Microcosmic contour detection terminal and system

Abstract

The utility model discloses a microscopic contour detection terminal and system, and relates to the technical field of precision detection. The microscopic contour detection terminal comprises a shell and a bottom plate connected with the shell, a mounting cavity is formed between the shell and the bottom plate, a 3D area-array camera, an optical microscope, a microscopic camera and a power supply are arranged in the mounting cavity, and the power supply is connected with the 3D area-array camera and the microscopic camera through power lines; a lens of the 3D area-array camera faces the bottom plate, a lens hole corresponding to the lens is formed in the bottom plate, a lens of the microscopic camera is connected with an eyepiece of the optical microscope, an objective lens of the optical microscope faces the bottom plate, and a light through hole corresponding to the objective lens is formed in the bottom plate. The advantages of a 3D area-array camera, an optical microscope and a microscopic camera are combined, microscopic inspection can be performed on a sample on site and in a laboratory, the micron-level detection precision is achieved, the high-precision requirement is met, optical microscopic detection and three-dimensional size detection of the sample can be completed, and quantitative and qualitative analysis is achieved.

Description

Technical Field

[0001] The present application relates to the field of precision detection technology, and in particular to a micro-contour detection terminal and system. Background Art

[0002] With the growing demand for precision testing in industrial manufacturing and scientific research, traditional contact-based testing methods are no longer able to meet the requirements of modern precision testing due to their inherent limitations, such as the potential damage to flexible samples, liquid samples, gaseous samples, high-speed moving samples, or samples with ultra-precision smooth surfaces. Therefore, non-contact 3D testing technology has emerged. It uses non-destructive technology to capture the 3D spatial coordinates of points on an object's surface, enabling the detection and characterization of the sample's surface profile.

[0003] Existing non-contact three-dimensional detection technologies include line laser displacement detection technology, structured light 3D imaging technology, white light interferometry profilometer technology, fiber optic interferometry displacement detection technology, laser confocal technology and spectral confocal technology.

[0004] These technologies each have their own unique advantages in actual inspection processes. However, for on-site micro-scale inspections, especially those requiring extremely high precision in localized inspections, such as pitting inspection of engine blades, existing technologies struggle to meet these high-precision requirements. Furthermore, while existing handheld 3D scanners are capable of on-site inspections, the 3D point cloud models they capture lack true color information, limiting their ability to perform quantitative, rather than qualitative, analysis. Utility Model Content

[0005] The purpose of this application is to provide a micro-contour detection system to solve the problem that existing detection technologies are difficult to meet high-precision detection requirements.

[0006] The technical solution adopted by this application to solve its technical problems is:

[0007] In a first aspect, a microscopic contour detection terminal is provided, comprising a housing and a base plate connected to the housing, wherein a mounting cavity is formed between the housing and the base plate, wherein a 3D area array camera, an optical microscope, a microscopic camera and a power supply are arranged in the mounting cavity, wherein the power supply is connected to the 3D area array camera and the microscopic camera via a power cord; the lens of the 3D area array camera faces the base plate, and a lens hole corresponding to the lens is provided on the base plate, the lens of the microscopic camera is connected to the eyepiece end of the optical microscope, the objective lens of the optical microscope faces the base plate, and a light hole corresponding to the objective lens is provided on the base plate.

[0008] Furthermore, an illuminator is provided on the bottom plate and outside the installation cavity, and the power supply is connected to the illuminator via a power line.

[0009] Furthermore, the position of the 3D area array camera and the sample remains constant during the imaging process.

[0010] Furthermore, the microscope camera includes a chip-movable camera or a chip-fixed camera.

[0011] Furthermore, the optical axis of the lens of the 3D area array camera is parallel or non-parallel to the optical axis of the objective lens of the optical microscope; when the optical axis of the lens of the 3D area array camera is non-parallel to the optical axis of the objective lens of the optical microscope, the angle between the two is less than or equal to 80°.

[0012] Furthermore, a handle is provided on the shell.

[0013] Furthermore, a support column is connected to the bottom plate and located outside the installation cavity.

[0014] Furthermore, the power supply includes a rechargeable battery or a replaceable battery.

[0015] In the second aspect, a micro contour detection system is provided, comprising a detection terminal and a processing terminal, wherein the detection terminal is the micro contour detection terminal provided in the first aspect, and the 3D area array camera and the microscope camera are both connected to the processing terminal in a wired or wireless manner.

[0016] Furthermore, it also includes an electric lifting platform for driving the entire detection terminal to rise and fall.

[0017] Beneficial effects of this application:

[0018] The micro-contour detection terminal provided in the embodiment of the present application combines the advantages of a 3D area array camera, an optical microscope, and a microscope camera. It can not only perform microscopic detection of samples to achieve micron-level detection accuracy and meet high-precision requirements, but also complete optical microscopic detection and three-dimensional size detection of samples to achieve quantitative and qualitative analysis. By providing a power supply for powering the 3D area array camera and the microscope camera, the detection terminal can not only inspect samples in the laboratory, but also inspect samples on-site without an external power supply, thereby improving the scope of application. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 is a three-dimensional diagram of a micro-contour detection terminal provided in an embodiment of the present application;

[0021] Figure 2 is a stereoscopic diagram from another perspective of the micro contour detection terminal provided by an embodiment of the present application;

[0022] Figure 3 This is a three-dimensional diagram of the micro-contour detection terminal provided by an embodiment of the present application with part of the outer shell removed;

[0023] Figure 4 This is a three-dimensional diagram from another perspective of the micro-contour detection terminal provided by an embodiment of the present application with part of the outer shell removed;

[0024] Figure 5 This is a structural diagram of placing the micro-contour detection terminal provided in an embodiment of the present application on an electric lifting platform;

[0025] Figure 6 It is a structural diagram of the micro contour detection system provided in an embodiment of the present application.

[0026] Reference numerals:

[0027] 1-Detection terminal;

[0028] 11- housing;

[0029] 111-handle;

[0030] 112-channel;

[0031] 12- bottom plate;

[0032] 121-lens hole;

[0033] 122-light hole;

[0034] 13-installation cavity;

[0035] 14-3D area array camera;

[0036] 15- Optical microscope;

[0037] 16-microscope camera;

[0038] 17-Power supply;

[0039] 18-illuminator;

[0040] 19- support column;

[0041] 2- Processing terminal;

[0042] 3-Electric lifting platform. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.

[0044] It should be noted that similar reference numerals and letters represent similar items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined or explained in subsequent figures. In addition, the embodiments and features in the embodiments of this application can be combined with each other unless there is a conflict.

[0045] In the description of the embodiments of the present application, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the product of the application is usually placed when in use, or the orientation or position relationship commonly understood by those skilled in the art. The terms "disposed", "opened", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, and an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication of two components.

[0046] Existing handheld 3D scanners allow for on-site 3D imaging and inspection of large samples. For example, patent application number 201520623622X, filed on August 18, 2015, discloses a handheld laser 3D scanning system. During the inspection process, the sample remains stationary while the handheld 3D scanner moves. This 3D scanner captures a wide field of view in a single shot, with a maximum resolution of up to 0.03mm. It is generally used for inspecting samples larger than 200mm. The position of the sample and the 3D scanning system changes during the scanning process, making it suitable for macroscopic inspections.

[0047] Currently, in the material corrosion inspection industry, the inspected parts are relatively microscopic. For example, the pitting inspection of engine blades has a size of only 0.5mm-1mm, and the local inspection accuracy is required to reach 0.005mm. The above-mentioned handheld 3D scanners cannot meet this requirement. Moreover, this type of 3D scanner collects 3D point clouds, and its model does not have real color, so it can only perform quantitative analysis, not qualitative analysis.

[0048] To solve the above problems, see Figure 1 、 Figure 2 、 Figure 3 、 Figure 4An embodiment of the present application provides a microscopic contour detection terminal, including a shell 11 and a base plate 12 connected to the shell 11, an installation cavity 13 is formed between the shell 11 and the base plate 12, and a 3D area array camera 14, an optical microscope 15, a microscope camera 16 and a power supply 17 are arranged in the installation cavity 13, and the power supply 17 is connected to the 3D area array camera 14 and the microscope camera 16 through a power cord; the lens of the 3D area array camera 14 faces the base plate 12, and a lens hole 121 corresponding to the lens is provided on the base plate 12, the lens of the microscope camera 16 is connected to the eyepiece end of the optical microscope 15, the objective lens of the optical microscope 15 faces the base plate 12, and a light hole 122 corresponding to the objective lens is provided on the base plate 12.

[0049] See also Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 The shell 11 and the base plate 12 can be connected together by bolts or a clamping structure, and a closed installation cavity 13 is formed between the two. The shell 11 can be an integrally formed structure or can be spliced ​​together by multiple parts. The base plate 12 is a flat plate structure, which can be square, rectangular, circular or other shapes.

[0050] See also Figure 3 、 Figure 4 3D area array camera 14 is mounted within mounting cavity 13 and is fixedly connected to base plate 12 via bolts. The lens of 3D area array camera 14 faces base plate 12. Base plate 12 includes a lens aperture 121 corresponding to the lens of 3D area array camera 14, allowing light to pass through. This prevents base plate 12 from obstructing the lens of 3D area array camera 14. 3D area array camera 14, without the aid of an external motion platform, can directly perform 3D scanning and imaging of the sample through its built-in scanning structure, generating 3D point cloud data. During the imaging process, the positional relationship between the sample and 3D area array camera 14 remains constant, and the 3D area array camera 14 is capable of achieving micron-level detection accuracy.

[0051] See also Figure 3 、 Figure 4 The optical microscope 15 and the microscopic camera 16 are disposed within the mounting cavity 13, and both can be fixedly connected to the housing 11 via bolts or a snap-fit ​​structure. The lens of the microscopic camera 16 is connected to the eyepiece of the optical microscope 15, so that the microscopic camera 16 can receive the image magnified by the optical microscope 15 and focus it on the image sensor of the microscopic camera 16, thereby enabling observation and imaging of the sample and obtaining a microscopic image of the sample. The objective lens of the optical microscope 15 faces the base plate 12, and a light hole 122 is provided on the base plate 12 corresponding to the objective lens of the optical microscope 15 for light to pass through, preventing the base plate 12 from blocking the objective lens of the optical microscope 15. In conjunction with the optical microscope 15, the microscopic camera 16 can achieve a detection accuracy of 5 microns.

[0052] See also Figure 3 、 Figure 4 The power supply 17 is arranged in the installation cavity 13 and can be connected to the housing 11 or the base plate 12 by bolts or a clamping structure; the power supply 17 is connected to the 3D area array camera 14 and the microscope camera 16 through a power line, and can supply power to the 3D area array camera 14 and the microscope camera 16.

[0053] The micro-contour detection terminal provided in the embodiment of the present application is used to perform microscopic detection on samples; its detection process is: S1, on-site visual inspection, preliminarily determine the detection area on the sample, and turn on the micro-contour detection terminal; S2, adjust the position of the micro-contour detection terminal so that the objective lens of the optical microscope 15 is located directly above the detection area, ensure that the detection area appears in the field of view of the optical microscope 15, turn on automatic focus, and use the microscope camera 16 to collect microscopic images and data of the detection area; S3, adjust the position of the micro-contour detection terminal again so that the lens of the 3D area array camera 14 is located directly above the detection area, ensure that the detection area appears in the field of view of the 3D area array camera 14, and use the 3D area array camera 14 to collect 3D point cloud data of the detection area.

[0054] After microscopic detection of the sample is performed using the microscopic contour detection terminal provided in the embodiment of the present application, the collected microscopic image and 3D point cloud data can be transmitted to the processing terminal via wired or wireless means for processing, thereby achieving quantitative and qualitative analysis of the sample.

[0055] The microscopic contour detection terminal provided in the embodiment of the present application combines the advantages of the 3D area array camera 14, the optical microscope 15, and the microscope camera 16. It is not only capable of performing microscopic inspections on samples, achieving micron-level inspection accuracy and meeting high-precision requirements, but also capable of completing optical microscopic inspections and three-dimensional size inspections of samples, achieving quantitative and qualitative analysis. By providing a power supply 17 for powering the 3D area array camera 14 and the microscope camera 16, the detection terminal can inspect samples not only in the laboratory but also on-site without an external power supply, thereby increasing its scope of application. The present application also has the advantages of being lightweight, compact and portable, having a wide range of applications, and being low-cost. It can provide a multi-purpose precision inspection method with excellent application prospects and practical value.

[0056] In some embodiments, the 3D area array camera 14 may include a structured light scanning 3D area array camera, a flying spot high-speed scanning 3D area array camera, or a scanning 3D area array camera based on spectral confocal technology.

[0057] A structured light scanning 3D area array camera primarily consists of a projection scanning unit for generating structured light, an industrial camera for capturing the sample and the projected lines on it, an industrial lens assembly, and matching control circuitry. A structured light scanning 3D area array camera typically uses the projection scanning unit to project light with specific structural characteristics onto the sample. The industrial camera then captures this light, acquiring the sample's 3D structure. This information is then further processed through computation, converting pixel information into spatial coordinates, ultimately reconstructing the sample in 3D.

[0058] The flying spot high-speed scanning 3D area array camera projects a single point onto the sample. A high-speed galvanometer system that can scan in the XY direction is designed on the projection optical path. The accurate displacement from the camera to a certain point on the sample is calculated in real time, thereby obtaining the surface depth information of a single point on the sample at high speed. Combined with the built-in XY coordinates, 3D information of the sample surface is constructed.

[0059] The scanning 3D area array camera based on spectral confocal technology measures the distance from a single point to the camera through the principle of white light dispersion, which is similar to the principle of flying spot high-speed scanning camera. Spectral confocal can also generate single measurement lines by designing different lenses. In the optical path, a high-speed scanning galvanometer system is introduced to realize vertical scanning of the measurement line, thereby constructing a 3D plane.

[0060] Throughout the acquisition process, the three types of 3D area array cameras described above maintain a constant position relative to the sample, eliminating the need for additional moving parts to capture the sample's contour information. This collected contour information is then transmitted to a processing terminal for further processing. Currently, the three types of 3D area array cameras described above have become a common technology in the inspection industry, and their operating principles will not be detailed here. For example, the 3D area array camera 14 is the Surface HD 20 three-dimensional structured light area array camera from Xi'an Zhixiang Optoelectronics Technology Co., Ltd.

[0061] In some embodiments, the microscope camera 16 may include a chip-moving camera or a chip-fixed camera.

[0062] A mobile chip camera refers to a camera with a removable image acquisition chip. While optical microscope 15 is stationary, the image acquisition chip moves along the optical axis of optical microscope 15 to accurately capture multiple layers of sequential optical microscopic images of the sample surface, along with the chip position information corresponding to each layer. After acquisition, the relevant information can be transmitted to a processing terminal for further processing, enabling depth-of-field synthesis and 3D modeling of microscopic images. Mobile chip cameras offer the advantages of light weight, compact structure, and flexible installation, facilitating high integration. Exemplarily, microscopic camera 16 utilizes the TP-5003H mobile chip camera from Hangzhou Tupu Technology Co., Ltd.

[0063] A chip-fixed camera is one in which the image chip is fixed in position, which enables conventional planar microscopic inspection of samples. Figure 5 , through the external electric lifting platform 3, the detection terminal can be placed as a whole on the lifting plate of the electric lifting platform 3, and the lifting plate drives the entire detection terminal to move up and down, and the sample is scanned axially along the optical axis of the objective lens of the optical microscope 15 to collect different depth-of-field images corresponding to different heights of the sample, and at the same time record the axial position information, thereby obtaining a microscopic sequence of images of the sample at different heights along the optical axis of the objective lens of the optical microscope 15 and the position corresponding to each image; after the acquisition is completed, the relevant information can be transmitted to the processing terminal for further processing, thereby realizing the depth-of-field synthesis of the microscopic image and the 3D modeling of the microscopic image. Exemplarily, the electric lifting platform 3 adopts the stepping control system LS-P80 of Shenzhen Leisai Company and the precision motion lifting platform SY-ZS30 of Tianjin Sanying Precision Technology, which has the function of synchronously recording displacement step information.

[0064] In some embodiments, the optical microscope 15 can be an existing monocular industrial microscope. Monocular industrial microscopes feature a constant working distance, multiple continuously variable magnifications, and a lens with a maximum resolution of less than 0.5 microns. Monocular industrial microscopes are a mature technology, and their operating principles are not described in detail. For example, the optical microscope 15 is the MT0740 continuously variable magnification microscope from Guilin Matt Technology Co., Ltd.

[0065] In some embodiments, the lens optical axis of the 3D area array camera 14 and the objective lens optical axis of the optical microscope 15 may be parallel or non-parallel; when the lens optical axis of the 3D area array camera 14 and the objective lens optical axis of the optical microscope 15 are not parallel, the angle between the two is less than or equal to 80°.

[0066] In some embodiments, see Figure 2 、 Figure 4 An illuminator 18 is disposed on the base plate 12 and outside the mounting cavity 13. A power supply 17 is connected to the illuminator 18 via a power cord. The illuminators 18 may include one, two, or more. The power supply 17 is used to power the illuminators 18, causing them to emit light. This provides sufficient light for the detection terminal in low-light or no-light environments, enabling the detection terminal to more accurately identify and detect sample characteristics.

[0067] Illuminator 18 can be a coaxial light illuminator, a ring light illuminator, an oblique-incidence illuminator, or a polarized light illuminator. Exemplarily, illuminator 18 is a high-brightness, long-life LED ring light illuminator, disposed around lens aperture 121 and light aperture 122. Specifically, illuminator 18 utilizes the OPT-2000 light source from Dongguan Opto Corporation, which features high brightness, long life, and low heat generation.

[0068] In some embodiments, the optical path within optical microscope 15 includes two sequentially connected segments, with the angle between the two segments being less than 180°. Specifically, a reflector is provided within optical microscope 15, so that a conventional single optical path is reflected by the reflector to form two optical paths. This optimizes the dimensions of optical microscope 15, effectively utilizing the space within mounting cavity 13, and thereby reducing the overall dimensions of the detection terminal. Exemplarily, the reflector has a reflection angle of 45°, resulting in a 90° angle between the two optical paths.

[0069] Since the micro-contour detection terminal provided in the embodiment of the present application is small in size and light in weight, the detection terminal can be held handheld to detect the sample. Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 The housing 11 is provided with a handle 111. The handle 111 is provided for easy one-handed operation by the staff.

[0070] In some embodiments, see Figure 4 The handle 111 has a channel 112 in communication with the mounting cavity 13, and part of the light path of the optical microscope 15 passes through the channel 112. Thus, the space in the channel 112 can be utilized to further reduce the size of the detection terminal.

[0071] In some embodiments, see Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 Support columns 19 are attached to the base plate 12 and located outside the mounting cavity 13. These columns provide auxiliary support for the entire detection terminal during sample testing, enhancing its stability when held in the hand. Support columns 19 may include one, two, or more, and their length may be adjustable to accommodate complex on-site requirements.

[0072] Exemplarily, the support column 19 is detachably connected to the base plate 12. This design allows for flexible installation and removal of the support column 19 to accommodate varying testing environments and conditions. For example, the support column 19 and the base plate 12 may be threaded or magnetically connected to facilitate quick installation and removal.

[0073] In some embodiments, power source 17 includes a rechargeable or replaceable battery. Rechargeable batteries can be reused multiple times, reducing reliance on disposable batteries and thus reducing waste batteries and environmental pollution. Replaceable batteries are easy to replace at any time without having to wait for a long time to recharge, making them convenient and quick.

[0074] The micro-contour detection terminal provided in the embodiments of the present application can be equipped with a collection button on handle 111, which is used to control the detection terminal to perform collection operations. Placing the collection button on handle 111 facilitates single-handed operation for workers to complete collection operations. To avoid vibration caused by single-handed button operation and ensure stable collection, a remote control is also provided to control the detection terminal to perform collection operations.

[0075] See also Figure 6 The micro-contour detection system provided in the embodiment of the present application includes a detection terminal 1 and a processing terminal 2. The detection terminal 1 is a micro-contour detection terminal, and the 3D area array camera 14 and the microscope camera 16 are both connected to the processing terminal 2 in a wired or wireless manner.

[0076] When both the 3D area array camera 14 and the microscope camera 16 are connected to the processing terminal 2 via a wired connection, the signal line of the 3D area array camera 14 is connected to the processing terminal 2 through a perforation in the housing 11, and the signal line of the microscope camera 16 is connected to the processing terminal 2 through a perforation in the housing 11. To reduce system wiring and enhance convenience, the signal lines of the 3D area array camera 14 and the microscope camera 16 can be integrated into a single output line via a converter. When both the 3D area array camera 14 and the microscope camera 16 are connected to the processing terminal 2 via a wireless connection, the connection method can be WiFi, Bluetooth, ZigBee, etc.

[0077] Processing terminal 2, which may include a laptop, desktop computer, or smartphone, is used to receive, store, and analyze 3D point cloud data, microscopic image information, and position information collected by 3D area array camera 14 and microscope camera 16. Specifically, processing terminal 2 is equipped with 3D imaging detection software. This software utilizes the industrial camera and structured light scanning components within 3D area array camera 14 to perform structured light scanning 3D imaging of the sample surface at the correct working distance. After obtaining 3D point cloud data of the sample surface, the 3D point cloud is rendered to obtain a high-precision white point cloud model. This 3D imaging detection software then performs accurate three-dimensional measurement and analysis of the 3D model, thereby determining the true three-dimensional dimensions of the sample surface, with an accuracy of up to 3 microns. The processing terminal 2 is also equipped with ultra-depth-of-field 3D microscopic analysis software, which can implement automatic focusing through the microscope camera 16, observe the sample surface clearly in real time, and determine the specific detection position by moving the detection terminal. After the detection position is determined, the ultra-depth-of-field plane synthesis of multi-layer images can be realized, thereby obtaining an ultra-depth-of-field plane image with full axial clarity; while collecting multi-layer images, the current specific axial position information is recorded, and the actual height of each layer of image is obtained by conversion, thereby realizing 3D optical microscopy construction and obtaining a 3D model with real color. The detection accuracy of the model can reach 5 microns.

[0078] The 3D imaging technology based on structured light scanning and the depth of field fusion and 3D modeling technology based on multi-layer sequence images are both existing technologies and are relatively mature. This technology is not the focus of this application and will not be discussed further here.

[0079] The microscopic contour detection system provided in the embodiments of the present application, by providing a detection terminal 1, is capable of not only performing microscopic inspection of samples, achieving micron-level detection accuracy and meeting high-precision requirements, but also completing optical microscopic inspection and three-dimensional dimensional inspection of samples. A processing terminal 2 is provided for processing and analyzing the microscopic images and 3D point cloud data collected by the detection terminal 1, enabling quantitative and qualitative analysis. In some embodiments, the detection system also includes a motorized lift 3 for driving the entire detection terminal 1 up and down.

[0080] The above is only a preferred embodiment of the present application and does not constitute any form of limitation to the present application. Based on the technical essence of the present application and within the spirit and principles of the present application, any simple modification, equivalent replacement and improvement of the above embodiment shall still fall within the scope of protection of the technical solution of the present application.

Claims

1. A micro contour detection terminal, characterized in that: The invention comprises a housing (11) and a bottom plate (12) connected to the housing (11); a mounting cavity (13) is formed between the housing (11) and the bottom plate (12); a 3D area array camera (14), an optical microscope (15), a microscopic camera (16) and a power supply (17) are arranged in the mounting cavity (13); and the power supply (17) is connected to the 3D area array camera (14) and the microscopic camera (16) via a power line; The lens of the 3D area array camera (14) faces the base plate (12), and a lens hole (121) corresponding to the lens is provided on the base plate (12); the lens of the microscope camera (16) is connected to the eyepiece end of the optical microscope (15); the objective lens of the optical microscope (15) faces the base plate (12), and a light hole (122) corresponding to the objective lens is provided on the base plate (12).

2. The micro contour detection terminal according to claim 1, characterized in that: An illuminator (18) is provided on the base plate (12) and outside the installation cavity (13), and the power supply (17) is connected to the illuminator (18) via a power line.

3. The micro contour detection terminal according to claim 1, characterized in that: The position of the 3D area array camera (14) and the sample remains constant during the imaging process.

4. The micro contour detection terminal according to claim 1, characterized in that: The microscope camera (16) includes a chip-moving camera or a chip-fixed camera.

5. The micro contour detection terminal according to claim 1, characterized in that: The lens optical axis of the 3D array camera (14) is parallel or non-parallel to the objective lens optical axis of the optical microscope (15); When the lens optical axis of the 3D area array camera (14) is not parallel to the objective lens optical axis of the optical microscope (15), the angle between the two is less than or equal to 80°.

6. The micro contour detection terminal according to claim 1, characterized in that: The housing (11) is provided with a handle (111).

7. The micro contour detection terminal according to claim 1, characterized in that: A support column (19) is connected to the bottom plate (12) and located outside the installation cavity (13).

8. The micro contour detection terminal according to claim 1, characterized in that: The power source (17) comprises a rechargeable battery or a replaceable battery.

9. A microscopic contour detection system, characterized in that: The invention comprises a detection terminal (1) and a processing terminal (2), wherein the detection terminal (1) is the microscopic contour detection terminal described in any one of claims 1 to 8, and the 3D area array camera (14) and the microscopic camera (16) are both connected to the processing terminal (2) in a wired or wireless manner.

10. The micro contour detection system according to claim 9, characterized in that: It also includes an electric lifting platform (3) for driving the detection terminal (1) to rise and fall as a whole.

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