Round target material sand blasting target surface protection device

Abstract

The utility model provides a target surface protection device for sand blasting of a circular target material, which is buckled on a target surface to protect the target surface during sand blasting and comprises a protection device main body which is of a cylindrical structure, and the edge of the top of the protection device main body is of an inclined structure from inside to outside; the edge of the bottom of the protection device main body is fixedly connected with a vacuum side surface protection edge which is arranged in a circular ring structure and is used for protecting a non-sand-blasting area of the vacuum side surface of the target surface to form a required sand blasting height; and a sealing strip is adhered to the inner wall of the vacuum side surface protection edge so as to ensure that the target surface is not scratched during sand blasting operation.

Description

Technical Field

[0001] This utility model patent belongs to the field of sandblasting technology, and specifically relates to a circular target sandblasting target surface protection device. Background Art

[0002] With the rapid development of China's electronic equipment market, the demand for high-purity sputtering targets is increasing. As the core material of magnetron sputtering technology, the performance of the target directly affects the quality and application results of the final film. As an advanced thin film deposition method, magnetron sputtering technology has become an indispensable part of modern industrial manufacturing.

[0003] During magnetron sputtering, atoms on the target surface collide with argon ions, gaining energy and detaching from the target surface toward the substrate. Upon contact, these moving atoms adhere to the substrate through physical and chemical adsorption, gradually forming a thin film. As the sputtering power increases, the intensity of the high-energy argon ion bombardment on the target surface increases, and the number of target atoms sputtered increases. These atoms or atomic clusters may be impacted by the plasma as they fly toward the substrate, particularly at the target edge, where this collision effect is more pronounced. Atoms or atomic clusters at the target edge, impacted by the plasma, may change their trajectory or even be rebounded back onto the target surface. This repeated collision and rebound process can lead to irregularities such as burrs and bumps at the target edge. Furthermore, if the collisions are intense enough, a loosely bonded anti-sputtering layer may form. This anti-sputtering layer can break off during subsequent sputtering, forming agglomerated microparticles that can affect the coating quality on the substrate.

[0004] As one of the important processes in the target production process, sandblasting can improve the adsorption force of the backsplash layer, reduce the probability of forming agglomerated microparticles, and disperse the internal stress of the backsplash layer to reduce peeling. The sandblasting range and sealing of the flange area are relatively easy to control. However, if it is simply based on the upper cover groove and the target material for installation, there will be problems with poor sealing due to slight differences in the size of products of the same size but different materials, or products of the same size and same material but different models, or there are certain processing tolerances in the target material processing itself. There is a risk of scratching the target surface, resulting in rework and repair, and even product scrapping. If tooling is equipped separately according to minor differences, it will increase production costs and tooling management workload, and the upper cover will block the spray gun, and a high degree of roughness cannot be achieved.

[0005] Therefore, it is necessary to provide a new type of target sandblasting target surface protection device to solve the problems of poor protection effect, inaccurate sandblasting area, high production cost and cumbersome tooling management in the existing technology, so as to achieve the purpose of effectively protecting the target material, accurate sandblasting area, qualified roughness, reducing production costs and simplifying tooling management. Utility Model Content

[0006] In order to overcome a series of defects existing in the prior art, the purpose of the present utility model is to provide a circular target sandblasting target surface protection device to address the above problems, which is buckled on the target surface during sandblasting to protect the target surface, including a protection device body arranged in a cylindrical structure, and the top edge of the protection device body is arranged in an inclined structure from the inside to the outside; the bottom edge of the protection device body is fixedly connected to a vacuum side protection edge 1 arranged in a circular ring structure to protect the non-sandblasting area of ​​the vacuum side of the target surface to form the required sandblasting height; a sealing strip 2 is bonded to the inner wall of the vacuum side protection edge 1 to ensure that the target surface will not be scratched during the sandblasting operation.

[0007] Furthermore, the height of the vacuum side protection edge 1 is greater than the remaining height of the sandblasting to ensure that the target surface and the protection device are not in contact with each other, thereby avoiding large-area scratches.

[0008] Furthermore, the height of the vacuum side protection edge 1 is 10.2 mm, and the remaining height for sandblasting is 9 mm.

[0009] Furthermore, the sealing strip 2 is a self-adhesive, non-slip and shock-proof silicone or rubber sealing sheet.

[0010] Furthermore, a pressing block positioning groove 3 is provided at the top center of the protection device body. The diameter of the pressing block positioning groove 3 is 200 mm and the groove depth is 7 mm.

[0011] Furthermore, two handles 4 are provided on the top of the protection device body, which are symmetrical about the center.

[0012] Furthermore, the main body of the protection device is made of engineering plastics with high mechanical strength and good toughness, with a tensile strength of ≥20MPa, a compressive strength of ≥10MPa, and a surface roughness of <0.5μm.

[0013] Furthermore, the angle of the inclined structure at the top edge of the protection device body is 10° to 60°.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1) Through good sealing effect and protective edge design, the target surface is protected from being scratched by sand particles, the surface quality of the target is improved and the risk of rework and repair is reduced;

[0016] 2) The design of the briquette positioning groove and vacuum side protection edge ensures the accuracy and consistency of the sandblasting area to meet production requirements;

[0017] 3) Optimizing materials and structural design reduces the impact on production costs and improves production efficiency;

[0018] 4) Simplified tooling management: The simple structure is easy to operate and maintain, reducing the cost and workload of tooling management;

[0019] 5) The protection device is easy to operate and easy for operators to use, thereby improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a top view of a circular target sandblasting target surface protection device disclosed in an embodiment of the present application.

[0021] Figure 2 This is a cross-sectional view of a circular target sandblasting target surface protection device disclosed in an embodiment of the present application.

[0022] Figure 3 This is a schematic diagram of an example target material in an embodiment of the present application.

[0023] 1- Vacuum side protection edge, 2- Sealing strip, 3- Press block positioning groove, 4- Handle. DETAILED DESCRIPTION

[0024] To make the purpose, technical solutions, and advantages of the present invention more clear, the following will describe the technical solutions in the embodiments of the present invention in more detail with reference to the accompanying drawings. In the accompanying drawings, the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The described embodiments are only some of the embodiments of the present invention, not all of them.

[0025] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work shall fall within the scope of protection of the present invention.

[0026] The embodiments and directional terms described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0027] In a broad embodiment of the present invention, a circular target sandblasting target surface protection device is buckled on the target surface during sandblasting to protect the target surface, including a protection device body arranged in a cylindrical structure, and the top edge of the protection device body is arranged in an inclined structure from the inside to the outside; a vacuum side protection edge 1 arranged in a circular ring structure is fixedly connected to the bottom edge of the protection device body to protect the non-sandblasting area of ​​the vacuum side of the target surface to form the required sandblasting height; a sealing strip 2 is bonded to the inner wall of the vacuum side protection edge 1 to ensure that the target surface will not be scratched during the sandblasting operation.

[0028] Furthermore, the height of the vacuum side protection edge 1 is greater than the remaining height of the sandblasting to ensure that the target surface and the protection device are not in contact with each other, thereby avoiding large-area scratches.

[0029] Furthermore, the height of the vacuum side protection edge 1 is 10.2 mm, and the remaining height for sandblasting is 9 mm.

[0030] Furthermore, the sealing strip 2 is a self-adhesive, non-slip and shock-proof silicone or rubber sealing sheet.

[0031] Furthermore, a pressing block positioning groove 3 is provided at the top center of the protection device body. The diameter of the pressing block positioning groove 3 is 200 mm and the groove depth is 7 mm.

[0032] Furthermore, two handles 4 are provided on the top of the protection device body, which are symmetrical about the center.

[0033] Furthermore, the main body of the protection device is made of engineering plastics with high mechanical strength and good toughness, with a tensile strength of ≥20MPa, a compressive strength of ≥10MPa, and a surface roughness of <0.5μm.

[0034] Furthermore, the angle of the inclined structure at the top edge of the protection device body is 10° to 60°.

[0035] The preferred embodiments of the present invention are listed below in conjunction with the accompanying drawings to further describe the present invention in detail.

[0036] like Figure 1-3 As shown, the utility model provides a circular target sandblasting target surface protection device, including a protection device body, a vacuum side protection edge 1, a sealing strip 2, a pressure block positioning groove 3 and a handle 4. The vacuum side protection edge 1 is used to protect the non-sandblasting area of ​​the vacuum side of the target surface to form a certain sandblasting height. The height H1 of the vacuum side protection edge 1 is greater than the size of the sandblasting height residual H2. The size of the height H1 minus the sandblasting height residual H2 is ≥1mm, which can ensure that the target surface and the protection device are not in contact throughout the body, avoiding large-area scratches.

[0037] The height H1 of the vacuum side protection edge 1 is 10.2 mm, and the sandblasting height remaining amount H2 is 9 mm.

[0038] The sealing strip 2 is adhered to the vacuum side protection edge 1 and has the characteristics of self-adhesion. It contacts the target material and fits the target surface with a gap of ≤0.05mm. After sandblasting, the protective device is removed and no sand particles enter the inside of the protective device, achieving a good sealing effect and ensuring that the target surface will not be scratched during sandblasting.

[0039] The material of the sealing strip 2 is preferably self-adhesive, non-slip and shock-proof silicone / rubber sealing sheet, which has a simple structure, strong corrosion resistance, acid and alkali corrosion resistance with a pH range of 3-9, is not easy to age, has a long service life, good wear resistance, and is easy to operate and install.

[0040] The diameter of the pressure block positioning groove 3 is 200 mm, the groove depth is 7 mm, and it is located at the center of the protective device. When the tooling is installed, the force of the circle in contact with the target surface line is guaranteed to be consistent, and the position of the pressure block is guaranteed to be consistent when the pressure block is placed during each sandblasting operation, which can avoid tilting and offsetting of the protective device. After sandblasting, the sandblasting area can be guaranteed to be qualified through measurement.

[0041] The main body of the protection device has an inclination angle of 10° to 60° toward the center of the circle, which can better adapt to the angle of the spray gun, reduce obstruction, and ensure that the sandblasting roughness is qualified.

[0042] The main body of the protective device is preferably made of engineering plastics, which have high mechanical strength and good toughness, high tensile and compressive strength, tensile strength ≥ 20MPa, compressive strength ≥ 10MPa, smooth surface, low friction coefficient, and roughness < 0.5μm; two handles 4 are provided on the top symmetrically to facilitate operation;

[0043] The utility model solves the technical problems of poor sealing, poor protection effect, inaccurate sandblasting area, high production cost and complicated tooling management of traditional sandblasting tooling, and has the characteristics of simple structure, good sealing effect, accurate sandblasting area and qualified roughness, so as to effectively protect the target material, reduce production costs and simplify tooling management.

[0044] Finally, it should be pointed out that the above embodiments are intended only to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they may modify the technical solutions described in the above embodiments or replace some of the technical features therein with equivalents; and such modifications or replacements do not deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A circular target sandblasting target surface protection device, which is buckled on the target surface during sandblasting to protect the target surface, including a protective device body arranged in a cylindrical structure, characterized in that: The top edge of the protective device body is arranged in an inclined structure from the inside to the outside; the bottom edge of the protective device body is fixedly connected to a vacuum side protection edge (1) arranged in a circular ring structure; and a sealing strip (2) is bonded to the inner wall of the vacuum side protection edge (1).

2. A circular target sandblasting target surface protection device according to claim 1, characterized in that: The height dimension of the vacuum side protection edge (1) is greater than the dimension of the remaining height of the sandblasting.

3. A circular target sandblasting target surface protection device according to claim 2, characterized in that: The height dimension of the vacuum side protection edge (1) is 10.2 mm, and the dimension of the remaining height for sandblasting is 9 mm.

4. The circular target sandblasting target surface protection device according to claim 1, characterized in that: The sealing strip (2) is a self-adhesive, non-slip and shock-proof silica gel or rubber sealing sheet.

5. The circular target sandblasting target surface protection device according to claim 1, characterized in that: A pressing block positioning groove (3) is provided at the center of the top of the protection device body. The diameter of the pressing block positioning groove (3) is 200 mm and the groove depth is 7 mm.

6. The circular target sandblasting target surface protection device according to claim 1, characterized in that: Two handles (4) symmetrically arranged about the center are provided on the top of the protective device body.

7. The circular target sandblasting target surface protection device according to claim 1, characterized in that: The main body of the protection device is made of engineering plastics with high mechanical strength and good toughness, with a tensile strength of ≥20MPa, a compressive strength of ≥10MPa, and a surface roughness of <0.5μm.

8. The circular target sandblasting target surface protection device according to claim 1, characterized in that: The angle of the inclined structure at the top edge of the protective device body is 10° to 60°.

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