Daylighting mechanism for vacuum coating equipment

Abstract

The utility model discloses a lighting mechanism for vacuum coating equipment. The vacuum coating equipment comprises a vacuum coating cavity and a coating frame arranged in the vacuum coating cavity. The lighting mechanism for the vacuum coating equipment comprises a first mounting plate; the mounting frame is fixedly connected with the first mounting plate and is provided with a working part and a connecting part which are connected, the working part and the coating frame are oppositely arranged, and the connecting part is fixedly connected between the working part and the first mounting plate; the lighting assembly comprises a prism, a lens and an optical fiber, and the lens is located between the prism and the optical fiber; the parallel light passing through the film coating sample on the film coating frame is reflected by the prism and then is gathered into the optical fiber through the lens; the second mounting plate is fixedly connected to the lighting assembly, and the face, away from the lighting assembly, of the second mounting plate is adjustably and fixedly connected with the face, facing the film coating frame, of the working part, so that the angle of the lighting assembly relative to the working part is adjustable. The lighting mechanism is simple and reliable in structure, and can well collect light passing through a coated sample, so that the measurement precision of the film thickness is improved.

Description

Technical Field

[0001] This specification relates to the field of vacuum coating technology, and in particular to a lighting mechanism for vacuum coating equipment. Background Art

[0002] Evaporation coating, often called vacuum coating, is a physical vapor deposition method characterized by the evaporation of material under vacuum conditions and its condensation into a film on the glass surface. The principle is to sublimate or sputter the film material through thermal evaporation or ion beam bombardment, and then project it toward the substrate in a vacuum environment, ultimately depositing it on the substrate surface as a solid film. The spectral characteristics of the film are determined by its thickness and refractive index. There are two main methods for controlling film thickness: quartz crystal monitoring and optical monitoring. Quartz crystal monitoring relies on detecting the vibration frequency of the crystal and calculating the current thickness based on the relationship between thickness and frequency. Optical monitoring directly measures the optical properties of the film system. Depending on the measurement method, it can be divided into direct light control and indirect light control, and depending on the test wavelength, it can be divided into white light control and laser light control.

[0003] Currently, optical monitoring offers higher control accuracy than other methods. Because the product is directly inspected, direct optical control is more direct than indirect optical control. Existing direct optical control systems struggle to fully capture the light passing through the coated sample, resulting in relatively low film thickness measurement accuracy. This leads to the accumulation of processing errors and the inability to achieve high-precision film thickness control. Utility Model Content

[0004] In view of the deficiencies in the prior art, one purpose of this specification is to provide a lighting mechanism for vacuum coating equipment, which has a simple and reliable structure and can well collect light passing through the coated sample, thereby improving the measurement accuracy of the film thickness.

[0005] To achieve the above-mentioned objectives, embodiments of the present specification provide a lighting mechanism for vacuum coating equipment, which is used in vacuum coating equipment. The vacuum coating equipment includes a vacuum coating chamber and a coating rack disposed in the vacuum coating chamber. The lighting mechanism for vacuum coating equipment includes:

[0006] a first mounting plate, the first mounting plate being used to be fixedly connected to a wall surface of the vacuum coating chamber;

[0007] A mounting frame located in the vacuum coating chamber, the mounting frame being fixedly connected to the first mounting plate; the mounting frame comprising a connected working portion and a connecting portion, the working portion being arranged opposite to the coating frame, and the connecting portion being fixedly connected between the working portion and the first mounting plate;

[0008] A light-collecting assembly includes a prism, a lens, and an optical fiber, wherein the lens is located between the prism and the optical fiber; parallel light passing through the coating sample on the coating rack is reflected by the prism and then focused into the optical fiber through the lens;

[0009] A second mounting plate is fixedly connected to the lighting assembly, and a side of the second mounting plate facing away from the lighting assembly is adjustably fixedly connected to a side of the working part facing the coating frame, so that the angle of the lighting assembly relative to the working part is adjustable.

[0010] As a preferred embodiment, the second mounting plate and the working part are fixedly connected by a plurality of fasteners, and the length of the fixing portion of the fasteners is adjustable.

[0011] As a preferred embodiment, the angle adjustment range of the lighting component relative to the working part is 5°.

[0012] As a preferred embodiment, the fastener is provided with an external thread, and the working portion is provided with a plurality of threaded holes for cooperation with the fastener; the threaded holes are arranged at intervals in the first direction, and the number of the threaded holes is greater than the number of the fasteners.

[0013] As a preferred embodiment, there are four fasteners, which are respectively located at the four vertices of the rectangle; adjacent sides of the rectangle extend along the first direction and the second direction respectively; and the two rows of threaded holes are spaced apart in the second direction.

[0014] As a preferred embodiment, in the second direction, the size of the working portion is larger than the size of the connecting portion.

[0015] As a preferred embodiment, the first mounting plate is vertically arranged, and the first direction has a predetermined angle with the horizontal plane.

[0016] As a preferred embodiment, a connecting block is fixedly connected to the inner side surface of the first mounting plate, and the connecting block is provided with a notch for accommodating part of the connecting portion, and one end of the connecting portion away from the working portion is fixedly connected to the connecting block.

[0017] As a preferred embodiment, the portion where the connecting portion is fixed to the connecting block is arranged horizontally.

[0018] As a preferred embodiment, the prism has a first right-angled surface, a second right-angled surface and a bevel that are surrounded by each other. The first right-angled surface is arranged opposite to the coating frame, and is used to receive parallel light passing through the coating sample on the coating frame; the bevel totally reflects the parallel light received by the first right-angled surface; and the second right-angled surface is arranged facing the lens, and is used to transmit the parallel light reflected by the bevel to the lens. Beneficial effects

[0019] The light-collecting mechanism for vacuum coating equipment provided in this embodiment is secured within the vacuum coating chamber of the vacuum coating equipment by providing a first mounting plate, a mounting bracket, and a second mounting plate. This structure is simple and reliable. The light-collecting assembly, comprising a prism, a lens, and an optical fiber, effectively collects light passing through the coating sample, thereby improving the accuracy of film thickness measurement. Furthermore, by providing an adjustable fixed connection between the second mounting plate and the working portion, the angle of the light-collecting assembly relative to the working portion can be adjusted, further optimizing the lighting effect and improving the accuracy of film thickness measurement.

[0020] With reference to the following description and drawings, specific embodiments of the present invention are disclosed in detail, indicating the manner in which the principles of the present invention can be employed. It should be understood that the scope of the embodiments of the present invention is not limited thereby.

[0021] Features described and / or illustrated with respect to one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0022] It should be emphasized that the term "include / comprising" when used herein refers to the presence of features, integers, steps or components, but does not exclude the presence or addition of one or more other features, integers, steps or components. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative labor.

[0024] Figure 1 This is a schematic diagram of the three-dimensional structure of a lighting mechanism for vacuum coating equipment provided in this embodiment;

[0025] Figure 2 This is a structural schematic diagram of a first mounting plate and a connecting block provided in this embodiment;

[0026] Figure 3 This is a schematic diagram of the internal structure of a lighting assembly provided in this embodiment.

[0027] Description of reference numerals:

[0028] 1. First mounting plate; 2. Mounting frame; 21. Working part; 201. Threaded hole; 22. Connecting part; 3. Lighting assembly; 31. Prism; 311. First right-angled surface; 312. Second right-angled surface; 313. Inclined surface; 32. Lens; 33. Optical fiber; 34. Housing; 4. Second mounting plate; 5. Fastener; 6. Connecting block; 61. Notch; X, first direction; Y, second direction; Z, vertical direction. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the following will be combined with the drawings of the embodiments of the present invention to clearly and completely describe the technical solutions of the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0030] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be another element centered thereon. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be another element centered thereon. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are intended only to describe specific embodiments and are not intended to limit this invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0032] See also Figures 1 to 3 The embodiment of the present application provides a lighting mechanism for vacuum coating equipment, which is used in vacuum coating equipment. The vacuum coating equipment includes a vacuum coating chamber and a coating rack disposed within the vacuum coating chamber. The lighting mechanism for vacuum coating equipment includes: a first mounting plate 1, a mounting rack 2, a lighting assembly 3, and a second mounting plate 4.

[0033] The first mounting plate 1 is fixedly connected to the wall of the vacuum coating chamber. The mounting frame 2 is located within the vacuum coating chamber and is fixedly connected to the first mounting plate 1. The mounting frame 2 comprises a connected working portion 21 and a connecting portion 22. The working portion 21 is disposed opposite the coating frame, and the connecting portion 22 is fixedly connected between the working portion 21 and the first mounting plate 1. The light-collecting assembly 3 comprises a prism 31, a lens 32, and an optical fiber 33. The lens 32 is located between the prism 31 and the optical fiber 33. Parallel light passing through the coating sample on the coating frame is reflected by the prism 31 and then focused into the optical fiber 33 by the lens 32. The second mounting plate 4 is fixedly connected to the light-collecting assembly 3. The side of the second mounting plate 4 facing away from the light-collecting assembly 3 is adjustably fixedly connected to the side of the working portion 21 facing the coating frame, so that the angle of the light-collecting assembly 3 relative to the working portion 21 is adjustable.

[0034] The light-collecting mechanism for vacuum coating equipment provided in this embodiment is secured within the vacuum coating chamber of the vacuum coating equipment by providing a first mounting plate 1, a mounting bracket 2, and a second mounting plate 4. This structure is simple and reliable. The light-collecting assembly 3, comprising a prism 31, a lens 32, and an optical fiber 33, effectively collects light passing through the coating sample, thereby improving the accuracy of film thickness measurement. Furthermore, by providing an adjustable fixed connection between the second mounting plate 4 and the working portion 21, the angle of the light-collecting assembly 3 relative to the working portion 21 can be adjusted, further optimizing the lighting effect and improving the accuracy of film thickness measurement.

[0035] In this embodiment, the second mounting plate 4 and the working part 21 are fixedly connected by multiple fasteners 5. The length of the fixing part of the fasteners 5 is adjustable. By adjusting the length of the fixing part of different fasteners 5, the angle between the second mounting plate 4 and the working part 21 can be changed. The second mounting plate 4 and the lighting component 3 are always kept fixed, so that the angle between the lighting component 3 and the working part 21 changes. The angle between the lighting component 3 and the working part 21 can be adjusted as needed to optimize the lighting effect of the lighting component 3.

[0036] In a preferred embodiment, the angle adjustment range of the lighting assembly 3 relative to the working portion 21 is 5°, which avoids wasting debugging time due to an excessively large adjustable range, and also avoids failing to collect all light due to an excessively small adjustable range.

[0037] Preferably, the fastener 5 is externally threaded, and the fastener 5 can be a screw, bolt, or other component. The working portion 21 is provided with a plurality of threaded holes 201 for engagement with the fasteners 5. The angle of the prism 31 is adjusted by adjusting the length of the fasteners 5 threaded into the threaded holes 201. The threaded holes 201 are spaced apart in the first direction X, and the number of threaded holes 201 exceeds the number of fasteners 5. This allows the position of the lighting assembly 3 in the first direction X to be adjusted to meet the desired position of the prism 31 in the first direction X.

[0038] Specifically, there are four fasteners 5, which are respectively located at the four vertices of the rectangle. The adjacent sides of the rectangle extend along the first direction X and the second direction Y respectively. Figure 1 As shown, the two rows of threaded holes 201 are spaced apart in the second direction Y. When adjusting the angle of the lighting assembly 3, the two fasteners 5 spaced apart in the second direction Y are grouped together and have the same extension length; the two fasteners 5 spaced apart in the first direction X can be adjusted to have different extension lengths.

[0039] In this embodiment, in the second direction Y, the size of the working portion 21 is larger than the size of the connecting portion 22 in order to provide reliable support for the lighting assembly 3 .

[0040] To avoid affecting other components within the vacuum coating equipment, the lighting mechanism is configured to extend from the side of the vacuum coating equipment, thereby positioning the first mounting plate 1 vertically, i.e., parallel to the vertical direction Z. The coating frame is umbrella-shaped, so that the working portion 21 and the lighting assembly 3 are tilted, i.e., the first direction X forms a predetermined angle with the horizontal plane.

[0041] To ensure the stability of the connection, Figure 2 As shown, a connecting block 6 is fixedly connected to the inner side of the first mounting plate 1. The connecting block 6 has a notch 61 for accommodating part of the connecting portion 22. The end of the connecting portion 22 away from the working portion 21 is fixedly connected to the connecting block 6.

[0042] Preferably, the portion where the connecting portion 22 is fixed to the connecting block 6 is arranged horizontally, that is, the portion where the connecting portion 22 is fixed to the connecting block 6 is perpendicular to the first mounting plate 1, to ensure reliable connection and easy installation.

[0043] In this embodiment, the lighting assembly 3 is provided with a housing 34 for shading and protection outside the prism 31, lens 32 and optical fiber 33. Figure 3As shown, the prism 31 has a first right-angled surface 311, a second right-angled surface 312 and a bevel 313 that surround each other. The first right-angled surface 311 is arranged opposite to the coating frame, and the first right-angled surface 311 is not blocked by the shell 34, and is used to receive parallel light passing through the coating sample on the coating frame. The bevel 313 totally reflects the parallel light received by the first right-angled surface 311. The second right-angled surface 312 is arranged facing the lens 32, and is used to transmit the parallel light reflected by the bevel 313 to the lens 32. The prism 31, the lens 32 and the optical fiber 33 are spaced apart in the first direction X. The end of the optical fiber 33 away from the lens 32 passes through the side wall of the vacuum coating equipment and extends out of the vacuum coating cavity, and is connected to the spectrometer.

[0044] It should be noted that, in the description of this specification, the terms "first," "second," etc., are used solely for descriptive purposes and to distinguish similar objects. There is no order of precedence between the two, nor should they be understood to indicate or imply relative importance. Furthermore, in the description of this specification, unless otherwise specified, "plurality" means two or more.

[0045] Any numerical value cited herein includes all values ​​of the lower and upper values ​​in increments of one unit from the lower value to the upper value, provided that there is at least a two-unit interval between any lower value and any higher value. For example, if the value of a component quantity or process variable (e.g., temperature, pressure, time, etc.) is stated to be from 1 to 90, preferably from 20 to 80, and more preferably from 30 to 70, it is intended to illustrate that values ​​such as 15 to 85, 22 to 68, 43 to 51, 30 to 32, etc. are also explicitly listed in this specification. For values ​​less than 1, one unit is appropriately considered to be 0.0001, 0.001, 0.01, 0.1. These are merely examples intended to be clearly stated, and it is to be understood that all possible combinations of the values ​​listed between the minimum and maximum values ​​are explicitly stated in this specification in a similar manner.

[0046] Unless otherwise indicated, all ranges include the endpoints and all numbers between the endpoints. When used with a range, "about" or "approximately" applies to both endpoints of the range. Thus, "about 20 to 30" is intended to cover "about 20 to about 30," including at least the specified endpoints.

[0047] All articles and references disclosed herein, including patent applications and publications, are incorporated herein by reference for all purposes. The term "consisting essentially of..." when describing a combination should include the identified elements, ingredients, components, or steps and other elements, ingredients, components, or steps that do not materially affect the basic novel characteristics of the combination. The use of the terms "comprising" or "including" to describe a combination of elements, ingredients, components, or steps herein also contemplates embodiments consisting essentially of these elements, ingredients, components, or steps. By using the term "may," it is intended to indicate that any attribute described as "may" be optional.

[0048] Multiple elements, ingredients, parts or steps can be provided by a single integrated element, ingredient, part or step. Alternatively, a single integrated element, ingredient, part or step can be divided into separate multiple elements, ingredients, parts or steps. The disclosure of "a" or "an" to describe an element, ingredient, part or step is not intended to exclude other elements, ingredients, parts or steps.

[0049] It should be understood that the above description is for illustration and not for limitation. Many embodiments and many applications beyond the examples provided will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of the present teachings should not be determined with reference to the above description, but rather with reference to the appended claims and the full scope of equivalents to which such claims are entitled. For the purpose of comprehensiveness, all articles and references, including disclosures of patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein in the preceding claims is not intended to be a disclaimer of such subject matter, nor should it be considered that the inventors did not consider such subject matter to be part of the disclosed utility model subject matter.

Claims

1. A lighting mechanism for vacuum coating equipment, used in vacuum coating equipment, wherein the vacuum coating equipment comprises a vacuum coating chamber and a coating frame arranged in the vacuum coating chamber; characterized in that: The lighting mechanism for the vacuum coating equipment includes: a first mounting plate, the first mounting plate being used to be fixedly connected to a wall surface of the vacuum coating chamber; A mounting frame located in the vacuum coating chamber, the mounting frame being fixedly connected to the first mounting plate; the mounting frame comprising a connected working portion and a connecting portion, the working portion being arranged opposite to the coating frame, and the connecting portion being fixedly connected between the working portion and the first mounting plate; A light-collecting assembly includes a prism, a lens, and an optical fiber, wherein the lens is located between the prism and the optical fiber; parallel light passing through the coating sample on the coating rack is reflected by the prism and then focused into the optical fiber through the lens; A second mounting plate is fixedly connected to the lighting assembly, and a side of the second mounting plate facing away from the lighting assembly is adjustably fixedly connected to a side of the working part facing the coating frame, so that the angle of the lighting assembly relative to the working part is adjustable.

2. The lighting mechanism for vacuum coating equipment according to claim 1, characterized in that: The second mounting plate and the working part are fixedly connected by a plurality of fasteners, and the length of the fixing portion of the fasteners is adjustable.

3. The lighting mechanism for vacuum coating equipment according to claim 2, characterized in that: The angle adjustment range of the lighting component relative to the working part is 5°.

4. The lighting mechanism for vacuum coating equipment according to claim 2, characterized in that: The fastener is provided with an external thread, and the working portion is provided with a plurality of threaded holes for the fastener to cooperate with; the threaded holes are arranged at intervals in the first direction, and the number of the threaded holes is greater than the number of the fasteners.

5. The lighting mechanism for vacuum coating equipment according to claim 4, characterized in that: There are four fasteners, which are respectively located at the four vertices of the rectangle; the adjacent sides of the rectangle extend along the first direction and the second direction respectively; the two rows of threaded holes are spaced apart in the second direction.

6. The lighting mechanism for vacuum coating equipment according to claim 5, characterized in that: In the second direction, a size of the working portion is larger than a size of the connecting portion.

7. The lighting mechanism for vacuum coating equipment according to claim 5, characterized in that: The first mounting plate is vertically arranged, and the first direction has a predetermined angle with the horizontal plane.

8. The lighting mechanism for vacuum coating equipment according to claim 7, characterized in that: A connecting block is fixedly connected to the inner side surface of the first mounting plate. The connecting block is provided with a notch for accommodating part of the connecting portion. One end of the connecting portion away from the working portion is fixedly connected to the connecting block.

9. The lighting mechanism for vacuum coating equipment according to claim 8, characterized in that: The portion where the connecting portion and the connecting block are fixed is arranged horizontally.

10. The lighting mechanism for vacuum coating equipment according to claim 1, characterized in that: The prism has a first right-angled surface, a second right-angled surface and a bevel that are surrounded by each other. The first right-angled surface is arranged opposite to the coating frame and is used to receive parallel light passing through the coating sample on the coating frame; the bevel totally reflects the parallel light received by the first right-angled surface; the second right-angled surface is arranged facing the lens and is used to transmit the parallel light reflected by the bevel to the lens.

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