Temperature control system for heater

Abstract

The temperature control system comprises a temperature controller, an SCR electric power regulator, a thermocouple and the heater, the temperature controller is electrically connected with the SCR electric power regulator, the temperature controller is electrically connected with the thermocouple, the thermocouple is installed in the heater, and the temperature controller is electrically connected with the SCR electric power regulator. The temperature sensor is used for measuring the temperature in the heater. According to the utility model, the PLC is used as a control core, the input and output control is realized through programming, and the on-site temperature is acquired by the multi-channel analog quantity input interface; the temperature controller adopts fuzzy PID to control the SCR output voltage so as to carry out heating control on the heating wire, and the control precision can realize extremely small deviation; and meanwhile, the system is provided with 16 paths of temperature detection equipment to read the temperature of the hot plate, so that the temperature detection and control are accurate.

Description

Technical Field

[0001] The utility model belongs to the technical field of temperature control, and in particular relates to a temperature control system for a heater. Background Art

[0002] Semiconductors are a class of materials with exceptional electrical conductivity, with conductivity levels between those of conductors and insulators. In modern electronics, semiconductor materials are widely used in various electronic devices, such as transistors and integrated circuits. Heaters play a crucial role in the fabrication and research of semiconductors. A temperature control system is crucial for heater operation, ensuring the heater's performance by controlling and monitoring its temperature.

[0003] The existing temperature control system has the following problems when used: SSR solid-state relays are used to control the heating of the heating wire, and the control accuracy is poor; the output voltage cannot be adjusted; it cannot be controlled by a touch screen or a computer at the same time; it uses traditional PID control method, and the response speed and control accuracy are poor; it does not have a multi-zone temperature control function; it does not have an overload test function; it does not have a temperature uniformity detection function; it cannot display the actual output voltage, current, and power; it cannot be controlled in sections; and it does not have a self-tuning function.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art already known to those skilled in the art. Utility Model Content

[0005] The purpose of the utility model is to provide a temperature control system for a heater, which can.

[0006] In order to achieve the above-mentioned purpose, the technical solution provided by a specific embodiment of the present invention is as follows:

[0007] A temperature control system for a heater, comprising:

[0008] A temperature controller is used to monitor, control and adjust the temperature of the heater.

[0009] The SCR power regulator is electrically connected to the temperature controller, so that data transmission can be achieved between the temperature controller and the SCR power regulator.

[0010] The thermocouple is used to monitor the temperature of the heater when in use. The temperature controller is electrically connected to the thermocouple so that the thermocouple can transmit the monitored temperature data to the temperature monitor.

[0011] The heater is a heating component used in semiconductor device processing. The thermocouple is installed in the heater to measure the temperature inside the heater.

[0012] In one or more embodiments of the present invention, the temperature controller's control system uses a PLC control system that can be programmed online. Using a PLC as the control core of the temperature controller offers stable performance and can be programmed online.

[0013] In one or more embodiments of the present invention, the temperature control system further includes a control cabinet, and the temperature controller and the SCR power regulator are both installed in the control cabinet.

[0014] In one or more embodiments of the present invention, the control cabinet has a door hingedly connected to the front side, and a touch screen is mounted on the door. The touch screen can be used to operate the temperature control system, and the arrangement makes the temperature control system intuitive, simple, and convenient.

[0015] In one or more embodiments of the present invention, the touch screen is electrically connected to the temperature controller, and the touch screen communicates via Ethernet, so that through the operation of the touch screen, the instructions issued on the touch screen can be transmitted via Ethernet to facilitate the control of the temperature control system.

[0016] In one or more embodiments of the present invention, the temperature controller is electrically connected to a switch and a computer, and the switch and the computer are electrically connected, so that the data of the temperature control system can be transmitted to the computer through the switch, so that the temperature control system of the heater can be monitored and controlled by the computer.

[0017] In one or more embodiments of the present invention, the SCR power regulator input line adopts modbus rtu communication, so that parameters such as voltage, current, power, output percentage, etc. can be read in real time.

[0018] In one or more embodiments of the present invention, the temperature controller utilizes a multi-zone temperature control method. The temperature control system features 16-channel temperature uniformity detection, enables segmented control, and can simultaneously achieve up to three-zone temperature control with an accuracy of within 0.5°C. Furthermore, the temperature control system features an automatic tuning function, employing different PID controls for heating different heating wires, resulting in higher accuracy, more intuitive operation, and greater convenience.

[0019] Compared with the existing technology, the utility model uses PLC as the control core, realizes input and output control through programming, and collects field temperature through multiple analog input interfaces; the temperature controller adopts fuzzy PID to control the SCR output voltage to control the heating wire, and the control accuracy can achieve extremely small deviation; at the same time, the system is equipped with 16-channel temperature detection equipment to read the temperature of the hot plate, so as to accurately detect and control the temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 This is a schematic diagram of a temperature control system for a heater in one embodiment of the present invention;

[0022] Figure 2 This is a wiring diagram of a temperature control system for a heater in one embodiment of the present invention. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the following will be combined with the drawings of the embodiments of the present invention to clearly and completely describe the technical solutions of the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0024] like Figure 1 and Figure 2 As shown, a temperature control system for a heater in one embodiment of the present invention includes a temperature controller, an SCR power regulator, a thermocouple and a heater.

[0025] Specifically, the temperature controller is used to monitor, control and adjust the temperature of the heater.

[0026] Furthermore, the temperature controller is electrically connected to the SCR power regulator, so that data transmission can be achieved between the temperature controller and the SCR power regulator.

[0027] Thermocouples are used to monitor the temperature of the heater when it is in use. The temperature controller and the thermocouple are electrically connected so that the thermocouple can transmit the monitored temperature data to the temperature monitor.

[0028] Heaters are components used during semiconductor processing. Thermocouples are installed inside heaters to measure the temperature inside the heaters.

[0029] Preferably, the control system of the temperature controller adopts a PLC control system, which can be programmed online. Using PLC as the control core of the temperature controller, the PLC control system has stable performance and can be programmed online.

[0030] Specifically, the temperature control system further includes a control cabinet, in which the temperature controller and the SCR power regulator are both installed.

[0031] Furthermore, a door is hingedly connected to the front of the control cabinet, and a touch screen is mounted on the door. The touch screen can be used to operate the temperature control system, and the arrangement makes the temperature control system intuitive, simple and convenient.

[0032] Furthermore, the touch screen is electrically connected to the temperature controller, and the touch screen communicates via Ethernet, so that through the operation of the touch screen, the instructions issued on the touch screen can be transmitted via Ethernet to facilitate the control of the temperature control system.

[0033] Preferably, the temperature controller is electrically connected to a switch and a computer, and the switch and the computer are electrically connected, so that the data of the temperature control system can be transmitted to the computer through the switch, so that the temperature control system of the heater can be monitored and controlled by the computer.

[0034] Preferably, the SCR power regulator input line adopts modbus rtu communication, so that parameters such as voltage, current, power, output percentage, etc. can be read in real time.

[0035] Preferably, the temperature controller adopts a multi-zone temperature control method. The temperature control system has 16-way temperature uniformity detection, which can be controlled in sections and can achieve a maximum temperature control of 3 zones with an accuracy of within 0.5°C. In addition, the temperature control system has an automatic setting function, using different PID controls for heating different heating wires, which has higher accuracy, more intuitive operation, and more convenient.

[0036] The utility model uses PLC as the control core and realizes input and output control through programming. Multiple analog input interfaces collect on-site temperature. The temperature controller uses fuzzy PID to control the SCR output voltage to control the heating wire. The control accuracy can achieve extremely small deviation. At the same time, the system is equipped with 16-channel temperature detection equipment to read the temperature of the hot plate, so as to accurately detect and control the temperature.

[0037] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0038] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A temperature control system for a heater, characterized in that: include: Temperature controller; An SCR power regulator, wherein the temperature controller is electrically connected to the SCR power regulator; A thermocouple, wherein the temperature controller is electrically connected to the thermocouple; The heater is installed in the heater and is used to measure the temperature in the heater.

2. A temperature control system for a heater according to claim 1, characterized in that: The control system of the temperature controller adopts a PLC control system, and the PLC control system can be programmed online.

3. A temperature control system for a heater according to claim 1, characterized in that: The temperature control system further comprises a control cabinet, in which the temperature controller and the SCR power regulator are both installed.

4. A temperature control system for a heater according to claim 3, characterized in that: A cabinet door is hinged on the front side of the control cabinet, and a touch screen is installed on the cabinet door.

5. A temperature control system for a heater according to claim 4, characterized in that: The touch screen is electrically connected to the temperature controller, and the touch screen communicates via Ethernet.

6. A temperature control system for a heater according to claim 1, characterized in that: The temperature controller is electrically connected to a switch and a computer, and the switch and the computer are electrically connected to each other.

7. A temperature control system for a heater according to claim 1, characterized in that: The SCR power regulator incoming line adopts modbus rtu communication.

8. The temperature control system for a heater according to claim 1, characterized in that: The temperature controller adopts a multi-zone temperature control method.

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