The invention belongs to the technical field of zero-emission cleaning of electronic-grade
chemical storage and transportation equipment, and discloses a zero-liquid and zero-
solid emission dry-type cleaning
system and method for the interior of a tank car. The zero-liquid and zero-
solid emission dry-type cleaning
system and method utilize
supercritical carbon dioxide to cooperate with plug-in
resorption, miniature
ultrasonic cavitation, on-line
barrel type
filtration, a substitution type low-residue entrainer and an original manhole equal-
diameter seal. The
system sequentially comprises a liquid CO2
storage tank, a pressure and temperature rising unit, a
static mixer, a top cover sealing
assembly, an
insertion type back-suction cleaning head, an on-line
barrel type filtering unit, an on-line particle monitor and a PLC (
Programmable Logic Controller) along a material flowing direction, the top cover sealing
assembly comprises a top cover with the same
diameter as the manhole
flange, a stainless steel feeding / suction
pipe and a quick-opening clamp, and original manhole-level sealing is formed. According to the device,
insertion and sealing are completed through an original manhole or an original
discharge port, after cleaning, the particle size is smaller than or equal to 10 pcs / mL, the
metal impurity size is smaller than or equal to 1 ppt, the CO2
recovery rate is larger than or equal to 99%, the preparation time is smaller than or equal to 15 min, the cost is reduced by 40-70%, and the requirements of ppt-grade cleaning of 12-30 nm electronic-grade chemicals for
advanced manufacturing procedures and the GB 39731-2020
national standard are met.