Single crystal furnace electrode sheath

Abstract

The utility model discloses an electrode sheath of a single crystal furnace, which belongs to the technical field of single crystal furnaces and comprises a sheath and end sleeves arranged at two ends of the sheath. The sheath is made of a carbon-carbon material; the end sleeve is made of a boron nitride material or an aluminum oxide material; one end of the end sleeve is inserted into the sheath. According to the utility model, by improving the material and the structural design of the sheath, the service life and the stability of the sheath are obviously improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal furnaces, in particular to a single crystal furnace electrode sheath. Background Art

[0002] In traditional single crystal furnaces, the electrode sheaths typically consist of two cylindrical structures: an outer graphite sheath and an inner quartz sheath. This structure results in a short lifespan for the quartz sheath, typically lasting only one furnace, while the outer graphite sheath has a lifespan of only 1-3 months. Utility Model Content

[0003] In view of the above problems, the utility model provides a single crystal furnace electrode sheath, which significantly improves the service life and stability of the sheath by improving the sheath material and structural design.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0005] A single crystal furnace electrode sheath comprises a sheath and end sleeves arranged at both ends of the sheath; the sheath is made of carbon-carbon material; the end sleeves are made of boron nitride material or aluminum oxide material; one end of the end sleeve is inserted into the sheath.

[0006] As a further improvement of the above solution, a mounting hole is provided on the outer wall of the sleeve, and a fixing piece for fixing the end sleeve to the sleeve is provided in the mounting hole.

[0007] As a further improvement of the above solution, countersunk holes are provided at both ends of the sheath, and the end sleeves are fixed in the countersunk holes.

[0008] As a further improvement of the above solution, the end sleeve is in a flange shape; the end with a smaller diameter is inserted into the sheath.

[0009] As a further improvement of the above scheme, the fixing part is a carbon-carbon screw; the end sleeve and the sleeve are fixed by the carbon-carbon screw; the mounting holes of the carbon-carbon screw and the sleeve are connected by threads, and the side wall of the end sleeve is provided with a hole for inserting the carbon-carbon screw, and the hole is a smooth hole.

[0010] As a further improvement of the above solution, the hole of the end sleeve is a blind hole, and the bottom surface thickness of the blind hole is 2-10 mm.

[0011] As a further improvement of the above solution, a gap of 2-5 mm is provided between the sheath and the end sleeve.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] 1. By using carbon-carbon material as the outer sheath and boron nitride material or alumina as the inner sheath, the temperature resistance and wear resistance of the sheath are improved, thereby extending the service life of the sheath.

[0014] 2. The flange shape design of the end sleeve and the use of countersunk holes enhance the fixing stability between the end sleeve and the sheath.

[0015] 3. The use of carbon-carbon screw and light hole design ensures connection reliability in high temperature environment while avoiding damage caused by thermal expansion.

[0016] 4. The blind hole design of the end sleeve provides additional mechanical support and prevents arcing, enhancing the structural integrity of the sleeve.

[0017] 5. Setting the gap between the sheath and the end sleeve effectively adapts to thermal expansion and reduces mechanical stress and deformation at high temperatures. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a structural diagram of the present utility model.

[0019] Figure 2 This is another structural diagram of the present utility model.

[0020] Figure 3 This is a third structural diagram of the present utility model.

[0021] In the figure: 1. Sheath; 2. End sleeve; 3. Fixing piece. DETAILED DESCRIPTION

[0022] In order to enable those skilled in the art to better understand the technical solution, the present invention is described in detail below in conjunction with the embodiments. The description in this section is only exemplary and explanatory and should not have any limiting effect on the scope of protection of the present invention.

[0023] like Figure 1-3 As shown, the specific solution of this embodiment is implemented as follows:

[0024] 1. Material selection:

[0025] External carbon-carbon sheath 1: Select high-purity, high-density carbon-carbon composite material, which has good thermal stability and mechanical strength.

[0026] Internal boron nitride sheath 1: Made of high-purity boron nitride material or alumina material, it has excellent high temperature resistance, corrosion resistance and insulation properties.

[0027] 2. Manufacturing of the outer carbon-carbon sheath 1:

[0028] The carbon-carbon composite material is prepared by chemical vapor deposition (CVD) process to ensure the uniformity and density of the material.

[0029] The prepared carbon-carbon material is processed into a cylindrical sheath 1.

[0030] like Figure 1 As shown, the end sleeve 2 is in a flange shape, and one end thereof can be inserted into the sheath 1 .

[0031] like Figure 2 As shown, the end sleeve 2 is in the shape of a ring; countersunk holes are processed at both ends of the sleeve 1, and the diameter is slightly smaller than the diameter of the boron nitride sleeve 1 to ensure that the end sleeve 2 can be tightly fixed in the countersunk hole.

[0032] like Figure 3 As shown, end sleeve 2 is flange-shaped, with one end inserted into sheath 1. Sheath 1 has a mounting hole in its sidewall, while end sleeve 2 has a light hole in its sidewall, which corresponds to each other. A fastener 3 is inserted into the mounting hole to secure end sleeve 2. The light hole in the boron nitride is not a through hole, leaving a 2-10mm margin at the bottom to prevent arcing during heating. A 2-5mm gap is provided between the two sheaths.

[0033] 3. Manufacturing of the inner boron nitride sheath 1:

[0034] Boron nitride material is prepared by hot pressing and sintering process to ensure the density and strength of the material.

[0035] The boron nitride material is processed into a cylindrical sheath 1 to fit the size of the outer carbon-carbon sheath 1 .

[0036] A flange shape is processed at one end of the boron nitride sheath 1 to facilitate cooperation with the countersunk hole of the outer carbon-carbon sheath 1 .

[0037] 4. Fixing the end sleeve 2 and the sheath 1:

[0038] A carbon-carbon screw was used as the fixing member 3 .

[0039] A light hole is processed on the side wall of the boron nitride sheath 1, and the hole diameter matches the diameter of the carbon-carbon screw.

[0040] Insert the flange end of the boron nitride sheath 1 into the counterbore of the carbon-carbon sheath 1, ensuring that the two are aligned.

[0041] The carbon-carbon screw is screwed in through the light hole to fix the boron nitride sheath 1 in the counterbore of the carbon-carbon sheath 1 .

[0042] 5. Blind hole design:

[0043] A blind hole is machined at the bottom of the boron nitride sheath 1 , with a depth of 5 mm and a bottom thickness of 5 mm, to avoid arcing during heating and to provide mechanical support.

[0044] 6. Gap setting:

[0045] A gap of 3 mm is left between the boron nitride sheath 1 and the carbon-carbon sheath 1 to accommodate thermal expansion and reduce structural stress.

[0046] 7. Inspection and testing:

[0047] Carry out dimensional inspection on the completed single crystal furnace electrode sheath to ensure that the dimensions of each component meet the design requirements.

[0048] A thermal stability test was performed on the jacket 1 in a simulated single crystal furnace working environment to verify its service life and stability at high temperatures.

[0049] Through the above steps, we have successfully manufactured a single crystal furnace electrode sheath. The sheath 1 has shown excellent high temperature resistance and long service life in actual use, effectively improving the operating efficiency and safety of the single crystal furnace.

[0050] It should be noted that, in this article, the terms include, contain or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. Specific examples are used herein to illustrate the principles and implementation methods of the technical solution of the present utility model. The above examples are only used to help understand the method of the present utility model and its core idea. The above is only a preferred embodiment of the present utility model. It should be pointed out that due to the limitations of textual expression and the objective existence of infinite specific structures, ordinary technicians in this technical field can make several improvements, modifications or changes without departing from the principles of the present utility model, and can also combine the above technical features in an appropriate manner; these improvements, modifications, changes or combinations, or the direct application of the concept and technical solution of the utility model to other occasions without improvement, should all be regarded as the scope of protection of the present utility model.

Claims

1. A single crystal furnace electrode sheath, characterized in that: The invention comprises a sheath (1) and end sleeves (2) arranged at both ends of the sheath (1); the sheath (1) is made of carbon-carbon material; the end sleeves (2) are made of boron nitride material or aluminum oxide material; and one end of the end sleeve (2) is inserted into the sheath (1).

2. The single crystal furnace electrode sheath according to claim 1, characterized in that: The outer wall of the sleeve (1) is provided with a mounting hole, and a fixing piece (3) for fixing the end sleeve (2) and the sleeve (1) is provided in the mounting hole.

3. The single crystal furnace electrode jacket according to claim 1, characterized in that: Countersunk holes are provided at both ends of the sheath (1), and the end sleeves (2) are fixed in the countersunk holes.

4. The single crystal furnace electrode jacket according to claim 1, characterized in that: The end sleeve (2) is in a flange shape; the end with a smaller diameter is inserted into the sheath (1).

5. The single crystal furnace electrode jacket according to claim 2, characterized in that: The fixing member (3) is a carbon-carbon screw; the end sleeve (2) and the sleeve (1) are fixed via the carbon-carbon screw; the mounting holes of the carbon-carbon screw and the sleeve (1) are connected by threads, and the side wall of the end sleeve (2) is provided with a hole for inserting the carbon-carbon screw, and the hole is a smooth hole.

6. The single crystal furnace electrode jacket according to claim 5, characterized in that: The hole of the end sleeve (2) is a blind hole, and the bottom surface thickness of the blind hole is 2-10 mm.

7. The single crystal furnace electrode jacket according to claim 1, characterized in that: A gap of 2-5 mm is provided between the sheath (1) and the end sleeve (2).

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