Multi-channel parallel test equipment

Abstract

The utility model discloses multichannel parallel test equipment, which relates to the technical field of semiconductor device detection, and comprises two groups of side plates, the inner walls of the two groups of side plates are connected with a conveying belt in a matched manner, the side ends of the side plates are fixedly connected with a driver, the driver is connected with the conveying belt in a matched manner, and the test equipment is fixedly connected with the top ends of the side plates. The side end of the test equipment is fixedly connected with a display screen, the bottom end of the test equipment is fixedly connected with a ray device, two ends of the test equipment are respectively matched and connected with plugging assemblies, the display screen is respectively matched with the driver and the ray device, and the limiting assembly is arranged at the side end of the side plate and is matched with the test equipment. The ray device and the conveying belt are used in cooperation, the time-consuming and labor-consuming phenomenon that in the prior art, workers need to conduct detection one by one is avoided, the workers can place a plurality of semiconductor devices on the conveying belt side by side at the same time, and the efficiency of the ray device for detecting the semiconductor devices is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor device detection, in particular to multi-channel parallel testing equipment. Background Art

[0002] Semiconductor devices are electronic components manufactured based on semiconductor materials. They have conductivity properties between those of conductors and insulators. The conductivity of semiconductor devices can be significantly changed by external factors such as doping, electric fields, and temperature. These devices play a vital role in modern electronic technology.

[0003] In the prior art, semiconductor devices are often inspected using X-ray equipment. Workers place the semiconductor devices in the inspection box of the equipment, then close the door of the inspection box. The X-rays in the inspection box scan the semiconductor devices, and the scanned data is transmitted to the data analyzer for processing. The final data is displayed on the monitor.

[0004] However, when inspecting a large number of semiconductor devices, workers need to constantly place the semiconductor devices one by one in the inspection box for inspection. This operation is time-consuming and labor-intensive, affecting the efficiency of semiconductor device inspection and thus affecting the effectiveness of the X-ray equipment. Utility Model Content

[0005] The purpose of the present utility model is to provide a multi-channel parallel testing device to solve the technical problem in the prior art that when testing a large number of semiconductor devices, workers are required to constantly place the semiconductor devices one by one in a test box for testing, which is a time-consuming and labor-intensive operation, affecting the efficiency of testing the semiconductor devices and thus affecting the use effect of the X-ray equipment.

[0006] The technical problem to be solved by the present invention can be achieved through the following technical solutions:

[0007] Multi-channel parallel test equipment, including:

[0008] Side panels, the side panels are provided with two groups, the inner walls of the two groups of side panels are cooperatively connected to the conveyor belt, the side ends of the side panels are fixedly connected to the driving machine, and the driving machine is cooperatively connected to the conveyor belt;

[0009] A test device, wherein the test device is fixedly connected to the top of the side panel, a display screen is fixedly connected to the side end of the test device, a ray detector is fixedly connected to the bottom end of the test device, and blocking components are respectively connected to both ends of the test device, and the display screen is respectively matched with the driving motor and the ray detector;

[0010] A limiting component is provided at the side end of the side plate, and the limiting component cooperates with the testing equipment.

[0011] As a further solution of the present invention: the limit assembly includes: an adjusting rod and a circular plate, the adjusting rod cooperates with the inner wall of the side plate, the side end of the adjusting rod is fixedly connected to the limit plate, the circular plate is provided with several groups and an adjusting hole is opened axially, the inner wall of the adjusting hole is threadedly connected to the adjusting rod, the diameter of the limit plate is larger than the diameter of the adjusting rod and is fitly connected to the outer wall of the side plate.

[0012] As a further solution of the present invention: limiting holes are respectively provided at both ends of the circular plate, the inner wall of the limiting hole is slidably connected to a limiting rod, and both ends of the limiting rod are respectively fixedly connected to the side plates.

[0013] As a further solution of the present invention: the sealing assembly includes: a sealing plate, a control seat, a threaded rod and a servo motor, the sealing plate is slidingly connected to the outer wall of the test equipment, the side end of the sealing plate is fixedly connected to the control seat, the bottom end of the sealing plate is fixedly connected with a sealing gasket, the inner wall of the control seat is threadedly connected to the threaded rod, the top of the threaded rod is fixedly connected to the servo motor, the servo motor is fixedly connected to the top of the test equipment, and the sealing gasket cooperates with the conveyor belt.

[0014] As a further solution of the present invention: positioning grooves are respectively provided on both sides of the side ends of the testing device, a positioning seat is clamped and connected in the positioning groove and is slidably connected to the positioning seat, and the positioning seat is fixedly connected to the side end of the blocking plate.

[0015] As a further solution of the present invention: a control tube is fixedly connected to the top of the control seat, a threaded hole is longitudinally opened in the control tube and passes through the interior of the control seat, the threaded hole is threadedly connected to the threaded rod, and a positioning plate is fixedly connected to the bottom end of the threaded rod, and the diameter of the positioning plate is larger than the diameter of the threaded rod.

[0016] Beneficial effects of the utility model:

[0017] 1. The staff can place a large number of semiconductor devices on the conveyor belt in sequence. The driving machine drives the conveyor belt to rotate, thereby realizing the effect of the conveyor belt automatically conveying the semiconductor devices. When the semiconductor devices are conveyed to the ray detector fixed at the bottom of the test equipment through the conveyor belt, the display screen controls the driving machine to stop driving the conveyor belt to move, and the blocking component blocks both ends of the ray detector. Then the ray detector detects the semiconductor devices by emitting X-rays. The ray detector transmits the detection data to the display screen for processing and display. The ray detector and the conveyor belt are used together to avoid the time-consuming and labor-intensive phenomenon of the existing technology that requires staff to detect one by one. The blocking component can prevent X-rays from causing harm to staff.

[0018] 2. Workers can place multiple semiconductor devices side by side on the conveyor belt at the same time, further improving the efficiency of the ray machine in detecting semiconductor devices. Workers separate multiple semiconductor devices through limit components to ensure that the semiconductor devices do not collide or stick together, avoiding affecting the accuracy of the ray machine in detecting semiconductor devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below with reference to the accompanying drawings.

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 This is a top view of the overall structure of the utility model;

[0022] Figure 3 This is the AA cross-sectional view of the overall structure of the utility model;

[0023] Figure 4 BB is a cross-sectional view of the overall structure of the utility model;

[0024] Figure 5 For the utility model Figure 3 A magnified schematic diagram of the structure at A;

[0025] Figure 6 This is a schematic structural diagram of the plugging component of the present utility model.

[0026] In the figure: 1. Side panel; 2. Conveyor belt; 3. Test equipment; 4. Display screen; 5. Sealing plate; 6. Control seat; 7. Limit plate; 8. Limit rod; 9. Adjustment rod; 10. Round plate; 11. Control tube; 12. Threaded rod; 13. Positioning slot; 14. Servo motor; 15. Drive motor; 16. Radiation detector; 17. Threaded hole; 18. Adjustment hole; 19. Limit hole; 20. Positioning seat; 21. Positioning plate; 22. Sealing gasket. DETAILED DESCRIPTION

[0027] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] like Figures 1-6 As shown, the multi-channel parallel test equipment includes: a side panel 1, a test device 3 and a limit assembly.

[0029] There are two groups of side panels 1. The inner walls of the two groups of side panels 1 are connected to the conveyor belt 2. The side ends of the side panels 1 are fixedly connected to the driving machine 15. The driving machine 15 is connected to the conveyor belt 2. The staff can place a large number of semiconductor devices on the conveyor belt 2 in sequence. The driving machine 15 drives the conveyor belt 2 to rotate, thereby achieving the effect of the conveyor belt 2 automatically transporting the semiconductor devices.

[0030] The testing device 3 is fixedly connected to the top of the side panel 1, and a display screen 4 is fixedly connected to the side end of the testing device 3, and a ray detector 16 is fixedly connected to the bottom end of the testing device 3. Blocking components are respectively connected to both ends of the testing device 3, and the display screen 4 cooperates with the driving machine 15 and the ray detector 16 respectively. When the semiconductor device is conveyed to the ray detector 16 fixed at the bottom end of the testing device 3 through the conveyor belt 2, the display screen 4 controls the driving machine 15 to stop driving the conveyor belt 2 to move, and the blocking component blocks both ends of the ray detector 16. Then the ray detector 16 detects the semiconductor device by emitting X-rays, and the ray detector 16 transmits the detected data to the display screen 4 for processing and display. The ray detector 16 and the conveyor belt 2 are used in combination to avoid the time-consuming and labor-intensive phenomenon that the existing technology requires staff to detect one by one. The blocking component can prevent X-rays from causing harm to the staff. The staff can place multiple semiconductor devices side by side on the conveyor belt 2 at the same time, further improving the efficiency of the ray detector 16 in detecting semiconductor devices.

[0031] The limiting component is set at the side end of the side plate 1, and the limiting component cooperates with the testing equipment 3. In order to avoid collisions when multiple semiconductor devices are placed side by side on the conveyor belt 2, the staff separates the multiple semiconductor devices through the limiting component, thereby ensuring that the semiconductor devices will not collide or stick together, thereby avoiding affecting the accuracy of the ray detector 16 in detecting semiconductor devices.

[0032] In some specific embodiments, the limit assembly includes: an adjusting rod 9 and a circular plate 10, the adjusting rod 9 cooperates with the inner wall of the side plate 1, the side end of the adjusting rod 9 is fixedly connected to the limit plate 7, the circular plate 10 is provided with several groups and axially opened with adjusting holes 18, the inner wall of the adjusting hole 18 is threadedly connected to the adjusting rod 9, the diameter of the limit plate 7 is larger than the diameter of the adjusting rod 9 and is fitted with the outer wall of the side plate 1, the two ends of the circular plate 10 are respectively penetrated by a limit hole 19, the inner wall of the limit hole 19 is slidably connected to the limit rod 8, and the two ends of the limit rod 8 are respectively fixedly connected to the side plate 1, and the working The operator adjusts the intervals between several groups of circular plates 10 according to the size of the semiconductor device. The operator rotates the adjusting rod 9, and the adjusting rod 9 drives several circular plates 10 to move through the threaded connection with the adjusting hole 18. The limiting holes 19 opened at both ends of the circular plate 10 slide along the limiting rod 8. The inner wall of the limiting hole 19 abuts against the limiting rod 8 to provide a limiting effect for the circular plate 10, thereby preventing the circular plate 10 from rotating when moving. Among them, the size setting of the limiting plate 7 can ensure that the adjusting rod 9 will not detach from the side plate 1 when rotating.

[0033] In some specific embodiments, the blocking assembly includes: a blocking plate 5, a control seat 6, a threaded rod 12 and a servo motor 14, the blocking plate 5 is slidingly connected to the outer wall of the test equipment 3, the side end of the blocking plate 5 is fixedly connected to the control seat 6, the bottom end of the blocking plate 5 is fixedly connected to a sealing gasket 22, the inner wall of the control seat 6 is threadedly connected to the threaded rod 12, the top of the threaded rod 12 is fixedly connected to the servo motor 14, the servo motor 14 is fixedly connected to the top of the test equipment 3, the sealing gasket 22 cooperates with the conveyor belt 2, and positioning grooves 13 are respectively provided on both sides of the side end of the test equipment 3, a positioning seat 20 is clamped and connected in the positioning groove 13 and is slidingly connected to the positioning seat 20, the positioning seat 20 is fixedly connected to the side end of the blocking plate 5, the top end of the control seat 6 is fixedly connected to the control tube 11, the control tube 11 has a threaded hole 17 longitudinally provided therein that passes through the interior of the control seat 6, and the threaded hole 17 is threadedly connected to the threaded rod 12 The bottom end of the threaded rod 12 is fixedly connected to a positioning plate 21, and the diameter of the positioning plate 21 is larger than the diameter of the threaded rod 12. When the blocking assembly is running, the servo motor 14 drives the threaded rod 12 to rotate, and the threaded rod 12 drives the control seat 6 and the control tube 11 to move through the threaded connection with the inner wall of the threaded hole 17. The control seat 6 drives the blocking plate 5 to move, and the blocking plate 5 drives the positioning seat 20 to slide along the inner wall of the positioning groove 13. The sealing gasket 22 fixed at the bottom end of the blocking plate 5 is plastic. When the sealing gasket 22 is pressed against the conveyor belt 2, the sealing gasket 22 is deformed. The sealing gasket 22 can fully seal the gap between the blocking plate 5 and the conveyor belt 2. The size setting of the positioning plate 21 prevents the control seat 6 from detaching when it moves through the threaded rod 12. The positioning seat 20 and the inner wall of the positioning groove 13 are connected to provide a limiting support for the blocking plate 5.

[0034] The above describes several embodiments of the present invention in detail, but the present invention is not limited to these embodiments and should not be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. Multi-channel parallel testing equipment, characterized in that, include: Side panels (1), the side panels (1) are provided with two groups, the inner walls of the two groups of side panels (1) are cooperatively connected to the conveyor belt (2), the side ends of the side panels (1) are fixedly connected to the driving machine (15), and the driving machine (15) is cooperatively connected to the conveyor belt (2); A test device (3), wherein the test device (3) is fixedly connected to the top of the side panel (1), a display screen (4) is fixedly connected to the side end of the test device (3), a ray detector (16) is fixedly connected to the bottom end of the test device (3), and blocking components are respectively connected at both ends of the test device (3), and the display screen (4) is respectively connected to the driving machine (15) and the ray detector (16); A limiting component is provided at a side end of the side plate (1), and the limiting component cooperates with the testing device (3).

2. The multi-channel parallel testing device according to claim 1, characterized in that: The limiting assembly comprises: an adjusting rod (9) and a circular plate (10); the adjusting rod (9) cooperates with the inner wall of the side plate (1); the side end of the adjusting rod (9) is fixedly connected to the limiting plate (7); the circular plate (10) is provided with a plurality of groups and axially opened with adjusting holes (18); the inner wall of the adjusting hole (18) is threadedly connected to the adjusting rod (9); the diameter of the limiting plate (7) is larger than the diameter of the adjusting rod (9) and is closely connected to the outer wall of the side plate (1).

3. The multi-channel parallel testing device according to claim 2, characterized in that: Limiting holes (19) are respectively provided through both ends of the circular plate (10); the inner wall of the limiting hole (19) is slidably connected to a limiting rod (8); and both ends of the limiting rod (8) are respectively fixedly connected to the side plate (1).

4. The multi-channel parallel testing device according to claim 1, characterized in that: The blocking assembly comprises: a blocking plate (5), a control seat (6), a threaded rod (12) and a servo motor (14); the blocking plate (5) is slidably connected to the outer wall of the test device (3); the side end of the blocking plate (5) is fixedly connected to the control seat (6); the bottom end of the blocking plate (5) is fixedly connected to a sealing gasket (22); the inner wall of the control seat (6) is threadedly connected to the threaded rod (12); the top end of the threaded rod (12) is fixedly connected to the servo motor (14); the servo motor (14) is fixedly connected to the top end of the test device (3); and the sealing gasket (22) cooperates with the conveyor belt (2).

5. The multi-channel parallel testing device according to claim 4, characterized in that: Positioning grooves (13) are respectively provided on both sides of the side ends of the test device (3); a positioning seat (20) is clamped and connected in the positioning groove (13) and is slidably connected to the positioning seat (20); and the positioning seat (20) is fixedly connected to the side end of the blocking plate (5).

6. The multi-channel parallel testing device according to claim 4, characterized in that: The top end of the control seat (6) is fixedly connected to a control tube (11), the control tube (11) is longitudinally provided with a threaded hole (17) penetrating the interior of the control seat (6), the threaded hole (17) is threadedly connected to the threaded rod (12), the bottom end of the threaded rod (12) is fixedly connected to a positioning plate (21), and the diameter of the positioning plate (21) is larger than the diameter of the threaded rod (12).

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