting in low production efficiency and manual entry of dust-free workshop requires air washing room, which wastes time and manpower.
A kind of MFC hanging tool dust-free workshop conveying equipment is designed. By setting up conveying components and liquid tanks between ordinary workshops and dust-free workshops, the liquid sealing tank is used to prevent pollutants from entering the dust-free workshops, and automatic material transfer is achieved.
Improve material transport efficiency, avoid dust particles entering the dust-free workshop, and improve production efficiency.
Smart Images
Figure CN223238854U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of workshop transportation, in particular to MFC hanger dust-free workshop transportation equipment. Background Art
[0002] Mass flow controllers (MFCs) are critical devices used in semiconductor equipment to precisely control gas flow and pressure to ensure the quality and stability of semiconductor devices. Typically consisting of a flow sensor, control circuitry, and actuators, MFCs can control gas flow and pressure using digital or analog signals. These devices are widely used in semiconductor manufacturing, photolithography, thin film deposition, ion implantation, and other fields, and are an integral part of the semiconductor manufacturing process. To ensure accuracy, they are generally manufactured in a cleanroom.
[0003] During the production process, both ordinary workshops and dust-free workshops will use hangers for transportation, but manual loading and unloading are still required when transporting between the two workshops, which is time-consuming and labor-intensive. In addition, manual labor is required to pass through the air washing room when entering the dust-free workshop. This results in a large amount of manpower and time required for material transfer, and production efficiency cannot be further improved.
[0004] Based on this, an MFC hanger dust-free workshop conveying device is now provided, which can eliminate the disadvantages of the existing device. Utility Model Content
[0005] The purpose of the utility model is to provide an MFC hanger dust-free workshop transmission device to solve the problems in the background technology.
[0006] To achieve the above objectives, the present invention provides the following technical solutions:
[0007] An MFC hanger clean room transport device includes a conveying assembly, the conveying assembly being arranged between a common workshop mounting frame and a clean room mounting frame, a workshop partition wall being arranged between the common workshop mounting frame and the clean room mounting frame, and a driving track being arranged on each of the common workshop mounting frame and the clean room mounting frame;
[0008] The conveying assembly includes a conveying motor, the output end of the conveying motor is transmission-connected to a conveying driving sprocket, the conveying driving sprocket is fixedly connected to a conveying roller, both ends of the conveying roller are provided with a conveying driving sprocket and a transmission shaft, a plurality of hanging basket guide baffles are provided above the conveying roller, a hanging basket is slidingly provided inside the hanging basket guide baffle, a partition is provided above the hanging basket, a sensing rod is provided near the side of the dust-free workshop mounting frame, and a tensioner is provided on the outside of the transmission shaft.
[0009] On the basis of the above technical solutions, the present invention also provides the following optional technical solutions:
[0010] In an optional solution, a tensioner is provided on the outside of the transmission shaft.
[0011] In an optional solution: the upper end of the hanging basket guide baffle is opened.
[0012] In an optional solution: a sensor is provided at the lower end of the sensing rod.
[0013] In an optional solution: an ordinary workshop crane is provided inside the ordinary workshop mounting frame, one end of the crane track on the ordinary workshop mounting frame is slidably connected to the ordinary workshop crane, and a crane hook is provided at the output end of the ordinary workshop crane.
[0014] In an optional solution, a clean room crane is provided inside the clean room mounting frame, and the clean room crane is slidably connected to an adjacent crane track.
[0015] In an optional solution: a liquid tank is provided above the conveying component, and the partition is provided below the liquid tank and is lower than the water level of the liquid tank.
[0016] In an optional solution: a liquid level tank infusion device is provided on one side of the lower end of the dust-free workshop mounting frame, and an output end of the liquid level tank infusion device is fixedly connected to the liquid level tank.
[0017] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0018] The utility model provides a conveying component and a liquid tank, and the liquid tank is filled with liquid to transfer materials between the ordinary workshop and the dust-free workshop area. The conveying component is used to convey the hanging basket, and the liquid in the liquid tank can effectively block the tank to prevent external pollutants from entering the dust-free workshop, and the hanging basket is automatically conveyed to the dust-free workshop through the underwater conveying trough. In this process, the liquid medium prevents air and dust particles from entering the dust-free workshop through the conveying trough; thereby, on the one hand, the conveying efficiency is improved, and on the other hand, dust particles are prevented from entering the dust-free workshop, thereby effectively improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model.
[0020] Figure 2 It is a schematic diagram of the overall structure of one side of the utility model.
[0021] Figure 3 It is a schematic diagram of the overall structure of the other side of the utility model.
[0022] Figure 4 This is a schematic diagram of the structure of the conveying component of the present utility model.
[0023] Notes on the accompanying figures: 1. Ordinary workshop mounting frame; 2. Ordinary workshop crane; 3. Dust-free workshop crane; 4. Workshop partition wall; 5. Partition; 6. Crane track; 7. Sensing rod; 8. Tensioner; 9. Conveying drive sprocket; 10. Liquid level tank infusion device; 11. Conveying motor; 12. Hanging basket; 13. Hanging basket guide baffle; 14. Drive shaft; 15. Crane hook; 16. Dust-free workshop mounting frame. DETAILED DESCRIPTION
[0024] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.
[0025] In one embodiment, Figure 1-Figure 4 As shown, an MFC hanger clean room transport device includes a conveying assembly, which is arranged between a common workshop mounting frame 1 and a clean room mounting frame 16. A workshop partition wall 4 is arranged between the common workshop mounting frame 1 and the clean room mounting frame 16. A driving track 6 is provided on each of the common workshop mounting frame 1 and the clean room mounting frame 16.
[0026] The conveying assembly includes a conveying motor 11, the output end of the conveying motor 11 is connected to the conveying driving sprocket 9, the conveying driving sprocket 9 is fixedly connected to the conveying roller, and the conveying driving sprocket 9 and the transmission shaft 14 are provided at both ends of the conveying roller. A plurality of hanging basket guide baffles 13 are provided above the conveying roller, and a hanging basket 12 is slidingly provided inside the hanging basket guide baffle 13. A partition 5 is provided above the hanging basket 12, and a sensing rod 7 is provided on the side close to the dust-free workshop mounting frame 16. A tensioner 8 is provided on the outside of the transmission shaft 14;
[0027] In this embodiment, the materials in the ordinary workshop are transported to the clean room through the liquid tank by the conveying component.
[0028] In one embodiment, Figure 1 As shown, a tensioner 8 is provided on the outside of the transmission shaft 14 .
[0029] In one embodiment, Figure 1 As shown, the upper end of the hanging basket guide baffle 13 is opened to facilitate the placement of the hanging basket 12.
[0030] In one embodiment, Figure 1 As shown, a sensor is provided at the lower end of the sensing rod 7 for sensing whether the hanging basket 12 is in place.
[0031] In one embodiment, Figure 1As shown, an ordinary workshop crane 2 is provided on the inner side of the ordinary workshop mounting frame 1, one end of the crane track 6 on the ordinary workshop mounting frame 1 is slidingly connected to the ordinary workshop crane 2, and a crane hook 15 is provided at the output end of the ordinary workshop crane 2 for clamping materials in the ordinary workshop.
[0032] In one embodiment, Figure 1 As shown, a clean room trolley 3 is provided inside the clean room mounting frame 16 , and the clean room trolley 3 is slidably connected to the adjacent trolley track 6 for clamping in the clean room.
[0033] In one embodiment, Figure 1 As shown, a liquid tank is provided above the conveying assembly, and the partition 5 is provided below the liquid tank and is lower than the water level of the liquid tank, ensuring that the water level of the liquid tank is higher than the partition 5 to prevent dust from entering.
[0034] In one embodiment, Figure 1 As shown, a liquid level tank infusion device 10 is provided on one side of the lower end of the dust-free workshop mounting frame 16, and the output end of the liquid level tank infusion device 10 is fixedly connected to the liquid level tank to ensure the blocking effect of the liquid tank.
[0035] The above embodiment discloses an MFC hanger dust-free workshop conveying device, wherein the ordinary workshop crane 2 of the ordinary workshop places the hanging basket 12 at one end of the conveying assembly, and then the conveying motor 11 starts to drive the hanging basket 12 to move inside the liquid tank into the dust-free workshop, wherein the transmission shaft 14 and the tensioner 8 provide transmission efficiency and stability, and the conveying motor 11 drives the conveying active sprocket 9 to rotate to achieve smooth movement, and then after entering the dust-free workshop, it is clamped and transported to the designated position by the dust-free workshop crane 3.
[0036] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.
Claims
1. An MFC hanger dust-free workshop conveying device, comprising a conveying assembly, wherein the conveying assembly is arranged between a common workshop mounting frame (1) and a dust-free workshop mounting frame (16), a workshop partition wall (4) is arranged between the common workshop mounting frame (1) and the dust-free workshop mounting frame (16), and a driving track (6) is arranged on each of the common workshop mounting frame (1) and the dust-free workshop mounting frame (16); It is characterized by: The conveying assembly includes a conveying motor (11), the output end of the conveying motor (11) is connected to a conveying driving sprocket (9), the conveying driving sprocket (9) is fixedly connected to a conveying roller, both ends of the conveying roller are provided with a conveying driving sprocket (9) and a transmission shaft (14), a plurality of hanging basket guide baffles (13) are provided above the conveying roller, a hanging basket (12) is slidingly provided inside the hanging basket guide baffle (13), a partition (5) is provided above the hanging basket (12), a sensing rod (7) is provided on the side close to the dust-free workshop mounting frame (16), and a tensioner (8) is provided on the outside of the transmission shaft (14).
2. The MFC hanger dust-free workshop transmission equipment according to claim 1, characterized in that: A tensioner (8) is provided on the outside of the transmission shaft (14).
3. The MFC hanger dust-free workshop transmission equipment according to claim 1, characterized in that: The upper end of the hanging basket guide baffle (13) is opened.
4. The MFC hanger dust-free workshop transmission equipment according to claim 1, characterized in that: The lower end of the sensing rod (7) is provided with a sensor.
5. The MFC hanger dust-free workshop transmission equipment according to claim 1, characterized in that: A common workshop crane (2) is provided inside the common workshop mounting frame (1), one end of a crane track (6) on the common workshop mounting frame (1) is slidably connected to the common workshop crane (2), and a crane hook (15) is provided at the output end of the common workshop crane (2).
6. The MFC hanger dust-free workshop transmission equipment according to claim 1, characterized in that: A dust-free workshop trolley (3) is provided inside the dust-free workshop mounting frame (16), and the dust-free workshop trolley (3) is slidably connected to an adjacent trolley track (6).
7. The MFC rack dust-free workshop conveying equipment according to claim 1, characterized in that: A liquid tank is provided above the conveying assembly, and the partition (5) is provided below the liquid tank and is lower than the water level of the liquid tank.
8. The MFC hanger dust-free workshop transmission equipment according to claim 1, characterized in that: A liquid level tank infusion device (10) is provided on one side of the lower end of the dust-free workshop mounting frame (16), and the output end of the liquid level tank infusion device (10) is fixedly connected to the liquid level tank.