Colloid filtering device and wafer processor

Abstract

The utility model discloses a colloid filtering device, which comprises a liquid discharge pipe, a filtering mechanism, a liquid storage tank and a colloid discharge mechanism, the filtering mechanism comprises a box body and a filter cartridge, the liquid discharge pipe is arranged on the box body, the liquid discharge pipe is used for discharging mixed liquid of colloid and liquid medicine into the filter cartridge, and a cavity for temporarily storing the filtered liquid medicine is formed between the filter cartridge and the box body; the cavity is communicated with the liquid storage tank, and filtered liquid medicine in the cavity flows into the liquid storage tank; the glue discharging mechanism comprises a glue discharging pipe, the glue discharging pipe is communicated with the filter cartridge, the glue discharging pipe is connected into a factory affair blow-off pipe, after the mixed liquid is filtered by the filter cartridge, liquid medicine enters the cavity, and glue is separated into the filter cartridge and discharged into the factory affair blow-off pipe through the glue discharging pipe. According to the colloid filtering device, through cooperation of the filtering mechanism, the liquid storage tank and the colloid discharging mechanism, automatic filtering of colloid is achieved, frequent operation of operators is not needed, time and labor are saved, meanwhile, liquid medicine flowing back to the liquid storage tank can be reused after being finely filtered, and the wafer processing cost is greatly reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer processing equipment, in particular to a colloid filtering device and a wafer processing machine. Background Art

[0002] A wafer is the silicon wafer used in the manufacture of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. Various circuit components can be fabricated on the silicon wafer, resulting in electronic components with specific electrical functions. During the manufacturing process, the wafer must be kept extremely clean. Therefore, in addition to eliminating external contaminants, cleaning is also required. Chemical solutions or gases are used to effectively remove impurities such as dust, metal ions, and organic matter remaining on the wafer without damaging its surface and electrical properties.

[0003] The wet cleaning process is a relatively commonly used cleaning process for wafers. At present, wafer processing equipment is used to clean wafers. In the specific implementation process, the wafer is first placed at a preset position of the wafer processing equipment, and then a chemical solution is used to remove the photoresist on the surface of the wafer in place. The removed photoresist will fall into the chemical solution and flow into the discharge pipe of the wafer processing equipment after mixing with the chemical solution. After long-term use, the mixture of chemical solution and photoresist will be deposited in the discharge pipe, causing the pipe to be blocked. The usual treatment method is to place a filter bag at the discharge pipe, and separate the colloid and chemical solution through the filter bag and collect them in the filter bag. When the colloid in the filter bag reaches a certain amount, the filter bag needs to be replaced. Obviously, there are disadvantages such as inconvenient operation, frequent replacement by operators, and time-consuming and labor-intensive. Utility Model Content

[0004] The purpose of the utility model is to provide a colloid filtering device and a wafer processing machine to solve the problem of inconvenient operation of conventional filtering methods in the prior art.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] In a first aspect, a colloid filtration device is provided, which includes a liquid discharge pipe, a filtration mechanism, a liquid storage tank, and a glue discharge mechanism, wherein:

[0007] The filtration mechanism includes a housing and a filter cartridge, wherein the filter cartridge is mounted in the housing, and the drain pipe is mounted on the housing. The drain port of the drain pipe is located above the filter cartridge, and the drain pipe is configured to discharge a mixed liquid of colloid and liquid medicine into the filter cartridge. The filter cartridge is provided with a plurality of filter holes, and a cavity for temporarily storing filtered liquid medicine is formed between the filter cartridge and the housing.

[0008] The liquid storage tank is configured to store filtered liquid medicine, the cavity is connected to the liquid storage tank through a pipeline, and the filtered liquid medicine in the cavity flows into the liquid storage tank through the pipeline;

[0009] The glue discharge mechanism includes a glue discharge pipe, a first end of the glue discharge pipe is connected to the bottom end of the filter cylinder, and a second end of the glue discharge pipe is connected to the factory sewage pipe. After the mixed liquid of the medicine and the colloid is filtered by the filter cylinder, the medicine enters the cavity, and the colloid is separated into the filter cylinder and discharged into the factory sewage pipe through the glue discharge pipe.

[0010] Furthermore, the debinding mechanism further includes a first control valve and an air blowing assembly, wherein the first control valve is provided on the debinding pipe and is configured to control the on / off state of the debinding pipe; the air blowing assembly is installed on the box body, and the air blowing end of the air blowing assembly is provided toward the filter cartridge, and the air blowing assembly is configured to blow air toward the colloid deposited in the filter cartridge during debinding;

[0011] During normal operation, the first control valve is in a closed state, and the colloid filtered by the filter cartridge is deposited at the bottom of the filter cartridge; when the amount of colloid deposited in the filter cartridge reaches a preset value, the first control valve is in an open state, and at the same time, the blowing assembly blows air toward the colloid deposited in the filter cartridge, so that the colloid in the filter cartridge is discharged into the factory sewage pipe through the rubber discharge pipe.

[0012] Furthermore, the colloid filtering device further includes a flushing component, which is configured to flush the filter cartridge after the colloid in the filter cartridge is discharged into the discharge pipe, so as to clean the filter cartridge.

[0013] Furthermore, the flushing assembly includes a flushing pipe and a flushing joint, the flushing joint is installed on the box body, the first end of the flushing pipe is connected to the flushing pipeline of the wafer processing chamber, the cleaning water after cleaning the wafer processing chamber flows into the flushing pipe through the flushing pipeline, and the second end of the flushing pipe is installed on the flushing joint.

[0014] Furthermore, the filter cartridge as a whole is a conical structure that is larger at the top and smaller at the bottom.

[0015] Furthermore, the density of the filter holes on the filter cartridge increases from top to bottom.

[0016] Furthermore, the diameters of the filter holes on the filter cartridge decrease from top to bottom.

[0017] Furthermore, a second control valve is provided at the end of the pipeline, and the second control valve is configured to control the on-off of the pipeline.

[0018] Furthermore, the liquid storage tank is located below the box body, and the filtered liquid in the cavity flows into the liquid storage tank by its own weight.

[0019] In a second aspect, a wafer processing machine is provided, comprising the above-mentioned colloid filtering device.

[0020] Compared with the prior art, the colloid filtration device and wafer processing machine have the following beneficial effects:

[0021] 1) Through the cooperation of the filtering mechanism, liquid storage tank and glue discharge mechanism, the liquid storage tank stores the filtered liquid medicine. After the mixture of liquid medicine and colloid is filtered by the filter cartridge, the liquid medicine enters the cavity. The colloid is separated into the filter cartridge and discharged into the factory sewage pipe through the glue discharge pipe. The liquid medicine filtered in the cavity flows into the liquid storage tank through the pipeline, realizing automatic filtration of the colloid, eliminating the need for frequent operation by the operator, saving time and labor. At the same time, the liquid medicine returning to the liquid storage tank can be reused after fine filtration, greatly reducing the processing cost of wafers;

[0022] 2) Through the cooperation of the first control valve, the air blowing assembly and the filter cartridge, the filtered colloid is first deposited in the filter cartridge, and then discharged through the discharge pipe after a certain amount of colloid is deposited, thus avoiding the clogging of the filter holes of the filter cartridge by the colloid and improving the filtration efficiency and filtration effect of the filter cartridge;

[0023] 3) A flushing component is provided to flush the filter cartridge after debinding to prevent residual colloid from clogging the filter holes of the filter cartridge. In addition, the flushing component uses secondary water used for wafer cleaning to clean the filter cartridge. While ensuring the flushing effect, it saves water, is conducive to saving emissions and reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present invention, a brief introduction is given below to the background technology of the present invention and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0025] Figure 1 This is a schematic front view of a colloid filtration device provided by an embodiment of the present utility model;

[0026] Figure 2 This is a schematic diagram of the three-dimensional structure of the colloid filtration device provided in an embodiment of the present utility model;

[0027] Figure 3 This is another three-dimensional structural diagram of the colloid filtration device provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0028] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0029] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the accompanying drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of the present invention. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly attached to the other component or there can be a central component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there can be a central component. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present invention belongs. The terms used herein in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the relevant listed items.

[0030] See also Figures 1 to 3 As shown, in this embodiment, a colloid filtration device includes a drain pipe 1, a filter mechanism 2, a liquid storage tank 3 and a glue discharge mechanism 4, wherein: the filter mechanism 2 includes a box 20 and a filter cartridge 21, the filter cartridge 21 is installed in the box 20, the drain pipe 1 is installed on the box 20, the discharge port of the drain pipe 1 is located above the filter cartridge 21, the drain pipe 1 is configured to discharge the mixed liquid of the colloid and the liquid medicine into the filter cartridge 21, the filter cartridge 21 is provided with a plurality of filter holes 210, and a filter cartridge 21 and the box 20 are formed between the filter cartridge 21 and the box 20 for temporarily storing the filtered liquid medicine. The cavity 200; the liquid storage tank 3 is configured to store the filtered medicinal liquid, the cavity 200 is connected to the liquid storage tank 3 through the pipeline 5, and the filtered medicinal liquid in the cavity 200 flows into the liquid storage tank 3 through the pipeline 5; the glue discharge mechanism 4 includes a glue discharge pipe 40, the first end of the glue discharge pipe 40 is connected to the bottom end of the filter cylinder 21, and the second end of the glue discharge pipe 40 is connected to the factory sewage pipe. After the mixed liquid of the medicinal liquid and the colloid is filtered by the filter cylinder 21, the medicinal liquid enters the cavity 200, and the colloid is separated into the filter cylinder 21 and discharged into the factory sewage pipe through the glue discharge pipe 40.

[0031] It can be seen that through the cooperation of the filtering mechanism 2, the liquid storage tank 3 and the glue discharge mechanism 4, the liquid storage tank 3 stores the filtered medicinal liquid. After the mixture of the medicinal liquid and the colloid is filtered through the filter cylinder 21, the medicinal liquid enters the cavity 200, and the colloid is separated into the filter cylinder 21 and discharged into the factory sewage pipe through the glue discharge pipe 40. The filtered medicinal liquid in the cavity 200 flows into the liquid storage tank 3 through the pipeline 5, realizing automatic filtration of the colloid, eliminating the need for frequent operation by the operator, saving time and effort, and at the same time, the medicinal liquid returned to the liquid storage tank 3 can be reused after fine filtration, which greatly reduces the processing cost of the wafer.

[0032] As an embodiment, the glue discharge mechanism 4 also includes a first control valve 41 and a blowing assembly. The first control valve 41 is arranged on the glue discharge pipe 40. The first control valve 41 is configured to control the on and off of the glue discharge pipe 40. The blowing assembly is installed on the box body 20. The blowing end of the blowing assembly is arranged toward the filter cartridge 21. The blowing assembly is configured to blow air toward the colloid deposited in the filter cartridge 21 during glue discharge; during normal operation, the first control valve 41 is in a closed state, and the colloid filtered by the filter cartridge 21 is deposited at the bottom of the filter cartridge 21; when the amount of colloid deposited in the filter cartridge 21 reaches a preset value, the first control valve 41 is in an open state, and the blowing assembly blows air toward the colloid deposited in the filter cartridge 21, so that the colloid in the filter cartridge 21 is discharged into the factory sewage pipe through the glue discharge pipe 40.

[0033] Specifically, the blowing assembly includes a blowing pipe and a blowing connector 42. The blowing connector 42 is installed on the box body 20. The first end of the blowing pipe is connected to the external blowing device, and the second end of the blowing pipe is installed on the blowing connector 42.

[0034] It can be seen that through the cooperation of the first control valve 41, the blowing assembly and the filter cartridge 21, the filtered colloid is first deposited in the filter cartridge 21, and then discharged through the discharge pipe 40 after a certain amount of colloid is deposited, thereby avoiding the colloid from clogging the filter holes 210 of the filter cartridge 21 and improving the filtration efficiency and filtration effect of the filter cartridge 21.

[0035] As an embodiment, the colloid filtering device further includes a flushing component 6 , which is configured to flush the filter cartridge 21 after the colloid in the filter cartridge 21 is discharged into the rubber drain pipe 40 , so as to clean the filter cartridge 21 .

[0036] It can be seen that a flushing component 6 is provided to flush the filter cartridge 21 after the glue is discharged to prevent the residual colloid from clogging the filter hole 210 of the filter cartridge 21. In addition, the flushing component 6 uses the secondary water used for cleaning the wafer to clean the filter cartridge 21. Under the premise of ensuring the flushing effect, water is saved, which is conducive to saving emissions and reducing production costs.

[0037] As an embodiment, the flushing assembly 6 includes a flushing pipe (not shown in the figure) and a flushing connector 60. The flushing connector 60 is installed on the box body 20. The first end of the flushing pipe is connected to the flushing pipeline 5 of the wafer processing chamber. The cleaning water after cleaning the wafer processing chamber flows into the flushing pipe through the flushing pipeline 5. The second end of the flushing pipe is installed on the flushing connector 60.

[0038] As an embodiment, the filter cartridge 21 is a cone-shaped structure that is larger at the top and smaller at the bottom.

[0039] As an embodiment, the density of the filter holes 210 on the filter cartridge 21 increases from top to bottom.

[0040] As an embodiment, the diameters of the filter holes 210 on the filter cartridge 21 decrease sequentially from top to bottom.

[0041] As an embodiment, a second control valve 7 is provided at the end of the pipeline 5 , and the second control valve 7 is configured to control the on-off of the pipeline 5 .

[0042] As an embodiment, the liquid storage tank 3 is located below the box body 20 , and the filtered liquid in the cavity 200 flows into the liquid storage tank 3 by its own weight.

[0043] Based on the above-mentioned colloid filtering device, a wafer processing machine is provided, which includes the above-mentioned colloid filtering device.

[0044] The working principle of the above-mentioned colloid filtering device is as follows: first, the mixture of the medicine liquid and the colloid flows into the filter cartridge 21 in the casing 20 through the drain pipe 1. At this time, the first control valve 41 is in a closed state, and the colloid in the filter cartridge 21 is deposited at the bottom of the filter cartridge 21. After the mixture of the medicine liquid and the colloid is filtered by the filter cartridge 21, the medicine liquid enters the cavity 200. The medicine liquid entering the cavity 200 flows into the liquid storage tank 3 through the pipeline 5. When the deposition amount of the colloid in the filter cartridge 21 reaches a preset value, the first control valve 41 is switched to an open state, and at the same time, the blowing component blows air downward into the filter cartridge 21, so that the colloid in the filter cartridge 21 is discharged into the discharge pipe 40. After the colloid in the filter cartridge 21 is discharged into the discharge pipe 40, the flushing component 6 sprays cleaning water on the filter cartridge 21 to clean the colloid remaining on the surface of the filter cartridge 21.

[0045] The above embodiments merely illustrate the basic principles and features of the present invention. The present invention is not limited to the above embodiments. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A colloid filtration device, characterized in that: The colloid filtration device includes a liquid discharge pipe, a filtering mechanism, a liquid storage tank and a glue discharge mechanism, wherein: The filtration mechanism includes a housing and a filter cartridge, wherein the filter cartridge is mounted in the housing, and the drain pipe is mounted on the housing. The drain port of the drain pipe is located above the filter cartridge, and the drain pipe is configured to discharge a mixed liquid of colloid and liquid medicine into the filter cartridge. The filter cartridge is provided with a plurality of filter holes, and a cavity for temporarily storing filtered liquid medicine is formed between the filter cartridge and the housing. The liquid storage tank is configured to store filtered liquid medicine, the cavity is connected to the liquid storage tank through a pipeline, and the filtered liquid medicine in the cavity flows into the liquid storage tank through the pipeline; The glue discharge mechanism includes a glue discharge pipe, a first end of the glue discharge pipe is connected to the bottom end of the filter cylinder, and a second end of the glue discharge pipe is connected to the factory sewage pipe. After the mixed liquid of the medicine and the colloid is filtered by the filter cylinder, the medicine enters the cavity, and the colloid is separated into the filter cylinder and discharged into the factory sewage pipe through the glue discharge pipe.

2. The colloid filtration device according to claim 1, characterized in that: The debinding mechanism further includes a first control valve and an air blowing assembly, wherein the first control valve is disposed on the debinding pipe and configured to control the on / off state of the debinding pipe. The air blowing assembly is mounted on the box body, and the air blowing end of the air blowing assembly is disposed toward the filter cartridge. The air blowing assembly is configured to blow air toward the colloid deposited in the filter cartridge during debinding. During normal operation, the first control valve is in a closed state, and the colloid filtered by the filter cartridge is deposited at the bottom of the filter cartridge; when the amount of colloid deposited in the filter cartridge reaches a preset value, the first control valve is in an open state, and at the same time, the blowing assembly blows air toward the colloid deposited in the filter cartridge, so that the colloid in the filter cartridge is discharged into the factory sewage pipe through the rubber discharge pipe.

3. The colloid filtration device according to claim 2, characterized in that: The colloid filtering device further includes a flushing component, which is configured to flush the filter cartridge after the colloid in the filter cartridge is discharged into the glue discharge pipe, so as to clean the filter cartridge.

4. The colloid filtration device according to claim 3, characterized in that: The flushing assembly includes a flushing pipe and a flushing joint. The flushing joint is installed on the box body. The first end of the flushing pipe is connected to the flushing pipeline of the wafer processing chamber. The cleaning water after cleaning the wafer processing chamber flows into the flushing pipe through the flushing pipeline. The second end of the flushing pipe is installed on the flushing joint.

5. The colloid filtration device according to claim 1, characterized in that: The filter cartridge is generally a conical structure that is larger at the top and smaller at the bottom.

6. The colloid filtration device according to claim 1, characterized in that: The density of the filter holes on the filter cartridge increases from top to bottom.

7. The colloid filtration device according to claim 1, characterized in that: The apertures of the filter holes on the filter cartridge decrease from top to bottom.

8. The colloid filtration device according to claim 1, characterized in that: A second control valve is provided at the end of the pipeline, and the second control valve is configured to control the on-off of the pipeline.

9. The colloid filtration device according to claim 1, characterized in that: The liquid storage tank is located below the box body, and the filtered liquid in the cavity flows into the liquid storage tank by its own weight.

10. A wafer processing machine, characterized in that: The wafer processing machine includes the colloid filtering device according to any one of claims 1 to 9.

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