Storage shelf for semiconductor wafer cassettes

Abstract

The utility model provides a storage shelf for semiconductor wafer cassettes, which is integrally of a cubic frame structure and comprises a plurality of storage positions. Each storage position comprises a horizontal layer plate, a vertical plate, a cross beam, a stand column, an oblique beam and a back plate and is used for stably supporting and limiting the wafer box in multiple directions. The surface of the laminate is provided with a positioning structure matched with the bottom shape of a wafer box, the left and right sides of the laminate are provided with limiting structures, and the right limiting structure can be adjusted to adapt to wafer boxes with different widths. Front and back limiting structures are arranged in front of and behind the laminates and comprise limiting grooves and protruding parts with conic tops, so that the wafer box is prevented from moving. The vertical plates are provided with a plurality of notches used for being connected with the layer plates in an inserted mode, and reinforcing ribs are arranged at the joints of the vertical plates and the stand columns. The cross beams are connected with the stand columns and provide transverse support for the storage positions. The oblique beams form a triangular supporting structure, so that the impact resistance of the goods shelf is improved. According to the design, the stability and safety of the wafer box in the high-density storage and carrying process are ensured, and the device is suitable for automatic storage and taking scenes.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor production equipment, in particular to a storage shelf for semiconductor wafer boxes, which is used to store and manage wafer boxes during the semiconductor manufacturing process, ensuring that the wafer boxes remain stable and safe during storage and transportation. Background Art

[0002] In the semiconductor manufacturing process, a wafer box is a container used to hold and protect semiconductor wafers. As the core material for manufacturing electronic components, semiconductor wafers are characterized by high precision and high value, but they are also extremely fragile, so the safety of their storage and handling is crucial. During the storage process of the wafers, the wafer box needs to be stored stably to prevent the wafers from being damaged due to tilting, slipping or tipping over. However, the storage rack designs widely used in the existing market are usually relatively simple and lack effective limiting structures. As a result, the wafer boxes are prone to movement or tipping over during storage or placement, making it difficult to ensure the stability and safety of the wafer boxes.

[0003] Currently, traditional storage racks are relatively simple in structure, typically providing only basic storage functions and not optimized for the unique requirements of semiconductor wafer cassettes. For example, many racks rely solely on vertical boards or columns for support, without specialized stoppers between the vertical boards and columns. This leaves the wafer cassettes unrestricted in the front-to-back or left-to-right directions, making them susceptible to displacement during placement or removal. This unstable storage method can cause collisions during placement and removal, potentially damaging the wafers inside. Since wafers are essential raw materials in the manufacturing process, any damage can result in significant financial losses.

[0004] Furthermore, traditional shelving designs lack specialized structures for semiconductor wafer cassettes, making it impossible to precisely position them. For example, in some semiconductor manufacturing plants, robotic or manual operations are required to pick and place wafer cassettes. Because storage shelves lack positioning structures, the wafer cassettes are not positioned consistently on the shelves, making it prone to deviations during the robotic process, impacting operational accuracy and efficiency. Even slight deviations in the position of the wafer cassettes can negatively impact subsequent handling and processing, ultimately affecting the normal operation of the entire production line.

[0005] In practical applications, semiconductor manufacturing environments often require high-density storage to maximize space utilization, resulting in racks often designed as multi-layer structures. However, existing storage racks fail to fully consider the stability of multi-layer storage in their frame design. The rack structures suffer from poor rigidity and load-bearing capacity, leading to deformation or shaking of the racks when carrying multiple wafer cassettes, reducing their service life and safety. Especially in large-scale semiconductor manufacturing plants, rack instability poses a significant risk, impacting production safety and efficiency.

[0006] Some general-purpose shelving systems exist in the existing technology, but these are primarily used to store general-purpose items, requiring less precise structure and positioning, making them unsuitable for storing high-precision containers such as wafer cassettes. These general-purpose shelving systems often lack multi-directional positioning devices, particularly in the left-right and front-to-back directions, which prevent them from providing stable support and positioning. However, for semiconductor production, wafer cassette storage racks must not only support the weight of the cassettes but also provide precise positioning to ensure absolute stability.

[0007] Based on the above problems, there is an urgent need in the prior art for a storage shelf specifically for semiconductor wafer boxes, which can provide a stable and safe storage environment for wafer boxes while meeting the needs of large-scale, high-density storage. The storage shelf should have a multi-directional limiting function to ensure that the wafer box is restricted in the left and right, front and back directions, and avoid the position of the wafer box being offset due to external force or vibration. In addition, the shelf structure needs to have high rigidity and strength to support the safe storage of multiple layers of wafer boxes and prevent the shelf from deforming or shaking during the loading process. In order to further improve the practicality of the storage shelf, a positioning structure that adapts to the shape of the bottom of the wafer box should also be designed to facilitate the precise placement of the wafer box and reduce position deviations during pick-and-place operations. Utility Model Content

[0008] The utility model aims to provide a semiconductor wafer box storage shelf with a stable structure and a multi-directional limiting function.

[0009] To achieve the above objectives, the present invention provides the following technical solutions:

[0010] A storage shelf for semiconductor wafer boxes, the storage shelf has an overall cubic frame structure, including multiple storage locations, each storage location includes a horizontally installed shelf, a vertically arranged riser, a horizontally penetrating crossbeam, columns located at the four corners, an obliquely arranged oblique beam, and a back plate at the rear side, wherein the shelf is used to carry the wafer box, and its surface has a positioning structure adapted to the shape of the bottom of the wafer box; the riser is vertically installed on both sides of the storage location, connected to the shelf, and provides vertical support; the crossbeam runs horizontally through the front and rear positions of the storage location, connected to the shelf and the columns, and provides lateral support; the columns are located at the four corners of the storage location, serving as the skeleton structure of the frame, and providing vertical support; the oblique beam extends from the columns to the shelf at a certain angle, forming a triangular support structure with the shelf and the columns; the back plate is installed at the rear side of the storage location, and connected to the rear edges of the columns and the riser;

[0011] A left side limiting structure and a right side limiting structure are provided on the layer plate. The left side limiting structure is a fixed structure with a hole and is provided on one side of the layer plate. The right side limiting structure includes a right side limiting groove provided on the layer plate, and a limiting component slidably installed in the limiting groove. The limiting component can adjust its position along the left and right directions in the limiting groove.

[0012] Furthermore, it also includes front and rear limiting structures arranged in front of and behind the layer plate, and the front and rear limiting structures include a pair of front and rear limiting grooves arranged on the layer plate and a protrusion structure arranged in the front and rear limiting grooves, which are used to limit the position of the wafer box in the front and rear directions.

[0013] Furthermore, the protrusion structure is a cylindrical structure, the upper part of which is a cone top and the lower part is provided with a laterally extending support surface.

[0014] Furthermore, the layer plate is in a generally rectangular shape with an opening in the center, and the opening extends upward from the bottom of the layer plate in a U shape.

[0015] Furthermore, the vertical board is a longitudinal strip structure with multiple horizontal notches or grooves evenly arranged along the height direction to form a notch structure for plugging in layer boards. The two ends of the vertical board are connected to the columns through fasteners, and the columns are located at the four corners of the storage position to form a frame structure.

[0016] Furthermore, reinforcing ribs or protrusions are provided at the connection between the vertical plate and the column.

[0017] Furthermore, the crossbeam is a horizontal long strip structure, both ends of which are connected to adjacent columns through connecting pieces, and reinforcing ribs are provided at the connection position between the crossbeam and the column, and the back plate is connected to the crossbeam.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] The utility model has the following beneficial effects:

[0020] Semiconductor wafer cassette storage racks utilize a cubic frame structure comprised of multiple components, including horizontal shelves, vertical panels, crossbeams, columns, diagonal beams, and a back panel. These components work together to form a three-dimensional, multi-directional support system. The horizontal support of the shelves, the vertical support of the vertical panels, the transverse connection of the crossbeams, the skeletal function of the columns, the angular support of the diagonal beams, and the rear support of the back panel create a multi-dimensional, stable support system. This design not only ensures the overall stability of the rack but also significantly reduces movement caused by external forces or vibration during operation, providing a safe and stable environment for storing wafer cassettes. Furthermore, it exhibits excellent deformation resistance, capable of handling the high-density storage requirements of multiple layers of wafer cassettes. This structure effectively supports the weight of each layer of wafer cassettes and ensures the shelf's shape remains stable even under long-term storage conditions, resisting deformation due to gravity or external forces, thus meeting the high standards required in semiconductor production environments.

[0021] The notch structure between the vertical plates, crossbeams and columns also provides a stable load-bearing effect for each storage location. The vertical plates and crossbeams are precisely connected to the columns through the notches, so that each storage location can firmly support the wafer box, avoiding the problem of wafer box tilting or slipping caused by the lack of limiting structure in traditional designs. The front and rear limiting structures and left and right limiting structures on the shelves further ensure the fixation of the wafer box, avoiding displacement or tilting that may occur during storage and transportation. These limiting structures are located in the four directions of the wafer box. Through the design of the left and right limiting grooves and the front and rear protruding parts, the wafer box can be reliably limited in multiple directions, effectively improving storage safety.

[0022] The front and rear limiting structures utilize cylindrical protrusions with conical tops. The conical top design naturally guides the wafer cassettes into the correct position during the limiting process, improving storage accuracy and convenience. The lower lateral support surface further increases the stability of the limiter, providing a larger support area to prevent the wafer cassettes from shaking or sliding in the front-to-back direction. Combined with the overall cylindrical structure, the protrusions provide stable support in multiple directions, ensuring that the wafer cassettes maintain a precise and stable position during storage and handling, and improving the safety and reliability of the storage racks.

[0023] Through this multi-component combination structural design, the utility model can adapt to the demand for high-density storage of wafer boxes in the semiconductor manufacturing process, and can still maintain the stability and reliability of the shelf structure under high-frequency access. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a diagram of the overall cubic frame structure of the semiconductor wafer box storage shelf in the present utility model;

[0025] Figure 2for Figure 1 A partial enlarged view of part A;

[0026] Figure 3 This is an enlarged view of the front and rear limit structures. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "several" means two or more, unless otherwise specifically defined.

[0030] See also Figure 1-Figure 3 As shown, this embodiment provides a semiconductor wafer cassette storage rack 1 having an overall cubic frame structure, including multiple storage locations 2. Each location 2 is used to stably store semiconductor wafer cassettes 3 and provides multi-directional support and position limiting. The storage rack's structural components primarily consist of horizontal shelves 5, vertical boards 6, crossbeams 7, columns 8, diagonal beams 9, and a back panel 10. These components are tightly integrated to form a high-strength frame structure, ensuring good stability while supporting multiple wafer cassettes 3.

[0031] As a core component of the shelf 1, the shelf 5 features a surface design that adapts to the shape of the bottom of the wafer cassettes 3, ensuring the wafer cassettes 3 remain precisely positioned when placed. The shelf 5 is roughly rectangular, with a U-shaped opening 5b extending upward from the bottom in its center. This opening not only reduces the shelf 5's weight but also facilitates the installation of retaining components and the flexible adjustment of the wafer cassettes 3, allowing the shelf 1 to accommodate wafer cassettes 3 of varying sizes. Left and right retaining structures are provided on either side of the shelf 5. The left retaining structure 5a is a perforated fixture securely attached to one side of the shelf 5 via fasteners, providing stable lateral retention. The right retaining structure includes a retaining slot 5c and a slidable retaining component. The slot 5c is located along the side of the shelf 5, and the retaining component slides within the slot and is secured with screws to accommodate wafer cassettes 3 of varying widths. This combined left and right retaining structure ensures the wafer cassettes 3 are precisely secured to the shelf 5, preventing lateral slippage during storage and handling.

[0032] The vertical plates 6 are longitudinal strips, mounted vertically on either side of each storage location 2. Multiple horizontal notches or grooves 6a are evenly spaced along the height of the shelves 5 for receiving the shelves 5. These notches allow the shelves 5 to be securely mounted within the horizontal notches or grooves 6a. The ends of the vertical plates 6 are connected to the columns 8 via fasteners, forming a sturdy frame structure. Ribs or protrusions are provided at the junctions between the vertical plates 6 and the columns 8 to enhance the frame's bending resistance and stability. This ensures that the shelf 1 maintains good structural stability even when carrying multiple layers of wafer cassettes 3, preventing swaying due to gravity or vibration.

[0033] The crossbeam 7 is a horizontal support structure and is the key to the overall lateral support of the shelf 1. The crossbeam 7 is long and its two ends are fixed to the adjacent columns 8 by connectors, thereby ensuring the firmness of the lateral connection. The connection between the crossbeam 7 and the columns 8 is provided with reinforcing ribs 7a, which further improve the overall deformation resistance of the shelf 1 and ensure that the structure remains stable under high load conditions. The columns 8 are the main frame skeleton of the entire storage shelf 1 and provide vertical support. Each column 8 is installed on the bottom base by fasteners to ensure the stability and load-bearing capacity of the entire shelf 1. The columns 8, together with the shelves 5, crossbeams 7 and vertical plates 6, form a cubic frame, which enables the shelf 1 to maintain high rigidity and stability in multi-layer applications. The corner structure of the columns 8 combined with the reinforcement design of the vertical plates 6 and crossbeams 7 effectively enhances the bending resistance of the shelf 1, which is suitable for high-density storage needs and ensures that the wafer boxes 3 will not be deformed due to gravity when they are stacked for storage.

[0034] Diagonal beams 9, serving as auxiliary support structures, are arranged diagonally within storage bays 2, connecting uprights 8 and shelves 5 to form a triangular support structure. This triangular support effectively distributes the load on shelves 5, preventing them from sinking or deforming due to overloaded wafer cassettes 3. The addition of diagonal beams 9 significantly improves the impact resistance of the storage rack 1, ensuring its structural stability and robustness even when subjected to external forces or vibrations.

[0035] Backplate 10 is installed at the rear of shelf 1 to prevent wafer cassettes 3 from moving forward and backward. Screws connect backplate 10 to the rear edges of columns 8 and risers 6, forming a complete storage frame. The design of backplate 10 further enhances the overall rigidity of shelf 1, preventing wafer cassettes 3 from sliding backward during storage and handling, thereby protecting the safety of wafer cassettes 3.

[0036] In addition, in order to achieve positioning in the front and rear directions, front and rear positioning structures are provided in front and rear of the layer plate 5. The positioning structure consists of a pair of positioning grooves and a protruding part 11 installed in the groove. The protruding part 11 adopts a cylindrical design with a conical top and a laterally extending support surface at the bottom. This cylindrical protruding part 11 provides stable support during positioning, and the conical top design reduces the friction between the positioning and the wafer box 3 to avoid wear on the outer shell. The lateral support surface increases the contact area, ensuring that the wafer box 3 is reliably limited in the front and rear directions, thereby preventing it from shifting in position during transportation and storage.

[0037] Through the careful design of the above-mentioned structure, the storage shelf of the present invention realizes the limitation and stable support of the wafer box 3 in multiple directions. The left and right limiting structures of the layer plate 5 cooperate with the front and rear limiting structures, so that the wafer box 3 is effectively restricted in all four directions, avoiding tilting or sliding during storage and transportation. At the same time, the combination of the crossbeam 7, the column 8, the vertical plate 6 and the inclined beam 9 constitutes a stable support structure, so that the shelf 1 can still maintain overall stability under multi-layer high-load conditions and is not easy to deform. Such a structural design ensures the safety of the wafer box 3 during storage and extends the service life of the shelf 1.

[0038] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A storage shelf for semiconductor wafer boxes, characterized in that: The storage shelf has a cubic frame structure as a whole, including multiple storage locations, each of which includes horizontally installed shelves, vertically arranged vertical boards, horizontally penetrating crossbeams, columns at the four corners, obliquely arranged diagonal beams, and a back panel at the rear. The shelves are used to carry wafer boxes, and their surfaces have positioning structures that adapt to the shape of the bottom of the wafer boxes; the vertical boards are vertically installed on both sides of the storage location and connected to the shelves to provide vertical support; the crossbeams horizontally penetrate the front and rear positions of the storage location and are connected to the shelves and columns to provide lateral support; the columns serve as the skeleton structure of the frame to provide vertical support; the diagonal beams and columns form a triangular support structure; and the back panel is installed at the rear side of the storage location. A left side limiting structure and a right side limiting structure are provided on the layer plate. The left side limiting structure is a fixed structure with a hole and is provided on one side of the layer plate. The right side limiting structure includes a right side limiting groove provided on the layer plate, and a limiting component slidably installed in the limiting groove. The limiting component can adjust its position along the left and right directions in the limiting groove.

2. A storage shelf for semiconductor wafer boxes according to claim 1, characterized in that: It also includes front and rear limiting structures arranged in front and rear of the layer plate, and the front and rear limiting structures include a pair of front and rear limiting grooves arranged on the layer plate and a protrusion structure arranged in the front and rear limiting grooves, which are used to limit the position of the wafer box in the front and rear directions.

3. A storage shelf for semiconductor wafer boxes according to claim 2, characterized in that: The protrusion structure is a cylindrical structure, the upper part of which is a cone top and the lower part of which is provided with a laterally extending supporting surface.

4. The storage rack for semiconductor wafer boxes according to claim 1, characterized in that: The layer plate is in a substantially rectangular shape and has an opening in the center. The opening extends upward from the lower portion of the layer plate and presents a U shape.

5. The storage rack for semiconductor wafer boxes according to claim 1, characterized in that: The vertical board is a longitudinal strip structure with multiple horizontal notches or grooves evenly arranged along the height direction to form a notch structure for plugging in layer boards. The two ends of the vertical board are connected to the columns through fasteners, and the columns are located at the four corners of the storage position to form a frame structure.

6. The storage rack for semiconductor wafer boxes according to claim 5, characterized in that: Reinforcement ribs or protrusions are provided at the connection between the vertical plate and the column.

7. The storage rack for semiconductor wafer boxes according to claim 1, characterized in that: The crossbeam is a horizontal long strip structure, and its two ends are connected to adjacent columns through connecting pieces. Reinforcement ribs are provided at the connection position between the crossbeam and the columns, and the back plate is connected to the crossbeam.

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