Microwave plasma equipment with compressed air cooling function

Abstract

The utility model provides microwave plasma equipment with a compressed air cooling function, which comprises an equipment body and an air cooling antenna which penetrates through the top wall of the equipment body, extends into a coupling cavity and is used for conveying cooling compressed air, the bottom of the air cooling antenna is open, and a quartz microwave window located under the air cooling antenna is arranged in the coupling cavity. A plurality of heat dissipation through holes, an air inlet pipe, an air outlet, a water cooling pipe, a water inlet pipe, a water return pipe, a stirring shaft, stirring blades, a driving module and an air cooling auxiliary module are distributed in the circumferential direction of the coupling cavity. According to the microwave plasma equipment with the compressed air cooling function, basic requirements of people can be met, high temperature in the cavity can be effectively cooled in time through heat exchange by means of the cooling compressed air, damage to the quartz microwave window is avoided, and the service life of the microwave plasma equipment is prolonged. And the cooling effect of the cooling water in the water cooling structure can be fully exerted, so that the cooling effect of the coupling cavity is improved, and waste of the cooling effect of the cooling water is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of microwave plasma processing devices, in particular to a microwave plasma device with compressed air cooling. Background Art

[0002] In microwave plasma chemical vapor deposition equipment, the cylindrical coupling cavity structure was a commonly used cavity type in the early days. The coupling cavity is usually equipped with a quartz microwave window located directly below the air-cooled antenna, and there are several heat dissipation holes distributed around the coupling cavity.

[0003] During the operation of the device, people usually cool down the coupling cavity and the quartz window by passing cooling compressed air into the coupling cavity and the quartz window, and on this basis, the coupling cavity is often further cooled down by a water cooling structure. However, the water cooling structure adopted is often to cool down the quartz window by cooperating with a tubular water cooling structure and cooling water statically filled in the water cooling structure. Since the cooling water is in a static state in the tubular water cooling structure, the cooling effect of the cooling water near the outer periphery of the inner wall of the tubular water cooling structure can be fully and efficiently exerted, while the cooling effect of the cooling water inside the inner wall of the tubular water cooling structure cannot be fully and efficiently exerted, so the cooling water needs to be replaced, which easily leads to a high frequency of cooling water replacement and also causes waste of cooling water. Utility Model Content

[0004] In view of this, the utility model aims to address the shortcomings of the existing technology and provide a microwave plasma device with compressed air cooling, which not only meets people's basic needs, but also uses the cooling compressed air to timely and effectively cool the high temperature in the cavity through heat exchange, avoiding damage to the quartz microwave window, and can fully exert the cooling effect of the cooling water in the water-cooling structure, thereby improving the cooling effect of the coupled cavity and avoiding the waste of the cooling effect of the cooling water.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: a microwave plasma device with compressed air cooling, comprising a device body and an air-cooled antenna that penetrates the top wall of the device body and extends to the bottom opening in the coupling cavity for conveying cooling compressed air, a quartz microwave window is provided in the coupling cavity and is located directly below the air-cooled antenna, and a plurality of heat dissipation holes are distributed circumferentially on the coupling cavity, an air inlet pipe is provided at the top side end of the air-cooled antenna, an air outlet is provided at the bottom of the air-cooled antenna, and a water-cooled pipe is provided inside the air-cooled antenna through multiple cross bars, an upper end of the water-cooled pipe is provided at the side of the upper end, a return water pipe that passes through the air-cooled antenna and upwardly passes through the top wall of the device body is provided at the bottom of the water-cooled pipe, a stirring shaft is vertically penetrated and rotatably provided at the top of the water-cooled pipe, and a stirring blade that is compatible with the water-cooled pipe is provided at the side end of the stirring shaft, a driving module for rotating the stirring shaft is provided on the device body, and an air-cooling auxiliary module is also provided at the bottom of the air-cooled antenna.

[0006] As a further improvement of the present invention, a bearing is provided on the top of the water-cooling tube, the upper end of the stirring shaft is connected to the inner ring of the bearing, and a through hole adapted to the stirring shaft is provided on the top of the water-cooling tube.

[0007] As a further improvement of the present invention, the driving module includes a fixed base vertically arranged on the top of the equipment body, a driving motor arranged on the fixed base, a driving gear arranged on the output shaft of the driving motor, and a driven gear meshing with the driving gear arranged at the upper end of the stirring shaft.

[0008] As a further improvement of the present invention, an extension plate is provided on the bottom side of the fixing seat, and a fixing bolt for screwing and fixing with the equipment body is provided on the extension plate. A threaded fixing hole adapted to the fixing bolt is provided on the top of the equipment body.

[0009] As a further improvement of the present invention, the air-cooling auxiliary module includes a blowing hood arranged at the bottom of the air-cooled antenna and adapted to the bottom of the coupling cavity. A blowing cavity is arranged inside the blowing hood, and a plurality of blowing holes connected to the blowing cavity are arranged at the bottom of the blowing hood.

[0010] As a further improvement of the present invention, a control valve is further provided at one end of the return pipe close to the air-cooled antenna.

[0011] As a further improvement of the present invention, the plurality of blowing holes are all in the shape of a cone with a larger upper portion and a smaller lower portion, and a reinforcing rod is further provided between the blowing cover and the inner wall of the coupling cavity.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0013] First, users can introduce cooling compressed air into the air-cooled antenna through the air inlet pipe and blow it out from the air outlet. The cold air will carry away the heat in the air-cooled antenna as it flows in the air-cooled antenna. Then the cold air will blow onto the adaptation window, carry away the heat on the quartz window, and leave the interior of the device body through multiple heat dissipation holes, thereby achieving cooling of the air-cooled antenna and quartz window.

[0014] Secondly, at the same time, the user can add cooling water to the water-cooling pipe through the water inlet pipe. The cooling water will take away the heat in the antenna body and the coupling cavity through the water-cooling pipe. At the same time, the driving module can be used to make the stirring shaft and stirring blades stir the cooling water in the water-cooling pipe to keep the temperature of the cooling water balanced, so that the cooling effect of the cooling water can be fully exerted. After that, it is only necessary to open the control valve and start the return water pump to pump the cooling water out of the water-cooling pipe through the return water pipe, and then close the control valve and the return water pump and add the cooling water back to the return water pipe.

[0015] Third, the control valve can prevent cooling water from entering the return pipe when it does not need to be drained.

[0016] Fourthly, because the multiple blowing holes are all conical with a larger top and a smaller bottom, the temperature of the cold air blown out can be lower, thereby better cooling the quartz window. The strengthening rod can increase the connection firmness between the blowing cover and the inner wall of the coupling cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0018] Figure 1 It is a structural diagram of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the device body, coupling cavity, air-cooled antenna, air outlet, 108, water-cooling pipe, crossbar, return pipe, and control valve of the utility model;

[0020] Figure 3 This is a structural diagram of the device body, air-cooled antenna, air inlet pipe, water-cooling pipe, water inlet pipe, water return pipe, and through hole of the utility model;

[0021] Figure 4 This is a structural diagram of the air-cooling auxiliary module of the present utility model;

[0022] Figure 5 This is a structural diagram of the stirring shaft, stirring blades, and driven gear of the utility model.

[0023] In the figure: 101, equipment body; 102, coupling cavity; 103, air-cooled antenna; 104, quartz microwave window; 105, heat dissipation through-hole; 106, air inlet pipe; 107, air outlet; 108, water-cooling pipe; 109, cross bar; 110, water inlet pipe; 111, water return pipe; 112, stirring shaft; 113, stirring blade; 114, bearing; 115, through-hole; 116, control valve; 201, fixing seat; 202, driving motor; 203, driving gear; 204, driven gear; 205, extension plate; 206, fixing bolt; 301, blowing hood; 302, blowing hole; 303, reinforcing rod. DETAILED DESCRIPTION

[0024] To better understand the present invention, the following examples further illustrate the present invention. However, the present invention is not limited to the following examples. In the following description, numerous specific details are provided to provide a more thorough understanding of the present invention. However, it is obvious to those skilled in the art that the present invention can be practiced without one or more of these details.

[0025] like Figure 1 、 2 , 3, 4, and 5, a microwave plasma device with compressed air cooling comprises a device body 101 and an air-cooled antenna 103 with a bottom opening that penetrates the top wall of the device body 101 and extends into a coupling cavity 102 for conveying cooling compressed air. A quartz microwave window 104 is provided in the coupling cavity 102 directly below the air-cooled antenna 103. The coupling cavity 102 has a plurality of heat dissipation holes 115105 distributed circumferentially. An air inlet pipe 106 is provided at the top side end of the air-cooled antenna 103, an air outlet 107 is provided at the bottom of the air-cooled antenna 103, and the interior of the air-cooled antenna 103 is also provided with a plurality of cross bars. 109 is provided with a water-cooling pipe 108, the upper end of which extends above the air-cooled antenna 103. A water inlet pipe 110 is provided on the side of the upper end of the water-cooling pipe 108. A return pipe 111 is provided at the bottom of the water-cooling pipe 108, which passes through the air-cooled antenna 103 and upward through the top wall of the device body 101. A stirring shaft 112 is vertically penetrated and rotatably provided at the top of the water-cooling pipe 108. The side end of the stirring shaft 112 is provided with a stirring blade 113 that is compatible with the water-cooling pipe 108. The device body 101 is provided with a drive module for rotating the stirring shaft 112. An air-cooling auxiliary module is also provided at the bottom of the air-cooled antenna 103. The upper end of the return pipe 111 is also connected to a water pump, which is provided with a return water pump.

[0026] like Figure 1 、 3As shown, a bearing 114 is provided at the top of the water-cooling tube 108 , the upper end of the stirring shaft 112 is connected to the inner ring of the bearing 114 , and a through hole 115 adapted to the stirring shaft 112 is provided at the top of the water-cooling tube 108 .

[0027] like Figure 1 、 5 As shown, the driving module includes a fixing base 201 vertically arranged on the top of the equipment body 101, a driving motor 202 arranged on the fixing base 201, a driving gear 203 is arranged on the output shaft of the driving motor 202, and a driven gear 204 meshing with the driving gear 203 is arranged at the upper end of the stirring shaft 112.

[0028] like Figure 1 As shown, an extension plate 205 is provided at the bottom side end of the fixing seat 201, and a fixing bolt 206 for screwing and fixing with the equipment body 101 is provided on the extension plate 205, and a threaded fixing hole adapted to the fixing bolt 206 is provided at the top of the equipment body 101.

[0029] like Figure 4 As shown, the air-cooling auxiliary module includes a blowing hood 301 arranged at the bottom of the air-cooled antenna 103 and adapted to the bottom of the coupling cavity 102. A blowing cavity is arranged inside the blowing hood 301, and a plurality of blowing holes 302 connected to the blowing cavity are arranged at the bottom of the blowing hood 301.

[0030] like Figure 2 As shown, a control valve 116 is further provided at one end of the return pipe 111 close to the air-cooled antenna 103. The control valve 116 can prevent cooling water from entering the return pipe 111 when drainage is not required.

[0031] like Figure 4 As shown, the plurality of blowing holes 302 are all in a conical cylindrical shape with a larger top and a smaller bottom, and a reinforcing rod 303 is further provided between the blowing cover 301 and the inner wall of the coupling cavity 102 .

[0032] The user can introduce the cooling compressed air into the air-cooled antenna 103 through the air inlet pipe 106 and blow it out from the air outlet 107. The cold air will carry away the heat in the air-cooled antenna 103 during the flow in the air-cooled antenna 103. Then the cold air will blow onto the adaptation window, carry away the heat on the quartz window, and leave the interior of the device body 101 through multiple heat dissipation holes, thereby achieving cooling of the air-cooled antenna 103 and the quartz window.

[0033] At the same time, the user can add cooling water to the water-cooling pipe 108 through the water inlet pipe 110. The cooling water will take away the heat in the antenna body and the coupling cavity 102 through the water-cooling pipe 108. At the same time, the driving module can be used to make the stirring shaft 112 and the stirring blade 113 stir the cooling water in the water-cooling pipe 108 so that the temperature of the cooling water remains balanced, thereby allowing the cooling effect of the cooling water to be fully exerted. After that, it is only necessary to open the control valve 116 and start the return water pump to pump the cooling water in the water-cooling pipe 108 out through the return water pipe 111, and then close the control valve 116 and the return water pump and add the cooling water to the new cold water pipe in the return water pipe 111.

[0034] Because the multiple blowing holes 302 are all conical cylindrical with a larger top and a smaller bottom, the temperature of the cold air blown out can be lower, thereby better cooling the quartz window. The reinforcing rod 303 can increase the connection firmness between the blowing cover 301 and the inner wall of the coupling cavity 102.

[0035] The above is a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A microwave plasma device with compressed air cooling, comprising a device body (101) and an air-cooled antenna (103) penetrating the top wall of the device body (101) and extending into a coupling cavity (102) with a bottom opening for conveying cooling compressed air, a quartz microwave window (104) located directly below the air-cooled antenna (103) is provided in the coupling cavity (102), a plurality of heat dissipation holes (115) (105) are distributed circumferentially around the coupling cavity (102), an air inlet pipe (106) is provided at the top side end of the air-cooled antenna (103), and an air outlet (107) is provided at the bottom of the air-cooled antenna (103), characterized in that: The interior of the air-cooled antenna (103) is also provided with a water-cooling pipe (108) whose upper end extends to the top of the air-cooled antenna (103) through a plurality of cross bars (109); a water inlet pipe (110) is provided on the side of the upper end of the water-cooling pipe (108); a return water pipe (111) is provided at the bottom of the water-cooling pipe (108) and passes through the air-cooled antenna (103) and upwards through the top wall of the device body (101); a stirring shaft (112) is vertically penetrated and rotatably provided at the top of the water-cooling pipe (108); a stirring blade (113) adapted to the water-cooling pipe (108) is provided at the side end of the stirring shaft (112); a driving module for driving the stirring shaft (112) to rotate is provided on the device body (101); and an air-cooling auxiliary module is also provided at the bottom of the air-cooled antenna (103).

2. The microwave plasma device with compressed air cooling according to claim 1, characterized in that: A bearing (114) is provided at the top of the water-cooling tube (108), the upper end of the stirring shaft (112) is connected to the inner ring of the bearing (114), and a through hole (115) adapted to the stirring shaft (112) is provided at the top of the water-cooling tube (108).

3. The microwave plasma device with compressed air cooling according to claim 2, characterized in that: The driving module comprises a fixing seat (201) vertically arranged on the top of the device body (101), a driving motor (202) arranged on the fixing seat (201), a driving gear (203) arranged on the output shaft of the driving motor (202), and a driven gear (204) meshing with the driving gear (203) arranged at the upper end of the stirring shaft (112).

4. The microwave plasma device with compressed air cooling according to claim 3, characterized in that: An extension plate (205) is provided at the bottom side end of the fixing seat (201), and a fixing bolt (206) for screwing and fixing with the device body (101) is provided on the extension plate (205), and a threaded fixing hole adapted to the fixing bolt (206) is provided at the top of the device body (101).

5. The microwave plasma device with compressed air cooling according to claim 4, characterized in that: The air-cooling auxiliary module comprises a blowing hood (301) arranged at the bottom of the air-cooling antenna (103) and adapted to the bottom of the coupling cavity (102); a blowing cavity is arranged inside the blowing hood (301); and a plurality of blowing holes (302) connected to the blowing cavity are arranged at the bottom of the blowing hood (301).

6. The microwave plasma device with compressed air cooling according to claim 5, characterized in that: A control valve (116) is also provided at one end of the return water pipe (111) close to the air-cooled antenna (103).

7. The microwave plasma device with compressed air cooling according to claim 6, characterized in that: The plurality of blowing holes (302) are all in the shape of a cone with a larger top and a smaller bottom. A reinforcing rod (303) is further provided between the blowing cover (301) and the inner wall of the coupling cavity (102).

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