Magnetically enhanced atmospheric pressure jet plasma high polymer material surface treatment device

Abstract

The utility model relates to a magnetic enhanced atmospheric pressure jet plasma high polymer material surface treatment device, which comprises a base, the sample transfer platform is arranged on the base; the axial magnetic field generating device is arranged on the fixed bracket and is used for generating an axial magnetic field; the axial magnetic field generating device comprises an upper annular magnet, a lower annular magnet and a spacing isolation regulator, the upper annular magnet and the lower annular magnet are coaxially arranged, and the upper annular magnet and the lower annular magnet are connected through the spacing isolation regulator; the plasma excitation electrode device is arranged above the sample transfer platform and is used for generating plasma jet; according to the utility model, the axial magnetic field is utilized to constrain and regulate the atmospheric pressure jet plasma, so that the more uniform atmospheric pressure jet plasma is obtained, the plasma scale is improved, the more stable plasma generation is obtained, the jet plasma ionization rate is improved, the generation of active substances is increased, and the plasma discharge is enhanced.

Description

Technical Field

[0001] The utility model relates to the technical field of surface treatment, in particular to a magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device. Background Art

[0002] Atmospheric pressure plasma jets (APPJs) are widely used in interdisciplinary fields such as biomedicine, environmental protection, and material surface modification due to their advantages, including high electron temperature, low gas temperature, rich active particle content, and excellent controllability. The simplicity of APPJ equipment and its ability to operate in open environments without vacuum systems have led to extensive research and industrial applications, providing new avenues for plasma processing and catalysis to produce fuels, chemicals, material surface modification, and other products. However, APPJs currently face challenges such as temperature control, jet length and stability, and particle concentration and activity control. Low-temperature plasma jets generated at atmospheric pressure suffer from poor discharge stability and reliability, and are prone to instabilities such as spark discharges and siphon discharges, which compromise discharge stability and reliability. Further optimization of discharge design and dielectrics is needed to improve discharge stability and reliability. Furthermore, energy conversion efficiency is low, with most of the input electrical energy ultimately dissipated as heat, with only a small portion converted into plasma energy. Improved electrode structures are needed to optimize the plasma generation process and enhance energy conversion efficiency. To further expand the working scenarios of APPJ, it is very important to improve the stability, controllability and efficiency of APPJ. Further research on plasma characteristics and optimization of discharge parameters are needed to advance this technology and its applications. Therefore, we need to explore new methods to improve the discharge characteristics of APPJ. Utility Model Content

[0003] To this end, the technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology and provide a magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device, which uses an axial magnetic field to constrain and regulate the atmospheric pressure jet plasma, so as to obtain a more uniform atmospheric pressure jet plasma, increase the plasma scale (length and width), obtain more stable plasma generation, improve the jet plasma ionization rate, increase the generation of active substances, and enhance plasma discharge.

[0004] In order to solve the above technical problems, the utility model provides a magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device, comprising:

[0005] A base, wherein a fixing bracket is provided on the base;

[0006] a sample transfer platform, which is disposed on the base and is used to transfer samples;

[0007] An axial magnetic field generating device is arranged on the fixed bracket for generating an axial magnetic field; the axial magnetic field generating device includes an upper annular magnet, a lower annular magnet and a spacing isolation regulator. The upper annular magnet and the lower annular magnet are coaxially arranged, and the upper annular magnet and the lower annular magnet are connected by the spacing isolation regulator. By adjusting the arrangement spacing of the upper annular magnet and the lower annular magnet, a stable axial magnetic field with a target magnetic field configuration and intensity is obtained.

[0008] A plasma excitation electrode device is arranged above the sample transfer platform and is used to generate a plasma jet. The plasma excitation electrode device includes a quartz tube, an air inlet pipe, and an electrode assembly. The inlet of the quartz tube is connected to the air inlet pipe, and the electrode assembly is wrapped around the outside of the quartz tube and connected to a pulse-modulated high-frequency high-voltage power supply. The plasma jet is ejected from the outlet of the quartz tube.

[0009] In one embodiment of the present invention, the spacing isolation adjuster includes an upper quartz tube clamping insulating ring, a lower quartz tube clamping insulating ring, an adjusting rod and a magnet locking piece; the upper quartz tube clamping insulating ring and the lower quartz tube clamping insulating ring are respectively arranged on the upper surfaces of the upper annular magnet and the lower annular magnet, the adjusting rod passes through the upper annular magnet and the lower annular magnet, and the adjusting rod is provided with a magnet locking piece for locking and fixing the lower quartz tube clamping insulating ring of the upper quartz tube clamping insulating ring.

[0010] In one embodiment of the present invention, the sample transfer platform includes an insulating carrier platform, an X-direction adjustment mechanism and a Y-direction adjustment mechanism, and the insulating carrier platform is driven by the X-direction adjustment mechanism and the Y-direction adjustment mechanism to reciprocate along the X and Y directions.

[0011] In one embodiment of the present invention, the Y-direction adjustment mechanism includes a second frequency-modulated stepper motor, a second screw rod and a Y-direction adjustment seat. The second frequency-modulated stepper motor and the second screw rod are both arranged on the base through a fixed seat. The output shaft of the second frequency-modulated stepper motor is connected to the second screw rod, and the Y-direction adjustment seat is connected to the second screw rod.

[0012] In one embodiment of the present utility model, the X-direction adjustment mechanism includes a first frequency-modulated stepper motor, a first screw and an X-direction adjustment seat; the first frequency-modulated stepper motor and the first screw are both arranged on the Y-direction adjustment seat through a fixed seat, the output shaft of the first frequency-modulated stepper motor is connected to the first screw, and the X-direction adjustment seat is connected to the first screw; the insulating loading platform is arranged on the X-direction adjustment seat.

[0013] In one embodiment of the present invention, the electrode assembly is a double-ring electrode or a needle-ring electrode.

[0014] In one embodiment of the present invention, the double-ring electrode includes an upper electrode and a lower electrode, the upper electrode and the lower electrode are respectively wrapped around the outside of the quartz tube, and the lower electrode is close to the outlet of the quartz tube.

[0015] In one embodiment of the present invention, an insulating ring is provided on the outer side of the quartz tube between the upper electrode and the lower electrode.

[0016] In one embodiment of the present invention, the air inlet pipe is connected to an air inlet system and is used to pass the discharge gas into the quartz tube.

[0017] In one embodiment of the present invention, a mass flow meter is provided on the air intake pipe.

[0018] The above technical solution of the utility model has the following beneficial effects compared with the prior art:

[0019] The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device described in the present invention is small in size, generally stable and reliable, can achieve long-term stable discharge, and can operate for a long time; the adjustable magnetic field configuration and magnetic field size can make up for the shortcomings of the existing atmospheric pressure jet plasma scale, active material concentration, uniformity, etc.; by utilizing the axial magnetic field to constrain and regulate the atmospheric pressure jet plasma, a more uniform atmospheric pressure jet plasma can be obtained, the plasma scale (length and width) can be increased, more stable plasma generation can be achieved, the jet plasma ionization rate can be increased, the generation of active materials can be increased, and plasma discharge can be enhanced, thereby improving the stability and reliability of the discharge, enhancing the energy coupling efficiency, and improving the plasma flow characteristics. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below based on the specific embodiments of the present invention and in conjunction with the accompanying drawings, wherein:

[0021] Figure 1 This is a schematic structural diagram of a magnetically enhanced atmospheric pressure jet plasma discharge device in a preferred embodiment of the present invention;

[0022] Explanation of the reference numerals in the accompanying drawings in the specification: 1. Base; 2. Fixed bracket; 3. Sample transfer platform; 31. Insulating loading platform; 32. X-axis adjustment mechanism; 33. Y-axis adjustment mechanism; 4. Upper annular magnet; 5. Lower annular magnet; 6. Spacing isolation adjuster; 61. Upper quartz tube clamping insulating ring; 62. Lower quartz tube clamping insulating ring; 63. Adjusting rod; 64. Magnet locking part; 7. Quartz tube; 8. Air inlet pipe; 9. Plasma jet; 10. Upper electrode; 11. Lower electrode; 12. Insulating ring. DETAILED DESCRIPTION

[0023] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0024] Reference Figure 1 As shown, the magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device described in the present invention includes: a base 1, a fixed bracket 2 is provided on the base 1; a sample transfer platform 3, which is provided on the base 1 and is used to transfer samples; an axial magnetic field generating device, which is provided on the fixed bracket 2 and is used to generate an axial magnetic field; the axial magnetic field generating device includes an upper annular magnet 4, a lower annular magnet 5 and a spacing isolation regulator 6, the upper annular magnet 4 and the lower annular magnet 5 are coaxially arranged, and the upper annular magnet 4 and the lower annular magnet 5 are connected by the spacing isolation regulator 6, and a stable axial magnetic field of target magnetic field configuration and intensity is obtained by adjusting the arrangement spacing of the upper annular magnet 4 and the lower annular magnet 5; a plasma excitation electrode device, which is provided above the sample transfer platform 3 and is used to generate a plasma jet 9; the plasma excitation electrode device includes a quartz tube 7, an air inlet pipe 8, and an electrode assembly; the inlet of the quartz tube 7 is connected to the air inlet pipe 8, the electrode assembly is wrapped around the outside of the quartz tube 7, and the electrode assembly is connected to a pulse-modulated high-frequency high-voltage power supply, and the plasma jet 9 is ejected from the outlet of the quartz tube 7.

[0025] The magnetically enhanced atmospheric pressure jet plasma discharge device designed in this utility model has a stable working system and a reasonable structure. It constrains and regulates the atmospheric pressure jet plasma through an axial magnetic field, and the plasma temperature generated is relatively low. This technology can be applied to many fields, such as the processing of polymer materials. It is a low-cost, simple to operate, environmentally friendly and efficient method that can be used in surface treatment, chemical reaction and other fields. Its application in other fields needs to be further developed and promoted, and it has broad market value and application prospects.

[0026] Preferably, the spacing isolation adjuster 6 includes an upper quartz tube clamping insulating ring 61, a lower quartz tube clamping insulating ring 62, an adjusting rod 63 and a magnet locking piece 64; the upper quartz tube clamping insulating ring 61 and the lower quartz tube clamping insulating ring 62 are respectively arranged on the upper surfaces of the upper annular magnet 4 and the lower annular magnet 5, and the adjusting rod 63 passes through the upper annular magnet 4 and the lower annular magnet 5. The adjusting rod 63 is provided with a magnet locking piece 64 for locking and fixing the lower quartz tube clamping insulating ring 62 of the upper quartz tube clamping insulating ring 61.

[0027] Preferably, the sample transfer platform 3 includes an insulating carrier platform 31 , an X-direction adjustment mechanism 32 and a Y-direction adjustment mechanism 33 . The insulating carrier platform 31 is driven by the X-direction adjustment mechanism 32 and the Y-direction adjustment mechanism 33 to reciprocate along the X and Y directions.

[0028] Preferably, the Y-direction adjustment mechanism 33 includes a second frequency-modulated stepper motor, a second screw and a Y-direction adjustment seat. The second frequency-modulated stepper motor and the second screw are both arranged on the base 1 through a fixed seat. The output shaft of the second frequency-modulated stepper motor is connected to the second screw, and the Y-direction adjustment seat is connected to the second screw.

[0029] Preferably, the X-direction adjustment mechanism 32 includes a first frequency-modulated stepper motor, a first screw and an X-direction adjustment seat; the first frequency-modulated stepper motor and the first screw are both arranged on the Y-direction adjustment seat through a fixed seat, the output shaft of the first frequency-modulated stepper motor is connected to the first screw, and the X-direction adjustment seat is connected to the first screw; the insulating loading platform 31 is arranged on the X-direction adjustment seat.

[0030] In this embodiment, the electrode assembly is a double-ring electrode, which includes an upper electrode 10 and a lower electrode 11 , which are respectively wrapped around the outside of the quartz tube 7 , and the lower electrode 11 is close to the outlet of the quartz tube 7 .

[0031] Furthermore, an insulating ring 12 is provided on the outer side of the quartz tube 7 between the upper electrode 10 and the lower electrode 11 .

[0032] In this embodiment, the air inlet pipe 8 is connected to the air inlet system and is used to pass the discharge gas into the quartz tube 7. A mass flow meter is provided on the air inlet pipe 8. The discharge gas is one of Ar, N2, He, and H2;

[0033] The specific working process of the magnetically enhanced atmospheric pressure jet plasma discharge device based on the above structure is as follows:

[0034] First, a high-frequency, high-voltage plasma AC power supply is connected. When the voltage peak reaches 12 kV, argon gas is introduced into the quartz tube 7 through the inlet pipe 8. The gas flow rate is controlled at 3 L / min by a mass flowmeter. The argon gas undergoes glow discharge in the quartz tube 7, which is surrounded by a double-ring electrode, to produce a uniform plasma. The lower electrode 11 (ground electrode) of the double-ring electrode is connected to a 100 ohm resistor. The current through the resistor is measured using an oscilloscope to determine the discharge current. The upper electrode 10 (high-voltage electrode) measures the discharge voltage and frequency. Under the influence of airflow, current, and magnetic field, the plasma is drawn from between the electrodes, ultimately generating a uniform plasma discharge region of a defined area below the electrodes. The plasma in this region can efficiently process materials. Combined with the X-axis adjustment mechanism 32 and the Y-axis adjustment mechanism 33, this can meet the needs of large-area material processing.

[0035] In this embodiment, the magnetically enhanced atmospheric pressure jet plasma discharge device has three basic discharge processes, including initial ionization, avalanche ionization, and plasma maintenance. The principle of plasma jet 9 generation is as follows:

[0036] In the dual-ring electrode structure, a high-frequency, high-voltage power supply generates a strong electric field. When the electric field strength exceeds the breakdown electric field strength of air (typically approximately 30 kV / m under standard conditions), air molecules begin to ionize, forming free electrons and ions. The ionization process includes impact ionization, where free electrons collide with air molecules, ionizing them to produce more electrons and ions, creating an electron avalanche effect. Once the air is broken down, a discharge channel is formed, and charges move rapidly under the action of the electric field, forming an electric current. This current further ionizes air molecules, triggering a chain reaction and causing the energy in the discharge area to rapidly diffuse. During the discharge process, the recombination between electrons and ions emits radiation of a certain wavelength, forming a visible plasma jet.9

[0037] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device, characterized by: include: A base, wherein a fixing bracket is provided on the base; a sample transfer platform, which is disposed on the base and is used to transfer samples; An axial magnetic field generating device is disposed on the fixed bracket and is used to generate an axial magnetic field. The axial magnetic field generating device includes an upper annular magnet, a lower annular magnet, and a spacing isolation adjuster. The upper annular magnet and the lower annular magnet are coaxially arranged, and the upper annular magnet and the lower annular magnet are connected by the spacing isolation adjuster. By adjusting the arrangement spacing of the upper annular magnet and the lower annular magnet, a stable axial magnetic field with a target magnetic field configuration and intensity is obtained. A plasma excitation electrode device is arranged above the sample transfer platform and is used to generate a plasma jet. The plasma excitation electrode device includes a quartz tube, an air inlet pipe and an electrode assembly. The inlet of the quartz tube is connected to the air inlet pipe, the electrode assembly is wrapped around the outside of the quartz tube, and the electrode assembly is connected to a pulse-modulated high-frequency high-voltage power supply. The plasma jet is ejected from the outlet of the quartz tube.

2. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 1, characterized in that: The spacing isolation adjuster includes an upper quartz tube clamping insulating ring, a lower quartz tube clamping insulating ring, an adjusting rod and a magnet locking piece; the upper quartz tube clamping insulating ring and the lower quartz tube clamping insulating ring are respectively arranged on the upper surfaces of the upper annular magnet and the lower annular magnet, and the adjusting rod passes through the upper annular magnet and the lower annular magnet. The adjusting rod is provided with a magnet locking piece for locking and fixing the lower quartz tube clamping insulating ring of the upper quartz tube clamping insulating ring.

3. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 1, characterized in that: The sample transfer platform includes an insulating carrier platform, an X-direction adjustment mechanism and a Y-direction adjustment mechanism. The insulating carrier platform is driven by the X-direction adjustment mechanism and the Y-direction adjustment mechanism to reciprocate along the X and Y directions.

4. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 3, characterized in that: The Y-direction adjustment mechanism includes a second frequency-modulated stepping motor, a second screw rod and a Y-direction adjustment seat. The second frequency-modulated stepping motor and the second screw rod are both arranged on the base through a fixed seat. The output shaft of the second frequency-modulated stepping motor is connected to the second screw rod, and the Y-direction adjustment seat is connected to the second screw rod.

5. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 4, characterized in that: The X-direction adjustment mechanism includes a first frequency-modulated stepping motor, a first screw and an X-direction adjustment seat; the first frequency-modulated stepping motor and the first screw are both arranged on the Y-direction adjustment seat through a fixed seat, the output shaft of the first frequency-modulated stepping motor is connected to the first screw, and the X-direction adjustment seat is connected to the first screw; the insulating loading platform is arranged on the X-direction adjustment seat.

6. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 1, characterized in that: The electrode assembly is a double-ring electrode or a needle-ring electrode.

7. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 6, characterized in that: The double-ring electrode includes an upper electrode and a lower electrode. The upper electrode and the lower electrode are respectively wrapped around the outside of the quartz tube, and the lower electrode is close to the outlet of the quartz tube.

8. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 7, characterized in that: An insulating ring is provided on the outer side of the quartz tube between the upper electrode and the lower electrode.

9. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 1, characterized in that: The air inlet pipe is communicated with the air inlet system and is used for passing the discharge gas into the quartz tube.

10. The magnetically enhanced atmospheric pressure jet plasma polymer material surface treatment device according to claim 9, characterized in that: A mass flow meter is provided on the air inlet pipe.

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