Metal sealing ring, sealing installation structure and semiconductor runner piece

Abstract

The utility model discloses a metal sealing ring, a sealing installation structure and a semiconductor flow channel member, and relates to the sealing ring technology field, the metal sealing ring comprises a ring main body and a first annular projection, and the outer periphery of the ring main body is provided with an annular groove; the first annular protrusion is integrally arranged at one axial end of the ring body, a first inclined face is formed on the side, facing an inner hole of the ring body, of the first annular protrusion, the first inclined face is of a trumpet-shaped structure, and the first inclined face can enable the first annular protrusion to deform in the direction away from the axis of the ring body under axial pressure.

Description

Technical Field

[0001] The utility model relates to the technical field of sealing rings, in particular to a metal sealing ring, a sealing installation structure and a semiconductor flow channel component. Background Art

[0002] Semiconductor equipment must use metal flow components to transmit gas or fluid. The flow components are made of UHPSUS316L ultra-high purity stainless steel that meets the SEMI F20 semiconductor material requirements. Generally, the integrated gas system (IGS) application is to assemble the flow components with sealing rings and then assemble different valve bodies. In addition, different flow pipe sizes, such as ”, “And high traffic ” liquid flow path, and 1 / 2” high-conductivity gas flow path, various valve body boxes and gas box systems. According to the semiconductor metal component specifications SEMI F1-96 and SEMI F1-0812, for helium permeation testing and pipeline permeation testing, they must pass high-low temperature and high-pressure testing (≥320°C, 160psi), liquid nitrogen low-temperature and high-pressure testing (-150°C, 150psi), and high-temperature and high-pressure cycling testing (>250°C, 125psi, 30 minutes) to ensure that the leakage rate is below the specification requirements.

[0003] The current seal assembly process on the market involves first loosening and securing the seal using a stator. The entire assembly is then placed on the manifold block, with the seal seated on the countersunk sealing surface of the manifold block. At this point, all three components are loose. The stator is then positioned using screws, the valve body is aligned over the seal, and light pressure is applied axially to completely compress and deform the seal. Once the valve body, seal, stator, and manifold block are assembled, the entire manifold is formed into a single, sealed unit. Furthermore, the complexity of this assembly process is compounded by the fact that radial compression of the seal is not controlled, and the seal and sealing surface are assembled while remaining free to move. Furthermore, the seal compression ratio is entirely dependent on the metal material's properties, such as structure, elasticity, hardness, and shape. Any misalignment or bias in the seal or sealing surface will affect the seal's sealing effectiveness. Utility Model Content

[0004] The main purpose of the utility model is to provide a metal sealing ring, a sealing installation structure and a semiconductor flow channel component, aiming to facilitate the control of the radial compression of the metal sealing ring and improve the sealing effect of the metal sealing ring.

[0005] To achieve the above-mentioned purpose, the metal sealing ring proposed in the present invention comprises:

[0006] A ring body, wherein an annular groove is formed on the outer periphery of the ring body;

[0007] The first annular protrusion is integrally provided at one axial end of the ring body, and a first inclined surface is formed on the side of the first annular protrusion facing the inner hole of the ring body. The first inclined surface is a trumpet-shaped structure, and the first inclined surface is subjected to axial pressure to cause the first annular protrusion to deform in a direction away from the axis of the ring body.

[0008] In one embodiment, the ring body is further formed with a first receiving groove, which is annularly arranged on the radially outer side of the first annular protrusion to accommodate the deformed portion of the first annular protrusion.

[0009] In one embodiment, the metal sealing ring further includes a second annular protrusion, which is provided on a side of the ring body facing away from the first annular protrusion, and the cross-section of the second annular protrusion is a rectangular structure.

[0010] In one embodiment, a second receiving groove and a third receiving groove are formed on radial inner and outer sides of the second annular protrusion, and the second receiving groove and the third receiving groove are arranged in an annular shape along the boundary of the second annular protrusion.

[0011] In one embodiment, the second annular protrusion has a wave-shaped structure.

[0012] In one embodiment, both axial ends of the ring body are provided with the first annular protrusion and / or the second annular protrusion.

[0013] In one embodiment, the width of the annular groove is a, the depth of the annular groove is b, and 1 / 3≤a / b≤1 / 2.

[0014] In one embodiment, the metal sealing ring is made of SUS316 stainless steel.

[0015] The present invention also provides a sealing installation structure, which includes the metal sealing ring mentioned above, and

[0016] A fixing plate is formed with a mounting hole, and the annular groove is clamped in the mounting hole.

[0017] The present invention also provides a semiconductor flow channel component, which includes the sealing installation structure described above.

[0018] The technical solution of the present utility model proposes a metal sealing ring, including a ring body and a first annular protrusion. The setting of the annular groove enables the ring body to produce micro-deformation when subjected to axial pressure, so as to better fit closely with the fixed plate and ensure the sealing effect. The first annular protrusion is set to a trumpet-shaped structure, and the setting of the first inclined surface also facilitates the control of the deformation direction and deformation position of the first annular protrusion when subjected to pressure, so that the deformation generated by the metal sealing ring during operation is in a direction that is conducive to improving the sealing effect, thereby ensuring the sealing effect of the metal ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0020] Figure 1 This is a structural diagram of an embodiment of a metal sealing ring provided by the utility model;

[0021] Figure 2 for Figure 1 Bottom view of the middle metal sealing ring;

[0022] Figure 3 A schematic structural diagram of another embodiment of the metal sealing ring provided by the present utility model;

[0023] Figure 4 This is a structural schematic diagram of the sealing installation structure provided by the utility model.

[0024] Description of Figure Numbers:

[0025] 1000. Sealing installation structure; 100. Metal sealing ring; 1. Ring body; 11. Annular groove; 12. First receiving groove; 13. Second receiving groove; 14. Third receiving groove; 2. First annular protrusion; 3. Second annular protrusion; 200. Fixing plate; 201. Mounting hole.

[0026] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0028] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0029] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0030] Semiconductor equipment must use metal flow components to transmit gas or fluid. The flow components are made of UHPSUS316L ultra-high purity stainless steel that meets the SEMI F20 semiconductor material requirements. Generally, the integrated gas system (IGS) application is to assemble the flow components with sealing rings and then assemble different valve bodies. In addition, different flow pipe sizes, such as ”, “And high traffic ” liquid flow path, and 1 / 2” high-conductivity gas flow path, various valve body boxes and gas box systems. According to the semiconductor metal component specifications SEMI F1-96 and SEMI F1-0812, for helium permeation testing and pipeline permeation testing, they must pass high-low temperature and high-pressure testing (≥320°C, 160psi), liquid nitrogen low-temperature and high-pressure testing (-150°C, 150psi), and high-temperature and high-pressure cycling testing (>250°C, 125psi, 30 minutes) to ensure that the leakage rate is below the specification requirements.

[0031] The current seal assembly process on the market involves first loosening and securing the seal using a stator. The entire assembly is then placed on the manifold block, with the seal seated on the countersunk sealing surface of the manifold block. At this point, all three components are loose. The stator is then positioned using screws, the valve body is aligned over the seal, and light pressure is applied axially to completely compress and deform the seal. Once the valve body, seal, stator, and manifold block are assembled, the entire manifold is formed into a single, sealed unit. Furthermore, the complexity of this assembly process is compounded by the fact that radial compression of the seal is not controlled, and the seal and sealing surface are assembled while remaining free to move. Furthermore, the seal compression ratio is entirely dependent on the metal material's properties, such as structure, elasticity, hardness, and shape. Any misalignment or bias in the seal or sealing surface will affect the seal's sealing effectiveness.

[0032] In order to solve the above problems, the present invention proposes a metal sealing ring 100, including a ring body 1 and a first annular protrusion 2, the outer periphery of the ring body 1 is formed with an annular groove 11; the first annular protrusion 2 is integrally arranged at one axial end of the ring body 1, and a first inclined surface is formed on the side of the first annular protrusion 2 facing the inner hole of the ring body 1, and the first inclined surface is a trumpet-shaped structure. When the first inclined surface is subjected to axial pressure, the first annular protrusion 2 can be deformed in a direction away from the axis of the ring body 1.

[0033] The technical solution of the present invention proposes a metal sealing ring 100, including a ring body 1 and a first annular protrusion 2. The setting of the annular groove 11 causes the ring body 1 to produce micro-deformation when subjected to axial pressure, so as to better fit closely with the fixing plate 200 and ensure the sealing effect. The first annular protrusion 2 is set to a trumpet-shaped structure, and the setting of the first inclined surface also facilitates the control of the deformation direction and deformation position of the first annular protrusion 2 when subjected to pressure, so that the deformation generated by the metal sealing ring 100 during operation is in a direction that is conducive to improving the sealing effect, thereby ensuring the sealing effect of the metal ring.

[0034] In an optional embodiment, in order to facilitate the accommodation of the first annular protrusion 2 after being deformed by pressure, please refer to Figure 1, the ring body 1 is also formed with a first receiving groove 12, which is annular and arranged on the radially outer side of the first annular protrusion 2 to accommodate the deformed part of the first annular protrusion 2. This design takes into account the deformation that may occur in the metal sealing ring 100 during operation, so that the first annular protrusion 2 is turned outward and hidden in the first receiving groove 12 after being subjected to axial pressure, and also facilitates the sealing ring and the sealing surface to achieve a tighter fit. By providing additional space to accommodate this deformation, the internal stress concentration caused by deformation is avoided, which may lead to the early failure of the metal sealing ring 100. The existence of the first receiving groove 12 ensures that the first annular protrusion 2 will not cause additional pressure on the ring body 1 when it is deformed, thereby maintaining the overall structural integrity of the metal sealing ring 100. This design also helps to reduce the deformation of the metal sealing ring 100 under high pressure, maintain its sealing performance, and also improve the durability and stability of the metal sealing ring 100. In addition, from Figure 1 It can be seen that the thickness of the neck where the first annular protrusion 2 is connected to the ring body 1 is slightly smaller than the thickness of the upper end. This also makes it easier for the first annular protrusion 2 to turn outward when under pressure, so as to ensure the controllability of the compression deformation positioning of the metal sealing ring 100, thereby ensuring the sealing effect.

[0035] In an alternative embodiment, please refer to Figure 1 and Figure 2 The metal sealing ring 100 also includes a second annular protrusion 3, which is arranged on the side of the ring body 1 facing away from the first annular protrusion 2, and the cross-section of the second annular protrusion 3 is a rectangular structure. This design provides additional support and stability, especially in high-pressure or high-torque working environments. The rectangular cross-sectional design of the second annular protrusion 3 helps to evenly distribute pressure and reduce local stress concentration, thereby improving the durability and reliability of the metal sealing ring 100. It is beneficial for the metal sealing ring 100 to provide a stable sealing effect in different directions and enhance its adaptability in complex working environments. The presence of the second annular protrusion 3 also increases the radial strength of the metal sealing ring 100, enabling it to withstand greater working pressure without deformation or damage.

[0036] For further information, please refer to Figure 2The second annular projection 3 is formed with a second groove 13 and a third groove 14 radially inside and outside. These grooves 13 and 14 are arranged in an annular pattern along the perimeter of the second annular projection 3. When the metal sealing ring 100 is subjected to axial pressure, the second annular projection 3 is flattened and accommodated within the second and third grooves 13 and 14, ensuring a perfect seal without interfering with dimensional tolerances and fully engaging the effective sealing surface area. This effectively blocks gas leakage and ensures a secure seal. This design takes into account the radial deformation that may occur during operation of the metal sealing ring 100 by providing additional space to accommodate this deformation, thereby avoiding internal stress concentration caused by deformation. The presence of the second groove 13 and third groove 14 ensures that deformation of the second annular projection 3 does not impose additional pressure on the ring body 1 or other components, maintaining the overall structural integrity of the metal sealing ring 100. This design also helps reduce deformation of the metal sealing ring 100 under high pressure, maintaining its sealing performance. It also improves the durability and stability of the metal sealing ring 100, enabling it to maintain consistent performance over long-term operation.

[0037] Optional, please refer to Figure 1 and Figure 2 , the second annular protrusion 3 has a wavy structure. The design of the wavy structure forms a guide for the deformation of the second annular protrusion 3 to achieve the effect of vertical flat pressing, so that the deformation of the second annular protrusion 3 on the inner and outer sides reaches a similar state when it is deformed by axial pressure, avoiding the occurrence of all deformation to the outside or all deformation to the inside, and maintaining the uniformity of deformation. The design of this structure allows the metal sealing ring 100 to deform when it is under pressure, thereby filling the tiny gaps that may exist in the sealing position and ensuring the sealing effect. The design of the wavy structure also helps to evenly distribute pressure and reduce local stress concentration, thereby extending the service life of the metal sealing ring 100. In addition, the design of the wavy structure also means that the sealing ring can adapt to different installation environments and working conditions without sacrificing sealing performance, thereby improving its application flexibility and reliability.

[0038] In an optional embodiment, a first annular protrusion 2 and / or a second annular protrusion 3 are provided at both axial ends of the ring body 1. This design provides a bidirectional sealing capability, so that the metal sealing ring 100 can provide a stable sealing effect in two directions. The metal sealing ring 100 can be used in different installation directions, which improves its application flexibility. The first annular protrusions 2 at both ends can provide sealing force in two directions, ensuring the axial sealing effect of the metal sealing ring 100. This design also helps to improve the installation flexibility of the metal sealing ring 100, so that it can be applied to different installation directions and working environments. In addition, the bidirectional sealing design can also reduce sealing failures caused by improper installation or uneven axial pressure, and improve the reliability of the entire sealing system. Optionally, in the actual design process, metal sealing rings 100 with different structures can be selected according to the actual use environment, please refer to Figure 1 and Figure 3 , Figure 1 The length of the first annular protrusion 2 is longer, and a first receiving groove 12 is provided to accommodate the first annular protrusion 2, which is suitable for sealing between large planes. Figure 3 The first annular protrusion 2 has a conical structure and is practical for use when the sealing surface of a workpiece has a small groove. Furthermore, the first annular protrusion 2 and the second annular protrusion 3 can be flexibly provided at both axial ends of the metal sealing ring 100. The first annular protrusion 2 or the second annular protrusion 3 can be provided at either axial end, or both axial ends. The first annular protrusion 2 and the second annular protrusion 3 can be spaced radially apart. The specific arrangement can be selected based on the actual use environment.

[0039] In an optional embodiment, the width of annular groove 11 is a, and the depth of annular groove 11 is b, where 1 / 3 ≤ a / b ≤ 1 / 2. This controlled dimensional ratio helps optimize the function of annular groove 11, ensuring it provides sufficient space to accommodate deformation without excessively weakening the structural strength of ring body 1. Precisely controlling the dimensions of annular groove 11 ensures that metal sealing ring 100 fits tightly against the fixture during installation while maintaining a good seal under operating pressure. This helps reduce seal failures caused by improper installation or changes in operating pressure, improving the applicability and reliability of metal sealing ring 100.

[0040] In an optional embodiment, the metal sealing ring 100 is made of SUS316 stainless steel. SUS316 stainless steel has excellent corrosion resistance and strength, enabling the metal sealing ring 100 to maintain its performance in a variety of harsh working environments. The corrosion resistance of SUS316 stainless steel makes it suitable for applications such as the chemical industry and marine environments, while its strength ensures the durability of the metal sealing ring 100 under high-pressure environments. Furthermore, the processing and welding properties of SUS316 stainless steel facilitate the manufacture and maintenance of the metal sealing ring 100, further ensuring the quality and performance of the metal sealing ring 100.

[0041] The present invention also proposes a sealing installation structure 1000, please refer to Figure 4 The sealing installation structure 1000 includes a metal sealing ring 100 and a fixing plate 200. The fixing plate 200 is formed with a mounting hole 201, and the annular groove 11 is clamped in the mounting hole 201. The design of this installation structure simplifies the installation process of the metal sealing ring 100. By clamping the annular groove 11 in the mounting hole 201, the metal sealing ring 100 can be ensured to be fixed in the axial direction, reducing displacement caused by vibration or pressure changes. In addition, after the sealing installation structure 1000 is installed on the semiconductor flow channel component, when the metal sealing ring 100 is subjected to axial pressure, the upper and lower structures of the annular groove 11 deform and clamp the fixing plate 200, thereby ensuring the sealing effect. The design of this installation structure also helps to reduce the complexity and errors in the installation process and improve the installation efficiency and reliability of the metal sealing ring 100. The specific structure of the sealing installation structure 1000 refers to the above embodiment. Since the sealing installation structure 1000 adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here.

[0042] The present invention also provides a semiconductor flow channel component, which includes a sealing mounting structure 1000. Installing the sealing mounting structure 1000 at the connection point of the semiconductor flow channel component improves the sealing performance and reliability of the semiconductor flow channel component. By integrating and optimizing the sealing mounting structure 1000, the semiconductor flow channel component can be ensured to be stable in high-pressure, high-temperature, and chemically corrosive environments, reducing production accidents caused by sealing failure.

[0043] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A metal sealing ring, characterized in that: include: A ring body, wherein an annular groove is formed on the outer periphery of the ring body; The first annular protrusion is integrally provided at one axial end of the ring body, and a first inclined surface is formed on the side of the first annular protrusion facing the inner hole of the ring body. The first inclined surface is a trumpet-shaped structure, and the first inclined surface is subjected to axial pressure to cause the first annular protrusion to deform in a direction away from the axis of the ring body.

2. The metal sealing ring according to claim 1, characterized in that: The ring body is further formed with a first receiving groove, which is annularly arranged on the radially outer side of the first annular protrusion to accommodate the deformed portion of the first annular protrusion.

3. The metal sealing ring according to claim 2, characterized in that: The metal sealing ring further includes a second annular protrusion, which is arranged on a side of the ring body facing away from the first annular protrusion, and the cross-section of the second annular protrusion is a rectangular structure.

4. The metal sealing ring according to claim 3, characterized in that: A second receiving groove and a third receiving groove are formed on radial inner and outer sides of the second annular protrusion. The second receiving groove and the third receiving groove are arranged in an annular shape along the boundary of the second annular protrusion.

5. The metal sealing ring according to claim 4, characterized in that: The second annular protrusion has a wave-shaped structure.

6. The metal sealing ring according to claim 3, characterized in that: Both axial ends of the ring body are provided with the first annular protrusion and / or the second annular protrusion.

7. The metal sealing ring according to any one of claims 1 to 6, characterized in that: The width of the annular groove is a, the depth of the annular groove is b, and 1 / 3≤a / b≤1 / 2.

8. The metal sealing ring according to claim 7, characterized in that: The metal sealing ring is made of SUS316 stainless steel.

9. A sealing installation structure, characterized in that: comprising the metal sealing ring according to any one of claims 1 to 8, and A fixing plate is formed with a mounting hole, and the annular groove is clamped in the mounting hole.

10. A semiconductor flow channel component, characterized in that: Comprising the sealing installation structure as claimed in claim 9.

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