IGS valve group-cap electrolytic polishing device

Abstract

The utility model relates to an IGS valve group-cap electrolytic polishing device, which comprises a cathode conductor and an anode conductor which are respectively connected with two hanging plates, a connecting rod is arranged between the two hanging plates, the connecting rod is arranged on the upper half part of the hanging plates, an anode frame is arranged on the inner side of the bottom of the hanging plates connected with the anode conductor, and a cathode frame is arranged on the inner side of the bottom of the hanging plates connected with the cathode conductor. The tops of the anode frame and the cathode frame are connected through an upper cathode plate, the bottoms of the anode frame and the cathode frame are connected through a lower cathode plate, a main plate is arranged between the upper cathode plate and the lower cathode plate, a connecting plate is arranged above the upper cathode plate, a second cathode block is installed on the connecting plate, a first cathode block is arranged between the upper cathode plate and the connecting plate, and a first cathode needle is embedded in the middle of the first cathode block. A second cathode needle is embedded in the middle of the second cathode block, and the front-back distance between the connecting plate and the upper cathode plate can be adjusted. The cathode needles enter the holes for polishing, and the connecting plate moves back and forth to control the second cathode needles to move back and forth, so that IGS-CAP-A damage caused by contact between the cathode needles and IGS-CAP-A is avoided, and the product yield is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of electrolytic polishing, and in particular relates to an IGS valve group-cap electrolytic polishing device. Background Art

[0002] IGS (Integrated Gas System): This is a gas control device used in the semiconductor industry. With advancements in semiconductor manufacturing processes, the requirements for gas control equipment are becoming increasingly stringent. At the company's trade show, they showcased the core modules of the IGS system and demonstrated its use in ultra-high-purity applications. The IGS-CAP-A, or IGS Cap A, is a crucial component of the IGS. However, the IGS-CAP-A features both straight and angled holes, and currently, there is no commercially available equipment capable of polishing the inner holes of this component.

[0003] Electropolishing uses a metal workpiece as the anode, placed in an electrolyte, and then, through the application of a DC power source, causes anodic dissolution of the metal surface in the electrolyte, thereby removing microscopic surface bumps and smoothing the surface. This process exploits the principle that microscopic bumps on the metal surface preferentially dissolve in specific electrolytes and under appropriate current densities. Electropolishing not only removes microscopic bumps and defects on the metal surface, but also significantly improves surface finish and corrosion resistance. However, conventional equipment lacks the capability to polish the inner bore of an IGS-CAP-A. Using a vertical cathode needle to polish inclined holes often results in burns on the IGS-CAP-A and short circuits the equipment. Using a cathode rod to transfer the cathode charge to the IGS-CAP-A, allowing the cathode charge to reach the inner bore of the IGS-CAP-A, often fails to achieve the desired effect due to deeper holes.

[0004] In summary, the existing technology has the problems of being unable to polish the inclined hole and being unable to control the vertical cathode needle polishing, resulting in IGS-CAP-A burn and waste. Utility Model Content

[0005] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and in the abstract and title of the present invention to avoid obscuring the purpose of this section, the abstract and the title of the utility model, and such simplifications or omissions shall not be used to limit the scope of the present invention.

[0006] Therefore, the purpose of the present invention is to provide an IGS valve group-cap electrolytic polishing device, which can solve the problems in the prior art of being unable to polish the inclined holes and unable to control the vertical cathode needle polishing, resulting in IGS-CAP-A burning and waste. The utility model provides an IGS valve group-cap electrolytic polishing device, which includes a cathode conductive and an anode conductive device respectively connected to two hanging plates, a connecting rod between the two hanging plates, and the connecting rod is arranged on the upper half of the hanging plate. An anode frame is installed on the inner side of the bottom of the hanging plate connected to the anode conductive, and a cathode frame is installed on the inner side of the bottom of the hanging plate connected to the cathode conductive. The top of the anode frame and the cathode frame are connected by an upper cathode plate, and the bottom is connected by a lower cathode plate. The middle of the upper cathode plate and the lower cathode plate is a main board, and a connecting plate is provided above the upper cathode plate. A second cathode block is installed on the connecting plate. A first cathode block is between the upper cathode plate and the connecting plate, a first cathode needle is embedded in the middle of the first cathode block, and a second cathode needle is embedded in the middle of the second cathode block. The connecting plate can adjust the front and rear distance of the upper cathode plate.

[0007] Preferably, the connecting plate is a U-shaped plate with a second clamping groove in the middle, the second clamping groove is adapted to the second cathode block, and both sides of the connecting plate are through openings.

[0008] Preferably, the upper cathode plate is a combination of multiple groups of reinforcement holes and first clip grooves, the reinforcement holes are distributed on both sides of the first clip groove and adapted to the through opening, the connecting plate is fixed to the upper cathode plate by bolt connection, and the first clip groove and the first cathode block are adapted.

[0009] Preferably, a second opening is provided in the middle of the second cathode block, the second opening is an oblique hole adapted to the second polished hole on the IGS-CAP-A, and the second cathode needle is adapted to the second opening.

[0010] Preferably, the first cathode block has a first opening in the middle thereof adapted to the first cathode needle, and a first fixing hole on the side thereof, and the first opening and the first polishing hole on the IGS-CAP-A are adapted to form a straight hole.

[0011] Preferably, a threaded fixing hole is provided below the intersection of the front surface of the connecting plate and the second cathode block, and the threaded fixing hole and the first fixing hole are used to fix the second cathode needle and the first cathode needle respectively.

[0012] Preferably, a plurality of positioning grooves are provided on the main board, and positioning holes are provided around the positioning grooves, and the positioning holes are adapted to the fixing holes on the four corners of IGS-CAP-A.

[0013] Preferably, the fixing hole and the positioning hole are fixed on the main board by positioning screws.

[0014] Preferably, the first cathode needle and the second cathode needle are identical, and are formed by a main cathode needle being clamped through any mounting grooves on both sides of the auxiliary cathode needle.

[0015] Preferably, the cross-sectional width of the main cathode needle is 2 mm, and the cross-sectional width of the auxiliary cathode needle is 6 mm.

[0016] Preferably, the first cathode needle, the second cathode needle, the second cathode block, the first cathode block, the connecting plate and the positioning screw together constitute a polishing component.

[0017] In summary, the present invention has at least one of the following beneficial effects:

[0018] The utility model adopts a polishing component arranged between the upper cathode plate and the main board, and the upper cathode plate and the main board are provided with a combination of multiple pairs of holes and grooves, which facilitates the left and right movement of the polishing device on the utility model. The connecting plate is bolted through different reinforcement holes, and the forward and backward movement of the second cathode needle can be realized, which increases the universality of the utility model and can be adapted to the inner hole grinding of the same series of products.

[0019] The utility model solves the problem of insufficient polishing of the oblique hole by controlling the polishing of the second polishing hole. By controlling the connection degree between the threaded fixing hole, the first fixing hole and the bolt, the position of the second cathode needle and the first cathode needle can be adjusted up and down to prevent the cathode needle from touching the inside of the IGS-CAP-A and causing damage to the IGS-CAP-A, thereby improving product yield and saving costs.

[0020] The utility model increases the portability and versatility of the device by adapting any mounting groove at both ends of the auxiliary cathode needle to the main cathode needle. At the same time, the cross-sectional area of ​​the main cathode needle is smaller than that of the auxiliary cathode needle, which can meet more precise polishing requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is a schematic diagram of the overall structure of an IGS valve group-cap electrolytic polishing device of the utility model;

[0023] Figure 2This is a schematic diagram of the polishing component structure of an IGS valve group-cap electrolytic polishing device of the utility model;

[0024] Figure 3 This is a top view of the polishing component structure of an IGS valve group-cap electrolytic polishing device of the utility model;

[0025] Figure 4 This is a schematic diagram of the first cathode block of an IGS valve group-cap electrolytic polishing device of the present invention;

[0026] Figure 5 This is a schematic diagram of the second cathode block of an IGS valve group-cap electrolytic polishing device of the present invention;

[0027] Figure 6 This is a top view of the mainboard of an IGS valve group-cap electrolytic polishing device of the utility model;

[0028] Figure 7 This is a schematic diagram of an IGS valve group-cap electrolytic polishing device IGS-CAP-A of the present invention;

[0029] Figure 8 This is a schematic diagram of the cathode needle structure of an IGS valve group-cap electrolytic polishing device of the present invention;

[0030] List of accompanying drawings: 1. Anode conduction; 2. Cathode conduction; 3. Connecting rod; 4. Hanging plate; 5. Upper cathode plate; 51. Reinforcement hole; 52. First snap-in groove; 6. Anode frame; 7. Lower cathode plate; 8. Main board; 81. Positioning groove; 82. Positioning hole; 9. Cathode frame; 10. Connecting plate; 101. Through-port; 102. Threaded fixing hole; 103. Second snap-in groove; 11. First cathode block; 111. First through-port; 112. First fixing hole; 12. First cathode needle; 121. Auxiliary cathode needle; 122. Mounting groove; 123. Main cathode needle; 13. Second cathode needle; 14. Second cathode block; 141. Second through-port; 15. IGS-CAP-A; 151. Fixing hole; 152. First polishing hole; 153. Second polishing hole; 16. Positioning screw. Implementation Method

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] Example 1, refer to Figure 1-8In this embodiment, the problem that the prior art cannot polish the inclined hole and cannot control the vertical cathode needle polishing, resulting in IGS-CAP-A burn and waste, is solved. The utility model discloses an IGS valve group-cap electrolytic polishing device, which includes a cathode conductive 2 and an anode conductive 1 respectively connected to two hanging plates 4, a connecting rod 3 between the two hanging plates 4, and the connecting rod 3 is arranged on the upper half of the hanging plate 4. An anode frame 6 is installed on the inner side of the bottom of the hanging plate 4 connected to the anode conductive 1, and a cathode frame 9 is installed on the inner side of the bottom of the hanging plate 4 connected to the cathode conductive 2. The tops of the anode frame 6 and the cathode frame 9 are connected by an upper cathode plate 5, and the bottoms are connected by a lower cathode plate 7. A main board 8 is located between the upper cathode plate 5 and the lower cathode plate 7. A connecting plate 10 is provided above the upper cathode plate 5, and a second cathode block 14 is installed on the connecting plate 10. A first cathode block 11 is located between the upper cathode plate 5 and the connecting plate 10, a first cathode needle 12 is embedded in the middle of the first cathode block 11, and a second cathode needle 13 is embedded in the middle of the second cathode block 14. The connecting plate 10 can adjust the front and rear distance of the upper cathode plate 5.

[0033] Polishing is performed by probing the first cathode needle 12 and the second cathode needle 13 into the hole, which is more efficient and more effective. The front and rear distance on the upper cathode plate 5 can be adjusted through the connecting plate 10, that is, the front and rear position of the second cathode needle 13 can be controlled to avoid damage to the IGS-CAP-A caused by contact between the second cathode needle 13 and the IGS-CAP-A, thereby improving the product yield and increasing the universality of this product, so that it can adapt to the polishing needs of products in the same series.

[0034] The connecting plate 10 is a U-shaped plate with a second snap-in slot 103 in the middle. The second snap-in slot 103 mates with the second cathode block 14. The connecting plate 10 has openings 101 on both sides. The upper cathode plate 5 is a combination of multiple reinforcement holes 51 and first snap-in slots 52. The reinforcement holes 51 are distributed on both sides of the first snap-in slot 52 and mate with the openings 101. The connecting plate 10 is fixed to the upper cathode plate 5 via bolts. The first snap-in slot 52 mates with the first cathode block 11. The second cathode block 14 has a second opening 141 in the middle. This second opening 141 is an oblique hole that mates with the second polished hole 153 on the IGS-CAP-A15. The second cathode needle 13 mates with the second opening 141. The first cathode block 11 has a first opening 111 in the middle that mates with the first cathode needle 12. A first fixing hole 112 is provided on the side. The first opening 111 is a straight hole that mates with the first polished hole 152 on the IGS-CAP-A15. A threaded fixing hole 102 is provided below the intersection of the front face of the connecting plate 10 and the second cathode block 14. This threaded fixing hole 102 and the first fixing hole 112 are used to secure the second cathode needle 13 and the first cathode needle 12, respectively. The main board 8 is provided with multiple positioning slots 81, each surrounded by positioning holes 82. These holes 82 mate with the fixing holes 151 at the four corners of the IGS-CAP-A15. The fixing holes 151 and the positioning holes 82 are secured to the main board 8 via positioning screws 16. The first cathode needle 12, the second cathode needle 13, the second cathode block 14, the first cathode block 11, the connecting plate 10, and the positioning screws 16 together form the polishing assembly.

[0035] The first cathode needle 12 and the first cathode block 11 control the polishing of the inside of the straight hole of the first polishing hole 152, and the second cathode needle 13 and the second cathode block 14 control the polishing of the oblique hole of the second polishing hole 153, which solves the problem of insufficient polishing of the oblique hole. The positions of the second cathode needle 13 and the first cathode needle 12 can be adjusted up and down by controlling the connection degree of the threaded fixing hole 102 and the first fixing hole 112 and the bolt. The second cathode needle 13 can be moved forward and backward by being fixed to the upper cathode plate 5 by the connecting plate 10 through bolts to prevent the cathode needle from touching the inside of the IGS-CAP-A15 and causing damage to the IGS-CAP-A, thereby improving product yield and saving costs. The main board 8 is provided with multiple positioning grooves 81 and the upper cathode plate 5 is provided with a combination of multiple groups of reinforcement holes 51 and first clamping grooves 52, and the two combinations appear in pairs, which facilitates the left and right movement of the polishing component to adapt to the polishing work of products of different volumes in the same series.

[0036] The first cathode needle 12 and the second cathode needle 13 are identical, consisting of a main cathode needle 123 connected through any mounting slots 122 on both sides of an auxiliary cathode needle 121. The cross-sectional width of the main cathode needle 123 is 2 mm, and the cross-sectional width of the auxiliary cathode needle 121 is 6 mm.

[0037] Since the mounting grooves 122 are provided at both ends of the auxiliary cathode needle 121 , the main cathode needle 123 can be easily inserted into the auxiliary cathode needle 121 , thereby increasing the portability and versatility of the device.

[0038] Specific implementation principle: When using the present invention, first fix the fixing hole 151 on the IGS-CAP-A15 and the positioning hole 82 on the main board 8 to the main board 8 through the positioning screw 16. There is a reinforcement hole 51 on the upper cathode plate 5 perpendicular to the positioning hole 82. By judging the position of the second polishing hole 153 on the IGS-CAP-A15, the connecting plate 10 is placed at the appropriate position of the upper cathode plate 5, and the through-port 101 and the reinforcement hole 51 are fixed by bolts. The first cathode block 11 is clamped on the corresponding first clamping groove 52, and the second cathode block 14 is clamped on the second clamping groove 103. The first cathode needle 12 and the second cathode needle 13 are respectively inserted into the first through-port 111 and the second through-port 141, and the position of the main cathode needle 123 and the corresponding first polishing hole 152 and the second polishing hole 153 are adjusted. After determining the position, fix them with bolts through the spiral fixing block 102 and the first fixing hole 112, and then turn on the power to perform electrolytic polishing of the inner hole.

[0039] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the foregoing description. It is intended that all variations within the meaning and range of equivalents of the claims be encompassed within the present invention, and any reference numerals in the claims should not be construed as limiting the claims to which they relate.

Claims

1. An IGS valve group-cap electrolytic polishing device, characterized by: The invention comprises a cathode conductive (2) and an anode conductive (1) connected to two hanging plates (4) respectively, a connecting rod (3) between the two hanging plates (4), and the connecting rod (3) is arranged on the upper half of the hanging plates (4). An anode frame (6) is installed on the inner side of the bottom of the hanging plate (4) connected to the anode conductive (1), and a cathode frame (9) is installed on the inner side of the bottom of the hanging plate (4) connected to the cathode conductive (2). The anode frame (6) and the cathode frame (9) are connected at the top through an upper cathode plate (5) and at the bottom through a lower cathode plate (7). The upper cathode plate (5) and the lower cathode plate (7) are connected, a main plate (8) is located between the upper cathode plate (5), a connecting plate (10) is located above the upper cathode plate (5), a second cathode block (14) is installed on the connecting plate (10), a first cathode block (11) is located between the upper cathode plate (5) and the connecting plate (10), a first cathode needle (12) is embedded in the middle of the first cathode block (11), a second cathode needle (13) is embedded in the middle of the second cathode block (14), and the connecting plate (10) can adjust the front-rear distance of the upper cathode plate (5).

2. The IGS valve group-cap electrolytic polishing device according to claim 1, characterized in that: The connecting plate (10) is a U-shaped plate with a second clamping groove (103) in the middle, the second clamping groove (103) is adapted to the second cathode block (14), and both sides of the connecting plate (10) are through openings (101).

3. The IGS valve group-cap electrolytic polishing device according to claim 2, characterized in that: The upper cathode plate (5) is a combination of multiple groups of reinforcement holes (51) and first clamping grooves (52), the reinforcement holes (51) are distributed on both sides of the first clamping groove (52) and are adapted to the through opening (101), the connecting plate (10) is fixed to the upper cathode plate (5) by bolt connection, and the first clamping groove (52) and the first cathode block (11) are adapted to each other.

4. The IGS valve group-cap electrolytic polishing device according to claim 1, characterized in that: A second opening (141) is provided in the middle of the second cathode block (14). The second opening (141) is an oblique hole adapted to the second polished hole (153) on the IGS-CAP-A (15). The second cathode needle (13) is adapted to the second opening (141).

5. The IGS valve group-cap electrolytic polishing device according to claim 4, characterized in that: The first cathode block (11) has a first opening (111) in the middle thereof adapted to the first cathode needle (12), and a first fixing hole (112) on the side thereof; the first opening (111) and the first polishing hole (152) on the IGS-CAP-A (15) are adapted to form straight holes.

6. The IGS valve group-cap electrolytic polishing device according to claim 5, characterized in that: A threaded fixing hole (102) is provided below the intersection of the front surface of the connecting plate (10) and the second cathode block (14); the threaded fixing hole (102) and the first fixing hole (112) are used to fix the second cathode needle (13) and the first cathode needle (12), respectively.

7. The IGS valve group-cap electrolytic polishing device according to claim 1, characterized in that: The main board (8) is provided with a plurality of positioning slots (81), and positioning holes (82) are provided around the positioning slots (81). The positioning holes (82) are adapted to the fixing holes (151) on the four corners of the IGS-CAP-A (15).

8. The IGS valve group-cap electrolytic polishing device according to claim 7, characterized in that: The fixing hole (151) and the positioning hole (82) are fixed to the main board (8) via positioning screws (16).

9. The IGS valve group-cap electrolytic polishing device according to claim 1, characterized in that: The first cathode needle (12) and the second cathode needle (13) are identical, and are composed of a main cathode needle (123) clamped together through any mounting grooves (122) on both sides of an auxiliary cathode needle (121).

10. An IGS valve group-cap electrolytic polishing device according to claim 9, characterized in that: The cross-sectional width of the main cathode needle (123) is 2 mm, and the cross-sectional width of the auxiliary cathode needle (121) is 6 mm.

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