Temperature returning device for photoresist cassette storage box

Abstract

The utility model discloses a temperature returning device of a photoresist cassette storage box. The temperature returning device comprises a storage box body, a groove body is formed in the storage box body; a plurality of fixing blocks which are uniformly distributed are fixedly connected in the groove body; a circular storage groove is formed in the fixed block; a bottom plate is fixedly arranged on the fixed block corresponding to the bottom of the storage groove; a first cavity is formed in the position, corresponding to the lower portion of the bottom plate, of the storage box body. When the cassette filled with photoresist is taken out of the containing groove, the containing groove is still kept sealed under the cooperation of the pipe body and the plate body, the protruding block is inserted into the cold air ventilation opening, cold air continuously conveyed in the first cavity is cut off, and the ventilation opening in the upper end of the air pipe moves to the wide position in the hollow pipe due to upward movement of the air pipe, so that the photoresist is taken out of the hollow pipe. And hot air in the second cavity is introduced into the corresponding accommodating groove, so that the temperature of the photoresist cassette stored in the accommodating groove is quickly recovered, and the photoresist cassette can be conveniently used by an operator.

Description

Technical Field

[0001] The utility model belongs to the technical field of photoresist storage, and in particular relates to a temperature recovery device for a photoresist dark box storage box. Background Art

[0002] Photoresist is a photosensitive material widely used in semiconductor manufacturing and microelectronics technology. When it is exposed to a light source (such as ultraviolet light), its chemical properties change, forming patterns. These patterns can be used in subsequent etching or deposition processes to create microelectronic components. Therefore, during storage before use, the photoresist must be kept at a temperature below -20°C and protected from light.

[0003] The existing photoresist storage container is a light-proof brown glass reagent bottle (dark box). When storing, the photoresist and the reagent bottle need to be placed in a constant temperature device such as a refrigerator. When using, in order to prevent the photoresist from undergoing chemical changes and forming patterns during use, it is necessary to take it out of the refrigerator together with the reagent bottle in advance and return it to 23°C.

[0004] In the current existing technology, there are two urgent problems that need to be addressed during the use of photoresist: first, the photoresist is warmed up at room temperature and needs to be warmed up in advance before use. The warming up time is relatively long, which is not convenient for operators to use quickly. In addition, if the operator forgets, it is very likely that the temperature of the photoresist will be too high and the time will be too long, causing it to deteriorate and become unusable; second, when the operator takes out the reagent bottle containing the photoresist, he cannot judge how much photoresist is left inside it, resulting in a lack of photoresist or a large amount of excess photoresist during subsequent use, which in turn causes a lot of trouble. Utility Model Content

[0005] One of the purposes of the utility model is to provide a photoresist dark box storage box temperature recovery device to solve the technical problem that the prior art cannot achieve rapid temperature recovery of the photoresist, resulting in inconvenience for operators to use and causing deterioration.

[0006] The second purpose of the present utility model is to provide a photoresist dark box storage box temperature recovery device to solve the technical problem in the prior art that it is impossible to judge the remaining photoresist inside the dark box when taking out the dark box, resulting in a lack of photoresist or a large amount of excess photoresist during subsequent use.

[0007] The purpose of the utility model can be achieved through the following technical solutions:

[0008] A photoresist cassette storage box temperature recovery device includes a storage box body; the characteristics are: a slot body is formed inside the storage box body; a plurality of fixed blocks are fixedly connected to the slot body; a circular receiving slot is formed inside the fixed block; a bottom plate is fixedly provided on the fixed block corresponding to the bottom of the receiving slot;

[0009] The storage box body is provided with a first cavity at a position corresponding to the position below the bottom plate; a plurality of cooling air vents are provided in a circular array at the outer edge of the bottom plate; and a movable plate is slidably provided inside the first cavity at a position corresponding to each position below the bottom plate;

[0010] The storage box body is provided with a second cavity at a position corresponding to the lower side of the first cavity; and the bottom plate is provided with a plurality of hot air vents at a position corresponding to the inner side of the cold air vent.

[0011] Furthermore, a blocking block corresponding to the cooling air vents is fixedly connected to the upper surface of the movable plate, and the size of the blocking block matches the cooling air vents.

[0012] Furthermore, a hollow tube is fixedly connected to the center of the lower surface of the bottom plate, the hot air vent is connected to the hollow tube, and the hollow tube passes through the movable plate and is narrower at the lower end; an air pipe with a closed upper end is slidably arranged inside the hollow tube.

[0013] Furthermore, the side of the trachea is connected to the movable plate via an L-shaped connecting rod, and the lower end of the trachea penetrates into the second cavity, and the outer diameter is the same as the inner diameter of the lower end of the hollow tube; a plurality of vents in a circular array are opened on the side of the upper end of the trachea.

[0014] Furthermore, the storage box body is provided with a tube body at a position corresponding to the storage groove, and the outer diameter of the tube body is equal to the inner diameter of the storage groove; the upper end of the tube body is fixedly connected to a plate body, and the diameter of the plate body is larger than the diameter of the circle formed between the guide rods.

[0015] Furthermore, a symmetrical protrusion is fixedly connected to the lower part of the tube body; an L-shaped sliding groove is provided at the position of the fixed block corresponding to the receiving groove.

[0016] Furthermore, a spring is provided in the first cavity at a position corresponding to the lower surface of the movable plate; a guide post is fixed to the side surface of the movable plate, and the upper end of the guide post passes through the upper surface of the fixed block.

[0017] Furthermore, the trough space is divided into crisscross cavities by fixed blocks; a thermal insulation layer is embedded in the trough corresponding to the outer side of the fixed block, and the thermal insulation layer is formed in the same shape as the cavity to block the temperature between the fixed blocks.

[0018] Furthermore, a pressure sensor is fixedly provided at the center of the upper surface of the base plate, and the pressure sensor is used to detect the weight of the remaining photoresist in the corresponding dark box.

[0019] Furthermore, a first connecting pipe communicating with the interior of the first cavity and a second connecting pipe communicating with the interior of the second cavity are fixedly connected to the bottom of the storage box body.

[0020] Beneficial effects of the utility model:

[0021] 1) When the dark box containing the photoresist is taken out from the storage groove, the storage groove remains sealed under the cooperation of the tube body and the plate body, and the protrusion is inserted into the cold air vent, blocking the cold air continuously transported from the first cavity. The air vent at the upper end of the air pipe moves to a wider position inside the hollow tube due to the upward movement of the air pipe, and the hot air inside the second cavity is passed into the corresponding storage groove, so that the photoresist dark box stored in the storage groove is quickly heated up, thereby making it convenient for operators to use.

[0022] 2) When the utility model stores the dark box containing the photoresist, the spring is compressed and the movable plate below the bottom plate moves downward. At this time, the blocking block provided on the movable plate also moves accordingly, and the cold air vent is opened. The cold air inside the first cavity will continue to flow into the storage slot containing the dark box, thereby ensuring that the photoresist inside the dark box will not deteriorate.

[0023] 3) In the present invention, since the cold air vents and the hot air vents need to have the movable plates in different positions during ventilation, the two will not ventilate at the same time, ensuring that heat exchange will not occur, resulting in increased power consumption. At the same time, by setting up a thermal insulation layer, it can be avoided that when gases of different temperatures are passed between the storage slots, the thermal insulation storage or temperature return of the dark boxes inside other storage slots is not affected. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0026] Figure 2 It is a cross-sectional view of the utility model;

[0027] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle;

[0028] Figure 4 This is a schematic structural diagram of the thermal insulation layer in the present invention;

[0029] Figure 5This is a schematic diagram of the structure of the hot air vent in the utility model;

[0030] Figure 6 It is a structural schematic diagram of the tube body in the utility model.

[0031] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0032] 1. Storage box body; 2. Slot body; 3. Insulation layer; 4. Fixed block; 5. Storage slot; 6. First cavity; 7. Second cavity; 8. Bottom plate; 9. Cold air vent; 10. Movable plate; 11. Blocking block; 12. Guide column; 13. Spring; 14. Pressure sensor; 15. Hot air vent; 16. Hollow tube; 17. Air pipe; 18. Connecting rod; 19. Vent; 20. Tube body; 21. Plate body; 22. Bump; 23. L-shaped slide; 24. First connecting pipe; 25. Second connecting pipe. DETAILED DESCRIPTION

[0033] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0034] See also Figure 1 - Figure 4 As shown, a photoresist dark box storage box temperature recovery device includes a storage box body 1; a slot body 2 is opened inside the storage box body 1; a plurality of evenly distributed fixed blocks 4 are fixedly connected to the slot body 2, and the space of the slot body 2 is divided into criss-cross cavities by the fixed blocks 4; a thermal insulation layer 3 is embedded in the slot body 2 corresponding to the outer side of the fixed block 4, and the formation of the thermal insulation layer 3 is the same as the shape of the formed cavity, which is used to block the temperature between the fixed blocks 4.

[0035] Please refer again Figure 2-Figure 5 As shown, a circular receiving groove 5 is provided inside the fixed block 4, and the receiving groove 5 is used to store the dark box containing photoresist; a bottom plate 8 is fixedly provided at the bottom of the fixed block 4 corresponding to the receiving groove 5; a pressure sensor 14 is fixedly provided at the center of the upper surface of the bottom plate 8, and the pressure sensor 14 is used to detect the weight of the remaining photoresist in the corresponding dark box.

[0036] Please refer again Figure 2 、 Figure 3 as well as Figure 5As shown, the storage box body 1 is provided with a first cavity 6 at a position corresponding to the bottom of the bottom plate 8, and the first cavity 6 is used to transport cold air required for insulation to the inside of each storage slot 5; a plurality of cold air vents 9 are provided in a circular array at the outer edge of the bottom plate 8; a movable plate 10 is slidingly provided inside the first cavity 6 corresponding to the position below each bottom plate 8; a block 11 corresponding to the cold air vent 9 is fixed to the upper surface of the movable plate 10, and the size of the block 11 matches the cold air vent 9.

[0037] Please refer again Figure 3-Figure 5 As shown, a spring 13 is provided in the first cavity 6 corresponding to the lower surface of the movable plate 10 ; a guide post 12 is fixed to the side of the movable plate 10 , and the upper end of the guide post 12 passes through the upper surface of the fixed block 4 .

[0038] Please refer again Figure 2 、 Figure 3 as well as Figure 5 As shown, the storage box body 1 is provided with a second cavity 7 at a position corresponding to the position below the first cavity 6, and the second cavity 7 is used to transport hot air for reheating to the inside of each storage slot 5; a plurality of hot air vents 15 are provided at positions corresponding to the inner side of the cold air vent 9 on the bottom plate 8; a hollow tube 16 is fixedly connected to the center of the lower surface of the bottom plate 8, and the hot air vent 15 is connected to the hollow tube 16, and the hollow tube 16 passes through the movable plate 10, and the lower end is narrower; an air pipe 17 with a closed upper end is slidingly provided inside the hollow tube 16; the side of the air pipe 17 is connected to the movable plate 10 via an L-shaped connecting rod 18, and the lower end of the air pipe 17 passes through the inside of the second cavity 7, and the outer diameter is the same as the inner diameter of the lower end of the hollow tube 16; a plurality of air vents 19 in a circumferential array are provided on the side of the upper end of the air pipe 17, and the vent 19 is used to input the hot air inside the second cavity 7 into the designated storage cavity.

[0039] Please refer again Figure 1 As shown, a first connecting pipe 24 communicating with the interior of the first cavity 6 and a second connecting pipe 25 communicating with the interior of the second cavity 7 are fixedly connected to the bottom of the storage box body 1 .

[0040] Please refer again Figure 1 and Figure 6 As shown, the storage box body 1 is provided with a tube body 20 at a position corresponding to the storage groove 5, and the outer diameter of the tube body 20 is equal to the inner diameter of the storage groove 5; the upper end of the tube body 20 is fixedly connected with a plate body 21, and the diameter of the plate body 21 is larger than the diameter of the circle formed between the guide rods; the lower part of the tube body 20 is fixedly connected with symmetrical protrusions 22; the fixing block 4 is provided with an L-shaped groove 23 at a position corresponding to the storage groove 5, which is used to cooperate with the protrusion 22 to fix the tube body 20 and the plate body 21.

[0041] In order to facilitate understanding of the above technical solution of the present invention, the working principle or operation method of the present invention in actual process is described in detail below:

[0042] Before use, first connect the gas generating sources of different temperatures, such as a hot air generator and a refrigerator, through the first connecting pipe 24 and the second connecting pipe 25, and continuously introduce cold air into the first cavity 6 and hot air into the second cavity 7 through the temperature control system.

[0043] When the cassette containing the photoresist is stored, the tube body 20 is first rotated by the handle provided on the upper surface of the plate body 21, so that the protrusion 22 loses engagement with the L-shaped groove 23 and the cassette is taken out from the receiving groove 5. Then, the cassette containing the photoresist is directly placed in the receiving groove 5 so that it falls on the pressure sensor 14 on the bottom plate 8. Then, the plate body 21 is used to put the tube body 20 back into the receiving groove 5. At this time, since the lower surface of the plate body 21 is in contact with the upper end of the guide rod, it is only necessary to press the plate body 21 downward and rotate the plate body 21 so that the protrusion 22 is engaged with the L-shaped groove 23 again, so that the spring 13 is compressed and the movable plate 10 under the bottom plate 8 moves downward. At this time, the blocking block 11 provided on the movable plate 10 also moves accordingly, and the cold air vent 9 is opened. The cold air inside the first cavity 6 will continue to pass cold air into the receiving groove 5 containing the cassette, thereby ensuring that the photoresist inside the cassette will not deteriorate.

[0044] It is worth noting here that: since a pressure sensor 14 is provided on the bottom plate 8 at the bottom of the storage tank 5, the pressure applied can be detected by the pressure sensor 14, thereby calculating the weight of the remaining photoresist inside the dark box, making it convenient for operators to select and use photoresist.

[0045] When taking out the dark box containing photoresist from the storage groove 5, first make the protrusion 22 lose cooperation with the L-shaped slide groove 23, and then the tube body 20 and the plate body 21 move upward under the action of the spring 13 and the guide rod. At this time, the storage groove 5 is still kept sealed under the cooperation of the tube body 20 and the plate body 21. The difference is that the protrusion 22 is reinserted into the cold air vent 9, blocking the cold air continuously transported from the first cavity 6, and the air vent 19 at the upper end of the air pipe 17 moves to a wider position inside the hollow tube 16 due to the upward movement of the air pipe 17. Therefore, the hot air inside the second cavity 7 passes from the air pipe 17 to the hot air vent 19, and finally passes into the corresponding storage groove 5, so that the photoresist dark box stored in the storage groove 5 quickly returns to temperature, and finally the plate body 21 can be taken out from the storage groove 5, which is convenient for the operator to use.

[0046] It is worth noting here that: since the cold air vents 9 and the hot air vents 15 need to make the movable plates 10 in different positions during ventilation, the two will not ventilate at the same time, ensuring that heat exchange will not occur, resulting in increased power consumption. At the same time, through the provision of the thermal insulation layer 3, it can be avoided that when gases of different temperatures are passed between the storage slots 5, the thermal insulation storage or temperature return of the dark boxes inside other storage slots 5 will be avoided.

[0047] In this photoresist dark box storage box reheating device, a timer alarm can be added to detect the temperature inside each storage slot 5 in real time, and after the temperature reaches 23°C, a buzzer alarm is used to prompt the operator. When using photoresist, only the photoresist inside one or more designated storage slots 5 can be reheated, which will not affect the normal storage of other photoresists, which is more convenient.

[0048] Throughout the specification, references to terms such as "one embodiment," "example," or "specific example" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0049] The above content is merely an example and explanation of the structure of the present utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined by the claims, they should fall within the scope of protection of the present utility model.

Claims

1. A device for reheating a photoresist cassette storage box, comprising a storage box body (1); characterized in that: The storage box body (1) has a trough (2) formed inside; a plurality of evenly distributed fixed blocks (4) are fixedly connected inside the trough (2); a circular receiving groove (5) is formed inside the fixed block (4); a bottom plate (8) is fixedly provided on the fixed block (4) corresponding to the bottom of the receiving groove (5); The storage box body (1) is provided with a first cavity (6) at a position corresponding to the bottom of the bottom plate (8); a plurality of cold air vents (9) are provided in a circumferential array at the outer edge of the bottom plate (8); and a movable plate (10) is slidably provided inside the first cavity (6) at a position corresponding to each position below the bottom plate (8); The storage box body (1) is provided with a second cavity (7) at a position corresponding to the bottom of the first cavity (6); the bottom plate (8) is provided with a plurality of hot air vents (15) at positions corresponding to the inner side of the cold air vent (9); A pressure sensor (14) is fixedly provided at the center of the upper surface of the bottom plate (8).

2. A photoresist cassette storage box temperature recovery device according to claim 1, characterized in that: The upper surface of the movable plate (10) is fixed with a blocking block (11) corresponding to each of the cold air vents (9), and the size of the blocking block (11) matches the cold air vent opening.

3. The photoresist cassette storage box temperature recovery device according to claim 1, characterized in that: A hollow tube (16) is fixedly connected to the center of the lower surface of the bottom plate (8), and the hot air vent (15) is connected to the hollow tube (16). The hollow tube (16) passes through the movable plate (10) and is narrower at the lower end. An air pipe (17) with a closed upper end is slidably arranged inside the hollow tube (16).

4. The photoresist cassette storage box temperature recovery device according to claim 3, characterized in that: The side of the air pipe (17) is connected to the movable plate (10) via an L-shaped connecting rod (18). The lower end of the air pipe (17) passes through the interior of the second cavity (7), and the outer diameter is the same as the inner diameter of the lower end of the hollow tube (16). A plurality of vents (19) in a circumferential array are opened on the side of the upper end of the air pipe (17).

5. The photoresist cassette storage box temperature recovery device according to claim 1, characterized in that: The storage box body (1) is provided with a tube body (20) at a position corresponding to the storage groove (5), and the outer diameter of the tube body (20) is equal to the inner diameter of the storage groove (5); the upper end of the tube body (20) is fixedly connected with a plate body (21), and the diameter of the plate body (21) is larger than the diameter of the circle formed between the guide rods.

6. The photoresist cassette storage box temperature recovery device according to claim 5, characterized in that: A symmetrical protrusion (22) is fixedly connected to the lower part of the tube body (20); and an L-shaped sliding groove (23) is provided on the fixed block (4) at a position corresponding to the receiving groove (5).

7. The photoresist cartridge storage box temperature recovery device according to claim 1, characterized in that: The first cavity (6) is provided with a spring (13) at a position corresponding to the lower surface of the movable plate (10); the side of the movable plate (10) is fixedly connected to a guide column (12), and the upper end of the guide column (12) passes through the upper surface of the fixed block (4).

8. The photoresist cartridge storage box temperature recovery device according to claim 1, characterized in that: The space of the tank body (2) is divided into cavities that are crisscrossed by fixed blocks (4).

9. The photoresist cartridge storage box temperature recovery device according to claim 8, characterized in that: The tank body (2) is provided with a thermal insulation layer (3) embedded in the outer side of the fixed block (4), and the thermal insulation layer (3) is formed in the same shape as the cavity.

10. The photoresist cassette storage box temperature recovery device according to claim 1, characterized in that: A first connecting pipe (24) communicating with the interior of the first cavity (6) and a second connecting pipe (25) communicating with the interior of the second cavity (7) are fixedly connected to the bottom of the storage box body (1).

Images