Connection structure for probe station and test head

Abstract

The utility model discloses a connecting structure for a probe station and a test head, which comprises a conversion frame, a driving shaft is rotatably mounted on the conversion frame, the driving shaft is connected with at least two supporting plates, the supporting plates are connected with a test head connecting plate, and an adjusting assembly is arranged between the supporting plates and the test head connecting plate; the adjusting assembly comprises a position adjusting connecting plate, the position adjusting connecting plate is fixed to the testing head connecting plate, a first fixing block is arranged at the end, away from the testing head connecting plate, of the position adjusting connecting plate, a second fixing block is arranged on the side face, away from the testing head connecting plate, of the first fixing block, and the second fixing block is arranged on the supporting plate. An adjusting screw is connected between the first fixing block and the second fixing block, and a connecting screw is connected between the position adjusting connecting plate and the supporting plate. The beneficial effects of the utility model are that through the connection between the support plate and the test head connecting plate, the connection between the probe station and the test head is realized; the position of the test head connecting plate is finely adjusted through the adjusting assembly, and the position of the test head is accurately adjusted and controlled.

Description

Technical Field

[0001] The utility model relates to the technical field of chip testing fixtures, in particular to a connection structure for a probe station and a test head. Background Art

[0002] With the rapid advancement of chip manufacturing technology, wafer chip testing faces more and more challenges, and the proportion of testing costs has also increased significantly. Wafer chip testing is to perform probe testing on each grain on the wafer. A probe (probe) made of gold wire as thin as a hair is installed on the detection head to contact the contact (pad) on the grain to test its electrical characteristics. Wafer chip testing requires the use of a tester, and for the tester, the connection between the probe station and the test head is very important. The position of the test head needs to be accurate to ensure the test accuracy of the wafer chip. The existing connection structure between the probe station and the test head is relatively complex, and its processing and installation are relatively troublesome. At the same time, it is difficult to adjust the installation position of the test head. Once fixed, it is basically difficult to adjust it, and the connection structure needs to be reprocessed. Utility Model Content

[0003] The purpose of the present invention is to provide a connection structure between a probe station and a test head, so as to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned objectives, the utility model provides the following technical solutions: a connection structure for a probe station and a test head, comprising a conversion frame, a drive shaft rotatably mounted on the conversion frame, the drive shaft being connected to at least two support plates, the support plates being connected to a test head connection plate, an adjustment component being provided between the support plate and the test head connection plate; the adjustment component comprising a positioning connection plate, the positioning connection plate being fixed to the test head connection plate, a first fixed block being provided at the end of the positioning connection plate away from the test head connection plate, a second fixed block being provided at the side of the first fixed block away from the test head connection plate, the second fixed block being arranged on the support plate, an adjustment screw being connected between the first fixed block and the second fixed block, and a connecting screw being connected between the positioning connection plate and the support plate.

[0005] Further preferably, the adjusting screw slides through the second fixed block and is threadedly connected to the first fixed block, and the distance between the first fixed block and the second fixed block is adjusted by rotating the adjusting screw; a limiting screw is provided on the second fixed block, and the head of the limiting screw abuts against the first fixed block, and the second fixed block is threadedly connected to the limiting screw, and the limiting screw is rotated so that the head of the limiting screw abuts against the first fixed block, thereby limiting the first fixed block after the distance adjustment, thereby ensuring the stability of the first fixed block.

[0006] Further preferably, the positioning connecting plate is provided with a plurality of connection holes for connecting with screws, and the connection holes are rectangular waist holes, which facilitate the position adjustment of the positioning connecting plate.

[0007] Further preferably, the adjustment connecting plate is an L-shaped structure, one side of which is connected to the test head connecting plate, and the other side of which is provided with a rectangular boss, and the support plate is provided with a limiting groove that matches the rectangular boss.

[0008] Further preferably, at least one positioning assembly is provided on a side of the test head connection board away from the support board, for positioning the test head connection board.

[0009] Further preferably, the positioning assembly includes a connecting rod, with a locating pin provided at the end of the connecting rod away from the test head connection plate, and a rectangular waist hole for a screw to pass through at the end of the connecting rod closer to the test head connection plate. The connecting rod is used to install the locating pin, which is used to position the test head connection plate. The rectangular waist hole on the connecting rod facilitates adjustment of the installation position of the connecting rod, and thus facilitates adjustment of the position of the locating pin.

[0010] Further preferably, the support plate and the drive shaft are fixedly connected by a flange plate to achieve quick connection of the support plate; the drive shaft is connected to a drive motor to drive the drive shaft to rotate; the support plate is in an inverted L shape to facilitate connection with the test head connection plate.

[0011] Further preferably, the conversion frame is provided with an inner concave cavity, and the drive shaft passes through the inner concave cavity, which is convenient for the installation of the drive shaft and the rotation of the test head connecting plate and the probe station; a plurality of mounting plates are provided on the lower side of the conversion frame for connecting the conversion frame and the probe station.

[0012] Further preferably, the test head connection plate is a rectangular frame structure formed by four rectangular plates, which facilitates the installation of the test head.

[0013] Beneficial effects: The connection structure for the probe station and the test head of the utility model realizes the connection between the probe station and the test head by connecting the support plate and the test head connecting plate, and the connection method is simple and easy; the position of the test head connecting plate is fine-tuned by the adjustment component, and then the position of the test head is precisely controlled to ensure accurate testing of the test head; specifically, by setting the adjustment connecting plate, the first fixed block, the second fixed block, the adjustment screw, the limit screw and the connecting screw, the distance between the first fixed block and the second fixed block can be adjusted by rotating the adjustment screw, and then the position of the adjustment connecting plate relative to the support plate is adjusted, and finally the position of the test head connecting plate and the test head installed thereon is adjusted; the position of the first fixed block after the distance adjustment is realized by the limit screw, that is, it is ensured that the first fixed block does not move after the position adjustment; the adjusted adjustment connecting plate is fixed by the connecting screw; the connection structure of the present application is simple, easy to manufacture and realize, and the installation position of the test head is accurate and easy to adjust, and there is no need to reprocess the connection structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the isometric structure of the connection structure between the probe station and the test head disclosed in an embodiment of the present utility model;

[0015] Figure 2 This is a schematic diagram of the main structure of the connection structure between the probe station and the test head disclosed in an embodiment of the present utility model;

[0016] Figure 3 This is a schematic structural diagram of the adjustment assembly disclosed in an embodiment of the present utility model.

[0017] Figure markings: 1-conversion frame, 2-drive shaft, 3-support plate, 31-limiting groove, 4-adjusting assembly, 41-adjusting connecting plate, 411-connecting hole, 412-rectangular boss, 42-first fixed block, 43-second fixed block, 44-adjusting screw, 45-limiting screw, 46-connecting screw, 5-test head connecting plate, 6-positioning assembly, 61-connecting rod, 62-positioning pin, 7-mounting plate, 8-flange plate. DETAILED DESCRIPTION

[0018] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0019] like Figure 1-3As shown, a connection structure for a probe station and a test head is used to realize the connection between the probe station and the test head. The connection structure includes a conversion frame 1, which is installed on the probe station; a drive shaft 2 is rotatably installed on the conversion frame 1, and the drive shaft 2 is connected to at least two support plates 3, and the support plates 3 are connected to a test head connecting plate 5, and an adjustment component 4 is provided between the support plates 3 and the test head connecting plate 5; the test head connecting plate 5 is used for the installation and connection of the test head, and can be docked with the probe station; the connection between the probe station and the test head is realized by the connection between the support plates 3 and the test head connecting plate 5; the rotation of the drive shaft can drive the support plate 3 to rotate synchronously, and then drive the test head connecting plate 5 to rotate, indirectly realizing the rotation of the test head connected to the test head connecting plate 5, and realizing the precise docking of the test head and the probe station. The adjustment component 4 is used to fine-tune the position of the test head connecting plate 5 to ensure the precise position of the test head connecting plate 5, thereby ensuring the precise installation of the position of the test head, ensuring the precise docking of the test head during testing, and ensuring the test accuracy. The adjustment assembly 4 includes a positioning connection plate 41, which is fixed to the test head connection plate 5. A first fixing block 42 is provided at the end of the positioning connection plate 41 away from the test head connection plate 5, and a second fixing block 43 is provided on the side of the first fixing block 42 away from the test head connection plate 5. The second fixing block 43 is arranged on the support plate 3, and an adjusting screw 44 is connected between the first fixing block 42 and the second fixing block 43. A connecting screw 46 is connected between the positioning connection plate 41 and the support plate 3. The adjustment component 4 can be used to fine-tune the position of the test head connection plate 5 relative to the support plate 3, wherein the adjustment screw 44 can connect the first fixed block 42 and the second fixed block 43 together, and at the same time, by rotating the adjustment screw 44, the distance between the first fixed block 42 and the second fixed block 43 can be adjusted, and then the relative position between the adjustment connection plate 41 connected to the first fixed block 42 and the support plate 3 is locked by the connecting screw 46, that is, the position adjustment of the test head connection plate 5 connected to the adjustment connection plate 41 is achieved, and finally the position adjustment of the test head relative to the probe station is achieved indirectly. By fine-tuning the position of the test head, the precise control of the test head is achieved, thereby ensuring the precise testing of the wafer chip. The connection structure realizes the connection and installation of the test head relative to the probe station, and can be precisely controlled.

[0020] In this embodiment, an adjusting screw 44 slides through the second fixing block 43 and is screwed onto the first fixing block 42, ensuring that when the adjusting screw 44 is turned, the second fixing block 43 remains stationary while the first fixing block 42 moves. A limiting screw 45 is provided on the second fixing block 43, the head of which abuts the first fixing block 42. The second fixing block 43 is screwed onto the limiting screw 45, ensuring that the limiting screw 45 can move relative to the second fixing block 43. After the adjusting screw 44 has adjusted the position of the first fixing block 42, the limiting screw 45 is rotated so that the head of the limiting screw 45 abuts against the first fixing block 42, thereby preventing the first fixing block 42 from shaking or moving, thereby limiting the position of the first fixing block 42. In other words, the relative position between the first fixing block 42 and the second fixing block 43 is adjusted and fixed by the adjusting screw 44 and the limiting screw 45, thereby adjusting and fixing the position between the support plate 3 and the test head connecting plate 5, thereby adjusting the position of the test head relative to the probe station.

[0021] In one solution of the present application, a plurality of connection holes 411 for connecting screws 46 are provided on the positioning connection plate 41, and the connection holes 411 are rectangular waist holes. That is, by providing rectangular waist holes on the positioning connection plate 41, it is ensured that the positioning connection plate 41 can move relative to the support plate 3, thereby realizing the position adjustment of the positioning connection plate 41; and the connection holes 411 with rectangular waist hole structures are not limited to being provided on the positioning connection plate 41, and can also be provided on the support plate 3, and the position adjustment of the positioning connection plate 41 relative to the support plate 3 can also be realized.

[0022] In another embodiment of the present application, the adjustment connecting plate 41 is an L-shaped structure, which facilitates the connection between the test head connecting plate 5 and the support plate 3. One side of the adjustment connecting plate 41 is connected to the test head connecting plate 5, and the other side of the adjustment connecting plate 41 is provided with a rectangular boss 412. The support plate 3 is provided with a limiting groove 31 that matches the rectangular boss 412. The rectangular boss 412 and the limiting groove 31 can limit the installation position of the adjustment connecting plate 41 relative to the support plate 3, facilitating the rapid installation of the adjustment connecting plate 41 and ensuring the accurate installation position of the adjustment connecting plate 41. At the same time, the limiting groove 31 is longer than the rectangular boss 412, facilitating the sliding of the rectangular boss 412 within the limiting groove 31 to achieve position adjustment of the adjustment connecting plate 41. The rectangular boss 412 can also be provided on the support plate 3, and the limiting groove 31 can be provided on the adjustment connecting plate 41. Alternatively, other structures can be used to achieve connection, movable adjustment, and limiting of the adjustment connecting plate 41 and the support plate 3, such as a linear guide structure.

[0023] In another embodiment of the present application, at least one positioning assembly 6 is provided on the side of the test head connecting plate 5 away from the support plate 3, and the rotational positioning of the test head connecting plate 41 is achieved through the positioning assembly 6, ensuring that the position of the test head connecting plate 41 after rotation is accurate, and can be accurately docked with the probe station, thereby achieving docking between the test head and the probe station, and ensuring that the test head accurately detects the wafer chip. Among them, the positioning assembly 6 includes a connecting rod 61, and the end of the connecting rod 61 away from the test head connecting plate 5 is provided with a positioning pin 62, and the end of the connecting rod 61 close to the test head connecting plate 5 is provided with a rectangular waist hole for the screw to pass through. The connection of the positioning pin 62 is achieved by the connecting rod 61, and the positioning of the test head connecting plate 5 is achieved by the positioning pin 62. The rectangular waist hole on the connecting rod 61 is used to adjust the installation position of the connecting rod 61 to ensure that the installation position of the positioning pin 62 is accurate.

[0024] In the solution of the present application, the support plate 3 and the drive shaft 2 are fixedly connected by a flange plate 8 to achieve quick connection of the support plate 3; the drive shaft 2 is connected to a drive motor, which is used to drive the drive shaft 2 to rotate, drive the support plate 3 connected to it to rotate, and finally realize the synchronous rotation of the test head on the test head connecting plate 5; the support plate 3 is in an inverted L shape for easy connection with the test head connecting plate 5.

[0025] In the present application, the converter frame 1 is provided with a concave cavity through which the drive shaft 2 passes. This cavity facilitates support for the drive shaft 2 without hindering the rotation of the test head connection plate 5 and the test head connected thereto. Multiple mounting plates 7 are provided on the lower side of the converter frame 1 for connecting the converter frame 1 to the probe station.

[0026] In the solution of the present application, the test head connection plate 5 is a rectangular frame structure surrounded by four rectangular plates, which facilitates the installation of the test head.

[0027] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A connection structure for a probe station and a test head, characterized by: The invention comprises a conversion frame (1), wherein a driving shaft (2) is rotatably mounted on the conversion frame (1), the driving shaft (2) is connected to at least two support plates (3), the support plates (3) are connected to a test head connecting plate (5), and an adjustment assembly (4) is provided between the support plates (3) and the test head connecting plate (5); the adjustment assembly (4) comprises a position adjustment connecting plate (41), the position adjustment connecting plate (41) is fixed to the test head connecting plate (5), a first fixing block (42) is provided at an end of the position adjustment connecting plate (41) away from the test head connecting plate (5), a second fixing block (43) is provided at a side of the first fixing block (42) away from the test head connecting plate (5), the second fixing block (43) is arranged on the support plate (3), an adjustment screw (44) is connected between the first fixing block (42) and the second fixing block (43), and a connecting screw (46) is connected between the position adjustment connecting plate (41) and the support plate (3).

2. The connection structure between a probe station and a test head according to claim 1, wherein: The adjusting screw (44) slides through the second fixing block (43) and is screwed to the first fixing block (42); a limiting screw (45) is provided on the second fixing block (43); the head of the limiting screw (45) abuts against the first fixing block (42); and the second fixing block (43) is screwed to the limiting screw (45).

3. The connection structure between a probe station and a test head according to claim 1, wherein: The position adjustment connecting plate (41) is provided with a plurality of connecting holes (411) for connecting with screws (46), and the connecting holes (411) are rectangular waist holes.

4. The connection structure between a probe station and a test head according to claim 1, wherein: The adjustment connecting plate (41) is an L-shaped structure, one side of which is connected to the test head connecting plate (5), and the other side of which is provided with a rectangular boss (412), and the support plate (3) is provided with a limiting groove (31) that matches the rectangular boss (412).

5. The connection structure between a probe station and a test head according to claim 1, wherein: At least one positioning assembly (6) is provided on the side of the test head connection plate (5) away from the support plate (3).

6. The connection structure between a probe station and a test head according to claim 5, characterized in that: The positioning assembly (6) comprises a connecting rod (61), the end of the connecting rod (61) away from the test head connecting plate (5) is provided with a positioning pin (62), and the end of the connecting rod (61) close to the test head connecting plate (5) is provided with a rectangular waist hole for a screw to pass through.

7. The connection structure between a probe station and a test head according to claim 1, wherein: The support plate (3) and the drive shaft (2) are fixedly connected via a flange plate (8); the drive shaft (2) is connected to a drive motor; and the support plate (3) is in an inverted L shape.

8. The connection structure between a probe station and a test head according to claim 1, wherein: The conversion frame (1) is provided with an inner concave cavity, the drive shaft (2) passes through the inner concave cavity, and a plurality of mounting plates (7) are provided on the lower side of the conversion frame (1).

9. The connection structure between a probe station and a test head according to claim 1, wherein: The test head connection plate (5) is a rectangular frame structure surrounded by four rectangular plates.

Images