Roller deformation detection and calibration device

Abstract

The utility model relates to the technical field of solar cell manufacturing, in particular to a roller deformation detection and calibration device. The roller deformation detection and calibration device of the embodiment of the utility model comprises a supporting frame which comprises two oppositely arranged supporting parts and fixing parts, and the two oppositely arranged fixing parts are respectively used for fixing two end parts of a rolling shaft; the deformation detection assembly is arranged on the supporting frame and is opposite to the notch of the roller; the calibration assembly is arranged on the supporting frame and comprises a clamping part, the clamping part comprises two clamping jaws, the inner walls of the clamping jaws are semicircular, and the two clamping jaws are close to each other so as to clamp the rolling shaft at the position corresponding to the notch; in the mode, the roller is fixed through the supporting frame, the deformation detection assembly performs deformation detection on the rolling shaft at the position corresponding to the notch in the roller, and the calibration assembly performs clamping correction on the rolling shaft at the position corresponding to the deformed notch so as to recover deformation, so that the phenomena of subfissure and irregular wafer output in the process that silicon wafers are driven by the roller to operate are avoided; and the etching quality of the silicon wafer can be improved.

Description

Technical Field

[0001] The present application relates to the field of solar cell manufacturing technology, and in particular to a roller deformation detection and calibration device. Background Art

[0002] During the preparation of solar cells, chain etching equipment is required to etch the silicon wafer. A mixed acid solution is used to corrode the lower surface and edge of the diffused silicon wafer to remove the N-type silicon at the edge, so that the upper and lower surfaces of the silicon wafer are insulated from each other. After the etching process, the phosphorus on the edge of the silicon wafer will be removed to avoid a short circuit at the PN junction and a reduction in parallel resistance.

[0003] In the prior art, a chain etching device is used to etch silicon wafers. A rotatable roller is provided in the etching tank of the chain etching device. During the etching process, the silicon wafer is placed on the roller, and the roller rotates and carries the silicon wafer from the first end of the etching tank to the second end of the etching tank. Since the roller needs to be immersed in an acidic etching solution, it is generally made of a corrosion-resistant polymer material. The rigidity of the roller is relatively low. As the length of the roller increases, it is prone to bending and deformation, resulting in hidden cracks and uneven wafer output during the operation of the silicon wafer, which is not conducive to improving the etching quality of the silicon wafer. Utility Model Content

[0004] Based on this, the present application provides a roller deformation detection and calibration device to solve the technical problem in the prior art that is not conducive to improving the etching quality of silicon wafers.

[0005] One embodiment of the present application provides a roller deformation detection and calibration device, wherein the roller includes a roller shaft and a plurality of rollers sleeved on the roller shaft, wherein the plurality of rollers are arranged in sequence along the length direction of the roller shaft, and a gap is formed between each adjacent two rollers; the roller deformation detection and calibration device includes:

[0006] A support frame, the support frame comprising two opposing support members and a fixing portion provided on the support member, wherein the plurality of fixing portions are sequentially spaced apart along a first direction, the first direction being perpendicular to the length direction of the roller, and the two opposing fixing portions are respectively used to fix two ends of the roller;

[0007] a deformation detection component provided on the support frame, wherein the deformation detection component is opposite to the notch of the drum;

[0008] A calibration component is provided on the support frame, and the calibration component includes a clamping portion, and the clamping portion includes two clamping claws with semicircular inner walls. The two clamping claws are close to each other to clamp the roller at the position corresponding to the notch.

[0009] Optionally, the deformation detection component includes a ranging sensor.

[0010] Optionally, the deformation detection component further includes an analog-to-digital conversion unit connected to the ranging sensor, a processing unit connected to the analog-to-digital conversion unit, and a storage unit connected to the processing unit.

[0011] Optionally, the support frame includes a deformation detection area and a calibration area sequentially arranged along the first direction, the deformation detection component is arranged in the deformation detection area, and the calibration component is arranged in the calibration area.

[0012] Optionally, the calibration assembly also includes a mounting portion connected to the support frame, two guide rods provided on the mounting portion, and two sliding frames, the guide rods extending along the first direction, the two ends of the sliding frame being respectively slidably connected to the two guide rods, and the two clamps being respectively connected to the two sliding frames.

[0013] Optionally, the mounting portion includes a mounting plate and two mounting seats provided on the mounting plate, the two mounting seats are spaced apart, and both ends of the guide rod are fixedly connected to the two mounting seats respectively.

[0014] Optionally, the calibration assembly further includes a connecting member, the connecting member is provided on the sliding frame, and the clamping claw is provided on the connecting member.

[0015] Optionally, the calibration assembly further includes a limiting sleeve sleeve mounted on the guide rod.

[0016] Optionally, the fixing portion is provided with a groove, and the end portion of the roller is placed in the groove.

[0017] Optionally, the distance measuring sensor is located directly below the notch.

[0018] The roller deformation detection and calibration device of the embodiment of the present application includes a support frame, the support frame includes two supporting parts arranged opposite to each other and a fixing part arranged on the supporting parts, the multiple fixing parts are arranged in sequence along a first direction, the first direction is perpendicular to the length direction of the roller, and the two fixing parts arranged opposite to each other are respectively used to fix the two ends of the roller; a deformation detection component is arranged on the support frame, and the deformation detection component is opposite to the notch of the roller; a calibration component is arranged on the support frame, and the calibration component includes a clamping part, and the clamping part includes two clamping claws with semicircular inner walls, and the two clamping claws are close to each other to clamp the roller at the position corresponding to the notch; in the above method, the roller is fixed by the support frame, the deformation detection component performs deformation detection on the roller at the position corresponding to the notch in the roller, and the calibration component clamps and corrects the roller at the position corresponding to the deformed notch to restore the deformation, thereby avoiding hidden cracks and uneven output of the silicon wafer during the operation driven by the roller, which is beneficial to improving the etching quality of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Schematic diagram of the structure of the roller in this application.

[0020] Figure 2 This is a schematic diagram of the roller transport of silicon wafers in this application.

[0021] Figure 3 Schematic diagram of the structure of a roller deformation detection and calibration device according to an embodiment of the present application.

[0022] Figure 4 Schematic diagram of the structure of the distance sensor in the roller deformation detection and calibration device according to one embodiment of the present application.

[0023] Figure 5 Schematic diagram of the structure of the deformation detection component in the roller deformation detection and calibration device according to one embodiment of the present application.

[0024] Figure 6 for Figure 1 Enlarged view of point I in the middle.

[0025] Figure 7 Schematic diagram of the structure of the calibration component in the roller deformation detection and calibration device according to one embodiment of the present application.

[0026] Figure 8 Schematic cross-sectional view of a calibration component in a roller deformation detection and calibration device according to an embodiment of the present application.

[0027] The meanings of the reference numerals in the accompanying drawings are:

[0028] 10 - roller; 11 - roller; 111 - end; 112 - first roller segment; 12 - roller; 13 - notch; 100 - silicon wafer; 20 - roller deformation detection and calibration device; 21 - support frame; 21a - deformation detection area; 21b - calibration area; 211 - support member; 212 - fixing portion; S1 - first direction; 22 - deformation detection assembly; 221 - ranging sensor; 11b - central axis; S2 - output light path; 2211-light transmitter; 2212-light receiver; 2213-optical isolation component; 222-analog-to-digital conversion unit; 223-processing unit; 224-storage unit; 23-calibration component; 23a-clamping part; 231-clamping claw; 231a-inner wall; 232-mounting part; 2321-mounting plate; 2322-mounting seat; 233-guide rod; 234-sliding frame; 235-connecting piece; 236-limiting sleeve. DETAILED DESCRIPTION

[0029] To facilitate understanding of the present application, a more comprehensive description of the present application will be provided below with reference to the accompanying drawings. The accompanying drawings illustrate preferred embodiments of the present application. However, the present application may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of the present application.

[0030] It should be noted that when an element is referred to as being “fixed to” another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or there may be an intermediate element.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application.

[0032] like Figures 1 to 8 As shown, it is a roller deformation detection and calibration device provided by an embodiment of the present application.

[0033] like Figure 1 As shown, the roller 10 includes a roller 11 and multiple rollers 12. The rollers 12 are sleeved outside the roller 11. The roller 11 includes two ends 111. The multiple rollers 12 are arranged in sequence along the length of the roller 11. The multiple rollers 12 are sequentially spaced between the two ends 111, and a gap 13 is formed between each adjacent two rollers 12. The portion of the roller 11 at the gap 13, corresponding to the portion not sleeved by the rollers 12, is the first roller segment 112, which is prone to bending and deformation.

[0034] like Figure 2 As shown, when the portion of the roller 11 corresponding to the notch 13, namely the first roller segment 112, is bent and deformed, the roller 12 is offset relative to its normal position. The silicon wafer 100 placed on the roller 12 is subjected to the pressure exerted by the offset roller 12, and is prone to hidden cracks. In addition, the silicon wafer 100 cannot maintain a horizontal state during transportation, and is prone to uneven wafers. Using a deformed roller 10 to transport silicon wafers is not conducive to improving the etching quality of the silicon wafers.

[0035] An embodiment of the present application provides a roller deformation detection and calibration device 20, such as Figure 3 As shown, the roller deformation detection and calibration device 20 includes a support frame 21, a deformation detection component 22 and a calibration component 23, wherein the deformation detection component 22 is used to perform deformation detection on the part of the roller 11 corresponding to the notch 13, namely the first roller segment 112, and the calibration component 23 is used to correct the roller 11 corresponding to the notch 13 where the deformation occurs.

[0036] The support frame 21 includes two opposing support members 211 and fixing portions 212 disposed on the support members 211. The support members 211 extend along a first direction S1. The fixing portions 212 are sequentially spaced along the first direction S1. The two opposing fixing portions 212 form a group. One of the two fixing portions 212 in each group is disposed on the first support member 211, and the other is disposed on the second support member 211. The two fixing portions 212 in each group are respectively used to fix the two ends 111 of the roller 11. When the roller 11 is fixed to the two opposing fixing portions 212, the first direction S1 is perpendicular to the length of the roller 11.

[0037] The deformation detection component 22 is disposed on the support frame 21 . The deformation detection component 22 is opposite to the notch 13 of the roller 12 , so as to perform deformation detection on the first roller segment 112 corresponding to the notch 13 .

[0038] The calibration component 23 is disposed on the support frame 21 and includes a clamping portion 23a. Figure 3 and Figure 8 As shown, the clamping portion 23a includes two jaws 231. The inner walls 231a of the jaws 231 are semicircular and disposed opposite each other. The two jaws 231 approach each other to clamp the first roller segment 112 at the location corresponding to the notch 13. Because the roller 11 is generally made of a corrosion-resistant polymer material, the roller 11 has relatively low rigidity and easily recovers from deformation. When the two jaws 231 approach each other, they clamp the first roller segment 112 at the location corresponding to the notch 13 for a predetermined period of time, allowing the first roller segment 112 to recover from deformation. For example, the predetermined period is greater than or equal to 0.5 hours.

[0039] In this embodiment, the roller is fixed by a support frame, the deformation detection component detects the deformation of the roller at the position corresponding to the notch in the roller, and the calibration component clamps and corrects the roller at the position corresponding to the deformed notch to restore the deformation, thereby avoiding hidden cracks and uneven wafer output during the operation of the silicon wafer driven by the roller, which is beneficial to improving the etching quality of the silicon wafer.

[0040] As an implementation, see Figure 3 and Figure 4 As shown, the deformation detection component 22 includes a distance sensor 221 , and an outgoing light path S2 of the distance sensor 221 intersects with the central axis 11 b of the roller 11 .

[0041] The distance measuring sensor 221 includes a light emitter 2211 and a light receiver 2212. The light emitter 2211 and the light receiver 2212 can be separated by an optical isolation component 2213. The light emitter 2211 is used to emit an outgoing light beam onto the first roller segment 112. The outgoing light beam is reflected by the first roller segment 112 to form a reflected light beam. The light receiver 2212 is used to receive the reflected light beam from the outgoing light beam after it is reflected by the first roller segment 112 and enters the distance measuring sensor 221. The light receiver absorbs the outgoing light beam and records and processes the time from the outgoing light beam's arrival at the first roller segment 112 to the reflected light beam's return to the light receiver 2212 to represent the distance between the first roller segment 112 and the distance measuring sensor 221. The distance to the first roller segment 112 measured by the distance measuring sensor 221 can be used to determine whether the first roller segment 112 has deformed.

[0042] If the first roller segment 112 is deformed, the measured distance between the first roller segment 112 and the distance measuring sensor 221 will differ from a standard distance. The standard distance is the distance between the first roller segment 112 and the distance measuring sensor 221 measured when the first roller segment 112 is not deformed. For example, deformation of the first roller segment 112 can be determined when the absolute value of the difference between the measured distance and the standard distance is greater than or equal to a first preset distance threshold. The first preset distance threshold can be obtained based on empirical data.

[0043] In some embodiments, see Figure 5 As shown, the deformation detection component 22 also includes an analog-to-digital conversion unit 222, a processing unit 223, and a storage unit 224. The analog-to-digital conversion unit 222 is connected to the distance sensor 221, the processing unit 223 is connected to the analog-to-digital conversion unit 222, and the storage unit 224 is connected to the processing unit 223. The distance sensor 221 is used to collect an electrical signal representing the distance, the analog-to-digital conversion unit 222 is used to convert the electrical signal into a corresponding digital signal, the processing unit 223 is used to convert the digital signal into distance data, and the storage unit 224 is used to store the distance data.

[0044] As an implementation, please continue to see Figure 3 As shown, the support frame 21 includes a deformation detection area 21a and a calibration area 21b arranged sequentially along a first direction S1. The deformation detection assembly 22 is disposed in the deformation detection area 21a, and the calibration assembly 23 is disposed in the calibration area 21b. Fixing portions 212 are provided in the deformation detection area 21a and the calibration area 21b, respectively. In this embodiment, the separate arrangement of the deformation detection area 21a and the calibration area 21b facilitates improved detection efficiency.

[0045] Those skilled in the art should understand that in other embodiments, the deformation detection component 22 and the calibration component 23 can be arranged in the same area.

[0046] As an implementation, see Figure 6 、 Figure 7 and Figure 8 As shown, the calibration assembly 23 further includes a mounting portion 232, a guide rod 233, and a sliding frame 234. The mounting portion 232 is connected to the support frame 21. Two guide rods 233 are provided on the mounting portion. The guide rods 233 extend along the first direction S1. Two sliding frames 234 are provided, and each sliding frame 234 has two ends slidably connected to the two guide rods 233. The two clamping jaws 231 are respectively connected to the two sliding frames 234. The sliding frames 234 slide along the guide rods 233 in the first direction S1. The two sliding frames 234 approach each other, driving the two clamping jaws 231 toward each other, thereby merging the two clamping jaws 231 into a single clamping portion 23a to clamp the first roller segment 112.

[0047] In some embodiments, please refer to Figure 6 、 Figure 7 and Figure 8 As shown, the mounting portion 232 includes a mounting plate 2321 and two mounting seats 2322 provided on the mounting plate 2321 . The two mounting seats 2322 are spaced apart, and both ends of each guide rod 233 are fixedly connected to the two mounting seats 2322 .

[0048] In some embodiments, please refer to Figure 6 、 Figure 7 and Figure 8 As shown, the calibration assembly 23 further includes a connecting member 235 , which is disposed on the sliding frame 234 , and the clamping jaw 231 is disposed on the connecting member 235 .

[0049] In some embodiments, see Figure 7 As shown, the calibration assembly 23 also includes a limiting sleeve 236 mounted on the guide rod 233. As the two sliding frames 234 approach each other, when they abut against the ends of the limiting sleeve 236, the two clamping jaws 231 merge into a single clamping portion 23a to clamp the first roller segment 112. In this embodiment, the limiting sleeve prevents the clamping jaws from squeezing the first roller segment when the two sliding frames approach each other.

[0050] As an embodiment, the fixing portion 212 is provided with a groove, and the end portion of the roller 11 is placed in the groove.

[0051] As an implementation, see Figure 3As shown, the distance measuring sensor 221 is located directly below the notch 13 to align with the first roller segment 112 .

[0052] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The above embodiments merely represent preferred embodiments of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person skilled in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A roller deformation detection and calibration device, characterized in that: The roller includes a roller shaft and a plurality of rollers sleeved on the roller shaft, wherein the plurality of rollers are arranged in sequence along the length direction of the roller shaft, and a gap is formed between each two adjacent rollers; the roller deformation detection and calibration device includes: A support frame, the support frame comprising two opposing support members and a fixing portion provided on the support member, wherein the plurality of fixing portions are sequentially spaced apart along a first direction, the first direction being perpendicular to the length direction of the roller, and the two opposing fixing portions are respectively used to fix two ends of the roller; a deformation detection component provided on the support frame, wherein the deformation detection component is opposite to the notch of the drum; A calibration component is provided on the support frame, and the calibration component includes a clamping portion, and the clamping portion includes two clamping claws with semicircular inner walls. The two clamping claws are close to each other to clamp the roller at the position corresponding to the notch.

2. The roller deformation detection and calibration device according to claim 1, characterized in that: The deformation detection component includes a distance measuring sensor.

3. The roller deformation detection and calibration device according to claim 2, characterized in that: The deformation detection component further includes an analog-to-digital conversion unit connected to the distance measuring sensor, a processing unit connected to the analog-to-digital conversion unit, and a storage unit connected to the processing unit.

4. The roller deformation detection and calibration device according to claim 1, characterized in that: The support frame includes a deformation detection area and a calibration area sequentially arranged along the first direction. The deformation detection component is arranged in the deformation detection area, and the calibration component is arranged in the calibration area.

5. The roller deformation detection and calibration device according to claim 4, characterized in that: The calibration assembly also includes a mounting portion connected to the support frame, two guide rods provided on the mounting portion, and two sliding frames, the guide rods extending along the first direction, the two ends of the sliding frame being slidably connected to the two guide rods, and the two clamps being connected to the two sliding frames respectively.

6. The roller deformation detection and calibration device according to claim 5, characterized in that: The mounting portion includes a mounting plate and two mounting seats arranged on the mounting plate. The two mounting seats are arranged at an interval, and both ends of the guide rod are fixedly connected to the two mounting seats respectively.

7. The roller deformation detection and calibration device according to claim 5, characterized in that: The calibration component further includes a connecting member, which is arranged on the sliding frame, and the clamping claw is arranged on the connecting member.

8. The roller deformation detection and calibration device according to claim 5, characterized in that: The calibration assembly further includes a limiting sleeve sleeved on the guide rod.

9. The roller deformation detection and calibration device according to claim 1, characterized in that: The fixing portion is provided with a groove, and the end portion of the roller is placed in the groove.

10. The roller deformation detection and calibration device according to claim 2, characterized in that: The distance measuring sensor is located directly below the notch.

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