Quick connector for high-density plasma equipment

Abstract

The utility model relates to the related field of high-density plasma equipment, in particular to a quick connector for high-density plasma equipment, which comprises a device body, a main guide pipe, cavity branch pipes, a control valve, a flange assembly and a quick connecting assembly are arranged in the device body, one side of the main guide pipe is connected with a plurality of groups of cavity branch pipes, and the other side of the main guide pipe is connected with the control valve. The outer ends of the cavity branch pipes are connected with control valves, the flange assembly is arranged at the outer ends of the control valves, the quick connecting assembly is connected to the outer end of the flange assembly, the flange assembly comprises an inner flange, an outer flange and an inner connecting pipe, the quick connecting assembly comprises a connecting base, a threaded pipe is arranged at the front end of the connecting base, and the front end of the threaded pipe is connected with an elastic piece. Double sealing protection of the inner flange and the outer flange can be achieved, the sealing effect of the flange connecting position is effectively improved, quick connection of the outer connecting pipe can be achieved, the time needed for replacing the quick connector under the condition that the quick connector is damaged is saved, and the influence on production of other processing cavities is avoided.

Description

Technical Field

[0001] The utility model relates to the relevant field of high-density plasma equipment, in particular to a quick connector used for high-density plasma equipment. Background Art

[0002] High-density plasma equipment is a technical device that uses high-density plasma to process materials. This equipment is commonly used in fields such as microelectronics, optoelectronics, and nanotechnology to achieve high-precision and high-efficiency material processing. High-density plasma equipment generates high-density plasma and uses these highly activated particles to etch and deposit materials. It has the advantages of high etching rate, good selectivity, and high uniformity.

[0003] When replacing the reaction chamber pump system of high-density plasma equipment, damage to the quick connector may cause water leakage. The process cooling water system is located at the lower end of the mass flow controller. When the T-valve is opened, there is only one total manual valve at the front end. When it is closed, it will affect the water flow of the RPS / turbo pumps in other chambers, thereby affecting the deposition and etching process of other chambers. When the quick connector is damaged, the operation of all chambers must be stopped and the quick connector must be replaced, which will affect production efficiency. Therefore, we need to upgrade and transform on the basis of existing technologies to overcome existing problems and shortcomings. Utility Model Content

[0004] The purpose of the utility model is to provide a quick connector for high-density plasma equipment to solve the problems raised in the above background technology.

[0005] To achieve the above objectives, the present invention provides the following technical solutions:

[0006] A quick connector for high-density plasma equipment is designed, including a device body, which contains a main pipe, chamber branch pipes, a control valve, a flange assembly and a quick-connect assembly. One side of the main pipe is connected to multiple groups of chamber branch pipes, the outer ends of the chamber branch pipes are connected to the control valves, the flange assembly is arranged at the outer end of the control valve, and the quick-connect assembly is connected to the outer end of the flange assembly.

[0007] Furthermore, the flange assembly includes an inner flange, an outer flange and an inner pipe, the two ends of the inner pipe are respectively inserted into the inner sides of the inner flange and the outer flange, and corresponding mounting holes are opened on the inner flange and the outer flange, and fixing bolts are screwed into the mounting holes.

[0008] Furthermore, a limiting ring is provided in the middle of the inner pipe, limiting grooves are provided on the inner sides of the inner flange and the outer flange, and the limiting ring is located between the limiting grooves on both sides.

[0009] Furthermore, sealing grooves are provided on the inner sides of the inner flange and the outer flange, sealing gaskets are installed in the sealing grooves, and the outer side of the outer flange is connected to the quick-connect assembly.

[0010] Furthermore, the quick-connect assembly includes a connecting seat, a threaded tube is provided at the front end of the connecting seat, and an elastic sheet is connected to the front end of the threaded tube, a threaded sleeve is screwed onto the outer side of the threaded tube, and a conical head is provided at the front end of the threaded sleeve.

[0011] Furthermore, the connecting seat is fixed to the outer flange, a sealing sleeve is provided on the inner side of the elastic sheet, and the conical head is pressed and fitted on the outer side of the elastic sheet and the sealing sleeve.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] 1. The utility model is provided with an inner flange, an outer flange, a mounting hole, a fixing bolt, an inner pipe, a limiting ring, a sealing gasket, a limiting groove and a sealing groove in the device. The inner and outer flanges are connected by the fixing bolt, and the flanges on both sides are sealed and docked by the inner pipe and the sealing gasket, which can achieve double sealing protection for the inner and outer flanges, effectively improve the sealing effect of the flange connection, ensure that there will be no liquid leakage between the flanges, and can effectively control RPS /

[0014] Risk of water leakage when replacing the turbine pump.

[0015] 2. The utility model is provided with a quick-connect assembly, a connecting seat, a threaded tube, an elastic sheet, a sealing sleeve, a threaded sleeve and a tapered head in the device. The threaded sleeve and the threaded tube drive the tapered head to move, and the tapered head squeezes the elastic sheet and the sealing sleeve, so as to realize the rapid connection and disassembly of the external pipe, save the time required for replacing the quick connector when it is damaged, and avoid affecting the production time of other processing chambers.

[0016] With reference to the following description and accompanying drawings, specific embodiments of the present invention are disclosed in detail, indicating how the principles of the present invention can be employed. It should be understood that the embodiments of the present invention are not limited in scope thereby. The embodiments of the present invention include numerous variations, modifications, and equivalents within the spirit and scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0018] Figure 1 Schematic diagram of the overall structure of a quick connector for high-density plasma equipment according to the utility model;

[0019] Figure 2 This is an exploded view of the overall structure of a quick connector for high-density plasma equipment according to the present invention;

[0020] Figure 3 This is an exploded view of a flange assembly of a quick connector for high-density plasma equipment according to the present invention;

[0021] Figure 4 The utility model is an exploded view of a quick-connect assembly of a quick connector for high-density plasma equipment.

[0022] In the figure: 1. Device body; 2. Main pipe; 3. Chamber branch pipe; 4. Control valve; 5. Flange assembly; 51. Inner flange; 52. Outer flange; 53. Mounting hole; 54. Fixing bolt; 55. Internal pipe; 56. Limiting ring; 57. Sealing gasket; 58. Limiting groove; 59. Sealing groove; 6. Quick connect assembly; 61. Connecting seat; 62. Threaded pipe; 63. Elastic sheet; 64. Sealing sleeve; 65. Threaded sleeve; 66. Conical head. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0024] like Figure 1 -4, this embodiment provides a quick connector for high-density plasma equipment, including a device body 1, which contains a main pipe 2, a chamber branch pipe 3, a control valve 4, a flange assembly 5 and a quick-connect assembly 6. One side of the main pipe 2 is connected to multiple groups of chamber branch pipes 3, the outer end of the chamber branch pipe 3 is connected to the control valve 4, the flange assembly 5 is arranged at the outer end of the control valve 4, and the quick-connect assembly 6 is connected to the outer end of the flange assembly 5.

[0025] Preferably, the flange assembly 5 includes an inner flange 51, an outer flange 52 and an inner pipe 55, the two ends of the inner pipe 55 are respectively inserted into the inner sides of the inner flange 51 and the outer flange 52, and the inner flange 51 and the outer flange 52 are correspondingly provided with mounting holes 53, and fixing bolts 54 are screwed in the mounting holes 53. A limiting ring 56 is provided in the middle of the inner pipe 55, and limiting grooves 58 are provided on the inner sides of the inner flange 51 and the outer flange 52. The limiting ring 56 is located between the limiting grooves 58 on both sides, and a sealing groove 59 is further provided on the inner side of the inner flange 51 and the outer flange 52. A sealing gasket 57 is installed in the sealing groove 59. The inner flange 51 and the outer flange 52 are fixed and disassembled by cooperating with the mounting holes 53 and the fixing bolts 54, and the limiting ring 56 is installed and fixed by the limiting groove 58, so that the inner pipe 55 can be fixedly connected between the inner flange 51 and the outer flange 52, thereby improving the sealing between the flanges. The sealing groove 59 facilitates the installation of the sealing gasket 57, further Improve the sealing ability between the flanges and effectively control the risk of water leakage when the RPS / turbo pump is replaced. The outer side of the outer flange 52 is connected to the quick-connect assembly 6. The quick-connect assembly 6 includes a connecting seat 61. A threaded tube 62 is provided at the front end of the connecting seat 61, and an elastic sheet 63 is connected to the front end of the threaded tube 62. A threaded sleeve 65 is screwed on the outer side of the threaded tube 62. A conical head 66 is provided at the front end of the threaded sleeve 65. The connecting seat 61 is fixed to the outer flange 52. A sealing sleeve 64 is provided on the inner side of the elastic sheet 63. The conical head 66 is squeezed and fitted on the outer side of the elastic sheet 63 and the sealing sleeve 64. The threaded sleeve 65 is screwed to the threaded tube 62, and the elastic sheet 63 and the sealing sleeve 64 are squeezed and contracted by the conical head 66. The elastic sheet 63 and the sealing sleeve 64 cooperate to be squeezed and connected to the external water pipe, which can realize rapid connection and disassembly of the external water pipe, save the time required for replacing the quick connector when the quick connector is damaged, and avoid affecting the production time of other processing chambers.

[0026] The principle and process of use of the present invention are as follows: when in use, the control valve 4 can be connected to the front end of each chamber branch pipe 3, and the control valve 4 and the quick-connect assembly 6 are connected through the flange assembly 5. When connecting the flange assembly 5, the internal pipe 55 should be inserted between the inner flange 51 and the outer flange 52 so that the limiting ring 56 is located in the limiting groove 58, and then a sealing gasket 57 is added in the sealing groove 59. The inner flange 51 and the outer flange 52 are fixedly connected through the mounting hole 53 and the fixing bolt 54. The external pipe is inserted into the front end of the quick-connect assembly 6 so that it is located inside the sealing sleeve 64 and the elastic sheet 63. The threaded sleeve 65 and the threaded pipe 62 are screwed together to drive the conical head 66 to move. The conical head 66 moves inward and squeezes the elastic sheet 63 and the sealing sleeve 64. The elastic sheet 63 and the sealing sleeve 64 shrink and are tightened on the outer wall of the external pipe, thereby realizing the quick connection operation, saving the time required to replace the quick connector when the quick connector is damaged.

[0027] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc., should be understood in a broad sense. For example, "connected" may refer to a fixed connection, a detachable connection, or an integral connection; it may refer to a mechanical connection or an electrical connection; it may refer to a direct connection or an indirect connection through an intermediate medium; it may refer to internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0028] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

Claims

1. A quick connector for high-density plasma equipment, characterized by: The invention comprises a device body (1), wherein the device body (1) contains a main conduit (2), a chamber branch conduit (3), a control valve (4), a flange assembly (5) and a quick-connect assembly (6); one side of the main conduit (2) is connected to multiple groups of chamber branch conduits (3); the outer ends of the chamber branch conduits (3) are connected to the control valve (4); the flange assembly (5) is arranged at the outer end of the control valve (4); and the quick-connect assembly (6) is connected to the outer end of the flange assembly (5).

2. A quick connector for high-density plasma equipment according to claim 1, characterized in that: The flange assembly (5) comprises an inner flange (51), an outer flange (52) and an inner pipe (55). The two ends of the inner pipe (55) are respectively plugged into the inner sides of the inner flange (51) and the outer flange (52). The inner flange (51) and the outer flange (52) are respectively provided with mounting holes (53). A fixing bolt (54) is screwed into the mounting hole (53).

3. A quick connector for high-density plasma equipment according to claim 2, characterized in that: A limiting ring (56) is provided in the middle of the inner pipe (55), limiting grooves (58) are provided on the inner sides of the inner flange (51) and the outer flange (52), and the limiting ring (56) is located between the limiting grooves (58) on both sides.

4. A quick connector for high-density plasma equipment according to claim 3, characterized in that: The inner side of the inner flange (51) and the outer flange (52) are further provided with a sealing groove (59), a sealing gasket (57) is installed in the sealing groove (59), and the outer side of the outer flange (52) is connected to the quick-connect assembly (6).

5. The quick connector for high-density plasma equipment according to claim 4, characterized in that: The quick-connect assembly (6) comprises a connecting seat (61), a threaded tube (62) is provided at the front end of the connecting seat (61), and an elastic sheet (63) is connected to the front end of the threaded tube (62), a threaded sleeve (65) is screwed on the outer side of the threaded tube (62), and a conical head (66) is provided at the front end of the threaded sleeve (65).

6. The quick connector for high-density plasma equipment according to claim 5, characterized in that: The connecting seat (61) is fixed to the outer flange (52), a sealing sleeve (64) is provided on the inner side of the elastic sheet (63), and the conical head (66) is pressed and fitted on the outer sides of the elastic sheet (63) and the sealing sleeve (64).

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