ITO rotating target material inner circle adjusting, positioning and supporting tool

Abstract

The utility model relates to the technical field of target material processing equipment, in particular to an ITO (indium tin oxide) rotating target material inner circle adjusting, positioning and supporting tool which comprises a polished shaft and a plurality of supporting tool bodies installed outside the polished shaft and close to the two ends, each supporting tool body comprises a tensioning sleeve block connected outside the polished shaft in a sleeving mode, and a penetrating channel is formed in each tensioning sleeve block. A through channel is formed in the supporting tool, an optical shaft penetrates into the through channel, conical sleeves are arranged on the two sides of the tensioning sleeve block and arranged between the through channel and the optical shaft, and an adjusting piece is further arranged outside the supporting tool. The multiple tensioning sleeve blocks are adjusted to the proper position of the optical axis, the conical sleeve moves in the penetrating channel and can be freely adjusted on the optical axis through matching and locking of the double-end stud and the nut, after the whole tool stretches into the inner wall of the target material, the tensioning sleeve blocks support the inner wall of the target material, and the outer ends of the tensioning sleeve blocks are attached to the inner side wall of the target material to fix the target material. And under the cooperation of the adjusting piece and the supporting tool, the inner circle support of the target material is independently adjusted, so that the device is suitable for the target material with poor concentricity of the inner diameter and the outer diameter.

Description

Technical Field

[0001] The utility model relates to the technical field of target material processing equipment, in particular to an ITO rotating target material inner circle adjustment positioning support tool. Background Art

[0002] After the ITO target is sintered, the inner and outer diameters of the target barrel are irregular circles, and the concentricity of the inner and outer diameters is unstable, so the outer diameter must be ground to achieve the required size. Since the target, tooling and grinding wheel rotate rapidly when the ITO cylindrical target is ground on the outer diameter, a positioning tool is required inside the target barrel to assist in supporting the grinding.

[0003] In the prior art, for example, the patent with publication number CN116900937A discloses an invention that discloses a positioning support tooling for outer diameter grinding of an ITO target and a method of use, comprising: a rotating shaft, and a plurality of single-body support tooling arranged on the periphery of the rotating shaft; the single-body support tooling comprises: a tensioning sleeve, which is sleeved on the periphery of the rotating shaft, and a penetration hole is provided in the middle of the tensioning sleeve for the rotating shaft to pass through, a plurality of guide blocks arranged in an annular manner are fixedly installed inside the tensioning sleeve, and a hollow channel is formed between two adjacent guide blocks, and one side of the hollow channel extends to the tensioning sleeve and passes through the tensioning sleeve; a tensioning top is slidably inserted into each hollow channel, and both ends of one side of the tensioning top are provided with inclined surfaces.

[0004] The above structure solves the problem of target material being easily misaligned during the process of lifting and tightening the ejector by means of multiple single-body support fixtures arranged on the periphery of the rotating shaft. However, it is still not applicable to target materials with excessive deviation in inner and outer diameter concentricity. Utility Model Content

[0005] In view of this, the purpose of the present invention is to propose an ITO rotating target inner circle adjustment positioning support tooling to solve the problem that targets with excessive deviation in inner and outer diameter concentricity cannot be used.

[0006] Based on the above purpose, the utility model provides an ITO rotating target inner circle adjustment positioning support tooling, including an optical axis and a plurality of support tooling installed near both ends of the optical axis, the support tooling is at least two groups, the support tooling includes a tensioning sleeve sleeved on the outside of the optical axis, a through-channel is opened inside the tensioning sleeve, the optical axis is inserted into the through-channel, and tapered sleeves are provided on both sides of the tensioning sleeve, and the tapered sleeves are arranged between the through-channel and the optical axis;

[0007] Multiple groups of studs are inserted between the two tapered sleeves, and the multiple groups of studs pass through the tensioning sleeve. Nuts are installed at both ends of the studs, and locking screws are installed between the tapered sleeves and the tensioning sleeve.

[0008] An adjusting piece is further provided on the outside of the supporting tooling, and the adjusting piece enables the supporting tooling to adapt to different target barrel inner diameters.

[0009] Preferably, the adjustment part includes a slot surrounded by the outside of the tensioning sleeve, a conical slider 1 is slidably installed inside the slot, the top of the conical slider 1 is connected to the conical slider 2, and the top of the conical slider 2 and the outside of the slot are both provided with multiple groups of slots, and the multiple groups of slots are sleeved with binding rings.

[0010] Preferably, the supporting fixture is an X-shaped structure, and multiple supporting fixtures are arranged parallel to each other.

[0011] Preferably, the through channel is provided with a conical structure corresponding to the conical sleeve, and a broken groove is provided inside the conical sleeve.

[0012] Preferably, the studs are distributed around the inside of the tension sleeve and the tapered sleeve, and there are at least four groups of studs, and the outside of the tension sleeve is all arranged in an arc surface.

[0013] Preferably, the inclined surface of the conical slider 1 corresponds to the inclined surface of the conical slider 2, and a positioning screw is connected between the conical slider 1 and the tensioning sleeve.

[0014] The beneficial effects of the utility model are as follows: multiple tensioning sleeves are adjusted to appropriate positions on the optical axis to adapt to the length of the target material; the tapered sleeve moves inside the through-channel and is locked by the stud and nut; at the same time, the locking screw locks the tapered sleeve and the tensioning sleeve, and can be adjusted arbitrarily on the optical axis to adapt to products of different specifications;

[0015] After the tooling is extended into the inner wall of the target material as a whole, the tensioning sleeve supports the inner wall of the target material, and the outer end of the tensioning sleeve fits against the inner wall of the target material, thereby fixing the target material. Then, through the cooperation of the adjustment part and the supporting tooling, the inner circle support of the target material is adjusted separately, so that it is suitable for targets with poor inner and outer diameter concentricity. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the half-section structure of the utility model as a whole;

[0019] Figure 3 For this utility model Figure 2 Schematic diagram of the enlarged structure of part A

[0020] Figure 4 This is a schematic cross-sectional view of the expansion sleeve of the utility model;

[0021] Figure 5 It is a structural schematic diagram of the tapered sleeve of the utility model.

[0022] The markings in the figure are: 1. Optical axis; 2. Support tooling; 3. Tensioning sleeve; 4. Through channel; 5. Tapered sleeve; 6. Broken slot; 7. Stud; 8. Nut; 9. Locking screw; 10. Adjustment piece; 11. Slot; 12. Conical slider 1; 13. Conical slider 2; 14. Slot; 15. Binding ring; 16. Positioning screw. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0024] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 and Figure 5 As shown, an ITO rotating target inner circle adjustment positioning support fixture includes an optical axis 1 and multiple support fixtures 2 installed on the outside of the optical axis 1 near both ends. The support fixtures 2 are at least two groups. The support fixtures 2 include a tensioning sleeve 3 sleeved on the outside of the optical axis 1. The tensioning sleeve 3 has a through channel 4 formed inside. The optical axis 1 passes through the through channel 4. Conical sleeves 5 are provided on both sides of the tensioning sleeve 3. The tapered sleeves 5 are arranged between the through channel 4 and the optical axis 1.

[0025] Multiple sets of studs 7 are inserted between the two tapered sleeves 5. The multiple sets of studs 7 pass through the tensioning sleeve 3, and nuts 8 are installed at both ends of the studs 7. Locking screws 9 are installed between the tapered sleeves 5 and the tensioning sleeve 3.

[0026] An adjusting member 10 is further provided on the outside of the supporting fixture 2 , and the adjusting member 10 enables the supporting fixture 2 to adapt to different target barrel inner diameters.

[0027] In this embodiment, multiple tensioning sleeves 3 are respectively inserted into the outside of the optical axis 1, and a tapered sleeve 5 is inserted between the tensioning sleeve 3 and the optical axis 1. The tensioning sleeve 3 is adjusted to a suitable position relative to the optical axis 1 to accommodate the length of the target material. The tapered sleeve 5 moves within the through-channel 4 and is locked by the stud 7 and nut 8. At the same time, the locking screw 9 locks the tapered sleeve 5 and the tensioning sleeve 3. It can be arbitrarily adjusted on the optical axis 1 to accommodate products of different specifications.

[0028] After the tooling as a whole extends into the inner wall of the target material, the tensioning sleeve 3 supports the inner wall of the target material, and the outer end of the tensioning sleeve 3 fits against the inner wall of the target material, thereby fixing the target material. Then, through the cooperation of the adjustment part 10 and the supporting tooling 2, the inner circle support of the target material is adjusted separately, so that it is suitable for targets with poor inner and outer diameter concentricity.

[0029] As an implementation method, Figure 1 、 Figure 2 and Figure 3 As shown, the adjustment member 10 includes a slot 11 that is opened around the outside of the tensioning sleeve 3, and a conical slider 12 is slidably installed inside the slot 11. The top of the conical slider 12 is connected to the conical slider 2 13, and the top of the conical slider 2 13 and the outside of the slot 11 are both provided with multiple groups of slots 14, and the multiple groups of slots 14 are internally sleeved with binding rings 15.

[0030] In this embodiment, rotating the positioning screw 16 can adjust the conical slider 12 to slide back and forth in the slot 11 in the tension sleeve 3. The conical slider 2 13 contacts the conical surface of the conical slider 12, so that the conical slider 12 slides up and down in the slot 11 in the tension sleeve 3, and the height of the conical slider 12 is adjusted. At this time, the positioning screw 16 is adjusted to make the conical slider 2 13 fit against the inner wall of the target material, and the binding ring 15 restricts the conical slider 2 13 from disengaging from the slot 11 in the tension sleeve 3 during further rotation, so that the four directions of the target inner circle support can be adjusted separately, which is suitable for targets with poor inner and outer diameter concentricity.

[0031] As an implementation method, Figure 1 、 Figure 2 As shown, the supporting fixture 2 is an X-shaped structure, and multiple supporting fixtures 2 are arranged parallel to each other.

[0032] In this embodiment, multiple supporting fixtures 2 move outside the optical axis 1, and use X-shaped tensioning sleeves 3 to support the inner wall of the target. The outer end of the tensioning sleeve 3 fits with the inner wall of the target. At the same time, multiple supporting fixtures 2 are suitable for targets of different lengths.

[0033] As an implementation method, Figure 4 and Figure 5 As shown, a conical structure corresponding to the conical sleeve 5 is provided in the through channel 4 , and a broken groove 6 is provided inside the conical sleeve 5 .

[0034] In this embodiment, the corresponding cone in the through channel 4 cooperates with the tapered sleeve 5. When the tapered sleeve 5 moves inward at the same time, the setting of the broken groove 6 allows the tapered sleeve 5 to elastically deform, so that the tapered sleeve 5 lifts the tensioning sleeve 3. The tapered sleeves 5 on both sides can move separately and independently to adapt to different optical axes 1.

[0035] As an implementation method, Figure 2 and Figure 3 As shown, the stud bolts 7 are distributed around the tension sleeve 3 and the interior of the tapered sleeve 5, and there are at least four groups of stud bolts 7. The exterior of the tension sleeve 3 is all arranged in an arc surface.

[0036] In this embodiment, multiple sets of studs 7 are distributed inside the tapered sleeve 5 and the tensioning sleeve 3. The tapered sleeve 5 moves inside the tapered through-channel 4. After the position is determined, the studs 7 are locked together with the nuts 8. At the same time, the locking screws 9 lock the tapered sleeve 5 and the tensioning sleeve 3. The tapered sleeve 5 can be adjusted arbitrarily on the optical axis 1 to be suitable for different optical axes 1.

[0037] As an implementation method, Figure 2 and Figure 3 As shown, the inclined surface of the conical slider 1 12 corresponds to the inclined surface of the conical slider 2 13 , and a positioning screw 16 is connected between the conical slider 1 12 and the tensioning sleeve 3 .

[0038] In this embodiment, conical slider 12 has threads matching the positioning screw 16. By rotating the positioning screw 16, the conical slider 12 can be adjusted to slide back and forth in the slot 11 in the tension sleeve 3. Since the conical slider 2 13 contacts the conical surface of the conical slider 12, the conical slider 12 slides up and down in the slot 11 in the tension sleeve 3. The height of the conical slider 12 is adjusted, so that the four directions of multiple ends of the tension sleeve 3 can be adjusted separately.

[0039] Working principle: When in use, multiple tensioning sleeves 3 are respectively inserted into the outside of the optical axis 1, and the tapered sleeve 5 is inserted between the tensioning sleeve 3 and the optical axis 1. The tensioning sleeve 3 is located in the through-channel 4 and is adjusted to a suitable position between the tensioning sleeve 3 and the optical axis 1 to adapt to the length of the target material. The tapered design of the tapered sleeve 5 and the setting of the broken groove 6 in the tapered sleeve 5 allow the tapered sleeve 5 to be elastic and move inside the tapered through-channel 4. After the position is determined, the stud 7 and the nut 8 are used to lock it. At the same time, the locking screw 9 locks the tapered sleeve 5 and the tensioning sleeve 3. It can be adjusted arbitrarily on the optical axis 1 to adapt to products of different specifications. At the same time, the tapered sleeve 5 lifts up the tensioning sleeve 3.

[0040] After the tooling is inserted into the inner wall of the target material, the inner wall of the target material is supported by the X-shaped tensioning sleeve 3. The outer end of the tensioning sleeve 3 fits with the inner wall of the target material, thereby fixing the target material.

[0041] By rotating the positioning screw 16, the conical slider 12 can be adjusted to slide back and forth in the slot 11 in the tensioning sleeve 3. The conical slider 2 13 contacts the conical surface of the conical slider 12, so that the conical slider 12 slides up and down in the slot 11 in the tensioning sleeve 3, and the height of the conical slider 12 is adjusted. At this time, the positioning screw 16 is adjusted to make the conical slider 2 13 fit the inner wall of the target material, and the binding ring 15 restricts the conical slider 2 13 from separating from the slot 11 in the tensioning sleeve 3. At the same time, with the cooperation of the supporting tooling 2, the four directions of the target inner circle support can be adjusted separately, so it is suitable for targets with poor inner and outer diameter concentricity.

[0042] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Within the scope of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

[0043] The present invention is intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A support fixture for adjusting the inner circle of an ITO rotating target, comprising an optical axis (1) and a plurality of support fixtures (2) installed outside the optical axis (1) near both ends, characterized in that: The supporting fixture (2) is at least two groups, and the supporting fixture (2) includes a tensioning sleeve (3) sleeved on the outside of the optical axis (1), a through-channel (4) is provided inside the tensioning sleeve (3), and the optical axis (1) is inserted into the through-channel (4), and tapered sleeves (5) are provided on both sides of the tensioning sleeve (3), and the tapered sleeves (5) are arranged between the through-channel (4) and the optical axis (1); A plurality of stud bolts (7) are inserted between the two conical sleeves (5), and the plurality of stud bolts (7) pass through the tensioning sleeve (3). Nuts (8) are installed at both ends of the stud bolts (7), and a locking screw (9) is installed between the conical sleeve (5) and the tensioning sleeve (3); An adjusting piece (10) is also provided on the outside of the supporting tool (2), and the adjusting piece (10) enables the supporting tool (2) to adapt to different target barrel inner diameters.

2. The ITO rotating target inner circle adjustment positioning support fixture according to claim 1, characterized in that: The adjusting member (10) includes a slot (11) provided around the outside of the tensioning sleeve (3), a conical slider (12) is slidably installed inside the slot (11), the top end of the conical slider (12) is connected to the conical slider (13), the top end of the conical slider (13) and the outside of the slot (11) are provided with a plurality of groups of slots (14), and the plurality of groups of slots (14) are sleeved with binding rings (15).

3. The ITO rotating target inner circle adjustment positioning support tooling according to claim 1, characterized in that: The supporting tooling (2) is an X-shaped structure, and a plurality of supporting toolings (2) are arranged parallel to each other.

4. The ITO rotary target inner circle adjustment positioning support fixture according to claim 1, characterized in that: The through channel (4) is provided with a conical structure corresponding to the conical sleeve (5), and a broken groove (6) is provided inside the conical sleeve (5).

5. The ITO rotary target inner circle adjustment positioning support fixture according to claim 1, characterized in that: The stud bolts (7) are distributed around the interior of the tensioning sleeve (3) and the tapered sleeve (5), and there are at least four groups of stud bolts (7). The exterior of the tensioning sleeve (3) is all arranged in an arc surface.

6. The ITO rotary target inner circle adjustment positioning support fixture according to claim 2, characterized in that: The inclined surface of the conical slider block 1 (12) corresponds to the inclined surface of the conical slider block 2 (13), and a positioning screw (16) is connected between the conical slider block 1 (12) and the tensioning sleeve block (3).

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