Resistivity value adjusting device

Abstract

The utility model discloses a resistivity value adjusting device, which comprises a hollow fiber membrane component, a gas inlet component and a water path component, the hollow fiber membrane component is divided into a gas collecting cavity and a liquid collecting cavity by a hollow fiber membrane, the water path component is provided with a liquid inlet flow channel, a liquid outlet flow channel and a bypass flow channel, and the bypass flow channel is respectively communicated with the liquid inlet flow channel and the liquid outlet flow channel. The bypass flow channel is provided with a reducing part, and the overflowing area of the reducing part is smaller than that of other positions of the bypass flow channel. According to the utility model, the bypass flow channel with the reducing part is arranged, so that even if the ultrapure water flow at the input side of the liquid inlet flow channel is unstable or even smaller, sufficient ultrapure water is ensured to stably enter the hollow fiber membrane component all the time, and further, the uniform mixing of the adjusting liquid in the liquid outlet flow channel and the ultrapure water in the bypass flow channel is ensured as much as possible; and the fluctuation of the resistivity value of the mixed liquid of the liquid outlet flow channel is reduced, so that the set requirement can be met all the time.

Description

Technical Field

[0001] The utility model relates to the technical field of resistivity value adjustment, in particular to a resistivity value adjustment device. Background Art

[0002] Ultrapure water is often used to clean substrates during semiconductor and liquid crystal manufacturing. If the resistivity of the ultrapure water is too high during cleaning, static electricity can be generated, potentially causing insulation breakdown or reattachment of particles, increasing product defect rates.

[0003] Currently, hollow fiber membrane modules are typically used to dissolve an adjustment gas, such as carbon dioxide or ammonia, into ultrapure water to form an adjustment liquid. This adjustment liquid is then mixed with the ultrapure water flowing through a bypass pipe to reduce the resistivity of the mixed liquid, resulting in ultrapure water with a set resistivity value. However, when the ultrapure water flow rate on the input side becomes unstable and becomes small, the distribution ratio of the ultrapure water flowing into the hollow fiber membrane module and the bypass pipe will also become unstable. As a result, the resistivity value of the adjustment liquid formed by the hollow fiber membrane module will fluctuate to a certain extent. This, combined with the fluctuations of the ultrapure water in the bypass pipe, results in uneven mixing of the mixed liquid on the output side of the outlet flow channel, resulting in poor resistivity stability. When the resistivity value of the mixed liquid is too low or too low, it cannot meet the usage requirements. This is especially true when insufficient ultrapure water enters the hollow fiber membrane module, which can easily result in the resistivity value of the outflowing mixed liquid failing to be reduced to the required level. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a resistivity value adjusting device to solve the problem of poor stability of the resistivity value of ultrapure water at the output side of the liquid outlet flow channel.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions: a resistivity value adjustment device, comprising a hollow fiber membrane assembly divided by a hollow fiber membrane into an air collecting chamber and a liquid collecting chamber, an air inlet assembly for supplying adjustment gas to the air collecting chamber, and a water channel assembly arranged on the outside of the hollow fiber membrane assembly, the water channel assembly having: an inlet channel, which is connected to the liquid collecting chamber, for supplying ultrapure water to the liquid collecting chamber, so that the adjustment gas dissolves into the ultrapure water in the liquid collecting chamber to form an adjustment liquid; an outlet channel, which is connected to the liquid collecting chamber, for discharging the adjustment liquid in the liquid collecting chamber; the water channel assembly also has a bypass channel, which is connected to the inlet channel and the outlet channel respectively, so that part of the ultrapure water in the inlet channel bypasses the hollow fiber membrane assembly and directly enters the outlet channel through the bypass channel, and mixes with the adjustment liquid in the outlet channel; the bypass channel has a reduced diameter portion, and the flow area of ​​the reduced diameter portion is smaller than the flow area of ​​the remaining positions of the bypass channel. This technical solution has the following technical effects:

[0006] The utility model provides a bypass flow channel with a reduced diameter portion. On the one hand, when ultrapure water flows through the bypass flow channel, the reduced diameter portion can increase the pressure loss of ultrapure water passing through the reduced diameter portion, reduce the flow rate of ultrapure water flowing through the bypass flow channel, and thus increase the flow rate of ultrapure water flowing to the hollow fiber membrane assembly. Because when the ultrapure water flow rate at the input side of the liquid inlet flow channel is small, the distribution ratio of the ultrapure water flowing to the hollow fiber membrane assembly and the bypass flow channel will be broken, resulting in insufficient ultrapure water entering the hollow fiber membrane assembly to dissolve adjusting gases such as carbon dioxide gas or ammonia to form an adjusting liquid, which in turn results in the resistivity value of the adjusting liquid flowing to the liquid outlet flow channel failing to decrease to the set required resistivity value. When the ultrapure water flow rate flowing into the input side of the liquid inlet flow channel is unstable, the resistivity of the adjusting liquid flowing to the liquid outlet flow channel will also fluctuate to a certain extent, resulting in poor stability of the resistivity value of the adjusting liquid flowing to the liquid outlet flow channel. The provision of the reduced diameter portion, When the flow rate of ultrapure water flowing into the liquid inlet channel is unstable and becomes a smaller flow rate, it can be ensured that there is always a sufficient amount of ultrapure water stably entering the hollow fiber membrane component, thereby ensuring that the resistivity value of the adjustment liquid flowing to the liquid outlet channel is relatively stable; on the other hand, when the ultrapure water in the bypass channel flows through the diameter reduction portion, the bypass channel is located upstream of the liquid outlet channel, the cross-section of the diameter reduction portion is reduced, and the flow velocity will increase and cause the ultrapure water to be sprayed downstream of the diameter reduction portion, so that the ultrapure water first generates turbulence in the bypass channel, and the ultrapure water in the turbulent bypass channel can be fully mixed with the stable adjustment liquid in the liquid outlet channel. The above two aspects work together to make the turbulent ultrapure water and the stable adjustment liquid that meets the set resistivity value as fully and evenly as possible, thereby enhancing the stability of the resistivity value of the mixed liquid flowing out of the liquid outlet channel, so that the resistivity value of the mixed liquid is basically stable at a predetermined value that meets the use requirements.

[0007] In the resistivity adjustment device described above, a portion of the inner wall of the bypass channel protrudes toward its central axis to form a reduced diameter portion; alternatively, an annular rib is provided on the inner wall of the bypass channel, protruding from the inner wall of the bypass channel to form the reduced diameter portion within the bypass channel. Forming the reduced diameter portion by protruding a portion of the inner wall of the bypass channel toward its central axis can reduce manufacturing and processing difficulties, or forming the reduced diameter portion by the annular rib protruding from the inner wall of the bypass channel can enhance the strength and stability of the reduced diameter portion. Both methods of forming the reduced diameter portion prevent deformation of the reduced diameter portion due to prolonged erosion by ultrapure water, and the preferred method can be selected based on actual production needs to facilitate manufacturing and processing.

[0008] In the resistivity value adjustment device described above, the waterway assembly includes a diverter tee, a converging tee, a bypass pipe, a first liquid inlet pipe and a second liquid inlet pipe respectively sealedly connected to both ends of the diverter tee, and a first liquid outlet pipe and a second liquid outlet pipe respectively sealedly connected to both ends of the converging tee; a portion of the diverter tee, the first liquid inlet pipe, and the second liquid inlet pipe constitute an inlet flow channel, a portion of the converging tee, the first liquid outlet pipe, and the second liquid outlet pipe constitute an outlet flow channel, the third end of the diverter tee includes a first joint connected to the inlet flow channel, the third end of the converging tee includes a second joint connected to the outlet flow channel, and both ends of the bypass pipe are respectively sealedly connected to the first joint and the second joint to form a bypass flow channel together with the first joint and the second joint. By configuring the waterway assembly as a structure in which the diverter tee, the converging tee, and the bypass pipe are separately provided, the difficulty of production and processing of the waterway assembly is reduced, assembly is simple and convenient, and in the event of damage, damaged parts can be replaced individually, reducing maintenance costs.

[0009] In the above-mentioned resistivity adjustment device, at least one of the first joint and the second joint is detachably sealed and connected to the end of the bypass pipe via a sealing sleeve having a water hole, and the diameter reduction portion is provided on the sealing sleeve, and the aperture of the diameter reduction portion is smaller than the aperture of the bypass pipe. By sealingly connecting the end of the bypass pipe via the sealing sleeve, at least one of the first joint and the second joint can achieve good sealing performance. The other of the first joint or the second joint can also be directly sealed and connected to the end of the bypass pipe, and the diameter reduction portion is provided on the sealing sleeve, so that at least one diameter reduction portion changes the flow rate of ultrapure water passing through the interior thereof, thereby reducing the flow rate of the bypass pipe. In addition, because the sealing sleeve is detachably connected to the first joint and / or the second joint, when the sealing sleeve is damaged or fails, the sealing sleeve can be replaced separately, reducing the difficulty of maintenance and replacement. When the throttling effect of the diameter reduction portion on the sealing sleeve deteriorates, it can be replaced with a new one, thereby restoring the resistivity value of the mixed liquid on the output side to remain stable.

[0010] In the resistivity adjustment device described above, two sealing sleeves are provided. The first and second joints are both threaded joints, and each includes an annular sealing groove corresponding to each sealing sleeve. The end of the bypass pipe is sleeved on one end of each sealing sleeve, and the other end of each sealing sleeve is sealed and inserted into the annular sealing groove. A locking nut is threadedly connected to each threaded joint, and the inner wall of the locking nut abuts the portion of the bypass pipe sleeved on the sealing sleeve, thereby ensuring a pressure-sealed connection between the bypass pipe and the sealing sleeve. The annular sealing groove increases the contact area between the sealing sleeve and the first and second joints. The extrusion of the locking nut and the provision of the annular sealing groove can cooperate to improve the sealing between the sealing sleeve and the first and second joints, thereby preventing leakage at the connection between the bypass pipe and the first or second joint. The setting of two sealing sleeves is equivalent to setting two reduced diameter parts in the bypass flow channel, and the two reduced diameter parts are arranged at intervals. When ultrapure water flows in the bypass flow channel, the flow velocity will change every time it passes through a reduced diameter part, that is, the ultrapure water will generate two turbulences, which enhances the mixing effect of the ultrapure water in the bypass flow channel and the adjustment liquid in the liquid outlet flow channel, thereby making the resistivity value of the mixed liquid flowing out of the liquid outlet flow channel more stable.

[0011] In the resistivity adjustment device, the inner wall of the reduced diameter portion and the inner wall of the water passage are connected by a transition slope. The transition slope can guide the water flow as it passes through the reduced diameter portion, making the water flow smoother and facilitating the subsequent uniform mixing of the ultrapure water with the adjustment liquid.

[0012] In the resistivity adjustment device described above, the reduced diameter portion is provided directly on the bypass pipe; alternatively, the reduced diameter portion is provided directly on the first joint and / or the second joint. Providing the reduced diameter portion on the first joint and / or the second joint, or directly on the bypass pipe, can reduce the difficulty of processing and assembling the waterway assembly, thereby improving assembly efficiency of the waterway assembly.

[0013] In the aforementioned resistivity adjustment device, the inner diameter of the reduced diameter portion is A, and the inner diameter of the bypass pipe is B, satisfying 0.3 ≤ A / B ≤ 0.8. This prevents a large difference in the inner diameters of the reduced diameter portion and the bypass pipe, which could result in excessive pressure loss at the reduced diameter portion when ultrapure water flows from the bypass pipe to the reduced diameter portion, causing the resistivity of the mixed liquid to fall below a preset value. It also prevents a small difference in the inner diameters of the reduced diameter portion and the bypass pipe, which could result in a failure to effectively restrict the flow of ultrapure water through the bypass channel when the flow rate of ultrapure water flowing into the hollow fiber membrane module is low, thereby ensuring that the resistivity of the mixed liquid flowing out of the outlet channel remains stable within a set required range.

[0014] In the resistivity adjustment device described above, the bypass channel and the liquid outlet channel both extend in a straight line and are arranged perpendicularly to each other, such that the bypass channel's outlet port is positioned opposite the inner wall of the liquid outlet channel. Because the bypass channel includes a reduced diameter portion, ultrapure water forms turbulent flow within the bypass channel and is ejected into the liquid outlet channel. Because the bypass channel's outlet port is positioned opposite the inner wall of the liquid outlet channel, the turbulent flow impacts the inner wall of the liquid outlet channel, promoting thorough mixing of the ultrapure water with the adjustment liquid and reducing volatility in the mixed liquid exiting the liquid outlet channel.

[0015] In the resistivity adjustment device described above, the hollow fiber membrane assembly and bypass tube both extend vertically and are spaced apart. The converging tee is located at the top of the bypass tube, and the diverting tee is located at the bottom. During operation, ultrapure water in the inlet channel flows horizontally toward the liquid collecting chamber of the hollow fiber membrane assembly and flows upward through the vertically extending bypass channel into the horizontally extending outlet channel. A reduced diameter portion is provided in the bypass channel to accelerate the ultrapure water in the bypass channel, ensuring smooth flow into the outlet channel.

[0016] The features and advantages of the present invention will be disclosed in detail in the following specific embodiments and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described below with reference to the accompanying drawings and specific embodiments:

[0018] Figure 1 is a cross-sectional view of the resistivity adjustment device in Example 1;

[0019] Figure 2 for Figure 1 A magnified view of part A;

[0020] Figure 3 This is a three-dimensional diagram of the water channel assembly in Example 1.

[0021] Reference numerals:

[0022] 100, hollow fiber membrane assembly; 110, housing; 120, hollow fiber membrane; 130, gas collecting chamber; 140, liquid collecting chamber;

[0023] 210, liquid inlet channel; 220, liquid outlet channel; 230, bypass channel;

[0024] 300, diverter tee; 310, first joint;

[0025] 400, converging tee; 410, second joint; 420, annular sealing groove;

[0026] 500, bypass pipe; 510, protrusion;

[0027] 610, first liquid inlet pipe; 620, second liquid inlet pipe;

[0028] 710, first liquid outlet pipe; 720, second liquid outlet pipe;

[0029] 800, sealing sleeve; 810, water hole; 820, reduced diameter portion; 830, transition slope;

[0030] 900. Lock nut. DETAILED DESCRIPTION

[0031] The present invention proposes a resistivity adjustment device, comprising a hollow fiber membrane assembly divided by a hollow fiber membrane into an air collecting chamber and a liquid collecting chamber, an air inlet assembly for supplying adjustment gas to the air collecting chamber, and a water channel assembly arranged on the outside of the hollow fiber membrane assembly, the water channel assembly having: a liquid inlet channel, which is connected to the liquid collecting chamber, for supplying ultrapure water to the liquid collecting chamber, so that the adjustment gas dissolves into the ultrapure water in the liquid collecting chamber to form an adjustment liquid; a liquid outlet channel, which is connected to the liquid collecting chamber, for discharging the adjustment liquid in the liquid collecting chamber; the water channel assembly also has a bypass channel, which is connected to the liquid inlet channel and the liquid outlet channel respectively, so that part of the ultrapure water in the liquid inlet channel bypasses the hollow fiber membrane assembly and directly enters the liquid outlet channel through the bypass channel, and mixes with the adjustment liquid in the liquid outlet channel; the bypass channel has a reduced diameter portion, and the flow area of ​​the reduced diameter portion is smaller than the flow area of ​​the bypass channel at other positions.

[0032] The utility model provides a bypass flow channel with a reduced diameter portion. On the one hand, when ultrapure water flows through the bypass flow channel, the reduced diameter portion can increase the pressure loss of ultrapure water passing through the reduced diameter portion, reduce the flow rate of ultrapure water flowing through the bypass flow channel, and thus increase the flow rate of ultrapure water flowing to the hollow fiber membrane assembly. Because when the ultrapure water flow rate at the input side of the liquid inlet flow channel is small, the distribution ratio of ultrapure water flowing to the hollow fiber membrane assembly and the bypass flow channel will be broken, resulting in insufficient ultrapure water entering the hollow fiber membrane assembly to dissolve adjustment gases such as carbon dioxide gas or ammonia to form an adjustment liquid, which in turn causes the resistivity value of the adjustment liquid flowing to the liquid outlet flow channel to fail to decrease to the set required resistivity value. When the ultrapure water flow rate flowing into the input side of the liquid inlet flow channel is unstable, the resistivity of the adjustment liquid flowing to the liquid outlet flow channel will also fluctuate to a certain extent, resulting in poor stability of the resistivity value of the adjustment liquid flowing to the liquid outlet flow channel. The setting of the reduced diameter portion , it can ensure that when the flow rate of ultrapure water flowing into the liquid inlet channel is unstable and becomes a smaller flow rate, there is always a sufficient amount of ultrapure water that stably enters the hollow fiber membrane component, thereby ensuring that the resistivity value of the adjustment liquid flowing into the liquid outlet channel is relatively stable; on the other hand, when the ultrapure water in the bypass channel flows through the diameter reduction portion, the bypass channel is located upstream of the liquid outlet channel, the cross-section of the diameter reduction portion is reduced, and the flow velocity will increase and cause the ultrapure water to be sprayed downstream of the diameter reduction portion, so that the ultrapure water first generates turbulence in the bypass channel, and the ultrapure water in the turbulent bypass channel and the stable adjustment liquid in the liquid outlet channel can be fully mixed and evenly. The above two aspects work together to make the turbulent ultrapure water and the stable adjustment liquid that meets the set resistivity value as fully and evenly as possible, thereby enhancing the stability of the resistivity value of the mixed liquid flowing out of the liquid outlet channel, so that the resistivity value of the mixed liquid is basically stable at a predetermined value that meets the use requirements.

[0033] The following is an explanation and description of the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention, but the following embodiments are only preferred embodiments of the present invention and are not exhaustive. Based on the embodiments in the embodiments, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "clockwise", "counterclockwise" and the like to indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, unless otherwise specified, "plurality" means two or more, unless expressly limited otherwise.

[0036] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0037] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0038] Example 1:

[0039] A resistivity value adjusting device, such as Figures 1 to 3As shown, it includes a hollow fiber membrane assembly 100, an air inlet assembly 150, an air outlet assembly 160 and a waterway assembly. The hollow fiber membrane assembly 100 includes a shell 110 and a hollow fiber membrane 120 arranged inside the shell 110. The hollow fiber membrane 120 is tubular, and a liquid collecting cavity 140 for liquid to pass through is formed inside it. The liquid collecting cavity 140 here is the sum of the internal spaces of all the tubular hollow fiber membranes 120, and the outside is a gas collecting cavity 130 for gas to pass through, which is the so-called inner tube. In the method of water flow and air flow outside the tube, the air inlet assembly 150 and the air outlet assembly 160 are connected to the gas collection chamber 130. The air inlet assembly 150 is used to supply carbon dioxide gas or ammonia gas or other adjustment gas into the gas collection chamber 130. The air inlet assembly 150 can refer to the air inlet or air inlet pipe on the housing 110. A pump or tank filled with adjustment gas can be connected to the air inlet pipe as an external component. The air outlet assembly 160 is used to discharge excess adjustment gas in the gas collection chamber 130 to ensure the stability of the air pressure in the gas collection chamber 130. Of course, it is understandable that the positions of the gas collection chamber 130 and the liquid collection chamber 140 in the hollow fiber membrane module 100 can also be reversed, that is, the liquid collection chamber 140 is the space outside the tubular hollow fiber membrane 120, and the gas collection chamber 130 is the space inside the tubular hollow fiber membrane 120, which is the so-called air flow inside the tube and water flow outside the tube. The working principle of the above-mentioned hollow fiber membrane module is the existing technology, and thus it will not be repeated or specifically limited.

[0040] It should be noted that the principle of static electricity removal for ultrapure water is that, for example, carbon dioxide dissolves in water to form carbonic acid, which decomposes into hydrogen ions and bicarbonate ions, and bicarbonate ions further decompose into hydrogen ions and carbonate ions. The negatively charged ionized water neutralizes the positive charge on the surface of the substrate, thereby achieving static electricity removal.

[0041] The water channel component is arranged on the outside of the hollow fiber membrane component 100, and has a liquid inlet channel 210, a liquid outlet channel 220 and a bypass channel 230. The liquid inlet channel 210 is connected to the liquid collecting chamber 140 to supply ultrapure water to the liquid collecting chamber 140. When the ultrapure water passes through the liquid collecting chamber 140, the micropores on the surface of the tubular hollow fiber membrane 120 can prevent the ultrapure water from entering the gas collecting chamber 130. However, the adjustment gas in the gas collecting chamber 130 can enter the liquid collecting chamber 140 through the micropores and dissolve in the ultrapure water in the liquid collecting chamber 140, so that when the ultrapure water flows through the liquid collecting chamber 140, the flow direction of the ultrapure water in the water channel component is as shown by the arrow, and the ultrapure water with a higher resistivity value is changed into an adjustment liquid with a lower resistivity value; the liquid outlet channel 220 is also connected to the liquid collecting chamber 140, and the adjustment liquid in the liquid collecting chamber 140 is discharged through the liquid outlet channel 220; the bypass channel 230 is connected to the liquid inlet channel 210 and the liquid outlet channel 220 respectively, and the ultrapure water entering the liquid inlet channel 210 is divided into two paths, one path of ultrapure water flows into the liquid collecting chamber 140 of the hollow fiber membrane assembly 100, and the adjustment gas dissolves with the ultrapure water in the liquid collecting chamber 140 to generate an adjustment liquid that enters the liquid outlet channel 220; the other path of ultrapure water does not enter the hollow fiber membrane assembly 100, but bypasses the hollow fiber membrane assembly 100 and directly enters the liquid outlet channel 220 through the bypass channel 230, mixes with the adjustment liquid in the liquid outlet channel 220 to become a mixed liquid, and finally flows out through the liquid outlet channel 220. The bypass channel 230 has a reduced diameter portion 820 , and the flow area of ​​the reduced diameter portion 820 is smaller than the flow area of ​​the remaining positions of the bypass channel 230 , that is, when the ultrapure water in the bypass channel 230 flows through the reduced diameter portion 820 , the flow area of ​​the ultrapure water is reduced.

[0042] The present invention provides a bypass channel 230 with a reduced diameter portion 820, so that when ultrapure water flows through the bypass channel 230, the reduced diameter portion 820 can increase the pressure loss of ultrapure water passing through the reduced diameter portion 820, reduce the flow rate of ultrapure water flowing through the bypass channel 230, and thereby increase the flow rate of ultrapure water flowing to the hollow fiber membrane assembly 100. Because when the flow rate of ultrapure water flowing into the input side of the liquid inlet channel 210 is small, the distribution ratio of ultrapure water flowing to the hollow fiber membrane assembly 100 and the bypass channel 230 will be broken, resulting in insufficient ultrapure water entering the hollow fiber membrane assembly 100 to dissolve adjustment gases such as carbon dioxide gas or ammonia to form an adjustment liquid, which in turn causes the resistivity value of the adjustment liquid flowing to the liquid outlet channel 220 to fail to decrease to the set required resistivity value. Therefore, when the flow rate of ultrapure water flowing into the input side of the liquid inlet channel 210 is unstable, the resistivity of the adjustment liquid flowing out of the liquid outlet channel 220 will also have a certain degree of volatility, resulting in uneven mixing of the adjustment liquid flowing out of the liquid outlet channel 220 and the ultrapure water in the bypass channel 230, and poor stability of the resistivity value of the mixed liquid, and the reduced diameter portion 820 The arrangement can ensure that when the flow rate of ultrapure water flowing into the liquid inlet channel 210 is unstable, there is always a sufficient amount of ultrapure water that stably enters the hollow fiber membrane assembly 100, thereby ensuring that the resistivity value of the adjustment liquid flowing out of the liquid outlet channel 220 is relatively stable. At the same time, because the bypass channel 230 has a reduced diameter portion 820, the ultrapure water in the bypass channel 230 will increase its flow rate when flowing through the reduced diameter portion 820 and be sprayed downstream of the reduced diameter portion 820, so that the ultrapure water will generate turbulence in the bypass channel 230. The turbulence allows the ultrapure water in the bypass channel 230 and the relatively stable adjustment liquid in the liquid outlet channel 220 to be fully mixed evenly, thereby enhancing the stability of the resistivity value of the mixed liquid flowing out of the liquid outlet channel 220 and avoiding large fluctuations in the mixed liquid.

[0043] The structure of the reduced diameter portion 820 is diverse. It is only necessary to ensure that the flow area of ​​the reduced diameter portion 820 is smaller than the flow area of ​​the rest of the bypass channel 230. Generally, for the basic regular circular bypass channel 230, it is only necessary to ensure that the inner diameter of the reduced diameter portion 820 is smaller than the inner diameter of the rest of the bypass channel 230. For example, the reduced diameter portion can be formed by part of the inner wall of the bypass channel 230 protruding toward its central axis to reduce the difficulty of production and processing, or it can be formed by an annular rib protruding from the inner wall of the bypass channel 230 to enhance the strength and stability of the reduced diameter portion 820 and avoid deformation of the reduced diameter portion 820. The annular rib can be directly formed on the inner wall of the bypass channel 230 during the production process, or it can be a welding protrusion protruding inwardly formed at the weld by welding two tubular structures. It can be set according to actual production needs to facilitate production and processing.

[0044] like Figure 1As shown, in this embodiment, the water channel assembly includes a diverting tee 300, a converging tee 400, a bypass pipe 500, a first liquid inlet pipe 610, a second liquid inlet pipe 620, a first liquid outlet pipe 710 and a second liquid outlet pipe 720. The first end of the diverting tee 300 is sealedly connected to the first liquid inlet pipe 610, and the second end is sealedly connected to the second liquid inlet pipe 620. The second liquid inlet pipe 620 is connected to the liquid collecting chamber 140 of the hollow fiber membrane assembly 100. The first liquid inlet pipe 610 and the second liquid inlet pipe 620 are connected through the diverting tee 300 to form an inlet channel 210 for supplying ultrapure water to the liquid collecting chamber 140; the first end of the converging tee 400 is sealedly connected to the first liquid outlet pipe 710, and the second end is sealedly connected to the second liquid outlet pipe 720. The first liquid outlet pipe 710 is connected to the liquid collecting chamber 140. The liquid collecting chamber 140 of the hollow fiber membrane assembly 100 is connected, and the first liquid outlet pipe 710 and the second liquid outlet pipe 720 are connected through the converging tee 400 to form a liquid outlet channel 220 for discharging the adjustment liquid from the liquid collecting chamber 140; the third end of the diverting tee 300 includes a first joint 310, and the first joint 310 is connected to the liquid inlet channel 210; the third end of the converging tee 400 includes a second joint 410, and the second joint 410 is connected to the liquid outlet channel 220, and the two ends of the bypass pipe 500 are respectively sealed and connected to the first joint 310 and the second joint 410, and the first joint 310 and the second joint 410 are connected through the bypass pipe 500 to form a bypass channel 230, and part of the ultrapure water in the diverting tee 300 enters the converging tee 400 through the bypass channel 230. By configuring the water channel assembly as a structure in which the pipe fittings such as the split tee 300, the converging tee 400 and the bypass pipe 500 are separately arranged, the difficulty of production, processing and assembly of the water channel assembly is reduced. In case of damage, the damaged parts can be replaced individually, thereby reducing maintenance costs.

[0045] In this embodiment, two cylindrical sealing sleeves 800 are provided, and the two sealing sleeves 800 are respectively connected to the first joint 310 and the second joint 410. The cylindrical sealing sleeves 800 surround a water hole 810. The sealing sleeve 800 is sealed and connected to the end of the bypass pipe 500, so that the first joint 310 and the bypass pipe 500 and the second joint 410 and the bypass pipe 500 are connected respectively through the water holes 810 of the two sealing sleeves 800. The two sealing sleeves 800 are detachably connected to the first joint 310 and the second joint 410, respectively. The reduced diameter portion 820 is provided on the sealing sleeve 800 so that the aperture of the reduced diameter portion in the sealing sleeve 800 is smaller than the aperture of the bypass pipe 500.

[0046] By providing a sealing sleeve 800 for sealingly connecting the ends of the bypass pipe 500 on both the first connector 310 and the second connector 410, and by providing a reduced diameter portion 820 on the sealing sleeve 800, the sealing sleeve 800 not only seals the bypass pipe 500 with the first connector 310 and the second connector 410, but also increases the flow rate of the ultrapure water passing through the reduced diameter portion 820, thereby reducing the flow rate of the ultrapure water in the bypass pipe 500. The provision of two sealing sleeves 800 is equivalent to providing two reduced diameter portions 820 within the bypass channel 230, with the two reduced diameter portions 820 spaced apart. When the ultrapure water flows through the bypass channel 230, the flow rate changes with each reduced diameter portion 820, resulting in two turbulent flows in the ultrapure water. This enhances the mixing effect between the ultrapure water in the bypass channel 230 and the adjusting liquid in the outlet channel 220, thereby ensuring more uniform mixing and more stable resistivity of the mixed liquid flowing out of the outlet channel 220. Furthermore, because the sealing sleeve 800 is detachably connected to the first joint 310 and the second joint 410, when the sealing sleeve 800 is damaged or fails, the sealing sleeve 800 can be replaced alone, reducing the difficulty of maintenance and replacement. Of course, it is understandable that in this embodiment, only one sealing sleeve 800 may be provided, that is, the sealing sleeve 800 may be connected only to the first joint 310, or the sealing sleeve 800 may be connected only to the second joint 410, and then the joint not connected to the sealing sleeve 800 is directly and sealedly connected to the end of the sealing sleeve 800.

[0047] In order to verify the improvement effect of the bypass flow channel 230 with the reduced diameter portion 820 on the fluctuation of the resistivity value of the mixed liquid in the liquid outlet flow channel 220, for example, the resistivity value of ultrapure water that actually meets the use requirements is 0.1±0.01 (MΩ·cm), that is, the expected ultrapure water resistivity value is 0.1MΩ·cm, and the allowable error range is ±0.01MΩ·cm. The sealing sleeve 800 at the end of the bypass pipe 500 is provided with the reduced diameter portion 820 as an embodiment, and the bypass flow channel 230 without the reduced diameter portion 820 is used as a control group. A resistivity tester is set at the outlet of the liquid outlet flow channel 220 to detect the resistivity value of the adjustment liquid. When ultrapure water with a resistivity value of 18.2MΩ·cm at 25°C is introduced into the input side of the liquid inlet flow channel 210, and the water pressure is 0.3MPa for 3 minutes, and multiple sets of data are tested when the ultrapure water on the input side is changed to different flow rates, the test results are shown in the following table:

[0048]

[0049] According to the data in the above table, the bypass channel 230 with the reduced diameter portion 820 reduces the volatility of the resistivity value of the mixed liquid in the liquid outlet channel 220, so that the resistivity value of the mixed liquid flowing out of the liquid outlet channel 220 can be stably maintained at a constant value within the set required resistivity value range, especially when the flow rate on the input side of the liquid inlet channel 210 is low (0.5 or 1 L / min), the resistivity value of the mixed liquid in the liquid outlet channel 220 does not fluctuate and is maintained at a predetermined value of 0.1 MΩ·cm; while in the control group where the reduced diameter portion 820 is not provided, the resistivity value of the mixed liquid in the liquid outlet channel 220 fluctuates greatly, with unreasonable fluctuations above and below the predetermined value of 0.1 MΩ, so that the resistivity value of the mixed liquid cannot be stably maintained within the set required resistivity value range, that is, the mixed liquid in the liquid outlet channel 220 in the control group may not meet production needs.

[0050] like Figure 2 As shown, in this embodiment, the first joint 310 and the second joint 410 are both threaded joints, each of which is threadedly connected with a locking nut 900. An annular sealing groove 420 is provided inside the first joint 310 and the second joint 410. When the two ends of the bypass pipe 500 are respectively sealed with the first joint 310 and the second joint 410, the end sealing sleeve of the bypass pipe 500 is provided at one end of the sealing sleeve 800. Because the outer wall of the end of the sealing sleeve 800 bulges outward, the bypass pipe 500 bulges outward under the push of the sealing sleeve 800 to form a protrusion 510. The other end of the sealing sleeve 800 is sealed and inserted in the annular sealing groove 420. The two locking nuts 900 are respectively threadedly connected. On the first joint 310 and the second joint 410, at this time, the inner wall of the locking nut 900 abuts against the protrusion 510 to squeeze the sealing sleeve 800 in the direction of the annular sealing groove 420 through the protrusion 510, so that the end of the bypass pipe 500 and the sealing sleeve 800 are pressurized and sealed. The annular sealing groove 420 increases the sealing contact area between the sealing sleeve 800 and the first joint 310 or the second joint 410. The extrusion of the locking nut 900 and the setting of the annular sealing groove 420 can work together to improve the sealing between the sealing sleeve 800 and the first joint 310 and the second joint 410, so as to avoid leakage at the connection between the bypass pipe 500 and the first joint 310 or the second joint 410.

[0051] Preferably, a transition slope 830 is provided between the inner wall of the reduced diameter portion 820 and the inner wall of the water hole 810, and the inner wall of the reduced diameter portion 820 and the inner wall of the water hole 810 are connected by the transition slope 830. The transition slope 830 can guide the water flow when the water flows through the reduced diameter portion 820, so that the flow of water is smoother, so that the ultrapure water can be evenly mixed with the adjustment liquid later.

[0052] like Figure 2As shown, in this embodiment, the inner diameter of the reduced diameter portion 820 is A, and the inner diameter of the bypass pipe 500 is B. The inner diameter A of the reduced diameter portion 820 and the inner diameter B of the bypass pipe 500 satisfy 0.3≤A / B≤0.8, so as to avoid excessive difference in the inner diameters of the reduced diameter portion 820 and the bypass pipe 500, which may result in excessive restriction of the ultrapure water flow rate when the ultrapure water flows from the bypass pipe 500 to the reduced diameter portion 820. It also avoids the situation where the difference in the inner diameters of the reduced diameter portion 820 and the bypass pipe 500 is small, and the ultrapure water flow rate flowing into the liquid inlet channel 210 is small, and the ultrapure water flow rate passing through the bypass channel 230 cannot be effectively restricted, thereby ensuring that the resistivity value of the mixed liquid flowing out of the liquid outlet channel 220 is stable within the set required range.

[0053] The bypass channel 230 and the liquid outlet channel 220 in this embodiment both extend in a straight line, and the bypass channel 230 and the liquid outlet channel 220 are arranged vertically, so that the liquid outlet of the bypass channel 230 is aligned with the inner wall of the liquid outlet channel 220. Because a reduced diameter portion 820 is provided in the bypass channel 230, ultrapure water forms turbulence in the bypass channel 230 and is sprayed into the liquid outlet channel 220. Because the liquid outlet of the bypass channel 230 is arranged relative to the inner wall of the liquid outlet channel 220, the turbulence will collide with the inner wall of the liquid outlet channel 220, so that the ultrapure water can be fully mixed with the adjustment liquid more evenly and the effect is better, further reducing the volatility of the adjustment liquid flowing out of the liquid outlet channel 220.

[0054] In this embodiment, the resistivity value adjusting device is used as follows: Figure 1 As shown, the hollow fiber membrane module 100 and the bypass pipe 500 both extend vertically and are spaced apart in the horizontal direction. The converging tee 400 and the diverting tee 300 are spaced apart in the height direction. The converging tee 400 is connected to the top of the bypass pipe 500, and the diverting tee 300 is connected to the bottom of the bypass pipe 500. During operation, the ultrapure water in the liquid inlet channel 210 flows horizontally toward the liquid collecting chamber 140 of the hollow fiber membrane module 100 in one direction, and flows upward into the horizontally extending liquid outlet channel 220 through the vertically extending bypass channel 230 in the other direction. The reduced diameter portion 820 is provided in the bypass channel 230 to accelerate the ultrapure water in the bypass channel 230, allowing the ultrapure water in the bypass channel 230 to flow smoothly into the liquid outlet channel 220.

[0055] Example 2:

[0056] The difference between this embodiment and embodiment one is that, in this embodiment, the water channel assembly does not include a diverter tee and a converging tee, but directly integrates the first liquid inlet pipe and the second liquid inlet pipe to form an inlet pipe that encloses the liquid inlet channel, and integrates the first liquid outlet pipe and the second liquid outlet pipe to form an outlet pipe that encloses the liquid outlet channel. Both ends of the bypass pipe are directly welded to the liquid inlet pipe and the liquid outlet pipe to achieve communication between the bypass channel and the liquid inlet channel and the liquid outlet channel. The structure is simple and the assembly difficulty is reduced.

[0057] Example 3:

[0058] This embodiment differs from the first embodiment in that, in this embodiment, the reduced diameter portion is provided directly on the bypass pipe; or, the reduced diameter portion is provided on both the first and second joints; or, the reduced diameter portion is provided on either the first or second joint. By providing the reduced diameter portion on the first and / or second joints, or directly on the bypass pipe, the difficulty of processing and assembling the waterway assembly can be reduced, thereby improving assembly efficiency of the waterway assembly.

[0059] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, certain improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A resistivity adjustment device comprising a hollow fiber membrane assembly divided by hollow fiber membranes into a gas collecting chamber and a liquid collecting chamber, an air inlet assembly for supplying adjustment gas to the gas collecting chamber, and a water channel assembly disposed outside the hollow fiber membrane assembly, the water channel assembly having: a liquid inlet channel, which is in communication with the liquid collecting chamber and is used to supply ultrapure water to the liquid collecting chamber, so that the adjustment gas dissolves in the ultrapure water in the liquid collecting chamber to form an adjustment liquid; The liquid outlet channel is connected to the liquid collecting chamber to discharge the adjustment liquid in the liquid collecting chamber; The water channel assembly further comprises a bypass flow channel, which is connected to the liquid inlet flow channel and the liquid outlet flow channel respectively, so that part of the ultrapure water in the liquid inlet flow channel bypasses the hollow fiber membrane assembly and directly enters the liquid outlet flow channel through the bypass flow channel and mixes with the adjustment liquid in the liquid outlet flow channel; The bypass flow channel has a reduced diameter portion, and a flow area of ​​the reduced diameter portion is smaller than a flow area of ​​other positions of the bypass flow channel.

2. A resistivity adjustment device according to claim 1, characterized in that: Part of the inner wall of the bypass flow channel protrudes toward the central axis thereof to form the reduced diameter portion; Alternatively, an annular rib is provided on the inner wall of the bypass flow channel, and the annular rib is provided to protrude from the inner wall of the bypass flow channel to form the reduced diameter portion in the bypass flow channel.

3. The resistivity adjustment device according to claim 1, wherein: The waterway assembly includes a diverting tee, a converging tee, a bypass pipe, a first liquid inlet pipe and a second liquid inlet pipe respectively sealedly connected to both ends of the diverting tee, and a first liquid outlet pipe and a second liquid outlet pipe respectively sealedly connected to both ends of the converging tee; A portion of the diverter tee, the first liquid inlet pipe, and the second liquid inlet pipe constitute the liquid inlet flow channel; a portion of the converging tee, the first liquid outlet pipe, and the second liquid outlet pipe constitute the liquid outlet flow channel; the third end of the diverter tee includes a first joint connected to the liquid inlet flow channel; the third end of the converging tee includes a second joint connected to the liquid outlet flow channel; both ends of the bypass pipe are respectively sealed and connected to the first joint and the second joint to form the bypass flow channel together with the first joint and the second joint.

4. The resistivity adjustment device according to claim 3, wherein: At least one of the first joint and the second joint is detachably sealed and connected to the end of the bypass pipe through a sealing sleeve having a water hole. The reduced diameter portion is provided on the sealing sleeve, and the aperture of the reduced diameter portion is smaller than the aperture of the bypass pipe.

5. The resistivity adjustment device according to claim 4, characterized in that: There are two sealing sleeves, the first joint and the second joint are both threaded joints, and each includes an annular sealing groove corresponding to each sealing sleeve, the end of the bypass pipe is sleeved on one end of each sealing sleeve, and the other end of each sealing sleeve is sealed and inserted into the annular sealing groove; A locking nut is threadedly connected to each threaded joint, and the inner wall of the locking nut abuts against the portion of the bypass pipe sleeve disposed on the sealing sleeve, so that the bypass pipe and the sealing sleeve are pressurized and sealed.

6. A resistivity adjustment device according to claim 4 or 5, characterized in that: The inner wall of the reduced diameter portion and the inner wall of the water hole are connected via a transition slope.

7. The resistivity adjustment device according to claim 3, characterized in that: The reduced diameter portion is directly provided on the bypass pipe; or, the reduced diameter portion is directly provided on the first joint and / or the second joint.

8. A resistivity adjustment device according to claim 3 or 4, characterized in that: The inner diameter of the reduced diameter portion is A, and the inner diameter of the bypass pipe is B, satisfying 0.3≤A / B≤0.

8.

9. The resistivity adjustment device according to claim 1, characterized in that: The bypass flow channel and the liquid outlet flow channel both extend in a straight line, and the bypass flow channel and the liquid outlet flow channel are arranged vertically, so that the liquid outlet of the bypass flow channel is arranged opposite to the inner wall of the liquid outlet flow channel.

10. The resistivity adjustment device according to claim 3, characterized in that: The hollow fiber membrane assembly and the bypass pipe are both extended vertically and arranged at intervals. The converging tee is located at the top of the bypass pipe, and the diverting tee is located at the bottom of the bypass pipe.

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