Continuous vacuum coating equipment

Abstract

The continuous vacuum coating equipment comprises a machine tool, a coating table, a mechanical arm and a feeding assembly, the feeding assembly comprises a table body, a motor, a rotating disc, a storage box and a top cover, an opening is formed in the right end face of the machine tool, a cooling bin is arranged in the table body, cooling liquid is filled in the cooling bin, an installation bin is arranged in the table body, and the mechanical arm is arranged in the installation bin. A motor, a rotary table, a storage box, a top cover, a cooling bin and a vacuum pump are arranged on the upper end face of the rotary table, a cross-shaped partition plate is arranged on the upper end face of the rotary table, the rotary table is equally divided into four cavities by the cross-shaped partition plate, and the vacuum pump is installed on the upper end face of the machine tool and connected into the top cover. According to the coating device, vacuum continuous feeding in the storage box can be guaranteed, meanwhile, the coated objects in the storage box can be cooled, the coating effect is improved, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model mainly relates to the technical field of vacuum coating equipment, in particular to a continuous vacuum coating equipment. Background Art

[0002] In the field of vacuum coating, the object to be coated is generally referred to as the substrate, and the material to be coated is called the target. The substrate and target are placed in the same vacuum chamber. Evaporation coating generally involves heating the target to evaporate the surface components in the form of atomic groups or ions, which then settle on the substrate surface. A thin film is formed through a film-forming process (scattered points - island structure - labyrinth structure - layered growth). Sputtering coating can be simply understood as bombarding the target with electrons or high-energy lasers, causing the surface components to be sputtered out in the form of atomic groups or ions, which ultimately settle on the substrate surface, undergoing a film-forming process, and ultimately forming a thin film. The coating process is prone to high temperatures, and the target needs to be cooled after being removed from the vacuum chamber to prevent the coating from being affected.

[0003] For example, the patent application number 201921473506.9 discloses a multi-station continuous vacuum coating equipment, including a coating box, a bracket is provided at the bottom of the coating box, a first transition box is provided on the right side and back side of the coating box, and a second transition box is provided on the left side and front side of the coating box, both sides of the first transition box and the second transition box are through structures, and the left side of the first transition box and the right side of the second transition box are both connected to the coating box. The utility model relates to the technical field of vacuum coating equipment. The multi-station continuous vacuum coating equipment realizes multi-station continuous coating processing by providing the first transition box on the right side and back side of the coating box, the second transition box is provided on the left side and front side of the coating box, the first transition box and the second transition box are through structures, and the left side of the first transition box and the right side of the second transition box are both connected to the coating box, with less pause time between material changes, greatly improving processing efficiency.

[0004] The inventor believes that the existing technology cannot simultaneously perform the functions of loading and cooling through the feeding component, and needs to dissipate heat separately, which is not efficient enough. Utility Model Content

[0005] The utility model mainly provides a continuous vacuum coating device to solve the technical problems raised in the above background technology.

[0006] The technical solution adopted by the utility model to solve the above technical problems is:

[0007] A continuous vacuum coating equipment comprises a machine tool, a coating table, a robotic arm and a loading assembly, wherein the coating table, the robotic arm and the loading assembly are sequentially installed in the machine tool from left to right, and the loading assembly comprises a table body, a motor, a turntable, a storage box and a top cover. The right end face of the machine tool is provided with an opening, the table body is installed in the machine tool and one end extends outward through the opening, a cooling bin is provided in the table body, the cooling bin is filled with coolant, an installation bin is provided inside the table body, the motor is installed in the installation bin, the output end of the motor extends upward through the installation bin and extends out of the table body, the turntable is fixedly installed at the output end of the motor and contacts the upper end face of the table body, the upper end face of the turntable is provided with a cross dividing plate, the cross dividing plate divides the turntable into four chambers, the storage boxes are movably connected in the chambers respectively, the top cover is fixedly installed on the upper end face of the opening to close the storage box located at the opening, a vacuum pump is installed on the upper end face of the machine tool, and the vacuum pump is connected to the top cover.

[0008] Preferably, a slide groove is provided on the bottom surface of the chamber, and a slider slidably connected to the slide groove is provided on the lower end surface of the storage box.

[0009] Preferably, a first magnet is provided in the slide groove, and a second magnet cooperating with the first magnet is installed on the outer wall of the slider.

[0010] Preferably, the outer wall of the storage box is provided with a groove.

[0011] Preferably, a sealing gasket is installed on the upper end surface of the storage box.

[0012] Preferably, the top wall of the cooling chamber is a heat conducting plate, and a plurality of heat conducting columns are integrally formed on the lower end surface of the heat conducting plate.

[0013] Preferably, a water pump is installed on the lower end surface of the machine tool, and the output end and input end of the water pump are respectively equipped with a water outlet pipe and a water inlet pipe connected to an external water tank. The water outlet pipe is connected to and communicated with the cooling bin, and a conduit connected to the external water tank is installed in the cooling bin.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. By setting up a motor, a turntable, a storage box, a top cover, a cooling chamber and a vacuum pump, the storage box is evacuated by the vacuum pump to ensure that the storage box is in a vacuum state for continuous loading, and the coated objects in the storage box can be cooled at the same time, thereby improving the coating effect and improving work efficiency.

[0016] The present invention will be explained in detail below with reference to the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 It is a cross-sectional view of the utility model;

[0019] Figure 3 This is a cross-sectional view of the feed assembly of the present utility model;

[0020] Figure 4 This is a top view of the turntable and storage box of the present invention;

[0021] Figure 5 This is a top view of the turntable, storage box and top cover of the utility model;

[0022] Figure 6 for Figure 2 Magnified view of area a;

[0023] Figure 7 for Figure 3 Magnified view of area b.

[0024] In the figure: 1. Machine tool; 11. Opening; 12. Vacuum pump; 13. Water pump; 131. Water outlet pipe; 132. Water inlet pipe; 2. Coating table; 3. Robotic arm; 4. Loading assembly; 41. Table body; 411. Cooling chamber; 4111. Conduit; 412. Mounting chamber; 413. Heat conduction plate; 414. Heat conduction column; 42. Motor; 43. Turntable; 431. Cross partition; 432. Chamber; 433. Slide; 4331. First magnet; 44. Storage box; 441. Slider; 442. Second magnet; 443. Groove; 444. Sealing gasket; 45. Top cover. DETAILED DESCRIPTION

[0025] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings, but the present invention can be implemented in different forms and is not limited to the embodiments described in the text. On the contrary, these embodiments are provided to make the content disclosed in the present invention more thorough and comprehensive.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly associated with those skilled in the art in the technical field to which the present invention pertains. The terminology used herein in the specification of the present invention is for the purpose of describing specific embodiments and is not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0027] Please pay attention to Figures 1 to 7A continuous vacuum coating device includes a machine tool 1, a coating table 2, a robotic arm 3 and a loading assembly 4. The coating table 2, the robotic arm 3 and the loading assembly 4 are sequentially installed in the machine tool 1 from left to right. The loading assembly 4 includes a table body 41, a motor 42, a turntable 43, a storage box 44 and a top cover 45. The right end face of the machine tool 1 is provided with an opening 11. The table body 41 is installed in the machine tool 1 and one end extends outward through the opening 11. A cooling bin 411 is provided in the table body 41, and the cooling bin 411 is filled with coolant. An installation bin 412 is provided in the table body 41, and the motor 42 is installed in the installation bin 412. Inside, the output end of the motor 42 extends upward, passes through the mounting chamber 412 and extends out of the table 41. The turntable 43 is fixedly installed at the output end of the motor 42 and contacts the upper end surface of the table 41. The upper end surface of the turntable 43 is provided with a cross partition plate 431. The cross partition plate 431 divides the turntable 43 into four chambers 432. The storage boxes 44 are movably connected in the chambers 432 respectively. The top cover 45 is fixedly installed on the upper end surface of the opening 11 to close the storage box 44 located at the opening 11. The upper end surface of the machine tool 1 is installed with a vacuum pump 12, and the vacuum pump 12 is connected to the top cover 45.

[0028] The above design is equipped with a motor 42, a turntable 43, a storage box 44, a top cover 45, a cooling chamber 411 and a vacuum pump 12. The vacuum pump 12 is used to evacuate the storage box 44 to a vacuum state, thereby ensuring that the storage box 44 is in a vacuum state for continuous loading, and simultaneously cooling the coated objects in the storage box 44, thereby improving the coating effect and improving work efficiency.

[0029] Please pay attention to Figures 2 to 7 The bottom surface of the chamber 432 is provided with a slide groove 433, and the lower end surface of the storage box 44 is provided with a slider 441 slidably connected to the slide groove 433. By providing the slider 441 and the slide groove 433, it is convenient to slide and connect the storage box 44, so that it is convenient to put the storage box 44 into the chamber 432 or take it out of the chamber 432, improving the convenience of taking it out. The slide groove 433 is provided with a first magnet 4331, and the outer wall of the slider 441 is equipped with a second magnet 442 that cooperates with the first magnet 4331. By providing the first magnet 4331 and the second magnet 442, the storage box 44 can be easily fixed in the chamber 432, ensuring that the storage box 44 can be stably located in the chamber 432 during rotation. The outer wall of the storage box 44 is provided with a groove 443, and the groove 443 is provided to facilitate the extraction of the storage box 44. The upper end surface of the storage box 44 is equipped with a sealing gasket 444, and the sealing gasket 444 can further improve the sealing effect.

[0030] Please pay attention to the following figure, Figure 3The top wall of the cooling bin 411 is a heat conducting plate 413, and a plurality of heat conducting columns 414 are integrally formed on the lower end surface of the heat conducting plate 413. By setting the top wall of the cooling bin 411 as the heat conducting plate 413 and having a plurality of heat conducting columns 414, the heat exchange efficiency can be further improved. A water pump 13 is installed on the lower end surface of the machine tool 1, and the output end and input end of the water pump 13 are respectively equipped with a water outlet pipe 131 and a water inlet pipe 132 connected to an external water tank. The water outlet pipe 131 is connected to and communicated with the cooling bin 411, and a conduit 4111 connected to the external water tank is installed in the cooling bin 411. By setting the water pump 13, the coolant can be circulated to further improve the cooling effect.

[0031] The specific operation mode of the utility model is as follows:

[0032] When in use, start the water pump 13 to continuously pump the coolant in the external water tank into the cooling chamber 411 for circulation, first evacuate the machine tool 1 to a vacuum, then draw out the storage box 44 and put the object to be coated, then push the storage box 44 back, press the switch to start the vacuum pump 12 to evacuate the storage box 44 to a vacuum, then turn off the vacuum pump 12, press the switch to start the motor 42, the motor 42 rotates counterclockwise to send the storage box 44 containing the object into the machine tool 1, and turn off the motor 42, then the robotic arm 3 starts to grab the object and place it on the coating table 2 for coating, while continuing to repeat the placing and feeding process, then the robotic arm 3 puts the coated object into the empty storage box 44, at the same time, the heat is conducted out through the heat conducting plate 413 for heat dissipation and cooling, as the turntable 43 rotates to the outside, the coated object is then taken out, and the above operation is repeated until all the objects are processed. After the processing is completed, the water pump 13 and the machine tool 1 are turned off.

[0033] The above description of the present invention is illustrative in combination with the accompanying drawings. It is obvious that the specific implementation of the present invention is not limited to the above-mentioned method. As long as such non-substantial improvements are made by adopting the method concept and technical solution of the present invention, or the concept and technical solution of the present invention are directly applied to other occasions without improvement, they are all within the scope of protection of the present invention.

Claims

1. A continuous vacuum coating device, comprising a machine tool (1), a coating table (2), a robotic arm (3) and a loading assembly (4), characterized in that: The coating table (2), the robotic arm (3) and the loading assembly (4) are sequentially installed in the machine tool (1) from left to right. The loading assembly (4) includes a table body (41), a motor (42), a turntable (43), a storage box (44) and a top cover (45). The right end face of the machine tool (1) is provided with an opening (11). The table body (41) is installed in the machine tool (1) and one end thereof extends outward through the opening (11). A cooling chamber (411) is provided in the table body (41). The cooling chamber (411) is filled with coolant. An installation chamber (412) is provided in the table body (41). The motor (42) is installed in the installation chamber (412). The output end of the motor (42) is upward. The turntable (43) extends through the installation chamber (412) and extends out of the platform (41). The turntable (43) is fixedly installed at the output end of the motor (42) and contacts the upper end surface of the platform (41). The upper end surface of the turntable (43) is provided with a cross partition plate (431). The cross partition plate (431) divides the turntable (43) into four chambers (432). The storage boxes (44) are movably connected in the chambers (432). The top cover (45) is fixedly installed on the upper end surface of the opening (11) to close the storage box (44) located at the opening (11). A vacuum pump (12) is installed on the upper end surface of the machine tool (1), and the vacuum pump (12) is connected to the top cover (45).

2. The continuous vacuum coating equipment according to claim 1, characterized in that: The bottom surface of the chamber (432) is provided with a slide groove (433), and the lower end surface of the storage box (44) is provided with a slider (441) slidably connected to the slide groove (433).

3. The continuous vacuum coating equipment according to claim 2, characterized in that: A first magnet (4331) is provided in the sliding groove (433), and a second magnet (442) that cooperates with the first magnet (4331) is installed on the outer wall of the sliding block (441).

4. The continuous vacuum coating equipment according to claim 1, characterized in that: The outer wall of the storage box (44) is provided with a groove (443).

5. The continuous vacuum coating equipment according to claim 1, characterized in that: A sealing gasket (444) is installed on the upper end surface of the storage box (44).

6. The continuous vacuum coating equipment according to claim 1, characterized in that: The top wall of the cooling chamber (411) is a heat conducting plate (413), and a plurality of heat conducting columns (414) are integrally formed on the lower end surface of the heat conducting plate (413).

7. The continuous vacuum coating equipment according to claim 1, characterized in that: A water pump (13) is installed on the lower end surface of the machine tool (1); an output end and an input end of the water pump (13) are respectively installed with a water outlet pipe (131) and a water inlet pipe (132) connected to an external water tank; the water outlet pipe (131) is connected to and communicates with the cooling chamber (411); a conduit (4111) communicating with the external water tank is installed in the cooling chamber (411).

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