Cache device of semiconductor wafer storage box

Abstract

The utility model provides an improved buffering device of a semiconductor wafer storage box. The improved buffering device mainly comprises a storage box, a carrying table, a mounting groove, a screw, a limiting device, a fixing block, a stop column and the like. The barge carrying platform serves as a basic platform and provides necessary supporting and positioning functions. The positioning mechanism is composed of a mounting groove and a screw, and the stability of the storage box in different directions is ensured. And the limiting device comprises an adjustable fixing block and a stop column and can be adjusted according to the size of the storage box so as to adapt to the storage boxes of different specifications, and more stable supporting and limiting functions are provided. According to the device, the storage and transfer efficiency of the wafer is improved, the damage risk is reduced, and the production efficiency and the product quality in the semiconductor manufacturing process are remarkably improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, and in particular to a device for storing and caching semiconductor wafers. Background Art

[0002] Wafer storage and transportation are crucial components of the semiconductor manufacturing process. With the continuous advancement of semiconductor technology, the requirements for wafer storage and transportation equipment are also increasing. As a key component of this equipment, the design and functionality of wafer storage boxes directly impact wafer safety and manufacturing efficiency. However, existing wafer storage boxes have several key issues that hinder their application in modern semiconductor manufacturing.

[0003] First, the structural design of wafer storage boxes lacks stability. During storage and transport, wafers are susceptible to vibration and impact, causing them to shift or even damage. Existing storage boxes lack effective fixing and retaining devices, making it difficult to ensure stability throughout the transport process. This not only increases the risk of wafer breakage but also potentially affects the precision and quality of subsequent processes. Therefore, effectively securing wafer storage boxes to prevent movement during storage and transport has become a pressing issue.

[0004] Secondly, wafer storage cassettes of varying sizes are common in practical applications, and existing storage and transfer systems lack flexibility when adapting to these cassette sizes. Traditional fixtures are typically designed for specific cassette sizes, and switching to a different cassette size often requires complex adjustments or replacement parts, resulting in cumbersome and inefficient operations. The lack of a position-fixing mechanism that can flexibly adjust to cassette size severely impacts production flexibility and efficiency.

[0005] Furthermore, there are some issues with the automated transfer of wafer storage boxes. With the increasing automation in semiconductor manufacturing, the demand for automated transfer of storage boxes is growing. Traditional manual operation is not only inefficient but also prone to human error, failing to meet the demands of modern, efficient production. Existing automated systems also have issues with the design and control of the fork plates during transfer. For example, the fork plate's support and fixing mechanisms lack stability during operation, which can easily cause wafers to shift or become damaged during transfer. These issues limit the effectiveness of existing automated systems in actual production.

[0006] Existing wafer storage boxes also face environmental adaptability issues. Maintaining the cleanliness of the storage box interior is crucial during semiconductor manufacturing. Although some storage box designs incorporate sealing and filtering devices, ensuring a consistently high cleanliness level under various process conditions remains a challenge in practice. Especially during complex process operations, the cleanliness of the storage box interior has a direct impact on wafer quality. Existing storage box designs lack an effective solution to this problem, which can easily lead to environmental contamination and thus affect wafer quality.

[0007] In summary, the wafer storage boxes currently used in semiconductor manufacturing have shortcomings in terms of fixation and positioning, adaptability to different box sizes, automated operation, and environmental cleanliness control. These issues not only affect the storage and transfer efficiency of wafers, but also increase the risk of damage and operational difficulty. An improved solution is urgently needed to overcome these technical obstacles. By addressing these issues, the storage and transfer efficiency of the semiconductor manufacturing process can be significantly improved, while also enhancing wafer quality and production flexibility. Utility Model Content

[0008] The purpose of the utility model is to provide an improved wafer storage box storage and transmission system to solve the problems existing in the prior art, such as poor stability of the storage box, insufficient flexibility in adapting to storage boxes of different specifications, difficulty in automated operation, and poor control of environmental cleanliness.

[0009] To achieve the above objectives, the present invention provides the following technical solutions:

[0010] A cache device for a semiconductor wafer storage box, comprising:

[0011] A storage box for storing semiconductor wafers;

[0012] a docking platform on which the storage box can be placed and positioned by a positioning mechanism;

[0013] The positioning mechanism at least includes:

[0014] A mounting slot is provided on the docking platform for positioning the storage box in the transverse and longitudinal directions;

[0015] Screws passing through the mounting slots and fixing the storage box on the docking platform;

[0016] A limiting device, used for limiting the movement of the storage box in the horizontal or vertical direction, wherein the limiting device can be adjusted according to the size of the storage box to adapt to storage boxes of different specifications; and a stop column.

[0017] Furthermore, a carrier plate is provided on the loading platform, and the mounting groove is hollowed out on the carrier plate; the carrier plate is provided with a plurality of positioning holes, and the limiting device is fixed in the positioning holes by the screws.

[0018] Furthermore, the limiting device includes:

[0019] A fixing block, which is arranged in the mounting groove of the carrier plate of the docking platform and is used to provide preliminary positioning in the horizontal or vertical direction, and the fixing block has a boss;

[0020] A positioning groove is provided on the fixing block;

[0021] The limiting column is arranged on the boss of the fixing block.

[0022] Furthermore, the top of the limiting column is conical.

[0023] Furthermore, a positioning hole is provided at the bottom of the storage box.

[0024] Furthermore, a sensor is provided on the carrier plate for sensing the position of the storage box.

[0025] Furthermore, the top end of the stopping column is located higher than the height of the boss of the fixing block.

[0026] Furthermore, it also includes a tooth fork plate, on which a plurality of positioning columns are provided, and the positioning columns are adapted to the positioning holes for supporting the storage box.

[0027] Compared with the prior art, the beneficial effects of the present invention are:

[0028] The utility model has the following beneficial effects: by arranging installation slots, screws and limit devices on the loading platform, the stability of the storage box during storage and transportation is ensured to prevent movement; the limit device can be adjusted according to the size of the storage box to adapt to storage boxes of different specifications, thereby improving the flexibility of device adaptation; the positioning holes and sensors on the carrier plate can accurately sense the position of the storage box to ensure the accuracy of automated operation; the combined design of the fixed block and the limit column provides preliminary horizontal and vertical positioning, thereby enhancing the fixing effect of the storage box; the top of the limit column is designed to be conical, which further improves the stability and accuracy of the fixation; the positioning column on the fork plate is adapted to the positioning hole of the storage box for lifting the storage box, thereby ensuring the stability and safety of the storage box during automated transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 : Schematic diagram of the overall structure of the cache device of the semiconductor wafer box;

[0030] Figure 2: Schematic diagram of the local structure of the cache device;

[0031] Figure 3 : Schematic diagram of the structure of the limiting device;

[0032] Figure 4 : Schematic diagram of the storage box;

[0033] Figure 5 : Bottom view of the storage box;

[0034] Figure 6 : Schematic diagram of the structure of the tooth fork.

[0035] 1-Storage box 2-Loading platform 3-Mounting slot 4-Screw 5-Limiting device 6-Fixed block 7-Limiting column 8-Carrying plate 9-Boss 10-Fork plate 11-Location slot 12-Location hole 13-Sensor 14-Location column 15-Stop column DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "several" means two or more, unless otherwise specifically defined.

[0039] See also Figures 1-6As shown, this embodiment provides an improved cache device for a semiconductor wafer storage box, which mainly includes components such as a storage box 1, a loading platform 2, a mounting slot 3, a screw 4, a limiting device 5, a fixing block 6 and a limiting column 7.

[0040] Storage box 1 is used to store semiconductor wafers. Its compact design effectively protects the wafers from external contamination and physical damage. During storage and transport, storage box 1 must be stably placed on platform 2, which provides the necessary support and positioning.

[0041] The loading platform 2 serves as the foundation for the entire caching system. The storage box 1 is placed on the loading platform 2 and positioned using a positioning mechanism. This positioning mechanism comprises at least mounting slots 3 and screws 4. The mounting slots 3, located on the loading platform's surface, position the storage box both horizontally and vertically. Multiple mounting slots ensure the stability of the storage box in various directions. Screws 4 penetrate the mounting slots and secure the storage box to the loading platform, preventing it from shifting during storage and transport.

[0042] The limiting device 5 is used to restrict the lateral or longitudinal movement of the storage box. This limiting device is adjustable and can be adjusted to accommodate storage boxes of varying sizes. This design not only increases the device's flexibility but also simplifies its operation. The limiting device 5 primarily consists of a fixing block 6 and a limiting post 7.

[0043] The fixing block 6 is arranged in the mounting groove 3 of the carrier plate 8 of the docking platform 2, and is used to provide preliminary positioning in the horizontal or vertical direction. The fixing block 6 has a boss 9, which can lift the storage box 1 to facilitate the insertion of the tooth fork plate 10 from the space between the storage box 1 and the carrier plate 8. The design of the fixing block 6 takes into account the overall structure of the docking platform 2, so that the fixing block 6 can be firmly embedded in the mounting groove 3 of the docking platform, thereby providing the necessary support and positioning functions. A stop column 15 is provided at one end of the carrier plate 8, and the stop column 15 is higher than the height of the boss 9 to prevent the storage box 1 from moving and shaking in the vertical direction.

[0044] Positioning slots 11 are provided on the fixing block 6 for screw adjustment and adjustment of the fixing block 6 within the mounting slot 3. A stopper post 7, mounted on the boss 9 of the fixing block 6, has a conical top. This design provides a larger contact area during positioning, thereby improving stability and accuracy. The conical top of the stopper post effectively prevents movement of the storage box during positioning, while also providing more stable support.

[0045] Furthermore, the bottom of the storage box 1 is provided with positioning holes 12. These holes 12 allow the storage box 1 to be more securely fixed to the docking platform 2. Sensors 13 are also provided on the carrier plate 8 to sense the position of the storage box 1. These sensors 13 monitor the position of the storage box 1 in real time, ensuring accuracy during automated operation. The presence of sensors 13 not only enhances the intelligence of the system but also increases operational safety and reliability.

[0046] The device also includes a fork plate 10. Several positioning posts 14 are provided on the fork plate 10. These posts 14 fit into the positioning holes 12 of the storage box 1 and are inserted into the holes 12 to secure the storage box 1 relative to the fork plate 1 and provide stable support. During automated transport, the fork plate 10 supports the storage box 1, ensuring its stability and safety and preventing it from tilting or sliding during transport. The design of the fork plate 10 takes into account the size and weight of the storage box 1, ensuring that it remains balanced and stable during transport.

[0047] In this embodiment, the fixing and limiting mechanism of the storage box 1 is further optimized. In order to ensure the stability of the storage box 1 in the horizontal and vertical directions, the combination design of the fixing block 6 and the limiting column 7 provides a more effective initial positioning.

[0048] First, the fixing block 6 is installed in the mounting slot 3 of the carrier plate 8 of the docking platform 2. The fixing block 6 provides initial lateral and longitudinal positioning through the boss 9 and positioning slot 11. A limiting post 7, with a conical top, is mounted on the boss 9 of the fixing block 6. This design not only effectively limits the lateral and longitudinal movement of the storage box 1, but also prevents displacement due to vibration or impact during transport.

[0049] In practice, the carrier plate 8 is provided with multiple positioning holes 12. These positioning holes 12 can be adjusted according to the size of the storage box 1, ensuring that storage boxes of different sizes can be securely fixed to the docking platform 2. Screws 4 pass through the mounting slots 3 and the positioning holes 12 to securely fasten the storage box 1 to the docking platform 2. The stopper 5 is fixed in the positioning holes 12 by the screws 4 and can be adjusted as needed to accommodate storage boxes 1 of different sizes.

[0050] To further improve the accuracy and efficiency of automated operations, sensors 13 are installed on carrier plate 8. These sensors 13 monitor the position of storage cassettes 1 in real time, ensuring they remain correctly positioned during automated transport. The presence of sensors 13 not only enhances the system's intelligence but also increases operational safety and reliability.

[0051] The positioning posts 14 on the fork plate 10 precisely mate with the positioning holes 12 of the storage box 1. During automated transport, the fork plate 10 supports the storage box 1, ensuring its stability and safety, and preventing it from tilting or sliding during transport. The design of the fork plate 10 takes into account the size and weight of the storage box 1, ensuring that it remains balanced and stable during transport.

[0052] In this embodiment, the design of the limiting device 5 and the fixing block 6 is further optimized. The limiting device 5 includes a plurality of adjustable limiting posts 7, which can be adjusted according to the size of the storage box 1 to accommodate storage boxes of different specifications. The tops of the limiting posts 7 are designed to be conical, which provides a larger contact area during positioning, thereby improving the stability of the positioning.

[0053] The fixing block 6 is arranged in the mounting groove 3 and fixed to the loading platform 2 by screws 4. The fixing block 6 has a boss 9 and a plurality of positioning grooves 11. These positioning grooves 11 are used for the initial positioning of the limiting column 7 to ensure that the limiting column 7 can accurately limit the movement of the storage box 1 during the fixing process.

[0054] In actual operation, when it is necessary to replace a storage box 1 of a different specification, it is only necessary to adjust the position of the limiting column 7. This design not only improves the flexibility of operation, but also simplifies the adjustment process and significantly improves work efficiency.

[0055] To ensure the stability of the storage box 1 during storage and transport, the retaining post 7 precisely mates with the positioning hole 12 of the storage box 1. The conical top design of the retaining post 7 provides a larger contact area during positioning, thereby improving the stability of the position. In addition, the boss 9 of the fixing block 6 can support the storage box 1, facilitating the insertion of the fork plate 10 through the space between the storage box 1 and the carrier plate 8.

[0056] The positioning posts 14 on the tooth fork plate 10 are inserted into the positioning holes 12 of the storage box 1 for relative fixation and stably support the storage box 1. During the automated transport process, the tooth fork plate 10 supports the storage box 1 to ensure its stability and safety and prevent it from tilting or sliding during transport.

[0057] The arrangement of the sensor 13 can monitor the position of the storage box 1 in real time, ensuring accuracy during the automated operation. The sensor 13 not only improves the intelligence level of the system, but also enhances the safety and reliability of the operation.

[0058] In summary, the present invention provides an improved caching device for semiconductor wafer storage boxes. Through a rational structural design, it ensures the stability of the storage boxes during storage and transport, improves adaptability to storage boxes of varying specifications, and optimizes automated operation processes. This device not only improves wafer storage and transport efficiency but also reduces the risk of breakage due to vibration or impact during operation, significantly enhancing production efficiency and product quality in the semiconductor manufacturing process.

[0059] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A buffer device for a semiconductor wafer storage box, characterized in that: include, A storage box for storing semiconductor wafers; a docking platform on which the storage box can be placed and positioned by a positioning mechanism; The positioning mechanism at least includes: A mounting slot is provided on the docking platform for positioning the storage box in the transverse and longitudinal directions; Screws passing through the mounting slots and fixing the storage box on the docking platform; A limiting device, used for limiting the movement of the storage box in the horizontal or vertical direction, wherein the limiting device can be adjusted according to the size of the storage box to adapt to storage boxes of different specifications; and a stop column.

2. The cache device of a semiconductor wafer storage box according to claim 1, characterized in that: The loading platform is provided with a loading plate, and the mounting groove is hollowed out on the loading plate; the loading plate is provided with a plurality of positioning holes, and the limiting device is fixed in the positioning holes by the screws.

3. The cache device of a semiconductor wafer storage box according to claim 2, characterized in that: The limiting device includes: A fixing block, which is arranged in the mounting groove of the carrier plate of the docking platform and is used to provide preliminary positioning in the horizontal or vertical direction, and the fixing block has a boss; A positioning groove is provided on the fixing block; The limiting column is arranged on the boss of the fixing block.

4. The cache device of a semiconductor wafer storage box according to claim 3, characterized in that: The top of the limiting column is conical.

5. The cache device of a semiconductor wafer storage box according to claim 1, characterized in that: A positioning hole is provided at the bottom of the storage box.

6. The cache device of a semiconductor wafer storage box according to claim 2, characterized in that: A sensor is provided on the carrier plate for sensing the position of the storage box.

7. The cache device of a semiconductor wafer storage box according to claim 3, characterized in that: The top end of the stopping column is located higher than the height of the boss of the fixing block.

8. The cache device of a semiconductor wafer storage box according to claim 3, characterized in that: It also includes a tooth fork plate, on which a plurality of positioning columns are provided. The positioning columns are adapted to the positioning holes and are used to support the storage box.

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