Jig for splitting quartz cover and sealing ring

Abstract

The utility model provides a jig for splitting a quartz cover and a sealing ring. The jig comprises a main body structure, more than two fixing pieces and more than two force applying pieces, the more than two fixing pieces and the more than two force applying pieces are arranged on the main body structure at intervals, the fixing pieces and the force applying pieces can move in the axis direction of the main body structure, and the more than two fixing pieces and the main body structure are used for being fixed to the sealing ring; and the more than two force application pieces are used for applying force to the quartz cover so as to separate the quartz cover from the sealing ring. The jig can be fixed on the sealing ring through the fixing piece and the main body structure; force can be applied to the quartz cover through the force application piece so that the main body structure and the fixing piece can lift the sealing ring, and then the sealing ring can be separated from the quartz cover. The jig has the unexpected effects that the quartz cover and the sealing ring can be quickly disassembled, the equipment maintenance time of a long film machine table is shortened, and the working efficiency of operators is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a jig for separating a quartz cover and a sealing ring. Background Art

[0002] In the semiconductor manufacturing process, a long film machine is needed to process the wafer to form a layer of silicon nitride film on the wafer surface. Figure 1 and Figure 2 As shown, when processing wafers using an existing film growth machine, the wafers need to be placed in a wafer boat, which is placed on a quartz cover 1 (cap), which is placed on a tray. A sealing ring 2 is fixed to the quartz cover 1. The sealing ring 2 is usually made of metal and can be called a metal ring. A first sealing ring 3 is provided between the sealing ring 2 and the quartz cover 1, and a second sealing ring 4 is provided on top of the sealing ring 2. The tray can move up and down with the wafer boat. When film growth is in progress, the tray moves upward, allowing the wafer boat to enter the machine from the bottom. The second sealing ring 4 is sealed against the bottom surface of the machine. After gases such as ammonia and dichlorosilane are introduced into the machine, a silicon nitride film is formed on the wafer. When film growth is completed, the tray descends with the wafer boat, allowing the wafer boat to move from inside the machine to outside.

[0003] However, during the wafer film growth process, the quartz cover 1 is corroded by the reaction gases, causing it to gradually age. Furthermore, a thin film of silicon nitride may also form on the surface of the quartz cover 1. Therefore, equipment maintenance requires the quartz cover 1 and sealing ring 2 to be separated and cleaned or replaced. Currently, this separation is primarily done manually, but long-term machine operation can cause the first sealing ring 3 to age, and adhesion between the quartz cover 1 and sealing ring 2 can make separation difficult. Utility Model Content

[0004] The utility model provides a jig for separating a quartz cover and a sealing ring, so as to solve the technical problem that the quartz cover and the sealing ring are difficult to separate.

[0005] In order to solve the above technical problems, the present invention provides a jig for separating a quartz cover and a sealing ring, wherein the sealing ring is clamped on the quartz cover, and the jig includes a main structure, two or more fixing parts and two or more force-applying parts; the two or more fixing parts and the two or more force-applying parts are respectively arranged on the main structure at intervals, and the fixing parts and the force-applying parts are movable along the axial direction of the main structure, the two or more fixing parts and the main structure are used to be fixed on the sealing ring, and the two or more force-applying parts are used to apply force to the quartz cover to separate the quartz cover and the sealing ring.

[0006] Optionally, the sealing ring is in the shape of a circular ring, the main structure includes two engaging parts, the engaging parts are in the shape of a semicircular ring, a step is provided at the bottom of the engaging parts, and the step and the bottom of the fixing part are used to clamp the sealing ring.

[0007] Optionally, the mating ends of the two engaging parts are provided with a plug-in joint, and the plug-in joint is provided with an internal thread. The two engaging parts are detachably connected by bolts, the plug-in joint and the internal thread.

[0008] Optionally, the plug connector includes two connecting plates arranged in parallel.

[0009] Optionally, the main structure also includes more than two brackets, and the brackets include vertical members and horizontal members; one end of the vertical member is connected to the locking member, and the other end of the vertical member is vertically connected to one end of the horizontal member; the extension line of one end of the horizontal member pointing to the other end of the horizontal member is vertically connected to the axes of the two locking members; each of the horizontal members is provided with a first threaded hole and a second threaded hole, the first threaded hole is close to one end of the horizontal member, and the second threaded hole is close to the other end of the horizontal member; the middle part of the fixing member is provided with a first external thread that matches the first threaded hole; the middle part of the force-applying member is provided with a second external thread that matches the second threaded hole.

[0010] Optionally, a first hexagonal groove for rotation is provided on the top of the fixing member.

[0011] Optionally, a first rubber pad for dispersing pressure is provided at the bottom of the fixing member.

[0012] Optionally, a second hexagonal groove for rotation is provided on the top of the force applying member.

[0013] Optionally, a second rubber pad for dispersing pressure is provided at the bottom of the force-applying member.

[0014] Optionally, the number of the fixing members and the number of the force-applying members are four respectively, and the four fixing members and the four force-applying members are respectively and evenly arranged on the main structure at intervals.

[0015] This utility model provides a jig for separating a quartz cover and a sealing ring. The jig comprises a main structure, two or more fixing members, and two or more force-applying members. The fixing members and the main structure secure the jig to the sealing ring. The force-applying members apply force to the quartz cover, lifting the main structure and fixing members with the sealing ring, thereby separating the sealing ring from the quartz cover. This jig has the unexpected effect of quickly separating the quartz cover and sealing ring, reducing equipment maintenance time on long-film machines and improving operator efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a quartz cover in the prior art.

[0017] Figure 2 This is a schematic diagram of the structure of a quartz cover and a sealing ring after they are matched in the prior art.

[0018] Figure 3 This is a structural schematic diagram of a jig for separating a quartz cover and a sealing ring provided by an embodiment of the present invention, when the jig is initially installed on the sealing ring.

[0019] Figure 4 yes Figure 3 Schematic diagram of the structure in which the sealing ring is fixed after the fixing part moves downward.

[0020] Figure 5 yes Figure 4 Schematic diagram of the structure in which the force-applying member moves downward and just contacts the quartz cover.

[0021] Figure 6 yes Figure 5 Schematic diagram of the structure in which the force-applying member continues to move downward and the quartz cover and the sealing ring are separated.

[0022] Figure 7 yes Figure 6 Schematic top view of .

[0023] Figure 8 This is a structural diagram of a plug-in connector provided by one embodiment of the utility model.

[0024] Figure 9 yes Figure 8 Schematic diagram of the structure after the plug-in connector is mated.

[0025] Figure 10 It is a structural schematic diagram of a fixing member provided in one embodiment of the present utility model.

[0026] Figure 11 This is a structural schematic diagram of a force-applying member provided in one embodiment of the present utility model.

[0027] [Description of reference numerals is as follows]:

[0028] Quartz cover-1, sealing ring-2, first sealing ring-3, second sealing ring-4;

[0029] Main structure-11, fixing member-12, force applying member-13;

[0030] Snap-on part 111, bracket 112

[0031] Connector-1111, internal thread-1112, connecting plate-1113;

[0032] Vertical piece-1121, horizontal piece-1122;

[0033] First external thread-121, first rubber pad-122;

[0034] Second external thread-131, second rubber pad-132. DETAILED DESCRIPTION

[0035] To further clarify the objectives, advantages, and features of the present invention, the following describes in further detail a jig for separating a quartz cover and a sealing ring, as provided herein, with reference to the accompanying drawings. It should be noted that the drawings are highly simplified and not to exact scale, and are intended solely to facilitate and clearly illustrate the objectives of the present invention.

[0036] In the description of this utility model, the terms "first," "second," and other qualifiers are added for convenience of description and reference and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, features qualified with qualifiers such as "first," "second," and the like may explicitly or implicitly include one or more of such features.

[0037] like Figure 3-Figure 7 As shown, this embodiment provides a jig for separating a quartz cover 1 and a sealing ring 2, wherein the sealing ring 2 is clamped on the quartz cover 1, and the jig includes a main structure 11, two or more fixing members 12 and two or more force members 13; the two or more fixing members 12 and the two or more force members 13 are respectively arranged on the main structure 11 at intervals, and the fixing members 12 and the force members 13 are movable along the axial direction of the main structure 11, the two or more fixing members 12 and the main structure 11 are used to be fixed on the sealing ring 2, and the two or more force members 13 are used to apply force to the quartz cover 1 to separate the quartz cover 1 and the sealing ring 2.

[0038] like Figure 3-Figure 6 As shown, the method for using the jig for separating the quartz cover 1 and the sealing ring 2 provided in this embodiment includes four steps: the first step is as follows: Figure 3 As shown, the main structure 11 of the fixture is placed on the sealing ring 2; the second step is as shown in FIG. Figure 4 As shown, move the fixing member 12 downward so that the fixing member 12 and the main structure 11 clamp the sealing ring 2; the third step, as shown Figure 5 As shown, move the force member 13 downward so that the force member 13 contacts the quartz cover 1; the fourth step, as shown in FIG. Figure 6 As shown, the force applying member 13 is continuously moved downward, so that the main structure 11 and the fixing member 12 are lifted up with the sealing ring 2 , thereby separating the sealing ring 2 from the quartz cover 1 .

[0039] This embodiment provides a jig for separating a quartz cover 1 and a sealing ring 2. The jig comprises a main structure 11, two or more fixing members 12, and two or more force-applying members 13. The fixing members 12 and the main structure 11 secure the jig to the sealing ring 2. The force-applying members 13 apply force to the quartz cover 1, lifting the main structure 11 and fixing members 12 with the sealing ring 2, thereby separating the sealing ring 2 from the quartz cover 1. This jig has the unexpected benefit of rapidly separating the quartz cover 1 and the sealing ring 2, reducing equipment maintenance time on a long-film machine and improving operator efficiency.

[0040] Optional, such as Figure 3 and Figure 7 As shown, the sealing ring 2 is annular in shape, and the main structure 11 includes two engaging members 111. The engaging members 111 are semi-annular in shape, and a step is provided at the bottom of the engaging members 111. The step and the bottom of the fixing member 12 are used to clamp the sealing ring 2. The quartz cover 1 is generally truncated in shape, with a cylinder of smaller diameter on top and a cylinder of larger diameter on the bottom, and the sealing ring 2 is clamped on the large cylinder at the bottom. The two engaging members 111 can be clamped on the side and bottom surfaces of the sealing ring 2, and then pressed against the top surface of the sealing ring 2 by the fixing member 12, thereby clamping the sealing ring 2. In other embodiments, the shape of the engaging members 111 can be adjusted according to the shape of the sealing ring 2.

[0041] Optional, such as Figure 7-Figure 9 As shown, the mating ends of the two engaging members 111 are provided with a plug connector 1111, and the plug connector 1111 is provided with an internal thread 1112. The two engaging members 111 are detachably connected by a bolt, the plug connector 1111, and the internal thread 1112. When the engaging members 111 need to be assembled, the bolt is screwed into the internal thread 1112 on the plug connector 1111 to connect and fix the two plug connectors 1111. When the engaging members 111 need to be disassembled, the bolt is unscrewed. This facilitates the installation and disassembly of the engaging members 111 and improves the firmness of the connection between the two plug connectors 1111. In other embodiments, the two engaging members 111 can also be connected by mortise and tenon or the like.

[0042] Optional, such as Figure 8 As shown, the plug connector 1111 includes two parallel connecting plates 1113. When the connecting plates 1113 are plugged into each other, the connection strength of the two plug connectors 1111 can be improved. In other embodiments, the plug connector 1111 can include three connecting plates 1113.

[0043] Optional, such as Figure 3 、 Figure 4 、 Figure 7、 Figure 10 and Figure 11 As shown, the main structure 11 also includes more than two brackets 112, and the brackets 112 include a vertical member 1121 and a horizontal member 1122; one end of the vertical member 1121 is connected to the engaging member 111, and the other end of the vertical member 1121 is perpendicularly connected to one end of the horizontal member 1122; the extension line of one end of the horizontal member 1122 pointing to the other end of the horizontal member 1122 is perpendicularly connected to the axis of the two engaging members 111; each of the horizontal members 1122 is provided with a first threaded hole and a second threaded hole, the first threaded hole is close to one end of the horizontal member 1122, and the second threaded hole is close to the other end of the horizontal member 1122; the middle part of the fixing member 12 is provided with a first external thread 121 that matches the first threaded hole; the middle part of the force applying member 13 is provided with a second external thread 131 that matches the second threaded hole. The fixing member 12 can move up and down through the first threaded hole, thereby clamping or loosening the sealing ring 2. The force applying member 13 can move up and down through the second threaded hole, thereby applying force to the quartz cover 1 to separate the quartz cover 1 and the sealing ring 2. In other embodiments, each fixing member 12 and force applying member 13 can be respectively configured with a bracket 112.

[0044] Optional, reference Figure 10 As shown, the top of the fixing member 12 is provided with a first hexagonal groove for rotation. Figure 4 and Figure 10 As shown, the first hexagonal groove can be used to easily rotate the fixing member 12 so that the fixing member 12 can move up and down relative to the sealing ring 2. In other embodiments, the top of the fixing member 12 can be provided with a slotted groove or a plum blossom groove for rotation.

[0045] Optional, such as Figure 10 As shown, a first rubber pad 122 for dispersing pressure is provided at the bottom of the fixing member 12. Figure 4 and Figure 10 As shown, the first rubber pad 122 can distribute the pressure applied by the fixing member 12 to the sealing ring 2 more evenly, preventing the sealing ring 2 from being deformed by compression. The first rubber pad 122 can be connected to the middle portion of the fixing member 12 via a bearing. In this way, when the top portion of the fixing member 12 is rotated, the first rubber pad 122 only moves up and down without rotating, thereby reducing friction between the first rubber pad 122 and the sealing ring 2. In other embodiments, a plastic pad can be provided at the bottom of the fixing member 12 to distribute the pressure.

[0046] Optional, reference Figure 11 As shown, the top of the force applying member 13 is provided with a second hexagonal groove for rotation. Figure 5 and Figure 11As shown, the second inner hexagonal groove can be used to easily rotate the force applying member 13 so that the force applying member 13 moves up and down relative to the quartz cover 1. In other embodiments, the top of the force applying member 13 can be provided with a straight groove or a plum blossom groove for rotation.

[0047] Optional, such as Figure 11 As shown, a second rubber pad 132 for dispersing pressure is provided at the bottom of the force applying member 13. Figure 5 and Figure 11 As shown, the second rubber pad 132 can distribute the pressure applied by the force-applying member 13 to the quartz cover 1 more evenly, preventing damage to the quartz cover 1. The second rubber pad 132 can be connected to the middle portion of the force-applying member 13 via a bearing. This allows the second rubber pad 132 to move up and down without rotating when the top portion of the force-applying member 13 is rotated, thereby reducing friction between the second rubber pad 132 and the quartz cover 1. In other embodiments, a plastic pad can be provided at the bottom of the force-applying member 13 to distribute the pressure.

[0048] Optional, Figure 6 and Figure 7 As shown, there are four fixing members 12 and four force-applying members 13, respectively. These four fixing members 12 and four force-applying members 13 are spaced and evenly arranged on the main structure 11. The four fixing members 12 are spaced and evenly distributed, which can more evenly distribute the pressure on the sealing ring 2. The four force-applying members 13 are spaced and evenly distributed, which can more evenly distribute the pressure on the quartz cover 1.

[0049] In summary, the present invention provides a jig for separating a quartz cover 1 and a sealing ring 2, comprising a main structure 11, two or more fixing members 12, and two or more force-applying members 13. The jig is secured to the sealing ring 2 via the fixing members 12 and the main structure 11. The force-applying members 13 apply force to the quartz cover 1, causing the main structure 11 and fixing members 12 to lift the sealing ring 2 upward, thereby separating the sealing ring 2 from the quartz cover 1. This jig has the unexpected advantage of rapidly separating the quartz cover 1 and the sealing ring 2, reducing equipment maintenance time on a long-film machine and improving operator efficiency.

[0050] The above description is only a description of the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art based on the above disclosure shall fall within the scope of protection of the present invention.

Claims

1. A jig for separating a quartz cover and a sealing ring, wherein the sealing ring is clamped on the quartz cover, characterized in that: The fixture includes a main structure, two or more fixing parts and two or more force-applying parts; the two or more fixing parts and the two or more force-applying parts are respectively arranged on the main structure at intervals, and the fixing parts and the force-applying parts are movable along the axial direction of the main structure. The two or more fixing parts and the main structure are used to be fixed on the sealing ring, and the two or more force-applying parts are used to apply force to the quartz cover to separate the quartz cover and the sealing ring.

2. A jig for separating a quartz cover and a sealing ring according to claim 1, characterized in that: The sealing ring is in the shape of a circular ring. The main structure includes two engaging parts. The engaging parts are in the shape of a semicircular ring. A step is provided at the bottom of the engaging parts. The step and the bottom of the fixing part are used to clamp the sealing ring.

3. A jig for separating a quartz cover and a sealing ring according to claim 2, characterized in that: The mating ends of the two engaging members are provided with a butt joint, and the butt joint is provided with an internal thread. The two engaging members are detachably connected via bolts, the butt joint and the internal thread.

4. A jig for separating a quartz cover and a sealing ring as claimed in claim 3, characterized in that: The plug-in connector includes two connecting plates arranged in parallel.

5. The jig for separating a quartz cover and a sealing ring according to claim 2, characterized in that: The main structure also includes more than two brackets, and the brackets include vertical members and horizontal members; one end of the vertical member is connected to the locking member, and the other end of the vertical member is vertically connected to one end of the horizontal member; the extension line of one end of the horizontal member pointing to the other end of the horizontal member is vertically connected to the axes of the two locking members; each of the horizontal members is provided with a first threaded hole and a second threaded hole, the first threaded hole is close to one end of the horizontal member, and the second threaded hole is close to the other end of the horizontal member; the middle part of the fixing member is provided with a first external thread that matches the first threaded hole; the middle part of the force-applying member is provided with a second external thread that matches the second threaded hole.

6. A jig for separating a quartz cover and a sealing ring according to claim 5, characterized in that: The top of the fixing piece is provided with a first hexagonal groove for rotation.

7. The jig for separating a quartz cover and a sealing ring according to claim 5, characterized in that: A first rubber pad for dispersing pressure is provided at the bottom of the fixing member.

8. The jig for separating a quartz cover and a sealing ring according to claim 5, characterized in that: A second hexagonal groove for rotation is provided on the top of the force applying member.

9. The jig for separating a quartz cover and a sealing ring according to claim 5, characterized in that: A second rubber pad for dispersing pressure is provided at the bottom of the force applying member.

10. The jig for separating a quartz cover and a sealing ring according to claim 1, characterized in that: The number of the fixing members and the number of the force applying members are four respectively, and the four fixing members and the four force applying members are respectively and evenly arranged on the main structure at intervals.

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