Polycrystalline silicon reduction furnace protection device

Abstract

The utility model relates to the technical field of polycrystalline silicon reduction furnaces, and discloses a polycrystalline silicon reduction furnace protection device which comprises a base, the top of the base is fixedly connected with a plurality of supporting columns, the tops of the supporting columns are fixedly connected with a protection cover, the outer portion of the protection cover is fixedly connected with a clamping block, and the clamping block is fixedly connected with the base. The outer portion of the protective cover is fixedly connected with a limiting assembly used for fixing and limiting movement of the mechanism, the interior of the limiting assembly is rotationally connected with a rotating rod, the outer portion of the protective cover is fixedly connected with a plurality of first fixing blocks, and the outer portion of the protective cover is fixedly connected with a connecting block. The supporting column is fixed to the top of the base, the protective cover is fixed to the top of the supporting column, the connecting block is fixed through the protective cover, the positioning rod in the connecting block is rotated, and the rotating rod in the limiting groove is connected with the clamping block, so that mechanical collision and damage are avoided, the protective cover can be detached, and the protective cover can be repaired or replaced in time if damaged.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon reduction furnaces, in particular to a polysilicon reduction furnace protection device. Background Art

[0002] Polycrystalline silicon (polysilicon, or simply polycrystalline), is a form of silicon composed of many small silicon crystals. It is a crucial building block in the photovoltaic and semiconductor industries. A reduction furnace is an industrial furnace primarily used for reduction reactions, which involve decomposing compounds or reducing oxides to their original metals or other elements at high temperatures.

[0003] In existing technologies, some devices use a chemical vapor deposition (CVD) process to react high-purity trichlorosilane (SiHCl3) and hydrogen (H2) at high temperatures to generate polysilicon. However, reduction furnaces without protective devices are susceptible to the impact of external forces, such as the movement or collision of other equipment or the falling of objects. These forces can cause the furnace body to deform and be damaged, affecting the normal operation of the equipment. In addition, the protective devices cannot be disassembled, making maintenance and replacement inconvenient. Utility Model Content

[0004] In order to make up for the above deficiencies, the present invention provides a polysilicon reduction furnace protection device, aiming to improve the problem in the prior art that some reduction furnaces cannot be disassembled during protection.

[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0006] A polysilicon reduction furnace protection device includes a base, a plurality of support columns fixedly connected to the top of the base, a protective cover fixedly connected to the top of the support columns, a clamping block fixedly connected to the outside of the protective cover, a limit assembly fixedly connected to the outside of the protective cover for fixing and limiting the movement of the mechanism, a rotating rod rotatably connected to the inside of the limit assembly, a plurality of fixed blocks 1 fixedly connected to the outside of the protective cover, a connecting block fixedly connected to the outside of the protective cover, and a positioning rod rotatably connected to the outside of the fixed block 1;

[0007] As a further description of the above technical solution:

[0008] The limiting assembly includes a limiting groove 1, the outer portion of the limiting groove 1 being fixedly connected to the inner portion of the rotating rod;

[0009] As a further description of the above technical solution:

[0010] The interior of the protective cover is detachably connected to a tank cover, and the top of the tank cover is fixedly connected to a water inlet;

[0011] As a further description of the above technical solution:

[0012] The top of the tank cover is fixedly connected to a motor, the output end of the motor is fixedly connected to a drive shaft, and the outside of the drive shaft is fixedly connected to a plurality of stirring rods;

[0013] As a further description of the above technical solution:

[0014] The interior of the tank cover is fixedly connected to the outer shell, the bottom of the tank cover is detachably connected to the tank body, and the interior of the tank body is detachably connected to a plurality of heating rods;

[0015] As a further description of the above technical solution:

[0016] The interior of the tank cover is slidably connected to a plurality of balls, and the bottom of the balls is slidably connected to a spring;

[0017] As a further description of the above technical solution:

[0018] The bottom of the spring is fixedly connected to a second fixing block, the bottom of the second fixing block is detachably connected to a second limiting groove, and the interior of the second limiting groove is slidably connected to two telescopic rods;

[0019] As a further description of the above technical solution:

[0020] The outside of the tank body is fixedly connected with a water outlet pipe, and the outside of the water outlet pipe is fixedly connected with a valve.

[0021] The utility model has the following beneficial effects:

[0022] 1. In the utility model, a support column is fixed on the top of the base, and a protective cover is fixed on the top of the support column. The internal positioning rod is rotated through the connecting block fixed by the protective cover so that the rotating rod in the limit groove is connected to the card block, thereby protecting it from mechanical collision and damage. The protective cover can also be disassembled and can be repaired or replaced in time if damaged.

[0023] 2. In the utility model, inside the tank body, the raw materials are introduced into the tank body through the water inlet, and the driving shaft is connected to the stirring rod driven by the motor to stir the raw materials, and the heating rod inside the tank body can heat the raw materials. The outer shell is fixed inside the tank cover, and by pressing the outer shell, the internal sphere is squeezed to drive the spring at the bottom to compress. There is a telescopic rod at the bottom of the spring. During the compression process, the telescopic rod is also compressed to disengage from the limit groove, and the tank cover is disassembled, so that the internal heating rod and stirring rod can be maintained and replaced. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a three-dimensional schematic diagram of the polysilicon reduction furnace protection device proposed by the present invention;

[0025] Figure 2 This is a structural diagram of the card block of the polysilicon reduction furnace protection device proposed by the present invention;

[0026] Figure 3 This is a schematic structural diagram of the heating rod of the polysilicon reduction furnace protection device proposed by the present invention;

[0027] Figure 4 This is a schematic structural diagram of the spring of the polysilicon reduction furnace protection device proposed by the present invention.

[0028] Legend:

[0029] 1. Base; 2. Support column; 3. Protective cover; 4. Tank lid; 5. Water inlet; 6. Block; 7. Limit slot 1; 8. Rotating rod; 9. Fixed block 1; 10. Connecting block; 11. Positioning rod; 12. Motor; 13. Housing; 14. Tank body; 15. Drive shaft; 16. Stirring rod; 17. Heating rod; 18. Water outlet pipe; 19. Valve; 20. Ball; 21. Spring; 22. Fixed block 2; 23. Telescopic rod; 24. Limit slot 2. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] Reference Figure 1 、 Figure 2 , an embodiment provided by the utility model: a polysilicon reduction furnace protection device, including a base 1, a plurality of support columns 2 are fixedly connected to the top of the base 1 to provide structural support, a protective cover 3 is fixedly connected to the top of the support column 2 to protect the tank body 14 from external impact and damage, the outside of the protective cover 3 is fixedly connected with a card block 6, which can be used to fix and connect mechanical parts, the outside of the protective cover 3 is fixedly connected with a limit assembly for fixing and limiting the movement of the mechanism, the internal rotation of the limit assembly is connected with a rotating rod 8, which can change the direction of movement, the outside of the protective cover 3 is fixedly connected with a plurality of fixed blocks 9, the outside of the protective cover 3 is fixedly connected with a connecting block 10, which can provide additional support and stability for the components in the mechanical equipment, the outside of the fixed block 9 is rotatably connected with a positioning rod 11 to ensure that the mechanical components maintain the correct position during assembly or operation, the limit assembly includes a limit groove 7 to prevent the components from exceeding the predetermined range of motion and avoid component displacement or offset, thereby ensuring the accuracy and safety of the mechanical system, and the outside of the limit groove 7 is fixedly connected to the inside of the rotating rod 8.

[0032] Reference Figure 3 、 Figure 4 The inside of the protective cover 3 is detachably connected to the tank cover 4, the top of the tank cover 4 is fixedly connected to the water inlet 5, the top of the tank cover 4 is fixedly connected to the motor 12, which can convert electrical energy into mechanical energy to drive the mechanical equipment to operate, the output end of the motor 12 is fixedly connected to the drive shaft 15, which rotates under the drive of the motor 12, and the outside of the drive shaft 15 is fixedly connected to a plurality of stirring rods 16 to fully stir the raw materials, the inside of the tank cover 4 is fixedly connected to the shell 13, the bottom of the tank cover 4 is detachably connected to the tank body 14, and the inside of the tank body 14 is detachably connected to multiple The heating rod 17 heats the raw materials. The inside of the tank cover 4 is slidably connected to a plurality of spheres 20. The bottom of the spheres 20 is slidably connected to a spring 21. The bottom of the spring 21 is fixedly connected to a fixed block 22. The bottom of the fixed block 22 is detachably connected to a limiting groove 24. The inside of the limiting groove 24 is slidably connected to two telescopic rods 23, and the length can be adjusted as needed. The outside of the tank body 14 is fixedly connected to a water outlet pipe 18, which can control the flow rate of the fluid, thereby adjusting the flow rate of the fluid. The outside of the water outlet pipe 18 is fixedly connected to a valve 19.

[0033] Working principle: The support column 2 is fixed on the top of the base 1, and the protective cover 3 is fixed on the top of the support column 2. The connecting block 10 fixed by the protective cover 3 is rotated to rotate the internal positioning rod 11 so that the rotating rod 8 in the limit groove 7 is connected to the block 6, so as to avoid mechanical collision and damage. The protective cover 3 can also be disassembled and can be repaired or replaced in time if damaged.

[0034] Inside the tank body, the raw materials are introduced into the tank body 14 through the water inlet 5, and the driving shaft 15 driven by the motor 12 drives the stirring rod 16 to stir the raw materials, and the heating rod 17 inside the tank body 14 can heat the raw materials. The stirred raw materials will flow along the water outlet pipe 18 at the bottom and open the valve 19 to make it flow out. The outer shell 13 is fixed inside the tank cover 4. By pressing the outer shell 13, the internal sphere 20 is squeezed to drive the spring 21 at the bottom to compress. There is a telescopic rod 23 at the bottom of the spring 21. During the compression process, the telescopic rod 23 is also compressed to disengage from the limit groove 24, and the tank cover 4 is disassembled, so that the internal heating rod 17 and the stirring rod 16 can be maintained and replaced.

[0035] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A polysilicon reduction furnace protection device, comprising a base (1), characterized in that: The top of the base (1) is fixedly connected to a plurality of support columns (2), the top of the support columns (2) is fixedly connected to a protective cover (3), the outside of the protective cover (3) is fixedly connected to a clamping block (6), the outside of the protective cover (3) is fixedly connected to a limit assembly for fixing and limiting the movement of the mechanism, the inside of the limit assembly is rotatably connected to a rotating rod (8), the outside of the protective cover (3) is fixedly connected to a plurality of fixed blocks (9), the outside of the protective cover (3) is fixedly connected to a connecting block (10), and the outside of the fixed block (9) is rotatably connected to a positioning rod (11).

2. The polysilicon reduction furnace protection device according to claim 1, characterized in that: The limiting assembly comprises a limiting groove (7), the outside of the limiting groove (7) being fixedly connected to the inside of the rotating rod (8).

3. The polysilicon reduction furnace protection device according to claim 1, characterized in that: The interior of the protective cover (3) is detachably connected to a tank cover (4), and the top of the tank cover (4) is fixedly connected to a water inlet (5).

4. The polysilicon reduction furnace protection device according to claim 3, characterized in that: The top of the tank cover (4) is fixedly connected to a motor (12), the output end of the motor (12) is fixedly connected to a drive shaft (15), and the outside of the drive shaft (15) is fixedly connected to a plurality of stirring rods (16).

5. The polysilicon reduction furnace protection device according to claim 3, characterized in that: The interior of the tank cover (4) is fixedly connected to the outer shell (13), the bottom of the tank cover (4) is detachably connected to the tank body (14), and the interior of the tank body (14) is detachably connected to a plurality of heating rods (17).

6. The polysilicon reduction furnace protection device according to claim 3, characterized in that: A plurality of spheres (20) are slidably connected to the interior of the tank cover (4), and a spring (21) is slidably connected to the bottom of the spheres (20).

7. The polysilicon reduction furnace protection device according to claim 6, characterized in that: The bottom of the spring (21) is fixedly connected to a second fixing block (22), the bottom of the second fixing block (22) is detachably connected to a second limiting groove (24), and the interior of the second limiting groove (24) is slidably connected to two telescopic rods (23).

8. The polysilicon reduction furnace protection device according to claim 5, characterized in that: The outside of the tank body (14) is fixedly connected to a water outlet pipe (18), and the outside of the water outlet pipe (18) is fixedly connected to a valve (19).

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