Crucible processing device and crucible sand blasting system

Abstract

The utility model discloses a crucible machining device and a crucible sand blasting system.The crucible machining device is used for blasting sand to the surface of a quartz crucible and comprises a sand blasting mechanism, the sand blasting mechanism comprises a supporting piece and a spray head assembly, and one end of the spray head assembly is rotationally connected to one end of the supporting piece in the first direction; the other end of the spray head assembly extends in the direction away from the supporting piece, and a preset included angle alpha is formed between the extending direction of the spray head assembly and the first direction and meets 0 degree lt; [alpha] [lt]; one end of the nozzle assembly is rotationally connected with the supporting piece, the other end of the nozzle assembly is used for blasting sand to the surface of the quartz crucible, and the extending direction of the nozzle assembly from one end to the other end is consistent with the sand blasting direction, so that the direction of the rotating shaft intersects with the sand blasting direction; and a certain included angle is formed between the sand blasting direction and the tangent plane of the cavity wall of the crucible, so that microbubbles with different depths on the inner surface of the crucible can be eliminated.

Description

Technical Field

[0001] The present application belongs to the technical field of crucible production equipment, and specifically relates to a crucible processing device and a crucible sandblasting system. Background Art

[0002] In the single crystal silicon wafer production process, quartz crucibles are consumable containers used to pull single crystal silicon rods. They hold molten silicon and are a key consumable for crystal pulling. Quartz crucibles are typically manufactured using the arc method, which results in a small amount of microbubbles on the inner surface of the crucible. When using a quartz crucible to pull single crystal silicon rods, the presence of these microbubbles can affect the yield of the rods. Utility Model Content

[0003] The present application aims to provide a crucible processing device and a crucible sandblasting system, which can effectively solve the microbubbles on the inner surface of the quartz crucible and further improve the yield rate of single crystal silicon rods.

[0004] In order to solve the above technical problems, this application is implemented as follows:

[0005] In the first aspect, an embodiment of the present application proposes a crucible processing device for sandblasting the surface of a quartz crucible, comprising: a sandblasting mechanism, comprising a support member and a nozzle assembly, one end of the nozzle assembly being connected to one end of the support member by rotating around a first direction, and the other end of the nozzle assembly extending toward the direction away from the support member, and a preset angle α is formed between the extension direction of the nozzle assembly and the first direction, satisfying: 0°<α<90°.

[0006] In an embodiment of the present application, the sandblasting mechanism includes a support member and a nozzle assembly, the nozzle assembly is rotatably connected to one end of the support member, and the other end of the nozzle assembly is used to sandblast the surface of the quartz crucible. The nozzle assembly extends from one end to the other end, that is, the extension direction of the nozzle assembly is consistent with the sandblasting direction, so that the rotation axis direction and the extension direction intersect, that is, the rotation axis direction of the nozzle assembly intersects with the sandblasting direction, so that when the nozzle assembly sandblasts the crucible, there is a certain angle between the sandblasting direction and the cross-section of the crucible cavity wall, which helps to eliminate microbubbles at different depths on the inner surface of the crucible.

[0007] In a second aspect, an embodiment of the present application proposes a crucible sandblasting system, comprising: a crucible and a crucible processing device as described in any one of the above items, wherein one end of the support rod extends into the inner cavity of the crucible to sandblast the inner cavity of the crucible through the nozzle assembly.

[0008] In an embodiment of the present application, the crucible system includes a crucible and a crucible processing device. By setting different rotation angles of the nozzle assembly relative to a preset plane, sandblasting is performed on different positions of the crucible, thereby eliminating microbubbles at different positions and different depths in the crucible.

[0009] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0011] Figure 1 is a structural schematic diagram of a crucible processing device according to an embodiment of the present application from one perspective;

[0012] Figure 2 is a structural schematic diagram of the crucible processing device according to an embodiment of the present application from another perspective;

[0013] Figure 3 is a partial schematic diagram of a sandblasting mechanism according to an embodiment of the present application;

[0014] Figure 4 is a partial cross-sectional view of the crucible sandblasting system according to an embodiment of the present application in operation;

[0015] Figure 5 Schematic diagram of sandblasting at different angles of a crucible processing device in a crucible sandblasting system according to an embodiment of the present application;

[0016] Figure 6 is a schematic diagram of a crucible processing device according to an embodiment of the present application during operation from one viewing angle;

[0017] Figure 7 is a schematic diagram of the crucible processing device according to an embodiment of the present application during operation from another perspective;

[0018] Figure 8 3 is a diagram showing the number of microbubbles at different depths according to an embodiment of the present application.

[0019] Reference numerals:

[0020] 11: base; 12: rotating table; 121: annular slot; 2: crucible; 21: bottom; 22: straight cylinder; 23: arc transition part; 3: sandblasting mechanism; 31: support member; 32: nozzle assembly; 321: connecting member; 3211: first connecting member; 3212: second connecting member; 322: nozzle; 3221: ejection port; 323: first driving member; 33: air inlet pipe; 34: feeding pipe; 4: collecting member; 5: second driving member; 6: control member; X: first direction; Y: extension and contraction direction of the support member; Z: second direction; d: distance between the ejection port and the wall of the inner cavity; O: coordinate origin. DETAILED DESCRIPTION

[0021] The embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0022] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly refer to one or more of the features. Throughout the description of this application, unless otherwise specified, "plurality" means two or more. Furthermore, "and / or" in the specification and claims refers to at least one of the connected entities, and the character " / " generally indicates an "or" relationship between the connected entities.

[0023] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0024] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0025] Before explaining the crucible processing device and the crucible sandblasting system of the embodiment of the present application, the application scenario of the crucible processing device of the embodiment of the present application is specifically described:

[0026] At present, quartz crucibles are used in the preparation of single crystal silicon rods. Quartz crucibles are usually made by heating quartz sand raw materials using an electric arc furnace method. The side walls of the quartz crucibles have an inner transparent layer and an outer bubble layer. Under a microscope, microbubbles still exist in the inner transparent layer, whether at the bottom of the crucible, the straight cylinder or the arc transition part, and the number of microbubbles varies at different locations. In addition, most of the microbubble layer is concentrated on the surface of the inner transparent layer, but there are still some at a depth of 0.5mm, and even at a depth of 1-2mm, there are trace microbubbles. Figure 8 As shown in the figure, it can be seen that the number of microbubbles is slightly different in different parts of the crucible. The number of microbubbles at the arc transition is much higher than that at the bottom of the crucible and the straight part of the crucible. In addition, the closer to the inner surface of the inner transparent layer of the quartz crucible (i.e., the inner wall), that is, the position where the crucible is at position 0, the number of microbubbles is the largest. There are also some microbubbles at the crucible position of 0.5mm. When pulling single crystals, these microbubbles are in direct contact with the inner surface of the quartz crucible and the silicon liquid. The microbubbles on the surface of the quartz crucible expand and burst due to heat, and tiny quartz particles are mixed into the silicon liquid, which leads to an increase in the breakage rate of the single crystal.

[0027] To this end, an embodiment of the present application provides a crucible processing device and a crucible sandblasting system. The crucible processing device and the crucible sandblasting system provided in the embodiment of the present application are described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0028] The crucible processing device provided in this application is used for processing crucibles and sandblasting the inner surface of the crucible, thereby eliminating microbubbles in the inner wall of the quartz crucible, thereby improving the yield of single crystal silicon rods when using the quartz crucible for pulling single crystals.

[0029] like Figure 1 and Figure 4 As shown, the crucible processing device according to some embodiments of the present application is used to sandblast the surface of a quartz crucible, including a sandblasting mechanism 3, the sandblasting mechanism 3 including a support 31 and a nozzle assembly 32, one end of the nozzle assembly 32 is connected to one end of the support 31 by rotating around a first direction X, and the other end of the nozzle assembly 32 extends in a direction away from the support 31, and a preset angle α is formed between the extension direction of the nozzle assembly and the first direction X, satisfying: 0°<α<90°.

[0030] In the embodiment of the present application, the first direction X is the rotation axis direction of the nozzle assembly 32. One end of the nozzle assembly 32 is connected to the support member, and the other end is used to sandblast the surface of the quartz crucible. The nozzle assembly 32 extends from one end to the other end, so that the extension direction of the nozzle assembly 32 is consistent with the sandblasting direction. The extension direction of the nozzle assembly 32 intersects with the first direction X, that is, the sandblasting direction of the nozzle assembly 32 intersects with the rotation axis direction of the nozzle assembly 32. Therefore, when the crucible 2 is sandblasted by the nozzle assembly 32, there is a certain angle between the sandblasting direction and the cross-section of the cavity wall of the crucible 2, which helps to eliminate microbubbles of different depths on the inner surface of the crucible 2. This avoids the low yield rate of single crystal silicon rods caused by microbubbles when using the crucible 2 for crystal pulling.

[0031] Specifically, the first direction X is the direction of the rotation axis of the nozzle assembly 32, that is, the axial direction of the rotation axis of the nozzle assembly 32; the nozzle assembly 32 extends from one end connected to the support member 31 to the other end, and the other end is used to sandblast the inner surface of the crucible 2. The sandblasting direction is consistent with the extension direction, and the extension direction is also the sandblasting direction of the nozzle assembly 32. The sandblasting direction of the nozzle assembly 32 intersects with the rotation axis direction, so that when the nozzle assembly 32 rotates about its rotation axis, the sandblasting direction always forms a certain angle with its rotation axis, and thus the sandblasting direction forms a certain angle with the cross-section of the inner wall of the crucible 2. The sand material sprayed by the nozzle assembly 32 can be sprayed onto the inner wall of the crucible 2 at a certain angle, thereby eliminating microbubbles at different depths in the inner wall of the crucible 2 without causing excessive impact on the inner wall of the crucible 2, thereby avoiding excessive damage to the inner wall due to sandblasting.

[0032] In a specific application, one end of the nozzle assembly 32 is connected to one end of the support member 31 by rotating around the first direction X, so that the nozzle assembly 32 can rotate according to different positions of the inner wall of the crucible 2, thereby spraying the sand material to the corresponding position, thereby improving the coverage range of the sandblasting.

[0033] It can be understood that since the number of microbubbles at different depths at different positions of the inner wall of the crucible 2 is different, one end of the nozzle assembly 32 rotates relative to one end of the support member 31 to spray sand to different areas of the inner wall of the crucible 2, and the sand sprayed at a certain angle can eliminate microbubbles at different depths without causing excessive removal of raw materials from the inner wall of the crucible 2, thereby improving the sandblasting effect.

[0034] In a specific application, the sandblasting direction of the nozzle assembly 32 forms a preset angle α with the first direction X. Specifically, the angle α between the sandblasting direction and the first direction X can be greater than 0° and less than 90°. In order to ensure that the sandblasting direction forms a certain angle with the cross-section of the inner wall of the crucible 2, the sandblasting direction of the nozzle assembly 32 and the first direction X should be set to be non-parallel to each other. It is understood that the preset angle α is greater than 0° and less than 90°, and can be any angle such as 0.5°, 10°, 20°, 30°, 40°, 50°, 60°, 70°, 80°, 89°, or a range between any two angles.

[0035] It should be explained that when the preset angle α is equal to 0° or equal to 90°, an excessive impact force will be generated on the inner wall of the crucible 2, which will remove too much material from the inner wall of the crucible 2 and easily cause the thickness of the crucible 2 to be excessively reduced.

[0036] like Figure 1 、 Figure 2 and Figure 3 As shown, in some embodiments of the present application, 30°≤α≤45°.

[0037] In the embodiment of the present application, the preset angle α between the blasting direction of the nozzle assembly 32 and the rotation axis direction is set in the range of 30° to 45°. In this way, when the nozzle assembly 32 sandblasts any part of the inner surface of the crucible 2, there is a certain angle between the sandblasting direction and the cross-section of the cavity wall of the inner cavity of the crucible 2. Even if the sand material sprayed by the nozzle assembly 32 is sprayed at a certain angle to the cavity wall of the inner cavity of the crucible 2, the quality of the sandblasting can be further improved, and microbubbles can be better eliminated.

[0038] In a specific application, the sandblasting direction of the nozzle assembly 32 forms a preset angle α with the first direction X. The preset angle α can be set to any angle such as 30°, 32°, 33°, 35°, 37°, 38°, 40°, 43°, 45°, or a range between any two angles.

[0039] It should be explained that when the preset angle α is less than 30° or greater than 45°, the angle between the sandblasting direction and the cross-section of the cavity wall of the inner cavity of the crucible 2 will be too small, so that the sand material cannot have a good impact on the cavity wall, thereby reducing the efficiency of eliminating microbubbles.

[0040] In a specific application, the predetermined angle α between the sandblasting direction of the nozzle assembly 32 and the rotation axis direction may be formed by a bent structure of the nozzle assembly 32 itself so that the sandblasting direction and the first direction X form the predetermined angle α, or the sand outlet may form the predetermined angle α with the first direction X. Those skilled in the art may configure the angle according to actual needs, and this application does not impose any restrictions thereto.

[0041] like Figure 2As shown, in some embodiments of the present application, the nozzle assembly 32 includes a connecting member 321 and a nozzle 322, one end of the connecting member 321 is rotatably connected to the support member 31, and the nozzle 322 is connected to the other end of the connecting member 321, the rotation axis direction of the connecting member 321 is the first direction X, and the sandblasting direction of the nozzle 322 forms a preset angle α with the first direction X.

[0042] In the embodiment of the present application, one end of the connecting member 321 is rotatably connected to the support member 31, and the nozzle 322 is connected to the other end of the connecting member 321. The rotation axis direction of the connecting member 321 is the first direction X, and the sandblasting direction of the nozzle 322 forms a preset angle α with the first direction X. In this way, when the nozzle assembly 32 sandblasts any part of the inner surface of the crucible 2, the sandblasting direction forms a certain angle with the cross-section of the inner cavity wall of the crucible 2. That is, the sand material sprayed by the nozzle assembly 32 will be injected into the inner cavity wall of the crucible 2 at a certain angle, thereby further improving the quality of the sandblasting and better eliminating microbubbles.

[0043] In a specific application, one end of the connecting member 321 is rotatably connected to the support member 31, and the nozzle 322 is connected to the other end of the connecting member 321, so that when the connecting member 321 rotates, it can drive the nozzle 322 to rotate. At the same time, it is ensured that the sandblasting direction of the nozzle 322 forms a certain angle with the first direction X, so that different areas of the inner wall of the crucible 2 can be sandblasted.

[0044] It can be understood that during sandblasting, the sand material is ejected from the nozzle 322, and the sandblasting direction is the actual sand material ejection direction. The sandblasting direction of the nozzle 322 forms the preset angle α with the first direction X, so that the sand material ejected from the nozzle 322 will be ejected at a certain angle to the cavity wall of the inner cavity of the crucible 2, thereby further improving the quality of sandblasting and better eliminating microbubbles.

[0045] like Figure 3 、 Figure 6 and Figure 7 As shown, in some embodiments of the present application, the connecting member 321 includes a first connecting portion 3211 and a second connecting portion 3212, and the first connecting portion 3211 is rotatably connected to the support member 31 around the first direction X; one end of the second connecting portion 3212 is fixedly connected to the first connecting portion 3211, and the other end extends in a direction away from the support member 31, the nozzle 322 is connected to the other end of the second connecting portion 3212, and the extension direction of the second connecting portion 3212 forms an angle γ with the extension direction of the first connecting portion 3211, satisfying α+γ=90°.

[0046] In the embodiment of the present application, a first connecting portion 3211 is provided to be rotatably connected to the support member 31 about a first direction X; one end of a second connecting portion 3212 is fixedly connected to the first connecting portion 3211, and the other end extends in a direction away from the support member 31; a nozzle 322 is connected to the other end of the second connecting portion 3212, and an angle γ is formed between the extension direction of the second connecting portion 3212 and the extension direction of the first connecting portion 3211, where α+γ=90°. Thus, the connecting member 321 has a bent structure, so that the sandblasting direction of the nozzle 322 connected to the second connecting portion 3212, i.e., the extension direction of the second connecting portion 3212, can form an angle α with the first direction X. Consequently, the sand material ejected from the nozzle 322 is ejected at a certain angle onto the inner wall of the crucible 2, further improving the quality of the sandblasting and better eliminating microbubbles.

[0047] In specific applications, such as Figure 3 As shown, the axial direction of the first connecting portion 3211 and the axial direction of the second connecting portion 3212 form an angle γ, that is, a bending structure is formed, which enables the sandblasting direction of the nozzle assembly 32 to form a certain angle with the cavity wall of the inner cavity of the crucible 2 at any angle and area when the nozzle assembly 32 rotates.

[0048] It can be understood that the first connection part 3211 is rotatably connected to the support member 31 around the first direction X. The first connection part 3211 can at least partially serve as a rotation axis, or the end of the first connection part 3211 away from the second connection part 3212 can be fixedly connected to the rotation axis.

[0049] like Figure 2 、 Figure 3 、 Figure 6 and Figure 7 As shown, in some embodiments of the present application, the nozzle assembly 32 further includes a first driving member 323 . The first driving member 323 is installed at one end of the supporting member 31 and is used to drive the connecting member 321 to rotate.

[0050] In the embodiment of the present application, by providing a first driving member 323 at one end of the support member 31, the connecting member 321 can be driven to rotate, so that the position of the nozzle 322 can be automatically adjusted to meet the sandblasting requirements at different positions of the inner cavity of the crucible 2, thereby improving operability.

[0051] In a specific application, the first driving member 323 drives the connecting member 321 to rotate, which can be driven by a motor, hydraulically driven, or pneumatically driven, etc. Those skilled in the art can set it according to actual needs, and this application does not impose any restrictions on this.

[0052] In one embodiment of the present application, the first driving member 323 is a micro motor, which drives the connecting member 321 to rotate without occupying a large space and is easy to install.

[0053] like Figure 1 、 Figure 2 As shown, in some embodiments of the present application, the sandblasting mechanism 3 also includes an air intake pipe 33 and a feed pipe 34, which are respectively connected to the nozzle 322, and the air intake pipe 33 is used to provide air flow to the nozzle 322 to drive the sand in the feed pipe 34 to be ejected from the nozzle 322.

[0054] In the embodiment of the present application, an air inlet pipe 33 and a feed pipe 34 are provided, and the air inlet pipe 33 and the feed pipe 34 are respectively connected to the nozzle 322. The air inlet pipe 33 is used to provide air flow to the nozzle 322 to drive the sand in the feed pipe 34 to be ejected from the nozzle 322, thereby realizing sandblasting of the crucible 2.

[0055] In a specific application, the air inlet pipe 33 is connected to the air pressure device to blow compressed air from the nozzle 322, and the feed pipe 34 is connected to the sand box to provide sand to the nozzle 322. The sand at the nozzle 322 is driven and ejected by the compressed air to sandblast the crucible.

[0056] like Figure 2 As shown, in some embodiments of the present application, the crucible processing device also includes a base 11, a rotating table 12 is provided on the base 11, and the rotating table 12 is rotatably connected to the base 11. An annular groove 121 is provided on the side of the rotating table 12 facing away from the base 11. The annular groove 121 is suitable for clamping with the open end of the workpiece to be sandblasted, and the rotating table is used to drive the workpiece to be sandblasted to rotate.

[0057] In the embodiment of the present application, an annular groove 121 is provided on the side of the rotating table 12 facing away from the base 11, so that the open end of the workpiece to be sandblasted can be conveniently clamped on the annular groove 121, so that the workpiece to be sandblasted can be driven to rotate by the rotating table 12, which can facilitate sandblasting of the inner wall of the workpiece to be sandblasted and ensure uniform sandblasting.

[0058] In a specific application, the part to be sandblasted is a crucible 2, which is inverted on the rotating table 12, and its open end is clamped on the annular clamping groove 121. In this way, under the action of the crucible's own gravity, the crucible 2 is connected to the rotating table 12, so that it can rotate with the rotating table 12.

[0059] Specifically, the rotating table 12 can drive the crucible 2 to rotate, so that the crucible 2 rotates with the rotation of the rotating table 12. When the sandblasting mechanism 3 sandblasts the crucible 2, since the crucible 2 is in a rotating state, the sandblasting force applied to different parts of the crucible 2 is the same, thereby improving the consistency of the inner wall of the crucible 2 after sandblasting.

[0060] It can be understood that in order to sandblast all areas of the inner cavity of the crucible 2, the nozzle assembly 32 rotates relative to the support member 31, and in combination with the rotary table 12, drives the crucible 2 to rotate, so that all areas of the inner cavity of the crucible 2 can be sandblasted, thereby improving the effect of eliminating microbubbles.

[0061] It should be explained that the material of the rotating table 12 is polytetrafluoroethylene (PTFE), which has a low manufacturing cost and will not cause damage to the open end of the crucible 2 during the clamping process.

[0062] like Figure 2 As shown, in some embodiments of the present application, the crucible processing device further includes a material collecting member 4, which is provided on a side of the base 11 away from the rotating table 12 and is used to collect sand materials.

[0063] In the embodiment of the present application, a collecting member 4 is provided on the side of the base 11 away from the rotating table 12 , so that the sand after sandblasting can be collected at any time, so as to recover and recycle the sand.

[0064] In a specific application, the collecting member 4 is also communicated with the feeding pipe 34 , so as to replenish the sand material in the feeding pipe 34 .

[0065] In some embodiments of the present application, a control member 6 is further provided between the material collecting member 4 and the feed pipe 34 to control the amount of material added to the feed pipe 34 by the material collecting member.

[0066] Specifically, the control component 6 is a flow meter or a valve, so as to control the amount of sand material when the material collecting component replenishes the feeding pipe 34.

[0067] like Figure 1 and Figure 2 As shown, in some embodiments of the present application, the crucible processing device further includes a second driving member 5 , which is mounted on the base 11 and is used to drive the rotating platform 12 to rotate relative to the base 11 .

[0068] In an embodiment of the present application, the crucible processing device also includes a second driving member 5, which is installed on the base 11 and is used to drive the rotating table 12 to rotate relative to the base 11, so that the crucible 2 can rotate relative to the sandblasting mechanism 3, thereby making the sandblasting more uniform.

[0069] It is understood that the second driving member 5 and the rotating table 12 may be connected by gears, belts, etc., and those skilled in the art may configure the connection based on actual needs, and this application does not impose any restrictions thereto. Preferably, the second driving member 5 drives the rotating table 12 to rotate via a belt, thereby ensuring smooth rotation while reducing equipment costs.

[0070] like Figure 1 and Figure 4 As shown, in some embodiments of the present application, the support member 31 is a retractable member.

[0071] In the embodiment of the present application, the support member 31 is configured as a retractable member, thereby driving the nozzle assembly 32 to sandblast all inner walls of the crucible 2, thereby increasing the operating range of the sandblasting.

[0072] In specific applications, the specific telescopic structure of the support member 31 includes but is not limited to at least one of a telescopic rod, a gear rack, a worm gear, a screw nut, etc., and those skilled in the art can set it according to needs, and this application does not impose any restrictions on this.

[0073] It is understandable that a micro motor is provided inside the support member 31 , so that the micro motor can be controlled by an external control member, thereby extending or shortening the support member 31 according to the operator's intention to reach different blasting areas of the crucible 2 .

[0074] like Figure 4 and Figure 5 As shown, the present application also provides a crucible sandblasting system, comprising: a crucible 2 and a crucible processing device as described in any of the above embodiments, one end of a support member 31 extends into the inner cavity of the crucible 2 to sandblast the inner cavity of the crucible 2 through a nozzle assembly 32.

[0075] In the embodiment of the present application, the sandblasting direction of the nozzle assembly 32 intersects with the rotation axis direction X of the nozzle assembly 32, so that there is a certain angle between the sandblasting direction and the cross-section of the cavity wall of the crucible 2. The sprayed sand material will be sprayed onto the cavity wall of the crucible 2 at a certain angle, thereby improving the quality of the sandblasting. At the same time, by setting different rotation angles of the nozzle assembly 32 relative to the preset plane, sandblasting can be performed on different positions of the crucible 2. In this way, microbubbles at different positions and different depths in the crucible 2 can be eliminated. This avoids the low yield rate of single crystal silicon rods caused by microbubbles when using the crucible 2 for crystal pulling.

[0076] It needs to be explained that, Figure 4 As shown, since the inner cavity of the crucible 2 is arc-shaped, in order to better sandblast the inner cavity of the crucible 2, the nozzle assembly 32 is rotatably connected to one end of the support member 31. When the nozzle assembly 32 sandblasts different positions of the crucible 2, the nozzle assembly 32 rotates to adjust the angle and strength of the sandblasting, so that different areas of the crucible 2 achieve the same sandblasting effect.

[0077] like Figure 4 and Figure 5As shown, in some embodiments of the present application, the crucible 2 includes a bottom 21, a straight cylindrical portion 22, and an arc transition portion 23 provided between the straight cylindrical portion 22 and the bottom 21; the support member 31 is a retractable member; the second direction Z is perpendicular to the first direction X and the retractable direction Y of the support member 31, respectively, and the first direction X and the second direction Z form a preset plane; the nozzle assembly 32 rotates around the first direction X and forms a relative rotation angle β with the preset plane; when the sandblasting mechanism 3 sandblasts the bottom 21, the rotation angle β is 60° to 130°; when the sandblasting mechanism 3 sandblasts the arc transition portion 23, the rotation angle β is 30° to 60°; when the sandblasting mechanism 3 sandblasts the straight cylindrical portion 22, the rotation angle β is 0° to 30°.

[0078] In the embodiment of the present application, the nozzle assembly 32 is rotated about the first direction X to adjust the rotation angle β of the nozzle assembly 32 relative to the preset plane; wherein, when the sandblasting mechanism 3 is sandblasting the bottom 21, the rotation angle β is 60° to 130°; when the sandblasting mechanism 3 is sandblasting the arc transition portion 23, the rotation angle β is 30° to 60°; when the sandblasting mechanism 3 is sandblasting the straight cylindrical portion 22, the rotation angle β is 0° to 30°. In this way, corresponding angle values ​​of the rotation angle β are set for different areas of the crucible 2, thereby ensuring that the nozzle assembly 32 can uniformly sandblast the corresponding areas of the inner wall of the crucible 2, improving the sandblasting quality, and thereby ensuring the efficiency of eliminating microbubbles in all areas.

[0079] Specifically, a line connecting the discharge port of the nozzle assembly 32 and the shaft end is defined as a predetermined straight line. The initial position of the predetermined straight line, parallel to the predetermined plane, is defined as the initial position. As the nozzle assembly 32 rotates about the first direction X, the position of the predetermined straight line changes accordingly. The angle formed between the initial position and the rotated position of the predetermined straight line is defined as the rotation angle β. In the initial position, the predetermined straight line is parallel to the predetermined plane, and the nozzle assembly 32 is sandblasting the straight portion 22.

[0080] like Figure 4 As shown in the figure, the dotted line represents the preset straight line. Line oa is the initial sandblasting position, at which point line oa is at a 0° angle to the XZ plane. When rotating to line ob, line ob is at a 30° angle to the XZ plane. When rotating to line oc, line oc is at a 60° angle to the XZ plane. When rotating to line oe, line oe is at a 130° angle to the XZ plane. In other words, when the nozzle assembly 32 rotates between lines oa and ob, the straight barrel portion 22 is sandblasted; when rotating between lines ob and oc, the arc transition portion 23 is sandblasted; and when rotating between lines oc and oe, the bottom portion 21 is sandblasted.

[0081] In a specific application, when the sandblasting mechanism 3 is sandblasting the bottom 21, the rotation angle β can be set to any angle such as 60°, 65°, 70°, 75°, 80°, 85°, 90°, 95°, 100°, 105°, 110°, 115°, 120°, 125°, 130°, or a range between any two angles. This allows the entire area of ​​the bottom 21 of the crucible 2 to be sandblasted, ensuring the quality of the sandblasting.

[0082] When the sandblasting mechanism 3 is sandblasting the arc transition portion 23, the rotation angle β can be set to any angle such as 30°, 35°, 40°, 45°, 50°, 55°, 60°, or a range between any two angles. This allows the entire arc transition portion 23 of the crucible 2 to be sandblasted, ensuring sandblasting quality.

[0083] When the sandblasting mechanism 3 is sandblasting the straight cylindrical portion 22, the rotation angle β can be set to any angle, such as 0°, 5°, 10°, 15°, 20°, 25°, 30°, or a range between any two angles. This allows the entire arc transition portion 23 of the crucible 2 to be sandblasted, ensuring sandblasting quality.

[0084] like Figure 4 As shown, in some embodiments of the present application, the sandblasting mechanism 3 includes a nozzle 322, which is connected to one end of the support member 31 and is used to sandblast the inner cavity of the crucible 2. The distance d between the spray port 3221 of the nozzle 322 and the cavity wall of the inner cavity is 40 mm-80 mm.

[0085] In the embodiment of the present application, by setting the distance d between the ejection port 3221 of the nozzle 322 and the cavity wall to 40 mm-80 mm, it can be ensured that the sand ejected from the ejection port 3221 can eliminate the microbubbles in the inner wall of the crucible 2.

[0086] In specific applications, the distance d between the nozzle outlet 3221 of the nozzle 322 and the cavity wall of the inner cavity can be set to any value such as 40mm, 45mm, 50mm, 55mm, 60mm, 65mm, 70mm, 75mm, 80mm, etc., or a range between any two values.

[0087] It should be explained that the distance d between the spray port 3221 of the nozzle 322 and the cavity wall of the inner cavity is achieved by the extension and contraction of the support member 31 and the rotation of the nozzle assembly 32. For example, when sandblasting the straight cylinder portion 22, the nozzle 322 is closer to the bottom, and the support member 31 needs to be retracted and moved downward, while the nozzle assembly 32 needs to be rotated to 0° to 30° with the preset plane to achieve sandblasting of the straight cylinder portion 22. At this time, the distance d between the spray port 3221 of the nozzle 322 and the cavity wall of the inner cavity depends on the extension and contraction position of the support member 31 and the rotation angle of the nozzle assembly 32.

[0088] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0089] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and purpose of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A crucible processing device, characterized in that: Used for sandblasting the surface of quartz crucible, including: A sandblasting mechanism (3) comprises a support member (31) and a nozzle assembly (32), wherein one end of the nozzle assembly (32) is connected to one end of the support member (31) by rotating around a first direction (X), and the other end of the nozzle assembly (32) extends in a direction away from the support member (31), and a preset angle α is formed between the extension direction of the nozzle assembly (32) and the first direction (X), satisfying the following: 0°<α<90°.

2. The crucible processing device according to claim 1, characterized in that 30°≤α≤45°。 3. The crucible processing device according to claim 2, characterized in that The nozzle assembly (32) comprises a connecting member (321) and a nozzle (322); one end of the connecting member (321) is rotatably connected to the supporting member (31); the nozzle (322) is connected to the other end of the connecting member (321); the rotation axis direction of the connecting member (321) is the first direction (X); and the extension direction of the nozzle (322) forms the preset angle α with the first direction (X).

4. The crucible processing device according to claim 3, characterized in that: The connecting member (321) comprises a first connecting portion (3211) and a second connecting portion (3212), wherein the first connecting portion (3211) is connected to the supporting member (31) by rotating around the first direction (X); one end of the second connecting portion (3212) is fixedly connected to the first connecting portion (3211), and the other end extends in a direction away from the supporting member (31); the nozzle (322) is connected to the other end of the second connecting portion (3212), and an angle γ is formed between the extension direction of the second connecting portion (3212) and the extension direction of the first connecting portion (3211), satisfying α+γ=90°.

5. The crucible processing device according to claim 3, characterized in that: The nozzle assembly (32) further includes a first driving member (323), which is mounted on one end of the support member (31) and is used to drive the connecting member (321) to rotate; And / or, the sandblasting mechanism (3) further comprises an air intake pipe (33) and a feed pipe (34), wherein the air intake pipe (33) and the feed pipe (34) are respectively connected to the nozzle (322), and the air intake pipe (33) is used to provide air flow to the nozzle (322) to drive the sand material in the feed pipe (34) to be ejected from the nozzle (322).

6. The crucible processing device according to any one of claims 1 to 5, characterized in that: The crucible processing device further comprises a base (11), a rotating platform (12) is provided on the base (11), the rotating platform (12) is rotatably connected to the base (11), an annular clamping groove (121) is provided on a side of the rotating platform (12) away from the base (11), the annular clamping groove (121) is suitable for clamping with the open end of the workpiece to be sandblasted, and the rotating platform (12) is used to drive the workpiece to be sandblasted to rotate.

7. The crucible processing device according to claim 6, characterized in that: The crucible processing device further comprises a material collecting member (4), which is arranged on a side of the base (11) facing away from the rotating table (12) and is used for collecting sand materials; And / or, the crucible processing device further comprises a second driving member (5), wherein the second driving member (5) is mounted on the base (11) and is used to drive the rotating table (12) to rotate relative to the base (11).

8. The crucible processing device according to claim 1, characterized in that: The supporting member (31) is a retractable member.

9. A crucible sandblasting system, characterized in that: include: A crucible (2) and a crucible processing device according to any one of claims 1 to 8, wherein one end of the support member (31) extends into the inner cavity of the crucible (2) so as to sandblast the inner cavity of the crucible (2) through the nozzle assembly (32).

10. The crucible sandblasting system according to claim 9, characterized in that: The crucible (2) comprises a bottom (21), a straight cylindrical portion (22), and an arc transition portion (23) provided between the straight cylindrical portion (22) and the bottom (21); the support member (31) is a retractable member; The second direction (Z) is perpendicular to the first direction (X) and the extension direction (Y) of the support member (31), respectively, and the first direction (X) and the second direction (Z) form a preset plane; The nozzle assembly (32) can rotate around the first direction (X) to adjust the rotation angle β of the nozzle assembly (32) relative to the preset plane; When the sandblasting mechanism (3) sandblasts the bottom (21), the rotation angle β is 60° to 130°; When the sandblasting mechanism (3) sandblasts the arc transition portion (23), the rotation angle β is 30° to 60°; When the sandblasting mechanism (3) sandblasts the straight cylindrical portion (22), the rotation angle β is 0° to 30°.

11. The crucible sandblasting system according to claim 10, characterized in that: The sandblasting mechanism (3) comprises a nozzle (322), which is connected to one end of the support member (31) and is used to sandblast the inner cavity of the crucible (2), and the distance (d) between the spray outlet (3221) of the nozzle (322) and the cavity wall of the inner cavity is 40 mm to 80 mm.

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