Air floatation connecting assembly and air floatation motion platform

Abstract

The utility model provides an air floatation connecting assembly and an air floatation motion platform, and relates to the technical field of semiconductor processing. The air floatation connecting assembly comprises an air floatation cushion, an ejector rod and a connecting piece, the ejector rod comprises a limiting rod section and a connecting rod section in the axial direction, an annular boss extending in the circumferential direction of the limiting rod section is arranged on the peripheral wall of the limiting rod section in a surrounding mode, and external threads used for being connected with a movement assembly are arranged on the peripheral wall of the connecting rod section; a connecting channel penetrating in the axial direction of the ejector rod is arranged in the ejector rod. The connecting piece comprises a screw rod and a screw head fixedly arranged at one end of the screw rod, the screw rod penetrates through the connecting channel and is in threaded connection with the air floating cushion, and the ejector rod is clamped between the screw head and the air floating cushion. When the air floatation connecting assembly is applied to the motion platform, the assembly efficiency and the maintenance convenience of the motion platform can be improved, and the air film gap formed between the air floatation cushion and the base station or the guide rail is convenient to adjust, so that the motion stability and accuracy of the motion assembly are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to an air-floating connection component and an air-floating motion platform. Background Art

[0002] At present, in the production or testing process of high-precision instruments, the motion platform generally adopts an air-floating type. Specifically, the motion component of the motion platform is connected to the air-floating pad, and an air film is formed between the air-floating pad and the base of the motion platform to achieve a floating connection and frictionless motion between the motion component and the base, thereby improving the motion stability and accuracy of the motion component, and correspondingly improving the production or testing accuracy.

[0003] However, in the existing technology, the connection structure between the motion component and the air floating cushion is complex, and the disassembly and assembly of the two is relatively inconvenient, resulting in low assembly efficiency and greater difficulty in maintenance of the motion platform; at the same time, during use, the air film gap formed between the air floating cushion and the base is difficult to adjust, resulting in poor movement stability and accuracy of the motion component. Utility Model Content

[0004] The purpose of the utility model is to provide an air-floating connection component and an air-floating motion platform to solve the technical problems that the existing motion platform has low assembly efficiency and is difficult to maintain, and the air film gap formed between the air-floating pad and the base is difficult to adjust, resulting in poor motion stability and accuracy of the motion component.

[0005] In order to solve the above problems, the present invention provides an air floating connection assembly, comprising:

[0006] Air flotation cushion;

[0007] The mandrel comprises a limiting rod section and a connecting rod section in the axial direction, the outer peripheral wall of the limiting rod section is provided with an annular boss extending along its circumference, and the outer peripheral wall of the connecting rod section is provided with an external thread for connecting to the moving component; the mandrel is provided with a connecting channel extending along its axial direction; and

[0008] The connecting piece includes a screw and a screw head fixed to one end of the screw. The screw passes through the connecting channel and is threadedly connected to the air floating cushion. The push rod is clamped between the screw head and the air floating cushion.

[0009] Optionally, the connecting channel includes a first channel section, a second channel section and a third channel section along its axial direction, the first channel section is used to accommodate the screw head, the third channel section is used to accommodate the screw rod, and the second channel section is conical with a narrowing from the first channel section to the third channel section; the screw head and the screw rod are connected through a connecting section, the outer peripheral wall of the connecting section is conical and matches the inner wall of the second channel section.

[0010] Optionally, the axial length of the first channel section is 0.1 to 0.5 mm greater than the axial length of the screw head.

[0011] Optionally, the outer peripheral wall of the annular boss is in the shape of a hexagonal prism.

[0012] Optionally, the air floating cushion is provided with a mounting groove, a pressure equalizing seat is embedded in the mounting groove, a first threaded hole is provided at the center of the pressure equalizing seat, and the screw is threadedly connected to the first threaded hole.

[0013] Optionally, a conical groove is provided on the end face of the pressure equalizing seat facing the annular boss, the conical groove is flared in the direction toward the annular boss, and the first threaded hole is coaxially connected to the conical groove; the end face of the connecting rod section facing away from the limiting rod section is conical and matches the side wall of the conical groove.

[0014] Optionally, the mounting groove includes a coaxial first groove section and a second groove section from the groove mouth to the groove bottom, and the diameter of the first groove section is larger than that of the second groove section; the equal pressure seat includes a first seat body and a second seat body along its axial direction, the first seat body is embedded in the first groove section, the second seat body is inserted into the second groove section, and an adjustment gap is left between the second seat body and the groove bottom of the second groove section.

[0015] Optionally, the first seat body is provided with a plurality of weight-reducing holes evenly spaced along its circumference.

[0016] Optionally, the connecting rod segment is sleeved with an elastic member, and the elastic member is configured to apply elastic force to the motion component when subjected to compression by the annular boss and the motion component.

[0017] The utility model also provides an air-floating motion platform, including a base, a motion component and the above-mentioned air-floating connection component, the motion component is provided with a second threaded hole, the second threaded hole is threadedly screwed to the external thread of the connecting rod section in the air-floating connection component; the air-floating pad of the air-floating connection component is facing the base or towards the guide rail provided on the base.

[0018] The air flotation connection assembly provided by the present invention is applied to an air flotation motion platform. On the one hand, the assembly of the motion assembly and the air flotation connection assembly can be completed by only two threaded connections between the motion assembly and the connecting rod section and between the screw and the air flotation pad. Similarly, the disassembly of the motion assembly and the air flotation connection assembly can be completed by only two threaded disconnections between the motion assembly and the connecting rod section and between the screw and the air flotation pad. The connection structure of the motion assembly and the air flotation connection assembly is simple, and the disassembly and assembly are convenient, which can effectively improve the assembly efficiency of the air flotation motion platform and the maintenance convenience of the motion assembly and the air flotation connection assembly. On the other hand, during use, the connecting rod section can be rotated to adjust the length of the connecting rod section extending out of the second threaded hole, so as to coarsely adjust the air film gap between the air flotation pad and the base or guide rail; and the screw can be rotated to fine-tune the air film gap between the air flotation pad and the base or guide rail, thereby ensuring stable and precise air flotation support of the motion assembly by the air flotation connection assembly, thereby ensuring the motion stability and accuracy of the motion assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 An axonometric view of an air-floating connection assembly provided in an embodiment of the present utility model;

[0021] Figure 2 A cross-sectional view of an air-floating connection assembly provided by an embodiment of the present utility model connected to a motion assembly;

[0022] Figure 3 A cross-sectional view of a push rod in an air-floating connection assembly provided in an embodiment of the present utility model.

[0023] Description of reference numerals:

[0024] 10-moving component; 11-second threaded hole; 100-air floating cushion; 110-mounting groove; 111-first groove section; 112-second groove section; 10A-adjusting gap; 200-top rod; 210-limiting rod section; 220-connecting rod section; 230-annular boss; 240-connecting channel; 241-first channel section; 242-second channel section; 243-third channel section; 300-connecting piece; 310-screw; 320-screw head; 330-connecting section; 400-equalizing pressure seat; 410-first seat body; 411-conical groove; 412-weight reduction hole; 420-second seat body; 430-first threaded hole; 500-elastic piece. DETAILED DESCRIPTION

[0025] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0028] This embodiment provides an air-floating connection assembly, such as Figure 1 and Figure 2 As shown, it includes an air floating cushion 100, a push rod 200 and a connecting piece 300, wherein the push rod 200 includes a limiting rod segment 210 and a connecting rod segment 220 along the axial direction, the outer peripheral wall of the limiting rod segment 210 is provided with an annular boss 230 extending along its circumference, and the outer peripheral wall of the connecting rod segment 220 is provided with an external thread for connecting to the motion component 10; the push rod 200 is provided with a connecting channel 240 that passes through it along its axial direction; the connecting piece 300 includes a screw rod 310 and a screw head 320 fixed at one end of the screw rod 310, the screw rod 310 passes through the connecting channel 240 and is threadedly connected to the air floating cushion 100, and the push rod 200 is clamped between the screw head 320 and the air floating cushion 100.

[0029] This embodiment also provides an air-floating motion platform, including a base, a motion component 10 and the above-mentioned air-floating connection component. The motion component 10 is provided with a second threaded hole 11, such as Figure 2As shown, the second threaded hole 11 is threadedly connected to the external thread of the connecting rod section 220 in the air floating connection assembly; the air floating pad 100 of the air floating connection assembly faces the base or the guide rail provided on the base.

[0030] When the air-floating connection assembly provided in this embodiment is applied to the air-floating motion platform, the disassembly and assembly operation of the motion assembly 10 is as follows: the outer diameter of the connecting rod segment 220 is consistent, and its outer peripheral wall is provided with an external thread that engages with the internal thread of the second threaded hole 11. The connecting rod segment 220 is screwed into the second threaded hole 11 and extends out of the second threaded hole 11. Then, the screw 310 passes through the connecting channel 240 and is screwed into the first threaded hole 430 of the air-floating cushion 100 until the screw head 320 and the air-floating cushion 100 clamp the top rod 200. Thereby, the assembly connection between the motion component 10 and the air floating connection component is completed, wherein the top rod 200 is fixedly connected to the air floating cushion 100 through the screw 310, so that the stability of the motion platform is higher, and the assembly operation only requires two threaded screwing operations, and the assembly operation is more convenient; wherein, the outer diameter of the annular boss 230 is larger than the aperture of the second threaded hole 11, so as to limit the position of the motion component 10 connected to the connecting rod segment 220, and prevent the motion component 10 from escaping from the limiting rod segment 210.

[0031] Similarly, when the air floating connection assembly needs to be repaired or replaced, it is only necessary to unscrew the screw 310 from the air floating pad 100 and unscrew the connecting rod section 220 from the second threaded hole 11 to remove the air floating connection assembly. The movement assembly 10 and the air floating connection assembly are also easy to disassemble.

[0032] When in use, when the air floating connection component is assembled on the motion platform and applied to the air floating motion platform, the air floating pad 100 can form an air film between the top surface of the base and the fixed surface, thereby playing an air floating support role for the motion component 10, so that the motion component 10 and the fixed surface can have frictionless air floating motion; or, the base is provided with a guide rail matching the motion component 10, and the air floating pad 100 can form an air film between the guide rail and the outer wall of the guide rail, thereby realizing an air floating sliding connection between the motion component 10 and the guide rail.

[0033] Among them, the connecting rod segment 220 can be rotated first as needed to adjust the length of the connecting rod segment 220 extending out of the second threaded hole 11, thereby coarsely adjusting the air film gap between the air floating cushion 100 and the base or guide rail; then, on the basis of ensuring that the top rod 200 is clamped between the screw head 320 and the air floating cushion 100 and cannot shake axially, the screw rod 310 can be further rotated relative to the air floating cushion 100 to fine-tune the air film gap between the air floating cushion 100 and the base or guide rail, thereby ensuring the stable and precise air floating support of the air floating connection component to the moving component 10, and further ensuring the stable and precise air floating coordination between the moving component 10 and the guide rail and the base.

[0034] When the air-floating connection assembly provided by this embodiment is applied to an air-floating motion platform, on the one hand, only two screw connections are required between the motion assembly 10 and the connecting rod section 220 and between the screw 310 and the air-floating pad 100 to complete the assembly of the motion assembly 10 and the air-floating connection assembly. Similarly, only two screw disconnections are required between the motion assembly 10 and the connecting rod section 220 and between the screw 310 and the air-floating pad 100 to complete the disassembly of the motion assembly 10 and the air-floating connection assembly. The connection structure of the motion assembly 10 and the air-floating connection assembly is simple, the disassembly and assembly are convenient, and the air-floating motion platform can be effectively improved. On the other hand, during use, the connecting rod segment 220 can be rotated to adjust the length of the connecting rod segment 220 extending out of the second threaded hole 11, so as to roughly adjust the air film gap between the air floating cushion 100 and the base or guide rail; and the screw 310 can be rotated to fine-tune the air film gap between the air floating cushion 100 and the base or guide rail, thereby ensuring the stable and precise air floating support of the air floating connection assembly to the motion assembly 10, thereby ensuring the motion stability and accuracy of the motion assembly 10.

[0035] In this embodiment, Figure 1 and Figure 2 As shown, the connecting rod segment 220 is sleeved with an elastic member 500. The elastic member 500 is configured to apply an elastic force to the motion assembly 10 when subjected to compression by the annular boss 230 and the motion assembly 10. When the motion assembly 10 is screwed onto the connecting rod segment 220, the motion assembly 10 and the annular boss 230 clamp the elastic member 500 on both sides, respectively. The elastic member 500 can provide additional pre-tightening force to the connecting rod segment 220 and the motion assembly 10, thereby improving the stability of the motion assembly 10 screwed onto the connecting rod segment 220. At the same time, when it is necessary to adjust the screwing depth of the connecting rod segment 220 and the second threaded hole 11, the elastic member 500 always abuts against the motion assembly 10 to apply an elastic force thereto, thereby improving the interference of the relative rotation of the connecting rod segment 220 and the second threaded hole 11, thereby achieving continuous small-stroke rotation adjustment of the connecting rod segment 220 relative to the second threaded hole 11, and correspondingly improving the adjustment accuracy of the air film gap.

[0036] Specifically, the elastic member 500 may be a disc spring.

[0037] In this embodiment, Figure 2 and Figure 3As shown, the connecting channel 240 includes a first channel section 241, a second channel section 242 and a third channel section 243 along its axial direction. The first channel section 241 is used to accommodate the screw head 320, the third channel section 243 is used to accommodate the screw rod 310, and the second channel section 242 is in a tapered shape from the first channel section 241 to the third channel section 243; the screw head 320 and the screw rod 310 are connected by a connecting section 330, and the outer peripheral wall of the connecting section 330 is tapered and matches the inner wall of the channel of the second channel section 242. The third channel section 243 and the first channel section 241 are both straight holes, and the inner diameter of the third channel section 243 is larger than the outer diameter of the screw 310, the inner diameter of the first channel section 241 is larger than the inner diameter of the third channel section 243, the inner diameter of the channel opening of the second channel section 242 facing the first channel section 241 is equal to the inner diameter of the first channel section 241, and the inner diameter of the channel opening of the second channel section 242 facing the third channel section 243 is equal to the inner diameter of the third channel section 243, and the inner wall of the channel of the second channel section 242 is conical.

[0038] After the motion component 10 is screwed to the connecting rod section 220, the end of the screw 310 facing away from the screw head 320 is inserted from the channel opening of the first channel section 241, and then the screw 310 passes through the first channel section 241, the second channel section 242 and the third channel section 243 in sequence and extends out of the thread to be screwed to the air floating cushion 100. As the screw 310 and the air floating cushion 100 are tightened, the conical connecting section 330 is gradually inserted into the conical second channel section 242, and the conical channel inner wall of the second channel section 242 can be aligned with the conical channel inner wall of the second channel section 242. The tapered outer wall of the connecting section 330 plays a guiding and centering role until the inner wall of the second channel section 242 abuts against the outer wall of the connecting section 330, and the connecting rod section 220 abuts against the air floating cushion 100, thereby clamping the push rod 200 between the screw head 320 and the air floating cushion 100, and the push rod 200 and the screw rod 310 can maintain a high coaxiality, the push rod 200 has a small offset to both sides, and the position accuracy is high, which accordingly ensures the position accuracy of the moving component 10 and its fit with the base or guide rail.

[0039] Furthermore, the first channel section 241 is used to accommodate the screw head 320, thereby reducing interference with other components caused by the protrusion of the screw head 320. Preferably, the axial length of the first channel section 241 is 0.1 to 0.5 mm greater than the axial length of the screw head 320. When the connector 300 passes through the connecting channel 240 and is connected to the air flotation cushion 100, the screw head 320 can be completely accommodated within the first channel section 241 without protruding outward, thereby further reducing interference with other components caused by the protrusion of the screw head 320. Furthermore, the axial distance between the outer end surface of the screw head 320 and the channel opening of the first channel section 241 is 0.1 to 0.5 mm. When an operator uses a tool to perform operations such as rotating and applying force to the screw head 320, the tool does not need to extend a long distance into the connecting channel 240, thereby improving the ease of assembly and disassembly of the connector 300, and correspondingly further improving the assembly efficiency and maintenance convenience of the motion platform.

[0040] In this embodiment, Figure 1 As shown, the outer peripheral wall of the annular boss 230 is in the shape of a hexagonal prism. The annular boss 230 has the same shape as the nut. When the connecting rod segment 220 is screwed into the second threaded hole 11 and the air film gap between the air cushion 100 and the base or guide rail is adjusted by rotating the connecting rod segment 220, a wrench can be inserted into the annular boss 230 to apply force to drive the entire push rod 200 to rotate, thereby improving the ease of assembly of the connecting rod segment 220 and the motion assembly 10 and the ease of adjusting the air film gap, and correspondingly further improving the ease of assembly, disassembly, and use of the motion platform.

[0041] In this embodiment, Figure 2 As shown, the air floating cushion 100 is provided with a mounting groove 110, and the mounting groove 110 can be specifically located at the center of the air floating cushion 100. A pressure equalizing seat 400 is embedded in the mounting groove 110, and a first threaded hole 430 is provided at the center of the pressure equalizing seat 400, and the screw 310 is threadedly screwed into the first threaded hole 430. The mounting groove 110, the air floating pad 100 and the first threaded hole 430 are coaxial, and the equal pressure seat 400 is embedded in the mounting groove 110, so that the outer shape of the air floating pad 100 is relatively flat. When in use, the air floating pad 100 sprays air toward the base or the guide rail to generate an air film between the two, and accordingly applies an air buoyancy force away from the base and the guide rail to the equal pressure pad. The air buoyancy force is transmitted to the moving component 10 through the equal pressure pad and the screw 310, the push rod 200, etc., wherein, in the process of the air buoyancy force of the air floating pad 100 being transmitted through the equal pressure seat 400, the equal pressure seat 400 can balance and evenly distribute the transmitted air buoyancy force, thereby improving the balance of the air buoyancy force transmitted to the moving component 10, and reducing the occurrence of the moving component 10 being offset due to the excessive local air buoyancy.

[0042] In this embodiment, Figure 2As shown, the end face of the pressure equalizing seat 400 facing the annular boss 230 is provided with a conical groove 411, and the conical groove 411 is expanded in the direction toward the annular boss 230, and the first threaded hole 430 is coaxially connected to the conical groove 411; the end face of the connecting rod segment 220 facing away from the limiting rod segment 210 is conical and matches the groove side wall of the conical groove 411. The side wall of the conical groove 411 is conical, and the conical groove 411 is coaxial with the equal pressure seat 400. The first threaded hole 430 is provided at the bottom of the conical groove 411 and is coaxial with the conical groove 411. The end of the first threaded hole 430 away from the conical groove 411 passes through the equal pressure seat 400. During assembly, the screw 310 extending from the connecting channel 240 passes through the conical groove 411 and is screwed to the first threaded hole 430. As the screw 310 rotates, the end of the connecting rod section 220 away from the limiting rod section 210 is tapered and enters the conical groove 411. The side walls of the tapered groove 411 can guide and center the tapered end face of the limiting rod segment 210 until the side walls of the tapered groove 411 can abut against the tapered end face of the limiting rod segment 210, and the assembly is completed. The coaxiality of the connecting rod segment 220 and the equalizing pressure seat 400 and the air floating cushion 100 is relatively high, thereby further improving the relative position accuracy of the top rod 200 and the air floating cushion 100, and correspondingly further improving the position accuracy of the moving component 10 relative to the base or guide rail, and further ensuring the cooperation between the two.

[0043] Specifically, the inner wall of the second channel section 242 and the side wall of the tapered groove 411 may both be part of a sphere. Correspondingly, the outer peripheral wall of the connecting section 330 and the end face of the connecting rod section 220 may also be part of a sphere.

[0044] In this embodiment, Figure 2 As shown, the mounting groove 110 includes a coaxial first groove section 111 and a second groove section 112 from the groove mouth to the groove bottom, and the diameter of the first groove section 111 is larger than that of the second groove section 112; the equalizing pressure seat 400 includes a first seat body 410 and a second seat body 420 along its axial direction, the first seat body 410 is embedded in the first groove section 111, the second seat body 420 is inserted into the second groove section 112, and an adjustment gap 10A is left between the second seat body 420 and the groove bottom of the second groove section 112. The depth of the second groove section 112 is relatively large. On the one hand, the restriction on the axial length of the second seat body 420 is relatively small, which can ensure the embedding of the equal pressure seat 400 and the mounting groove 110; on the other hand, the first threaded hole 430 is connected to the adjustment gap 10A. When the length of the screw 310 is longer, it can be extended into the adjustment gap 10A through the first threaded hole 430, and the applicable range of the length of the screw 310 is wider, thereby reducing the assembly accuracy requirements of the equal pressure seat 400, the air floating pad 100 and the screw 310, and further improving the assembly convenience of the motion platform.

[0045] In this embodiment, Figure 1As shown, the first base 410 is provided with a plurality of weight-reducing holes 412 evenly spaced along its circumference. The provision of weight-reducing holes 412 reduces the weight of the pressure-equalizing base 400 while ensuring the pressure-equalizing effect of the pressure-equalizing base 400. This reduces the support load exerted by the air flotation cushion 100 on the pressure-equalizing base 400, thereby improving the accuracy of the air flotation control of the air flotation cushion 100.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An air floating connection assembly, characterized in that: include: Air floating cushion (100); The push rod (200) includes a limiting rod section (210) and a connecting rod section (220) along the axial direction, wherein the outer peripheral wall of the limiting rod section (210) is provided with an annular boss (230) extending along the circumference thereof, and the outer peripheral wall of the connecting rod section (220) is provided with an external thread for connecting to the motion component (10); the push rod (200) is provided with a connecting channel (240) extending along the axial direction thereof; and The connecting member (300) comprises a screw rod (310) and a screw head (320) fixed to one end of the screw rod (310); the screw rod (310) passes through the connecting channel (240) and is threadedly connected to the air flotation pad (100); and the push rod (200) is clamped between the screw head (320) and the air flotation pad (100).

2. The air floating connection assembly according to claim 1, characterized in that: The connecting channel (240) includes a first channel section (241), a second channel section (242) and a third channel section (243) along its axial direction, wherein the first channel section (241) is used to accommodate the screw head (320), the third channel section (243) is used to accommodate the screw rod (310), and the second channel section (242) is in a tapered shape from the first channel section (241) to the third channel section (243); the screw head (320) is connected to the screw rod (310) via a connecting section (330), the outer peripheral wall of the connecting section (330) is tapered and matches the inner wall of the second channel section (242).

3. The air floating connection assembly according to claim 2, characterized in that: The axial length of the first channel section (241) is 0.1 to 0.5 mm greater than the axial length of the screw head (320).

4. The air floating connection assembly according to claim 1, characterized in that: The outer peripheral wall of the annular boss (230) is in the shape of a hexagonal prism.

5. The air floating connection assembly according to any one of claims 1 to 4, characterized in that: The air floating cushion (100) is provided with a mounting groove (110), a pressure equalizing seat (400) is embedded in the mounting groove (110), a first threaded hole (430) is provided at the center of the pressure equalizing seat (400), and the screw (310) is screwed into the first threaded hole (430).

6. The air floating connection assembly according to claim 5, characterized in that: The end surface of the pressure-equalizing seat (400) facing the annular boss (230) is provided with a tapered groove (411), and the tapered groove (411) is expanded in the direction toward the annular boss (230), and the first threaded hole (430) is coaxially connected to the tapered groove (411); the end surface of the connecting rod section (220) facing away from the limiting rod section (210) is tapered and matches the groove side wall of the tapered groove (411).

7. The air floating connection assembly according to claim 5, characterized in that: The mounting groove (110) includes a coaxial first groove section (111) and a second groove section (112) from the groove opening to the groove bottom, and the diameter of the first groove section (111) is larger than that of the second groove section (112); the pressure-equalizing seat (400) includes a first seat body (410) and a second seat body (420) along its axial direction, the first seat body (410) is embedded in the first groove section (111), the second seat body (420) is inserted into the second groove section (112), and an adjustment gap (10A) is left between the second seat body (420) and the groove bottom of the second groove section (112).

8. The air floating connection assembly according to claim 7, characterized in that: The first seat (410) is provided with a plurality of weight-reducing holes (412) evenly spaced along its circumference.

9. The air floating connection assembly according to any one of claims 1 to 4, characterized in that: The connecting rod section (220) is sleeved with an elastic member (500), and the elastic member (500) is configured to apply an elastic force to the motion component (10) when subjected to compression by the annular boss (230) and the motion component (10).

10. An air-floating motion platform, characterized in that: The invention comprises a base, a motion component (10) and an air-floating connection component according to any one of claims 1 to 9, wherein the motion component (10) is provided with a second threaded hole (11), and the second threaded hole (11) is screwed to the external thread of the connecting rod section (220) in the air-floating connection component; the air-floating pad (100) of the air-floating connection component faces the base or the guide rail provided on the base.

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