Micro-arc oxidation hanger

By designing the clamping part of silicone material and the micro-arc oxidation hanging tool of aluminum alloy material, the film layer uneven caused by heterogeneous metal ports during the micro-arc oxidation process is solved, and the uniform oxidation effect of products in IC equipment manufacturing is achieved.

CN223255484UActive Publication Date: 2025-08-22LIAONING ZHONGWANG GROUP CO LTD
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Patent Information

Application Number
CN202422624741.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-29
Publication Date
2025-08-22
Estimated Expiration
2034-10-29

AI Technical Summary

Technical Problem

In IC equipment manufacturing, during the microarc oxidation process of products with cavity, due to the presence of heterogeneous metal ports, the masking glue will have a paste at high temperature, resulting in uneven film layer.

Method used

A micro-arc oxidation hanging tool is designed, using a clamping part made of silicone and aluminum alloy material. Through a combined structure of screws, gaskets and clamping parts, effective shielding of heterogeneous metals is achieved, and the inflow and discharge of electrolyte is ensured through the flow hole to ensure uniform oxidation of the inner cavity and the outer surface.

Benefits of technology

Effective shielding of heterogeneous metals is achieved, uniform micro-arc oxidation of the inner cavity and outer surface of the product is ensured, avoiding the paste of the masking glue, and ensuring the uniformity and quality of the film layer.

✦ Generated by Eureka AI based on patent content.

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Abstract

A micro-arc oxidation hanging tool is applied to the technical field of micro-arc oxidation and comprises a clamp part, and the clamp part comprises a screw, a first gasket, a second gasket, a first clamping part, a second clamping part and a fastening nut; the screw rod is of a rod-shaped structure, threads are arranged on the outer surface of the screw rod, and a stopping protruding block is arranged at one end of the screw rod. The first gasket, the first clamping part, the second clamping part and the second gasket are sequentially arranged on the screw rod in a sleeving mode, the fastening nut is connected to the screw rod in a threaded mode and makes contact with the second gasket, clamping part flow guide holes are formed in the first clamping part and the second clamping part, and the first clamping part and the second clamping part are both made of silica gel materials. By means of the structural design, even micro-arc oxidation of the inner surface and the outer surface of a product can be achieved, and meanwhile dissimilar metal at the end of the product is well shielded.
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Description

Technical Field

[0001] The invention belongs to the technical field of surface treatment, and in particular relates to a micro-arc oxidation hanger. Background Art

[0002] In the field of IC equipment manufacturing, most components are small but precise in size, with specific surface requirements for high hardness, insulation, and wear resistance. Existing technology requires micro-arc oxidation of both the inner and outer surfaces of products with cavities, ensuring a uniform film thickness. Because the product's ports contain dissimilar metals, masking glue is typically applied to the dissimilar metal locations to prevent them from affecting the micro-arc oxidation process. However, during the micro-arc oxidation process, the product surface temperature can reach as high as 400°C, causing the masking glue to become fuzzy at the edges. Summary of the Invention

[0003] In view of this, the present invention discloses a micro-arc oxidation hanger, the specific scheme is as follows:

[0004] A micro-arc oxidation hanger includes a clamp portion, the clamp portion including a screw, a first washer, a second washer, a first clamping portion, a second clamping portion, and a fastening nut;

[0005] The screw is a rod-shaped structure with threads on its outer surface and a stopper protrusion at one end of the screw;

[0006] The first gasket, the first clamping part, the second clamping part and the second gasket are arranged on the screw in sequence, and the fastening nut is screwed on the screw and in contact with the second gasket. The first and second clamping parts are provided with clamping part flow guide holes, and the first and second clamping parts are made of silicone material.

[0007] As a supplement to the technical solution of the present invention, the first clamping part includes a first end face and a second end face, the first end face and the second end face are both ends in the length direction of the first clamping part, and a hollow accommodating chamber is provided in the first clamping part, and a clamping part flow guide hole communicating with the inner hollow chamber, and a clamping part fixing hole for the screw to pass through;

[0008] The structure of the second clamping portion is the same as that of the first clamping portion;

[0009] The first end surface of the first clamping portion abuts against the first gasket, and the first end surface of the second clamping portion abuts against the second gasket;

[0010] The first gasket is provided with a gasket flow hole communicating with the clamping part flow hole on the first end surface of the first clamping part, and the second gasket is provided with a gasket flow hole communicating with the clamping part flow hole on the first end surface of the second clamping part.

[0011] As a supplement to the technical solution of the present utility model, the first clamping portion is a truncated cone structure, the first gasket is a disc-shaped structure, the diameter of the first end surface of the first clamping portion is the same as the diameter of the first gasket, and the diameter of the first end surface of the first clamping portion is smaller than the diameter of the second end surface;

[0012] The second clamping part has the same structure as the first clamping part, both of which are frustum structures. The first end face of the second clamping part abuts against the second gasket, and the second gasket is a disc-shaped structure. The diameter of the first end face of the second clamping part is the same as the diameter of the second gasket, and the diameter of the first end face of the second clamping part is smaller than the diameter of the second end face.

[0013] As a supplement to the technical solution of the utility model, it also includes a hanger body and hanging teeth;

[0014] The main body of the hanger is a long straight plate structure, and a bent portion is provided at the upper end thereof for hanging;

[0015] One end of the hanging tooth is connected to the hanger body, and the other end is provided with a threaded hole. The end of the screw rod of the clamp part is screwed into the threaded hole on the hanging tooth.

[0016] As a supplement to the technical solution of the present utility model, the screw, the fastening nut, the first gasket and the second gasket are all made of aluminum alloy.

[0017] Beneficial effects: The utility model has a simple structure and can shield heterogeneous metals at the end portion, while ensuring uniform micro-arc oxidation of the inner cavity and surface of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the main structure of the hanger of the utility model.

[0019] Figure 2 This is a schematic diagram of the fixture structure of the utility model.

[0020] Figure 3 This is a schematic diagram of the fixture structure of the utility model.

[0021] In the figure: 1. hanger body, 2. hanging teeth, 3. clamping part, 4. screw, 5. first gasket, 6. second gasket, 7. first clamping part, 8. second clamping part, 9. fastening nut, 10. stopping protrusion, 11. bending part. DETAILED DESCRIPTION

[0022] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0023] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection, or communication; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0024] like Figures 1 to 3 A micro-arc oxidation hanger is shown, used to secure and electrically connect workpieces during the micro-arc oxidation process. For workpieces with internal cavities and dissimilar metals at their ends, this hanger can secure the workpiece while effectively shielding the dissimilar metal. It includes a clamping portion 3 for clamping the workpiece.

[0025] The clamp portion 3 includes a screw 4 , a first washer 5 , a second washer 6 , a first clamping portion 7 , a second clamping portion 8 , and a fastening nut 9 .

[0026] The screw rod 4 is a rod-shaped structure with threads on its outer surface. A stop protrusion 10 is provided at one end of the screw rod 4 .

[0027] The first gasket 5 , the first clamping portion 7 , the second clamping portion 8 , and the second gasket 6 are sequentially sleeved on the screw 4 , the fastening nut 9 is screwed onto the screw 4 and contacts the second gasket 6 , and the first gasket 5 contacts the stopping protrusion 10 on the screw 4 .

[0028] During actual installation, the workpiece needs to be installed between the first clamping portion 7 and the second clamping portion 8. That is, after the first clamping portion 7 is sleeved on the screw rod 4, the workpiece is sleeved on the screw rod 4, and then the second clamping portion 8 is sleeved on the screw rod 4, so that the first clamping portion 7 and the second clamping portion 8 clamp the workpiece. After the second gasket 6 is sleeved on the screw rod 4, the fastening nut 9 is screwed onto the screw rod 4 and tightened to clamp the workpiece, so that the first clamping portion 7 and the second clamping portion 8 shield the dissimilar metal at both ends of the workpiece cavity.

[0029] In order to ensure that the electrolyte can flow smoothly into the workpiece cavity, the first clamping part 7 and the second clamping part 8 are both provided with clamping part guide holes, so that the electrolyte can flow smoothly into the inner cavity of the workpiece through the guide holes.

[0030] The first clamping part 7 and the second clamping part 8 are both provided with a clamping part fixing hole for the screw 4 to pass through, so that they can be smoothly mounted on the screw 4. Since the first clamping part 7 and the second clamping part 8 are in direct contact with the workpiece, in order to avoid the technical problem of the clamping part and the workpiece being in rigid contact when tightening the fastening nut 9, squeezing the workpiece and causing deformation of the workpiece, the first clamping part 7 and the second clamping part 8 are made of silicone. Since the first clamping part 7 and the second clamping part 8 are both made of silicone, when the first gasket 5 and the second gasket 6 are not provided, as the fastening bolts are tightened, it is easy to cause excessive deformation at the position of the silicone clamping part fixing hole, affecting the shielding of the heterogeneous metal at the end of the workpiece, so the first gasket 5 and the second gasket 6 are provided. The first gasket 5 and the second gasket 6 can be made of hard materials so that they exert uniform force on the first clamping part 7 and the second clamping part 8.

[0031] The first gasket 5 and the second gasket 6 are both provided with gasket through holes for the screw rod 4 to pass through.

[0032] As a supplement to the technical solution of the present invention, a hollow accommodating chamber is provided in the first clamping part 7, which includes a first end face and a second end face. The first end face and the second end face are the two ends in the length direction of the first clamping part 7, and the first end face and the second end face are both provided with a clamping part guide hole connected to the hollow chamber inside thereof, and a clamping part fixing hole for the screw 4 to pass through.

[0033] The structure of the second clamping portion 8 is the same as that of the first clamping portion 7 .

[0034] Correspondingly, the first gasket 5 is provided with a gasket guide hole connected to the clamping portion guide hole on the first clamping portion 7 , and the second gasket 6 is provided with a gasket guide hole connected to the clamping portion guide hole on the second clamping portion 8 .

[0035] Through the above arrangement, when the first clamping part 7 is subjected to the tightening force applied by the first gasket 5 toward the workpiece, the first clamping part 7 has a large deformation, which is convenient for observation by the staff and ensures that the first clamping part 7 and the second clamping part 8 can clamp the workpiece, and the same applies to the second clamping part 8.

[0036] When the first clamping portion 7 and the second clamping portion 8 are sheet-like structures, they are subject to little deformation under the tightening of the fastening bolts, which is not conducive to observation by the staff and may easily lead to excessive tightening force applied to the workpiece, causing deformation of the workpiece.

[0037] The electrolyte can flow into the inner cavity of the workpiece through the gasket guide holes on the first gasket 5 and the clamping portion guide holes on the first clamping portion 7, while facilitating timely discharge of the electrolyte, water, etc. in the inner cavity of the workpiece.

[0038] As a supplement to the above technical solution, the first clamping portion 7 is a truncated cone structure, and the first end face of the first clamping portion 7 is used to abut against the first gasket 5. The first gasket 5 is a disc-shaped structure, and the diameter of the first end face of the first clamping portion 7 is the same as the diameter of the first gasket 5. The second end face is used to contact the workpiece and shield the heterogeneous metal at the end of the workpiece. The diameter of the first end face of the first clamping portion 7 is smaller than the diameter of the second end face. Through the above arrangement, the force applied by the first gasket 5 to the first end face of the first clamping portion 7 can be evenly transmitted to the second end face.

[0039] The second clamping portion 8 has the same structure as the first clamping portion 7, both of which are truncated cone structures. The first end face of the second clamping portion 8 abuts the second gasket 6, which is a disc-shaped structure. The diameter of the first end face of the second clamping portion 8 is the same as the diameter of the second gasket 6. The second end face of the second clamping portion 8 is used to contact the workpiece and shield the heterogeneous metal at the end of the workpiece. The diameter of the first end face of the second clamping portion 8 is smaller than the diameter of the second end face. Through the above arrangement, the force applied by the second gasket 6 to the first end face of the second clamping portion 8 can be evenly transmitted to the second end face.

[0040] The first clamping part 7 and the second clamping part 8 can both be set as cylindrical structures, but when set as cylindrical structures, the sizes of the first gasket 5 and the second gasket 6 are increased compared to the above technical solution. At the same time, the amount of materials used in the production of the first clamping part 7 and the second clamping part 8 is increased, which increases the production cost while improving the overall quality of the clamp part 3.

[0041] The first gasket 5 and the second gasket 6 can also serve as auxiliary cathodes to reduce the current shielding of the cavity material and thus reduce the internal film layer unevenness.

[0042] As a supplement to the technical solution of the present utility model, the micro-arc oxidation hanger further includes a hanger body 1 and hanging teeth 2.

[0043] The hanger body 1 is a long straight plate structure, and a bent portion 11 is provided at the upper end thereof for hanging.

[0044] One end of the hanging tooth 2 is connected to the hanger body 1, and the other end is provided with a threaded hole for screwing the screw 4 of the clamp part 3. When the assembled clamp part 3 needs to be assembled to the hanger body 1, the end of the screw 4 of the clamp part 3 is screwed into the threaded hole on the hanging tooth 2 to complete the assembly.

[0045] As a preferred technical solution of the present invention, the screw 4, the fastening nut 9, the first gasket 5 and the second gasket 6 are all made of aluminum alloy.

[0046] The above description is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, can make equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A micro-arc oxidation rack, characterized in that: The clamping part (3) includes a screw (4), a first washer (5), a second washer (6), a first clamping part (7), a second clamping part (8), and a fastening nut (9); The screw rod (4) is a rod-shaped structure, and a thread is provided on its outer surface. A stop protrusion (10) is provided at one end of the screw rod (4); The first gasket (5), the first clamping portion (7), the second clamping portion (8), and the second gasket (6) are sequentially sleeved on the screw rod (4); the fastening nut (9) is screwed onto the screw rod (4) and contacts the second gasket (6); the first clamping portion (7) and the second clamping portion (8) are both provided with clamping portion guide holes; and the first clamping portion (7) and the second clamping portion (8) are both made of silicone material.

2. A micro-arc oxidation rack according to claim 1, characterized in that: The first clamping portion (7) comprises a first end face and a second end face, the first end face and the second end face being two ends in the length direction of the first clamping portion (7), a hollow accommodating chamber is provided in the first clamping portion (7), and a clamping portion guide hole communicating with the hollow chamber therein and a clamping portion fixing hole for the screw (4) to pass through are provided on the first end face and the second end face of the first clamping portion (7); The structure of the second clamping portion (8) is the same as that of the first clamping portion (7); The first end surface of the first clamping portion (7) abuts against the first gasket (5), and the first end surface of the second clamping portion (8) abuts against the second gasket (6); The first gasket (5) is provided with a gasket guide hole connected to the clamping portion guide hole on the first end face of the first clamping portion (7), and the second gasket (6) is provided with a gasket guide hole connected to the clamping portion guide hole on the first end face of the second clamping portion (8).

3. A micro-arc oxidation rack according to claim 2, characterized in that: The first clamping portion (7) is a truncated cone structure, the first gasket (5) is a disc-shaped structure, the diameter of the first end face of the first clamping portion (7) is the same as the diameter of the first gasket (5), and the diameter of the first end face of the first clamping portion (7) is smaller than the diameter of the second end face; The second clamping portion (8) has the same structure as the first clamping portion (7), both of which are truncated cone structures. The first end face of the second clamping portion (8) abuts against the second gasket (6). The second gasket (6) is a disc-shaped structure. The diameter of the first end face of the second clamping portion (8) is the same as the diameter of the second gasket (6). The diameter of the first end face of the second clamping portion (8) is smaller than the diameter of the second end face.

4. The micro-arc oxidation rack according to claim 1, characterized in that: It also includes a hanger body (1) and hanging teeth (2); The hanger body (1) is a long straight plate-shaped structure, and a bent portion (11) is provided at the upper end thereof for hanging; One end of the hanging tooth (2) is connected to the hanger body (1), and the other end is provided with a threaded hole. The end of the screw rod (4) of the clamp part (3) is screwed into the threaded hole on the hanging tooth (2).

5. The micro-arc oxidation rack according to claim 1, characterized in that: The screw (4), the fastening nut (9), the first washer (5), and the second washer (6) are all made of aluminum alloy.