Detection device for corrugated pipe of crucible shaft of single crystal furnace

Abstract

The utility model belongs to the technical field of monocrystalline silicon detection equipment, and relates to a detection device for a corrugated pipe of a crucible shaft of a single crystal furnace, which comprises a mounting plate connected with the end part, far away from a crucible, of the crucible shaft, and a detection assembly arranged between the mounting plate and the corrugated pipe, and the detection end of the detection assembly faces the accumulation position of particulate matters. The utility model has the beneficial effects that the fixed flange and the mounting plate are arranged at the bottom of the corrugated pipe, equivalently, the length of the corrugated pipe is prolonged in a disguised manner, the arrangement of the mounting plate also provides favorable conditions for accumulation of particulate matters, and oxide particles can be brought to the bottom of the corrugated pipe and the top of the mounting plate along with negative pressure airflow of a vacuum pump to be accumulated; 360-degree detection is achieved through the visual sensor arranged on the inner side of the fixed flange in the circumferential direction, the accumulation area of particulate matter can be collected in real time, the automation degree of equipment maintenance is improved, the labor intensity of manual cleaning is reduced, unnecessary maintenance time is effectively shortened, and operation and maintenance cost is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal silicon detection equipment and relates to a detection device for a crucible shaft bellows of a single crystal furnace. Background Art

[0002] As is well known, oxide particles will be generated during the production process of single crystal furnaces. A small number of oxide particles will be brought into the bottom of the crucible shaft bellows by the negative pressure airflow of the vacuum pump and accumulated. When the particles accumulate to a certain extent, they will scratch the bellows during rotation and movement, thereby affecting the sealing performance and causing air leakage, making it impossible to guarantee the vacuum conditions during the crystal pulling process.

[0003] In addition, dismantling and cleaning the equipment after the furnace is shut down can also cause larger particles to fall to the bottom of the bellows. Due to the narrow gap between the bellows and the crucible shaft, cleaning is very inconvenient. The operator needs to use tools to disassemble the flanges on both sides of the bellows and then use special tools to clean it. This is to prevent particles from scratching the crucible shaft bellows during the next furnace opening and crystal pulling process, and to ensure vacuum conditions during the crystal pulling process. However, there are also cases where the bellows is clean after opening and does not need to be cleaned, resulting in unnecessary waste and delaying work time. Therefore, a detection device for the crucible shaft bellows of a single crystal furnace is needed to solve the above technical problems. Utility Model Content

[0004] In order to solve the above-mentioned technical problems, the utility model provides a detection device for the crucible shaft bellows of a single crystal furnace, which can timely obtain the accumulation of particulate matter in the bellows, save cleaning time, do not require manual operation, and reduce the labor intensity of workers.

[0005] The technical solution adopted by the utility model is: a detection device for the crucible shaft bellows of a single crystal furnace, which can be connected to the crucible shaft and the bellows sleeved on the outside of the crucible shaft, and is characterized in that it includes a mounting plate connected to the end of the crucible shaft away from the crucible, and a detection component arranged between the mounting plate and the bellows, and the detection end of the detection component is directed toward the accumulation position of the particulate matter.

[0006] Furthermore, the detection assembly includes a fixed flange connecting the bellows and the mounting plate and a visual sensor provided on the fixed flange, and the crucible shaft passes through the fixed flange and is connected to the mounting plate.

[0007] Furthermore, the bellows, the fixing flange, the mounting plate and the crucible axis form a cavity, and the detection ends of some visual sensors are placed in the cavity toward the mounting plate, and the detection ends of other parts of the visual sensors are placed in the cavity toward the bellows.

[0008] Furthermore, the side surface of the mounting plate placed in the cavity is arranged perpendicular to the crucible axis.

[0009] Furthermore, a crucible magnetic fluid is provided in the mounting plate to seal the cavity.

[0010] Furthermore, the visual sensor is electrically connected to the industrial control machine.

[0011] Furthermore, when the accumulation area of ​​the particles is greater than or equal to 20% of the entire area of ​​the mounting plate in the cavity, a signal that cleaning is required is transmitted to the industrial computer.

[0012] Furthermore, the side of the mounting plate away from the corrugated pipe is connected to a movable frame, and the movable frame is connected to the frame via a lead screw.

[0013] Furthermore, the end of the lead screw away from the movable frame is connected to the output end of the drive motor, and the drive motor is arranged on the frame.

[0014] Furthermore, a radial gap between the inner side of the bellows and the outer wall of the crucible shaft is 3 mm to 5 mm.

[0015] The utility model is designed to detect the bellows of the crucible shaft of a single crystal furnace. A fixed flange and a mounting plate are provided at the bottom of the bellows, which is equivalent to extending the length of the bellows in disguise. The installation of the mounting plate also provides favorable conditions for the accumulation of particles. Oxide particles will be carried to the bottom of the bellows and the top of the mounting plate by the negative pressure airflow of the vacuum pump and accumulate. 360° detection is achieved through a visual sensor circumferentially arranged on the inner side of the fixed flange. The accumulation area of ​​the particles can be collected in real time, thereby improving the automation level of equipment maintenance, reducing the labor intensity of manual cleaning, effectively reducing unnecessary maintenance time, and reducing operation and maintenance costs. In addition, the detection device can be connected to an industrial computer to remotely obtain information, realize automated operation, and improve the degree of automation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0017] Figure 1 It is a structural diagram of the embodiment provided by the utility model when in use.

[0018] Figure 2It is a connection diagram of the mobile rack of the embodiment provided by the utility model.

[0019] The following are marked in the figure:

[0020] 1. Crucible shaft; 2. Bellows; 3. Crucible; 4. Mounting plate; 41. Crucible magnetic fluid; 5. Detection component; 51. Fixed flange; 6. Furnace bottom plate; 7. Moving frame; 8. Screw; 9. Frame. DETAILED DESCRIPTION

[0021] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions of the present invention, not its entire structure.

[0022] like Figure 1 As shown, a detection device for a crucible shaft bellows of a single crystal furnace can be connected to a crucible shaft 1 and a bellows 2 sleeved on the outside of the crucible shaft 1, including a mounting plate 4 connected to the end of the crucible shaft 1 away from the crucible 3, and a detection component 5 arranged between the mounting plate 4 and the bellows 2, and the detection end of the detection component 5 is directed toward the accumulation position of the particulate matter.

[0023] Preferably, the detection assembly 5 includes a fixed flange 51 connecting the bellows 2 and the mounting plate 4, and a visual sensor disposed on the fixed flange 51. The crucible shaft 1 passes through the fixed flange 51 and is connected to the mounting plate 4. The provision of the fixed flange 51 between the bellows 2 and the mounting plate 4 is equivalent to extending the length of the bellows 2 in disguise. The transversely disposed mounting plate 4 increases the area where oxide particles accumulate, providing favorable conditions for the attachment of particles. Due to the effect of gravity, particles entering the bellows 2 are more likely to accumulate on the top of the mounting plate 4. Compared to cleaning the inner side wall of the bellows 2, the top of the mounting plate 4 is more convenient for detecting and cleaning particles.

[0024] Preferably, the side of the mounting plate 4 placed in the cavity is perpendicular to the crucible axis 1. In this embodiment, most oxide particles accumulate on the top of the mounting plate 4. The side of the mounting plate 4 placed in the cavity (i.e., the top) is perpendicular to the crucible axis 1, which is more conducive to the adhesion of particles and reduces the possibility of accumulation on the inner wall of the bellows 2. It can quickly obtain the area of ​​accumulated particles, timely understand the cleanliness of the cavity, and improve the detection accuracy of the detection component 5.

[0025] Preferably, the visual sensor is embedded in a fixed flange 51 and placed on the side of the cavity. In this embodiment, the top of the fixed flange 51 is connected to the bottom of the bellows 2 via an adapter, and the bottom of the fixed flange 51 is connected to the mounting plate 4. The fixed flange 51 is provided with a through hole for the crucible shaft 1 to pass through. The crucible shaft 1 penetrates the fixed flange 51 and then embeds into the mounting plate 4. When oxide particles enter the bellows 2, most of them accumulate on the top of the mounting plate 4, and a small amount accumulates on the inner wall of the bellows 2. The visual sensor's field of view at least covers the area where the particles accumulate, facilitating timely information collection and determining whether manual disassembly and cleaning are necessary.

[0026] Preferably, the bellows 2, the fixed flange 51, the mounting plate 4 and the crucible axis 1 form a cavity, the detection ends of some visual sensors are directed toward the portion of the mounting plate 4 placed in the cavity, and the detection ends of other visual sensors are directed toward the portion of the bellows 2 placed in the cavity. In this embodiment, the top of the bellows 2 is connected to the furnace bottom plate 6 of the single crystal furnace, and its bottom is connected to the mounting plate 4 through the fixed flange 51. The bellows 2, the fixed flange 51, the mounting plate 4 and the crucible axis 1 form an annular cavity. Oxide particles will be brought from top to bottom by the negative pressure airflow of the vacuum pump to the bottom of the bellows 2 and the top of the mounting plate 4 and accumulate. 360° detection is achieved by three visual sensors circumferentially arranged on the inner side of the fixed flange 51. The accumulation area of ​​the particles can be collected in real time, thereby improving the degree of automation of equipment maintenance, reducing the labor intensity of manual cleaning, effectively reducing unnecessary maintenance time, and achieving a reduction in operation and maintenance costs.

[0027] Preferably, a crucible magnetic fluid 41 is disposed within the mounting plate 4 to seal the cavity. In this embodiment, the crucible magnetic fluid 41 is disposed along the outer periphery of the bottom of the crucible shaft 1, which facilitates the mounting plate 4 to tightly embrace the crucible shaft 1 for connection. This allows the mounting plate 4 to rotate and move with the crucible shaft 1, preventing dust from entering the gap between the two, and improving the load-bearing capacity of the crucible shaft 1.

[0028] Preferably, the visual sensor is electrically connected to the industrial computer, so that the image information collected by the visual sensor is fed back to the industrial computer.

[0029] Preferably, when the accumulation area of ​​the particulate matter is greater than or equal to 20% of the entire area of ​​the mounting plate 4 in the cavity, a signal that cleaning is required is transmitted to the industrial computer, so that the operator can judge whether the equipment needs to be cleaned, thereby reducing the labor hours and operation and maintenance costs of the single crystal furnace.

[0030] Preferably, the side of the mounting plate 4 away from the corrugated tube 2 is connected to the movable frame 7 , and the movable frame 7 is connected to the frame 9 via a lead screw 8 .

[0031] Preferably, the end of the lead screw 8 away from the movable frame 7 is connected to the output end of the drive motor, and the drive motor is arranged on the frame 9.

[0032] Preferably, the lead screw 7 is arranged parallel to the crucible axis 1. Figure 2 As shown, the top of the movable frame 7 is connected to the mounting plate 4, and the movable frame 7 is also connected to the screw 8. Driving the screw 8 to rotate can drive the movable frame 7 to move up and down, thereby driving the mounting plate 4, the crucible shaft 1, the detection component 5 and the bellows 2 on its top to move together, so as to adjust the crucible position of the crucible 3 through the crucible shaft 1. A rotating motor is also provided on the frame 9, and the output end of the rotating motor is connected to the mounting plate 4. Driving the rotating motor can drive the crucible shaft 1 and the mounting plate 4 to rotate, thereby realizing the detection of the accumulation of particulate matter while the crucible shaft 1 is raised and lowered and rotated.

[0033] Preferably, the radial gap between the inner side of the bellows 2 and the outer wall of the crucible shaft is 3 mm to 5 mm.

[0034] Note that the above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above-mentioned embodiments. The above-mentioned embodiments and descriptions are only for illustrative purposes. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements shall fall within the scope of the present invention as claimed, and the scope of protection of the present invention shall be defined by the appended claims and their equivalents.

Claims

1. A detection device for a crucible shaft bellows of a single crystal furnace, which can be connected to the crucible shaft and the bellows sleeved on the outside of the crucible shaft, characterized in that: The invention comprises a mounting plate connected to the end of the crucible shaft away from the crucible, and a detection component arranged between the mounting plate and the bellows, wherein the detection end of the detection component faces the accumulation position of the particles.

2. The detection device for the crucible shaft bellows of a single crystal furnace according to claim 1, characterized in that: The detection assembly includes a fixing flange connecting the bellows and the mounting plate and a visual sensor arranged on the fixing flange. The crucible shaft passes through the fixing flange and is connected to the mounting plate.

3. The detection device for the crucible shaft bellows of a single crystal furnace according to claim 2, characterized in that: The bellows, the fixing flange, the mounting plate and the crucible axis form a cavity, and the detection ends of some visual sensors are placed in the cavity toward the mounting plate, while the detection ends of other visual sensors are placed in the cavity toward the bellows.

4. The detection device for the crucible shaft bellows of a single crystal furnace according to claim 3, characterized in that: The side surface of the mounting plate placed in the cavity is perpendicular to the crucible axis.

5. The detection device for the crucible shaft bellows of a single crystal furnace according to claim 3 or 4, characterized in that: A crucible magnetic fluid is arranged in the mounting plate to seal the cavity.

6. The detection device for the crucible shaft bellows of a single crystal furnace according to claim 5, characterized in that: The visual sensor is electrically connected to the industrial control machine.

7. The detection device for the crucible shaft bellows of a single crystal furnace according to claim 6, characterized in that: When the accumulation area of ​​the particles is greater than or equal to 20% of the entire area of ​​the mounting plate in the cavity, a signal that cleaning is required is transmitted to the industrial computer.

8. The detection device for a crucible shaft bellows of a single crystal furnace according to any one of claims 1 to 4, 6, and 7, characterized in that: The side of the mounting plate away from the corrugated pipe is connected to the movable frame, and the movable frame is connected to the frame through a lead screw.

9. The detection device for the crucible shaft bellows of a single crystal furnace according to claim 8, characterized in that: The end of the lead screw away from the movable frame is connected to the output end of the drive motor, and the drive motor is arranged on the frame.

10. The detection device for the crucible shaft bellows of a single crystal furnace according to claim 8, characterized in that: The radial gap between the inner side of the bellows and the outer wall of the crucible shaft is 3 mm to 5 mm.

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