Device for testing extrusion resistance of sealing ring

Abstract

The utility model discloses a device for testing extrusion resistance of a sealing ring, which comprises a base, a heating plate arranged at the top of the base and an extrusion mechanism positioned above the heating plate, a placing plate arranged at the top of the heating plate, and a profiling groove concavely arranged on the surface of the placing plate; the extrusion mechanism comprises a support fixedly arranged on the base and an extrusion air cylinder vertically arranged on the support, the extrusion air cylinder is connected with a counter, the output end of the extrusion air cylinder is downwards connected with a pressure plate, the pressure plate is parallel to the containing plate in the vertical direction, and the extension direction of the pressure plate is consistent with the extension direction of the profiling groove; and the centers of the extrusion air cylinder, the pressure plate and the profiling groove are located on the same vertical line. According to the utility model, the extrusion cylinder drives the pressure plate to repeatedly extrude the sealing ring rubber strip, the counter is electrically connected to the extrusion cylinder, the counter records the number of times of extrusion when the sealing ring rubber strip is broken, and the service life of the door valve sealing ring under working conditions is simulated through the anti-extrusion performance.

Description

Technical Field

[0001] The utility model relates to the technical field of sealing ring detection, in particular to a device for testing the extrusion resistance performance of a sealing ring. Background Art

[0002] During the manufacturing process of semiconductors, display panels, and other devices, wafers and substrates must be transferred from a transfer chamber to a plasma etching chamber. A gate valve is installed between the transfer chamber and the etching chamber, and a rubber seal is required to seal the gate valve against the chamber wall. To maintain high yields during the manufacturing process, controlling impurity particles and vacuum levels within the etching chamber is crucial, placing certain demands on the life of the seal.

[0003] In actual operation, the valve mechanism opens and closes 200-500 times per day, so the service life of the sealing ring is usually required to be at least one year. The valve mechanism's life cycle requires opening and closing hundreds of thousands to millions of times. The opening and closing of the valve mechanism will repeatedly squeeze the sealing ring, and this is also due to the high temperature environment (200-300°C) of the etching chamber. Generally, the dynamic characteristics of rubber rings are generally expressed using stiffness coefficients and damping coefficients. However, due to the difficulty of theoretical analysis, the current theoretical research on the dynamic characteristics of elastic sealing rings is still incomplete, and most studies use simple experimental tests to study their performance.

[0004] Therefore, it is very necessary to design a test device to simulate the actual use of the door valve sealing ring. Utility Model Content

[0005] In view of this, the purpose of the present invention is to provide a device for testing the extrusion resistance of a sealing ring, which has a simple structure and can simulate the extrusion action on the sealing ring.

[0006] To achieve the above purpose, the present invention adopts the following contents:

[0007] The utility model provides a device for testing the extrusion resistance of a sealing ring, which comprises a base, a heating plate and an extrusion mechanism located above the heating plate, a placement plate provided on the top of the heating plate, a contour groove provided in a recessed manner on the surface of the placement plate; the extrusion mechanism comprises a bracket fixedly mounted on the base and an extrusion cylinder vertically mounted on the bracket, the extrusion cylinder being connected to a counter, an output end of the extrusion cylinder being downwardly connected to a pressure plate, the pressure plate being parallel to the placement plate in the upper and lower directions, and the extension direction of the pressure plate and the contour groove being consistent; wherein the centers of the extrusion cylinder, the pressure plate and the contour groove are on the same vertical line.

[0008] According to a device for testing the extrusion resistance of a sealing ring provided by the utility model, the placement plate and the heating plate are detachably connected; at least four screw inner holes are provided on the surface of the heating plate, and through waist holes corresponding to the screw inner holes are provided on the placement plate, and the through waist holes and the screw inner holes are matched and connected by screws.

[0009] The advantage of designing the placement plate and the heating plate to be detachably connected is that it is easy to replace placement plates of different sizes, so that suitable placement plates can be quickly provided for sealing rings of different wire diameters, ensuring that the sealing ring can perfectly fit the contoured groove.

[0010] Furthermore, the placement plate is embedded within the heating plate; the surface of the heating plate is recessed to accommodate a groove for the placement plate, and the screw holes are opened inward along the bottom end of the groove. During the extrusion test, the pressure plate first acts on the sealing ring strip in the contoured groove of the placement plate, and then acts on the placement plate. The placement plate is surrounded by the heating plate, facilitating heat conduction and simulating the operating temperature of the sealing ring.

[0011] Furthermore, the heating plate includes reserved mounting holes extending inwardly along both sides of the heating plate. The reserved mounting holes are distributed on both sides of the groove, and the opening direction of the reserved mounting holes is perpendicular to the extension direction of the groove. The heating tubes are disposed in the reserved mounting holes. This allows the heating tubes to be detachably connected to the heating plate, facilitating removal and replacement of the heating tubes. Furthermore, the longitudinally arranged heating tubes can quickly conduct heat to both sides of the groove.

[0012] Furthermore, the depth of the groove is not greater than the height of the placement plate, ensuring that the placement plate can protrude from the surface of the heating plate to prevent the pressure plate from failing to contact the sealing ring strip placed on the placement plate.

[0013] According to the utility model, a device for testing the extrusion resistance of a sealing ring is provided. The longitudinal cross-section of the profiling groove is a three-quarter circular arc groove. The profiling groove can accommodate approximately three-quarters of the volume of the sealing ring rubber strip, leaving the remaining 1 / 4 to 1 / 3 of the arc portion of the sealing ring rubber strip protruding upward, simulating the assembly of an actual sealing ring and ensuring that the pressure plate first contacts and squeezes the exposed portion.

[0014] According to the device for testing the extrusion resistance of a sealing ring provided by the present invention, the length of the pressure plate is not less than the length of the contoured groove, thereby ensuring that the pressure plate fully covers the upwardly protruding portion of the sealing ring strip, thereby fully achieving contact extrusion.

[0015] The beneficial effects of the utility model are as follows: the pressure plate is connected to the extrusion cylinder, the sealing ring strip is assembled in the contoured groove on the placement plate, the working environment temperature is simulated by the heating plate, the extrusion cylinder is driven to reciprocate up and down by compressed gas, and a counter is connected to record the number of extrusions, and the number of extrusions when the sealing ring strip is broken is recorded by repeated extrusion. The service life of the door valve sealing ring under working conditions is simulated by the anti-extrusion performance; and the utility model also has the characteristics of simple and compact structure and small space occupation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0017] Figure 1 This is a side view schematic diagram of a device for testing the extrusion resistance of a sealing ring according to an embodiment of the present utility model;

[0018] Figure 2 This is a schematic front view of a device for testing the extrusion resistance of a sealing ring according to an embodiment of the present utility model;

[0019] Figure 3 It is a top view schematic diagram of the heating plate and the placement plate according to an embodiment of the present utility model;

[0020] 1-base, 2-heating plate, 3-extrusion cylinder, 4-pressure plate, 5-placement plate; 11-bracket, 21-groove, 22-reserved mounting hole, 23-heating tube, 24-screw inner hole, 51-profile groove, 52-through waist hole. DETAILED DESCRIPTION

[0021] In order to more clearly illustrate the present invention, the present invention is further described below in conjunction with preferred embodiments. Those skilled in the art should understand that the following specific description is illustrative rather than restrictive and should not limit the scope of protection of the present invention.

[0022] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0023] See also Figure 1 、 Figure 2 and Figure 3The embodiment of the present utility model provides a device for testing the extrusion resistance of a sealing ring, and the testing device is aimed at testing the performance of the sealing ring of a gate valve component described in the background technology of the present application.

[0024] This testing device mainly includes a base 1, a heating plate 2, a placement plate 5 and an extrusion mechanism. The heating plate 2 is arranged in the top middle of the base 1, and the extrusion mechanism is fixed to the top of the base 1 by a bracket 11 and the extrusion mechanism is located directly above the heating plate 2. The placement plate 5 is arranged in the top middle of the heating plate 2; a contoured groove 51 is provided in a recessed surface of the placement plate 5 for inserting the sealing ring strip; wherein, the extrusion mechanism includes an extrusion cylinder 3 vertically arranged in the top middle of the bracket 11, and the extrusion cylinder 3 is electrically connected to a counter (not shown in the figure), and the output end of the extrusion cylinder 3 is downwardly connected to a horizontal pressure plate 4, and the pressure plate 4 is parallel to the placement plate 5 in the upper and lower directions, and the extension direction of the pressure plate 4 is consistent with that of the contoured groove 51; it is worth noting that the centers of the extrusion cylinder 3, the pressure plate 4 and the contoured groove 51 are on the same vertical line, ensuring that the extrusion of the sealing ring strip can be uniformly stressed.

[0025] When using the test device, the sealing ring strip is inserted into the contoured groove, the heating plate is controlled to heat up to about 350°C, the extrusion cylinder is driven by compressed gas to drive the pressure plate to move up and down, and a counter is connected to record the number of extrusions. The pressure plate first acts on the upper part of the sealing ring strip, and then acts downward on the placement plate. The pressure is maintained for 1 to 5 seconds, and the extrusion cylinder lifts the pressure plate upward to complete one extrusion action. Repeat the extrusion until the number of extrusions reaches the set value. At this time, observe the damage of the sealing ring strip to judge its performance.

[0026] To increase the versatility of sealing ring testing, the placement plate 5 and heating plate 2 are designed to be removably connected. Specifically, at least four screw holes 24 are provided on the surface of the heating plate 2, and through-holes 52 are provided on the placement plate 5, corresponding one-to-one with the screw holes 24. The through-holes 52 and the screw holes 24 are connected by screws. The contoured grooves on different placement plates vary in size, making it easy to replace placement plates of different sizes. This allows for quick provision of suitable placement plates for sealing rings of varying wire diameters, ensuring that the sealing rings fit perfectly within the contoured grooves.

[0027] Furthermore, the placement plate 5 is embedded within the heating plate 2; the surface of the heating plate 2 is recessed with a groove 21 for receiving the placement plate 5. Specifically, the placement plate 5 is inserted into the groove 21, and the screw holes 24 are opened inward along the bottom end of the groove 21. The pressure plate is made of stainless steel. During the extrusion test, the pressure plate first acts on the sealing ring strip in the contoured groove of the placement plate, and then acts on the placement plate. The placement plate is surrounded by the heating plate to facilitate heat conduction and simulate the ambient temperature of the sealing ring.

[0028] The heating plate 2 includes reserved mounting holes 22 extending inward along both sides of the heating plate 2. The reserved mounting holes 22 are distributed on both sides of the groove 21, and the opening direction of the reserved mounting holes 22 is perpendicular to the extension direction of the groove 21. The heating tubes 23 are arranged in the reserved mounting holes 22. The heating plate is made of 45-gauge steel. In this way, the heating tubes can be detachably connected to the heating plate, making it easy to remove and replace the heating tubes. In addition, the longitudinally arranged heating tubes can quickly conduct heat to both sides of the groove.

[0029] It should be noted that the depth of groove 21 is no greater than the height of placement plate 5. This ensures that the placement plate protrudes above the surface of the heating plate to prevent the pressure plate from contacting the sealing ring and rubber strip placed on the placement plate. In one embodiment, the groove has a length, width, and height of 400 mm, 40 mm, and 20 mm. The placement plate's dimensions match the groove's, allowing it to fit perfectly within the groove.

[0030] It should be noted that the length of the pressure plate 4 is not less than the length of the contoured groove 51. The width of the tested sealing ring rubber strip ranges from 2 to 15 mm, and its length ranges from 100 to 250 mm. The length and width of the pressure plate can be designed to be 330 mm and 100 mm, respectively. This ensures that the pressure plate fully covers the upwardly protruding portion of the sealing ring rubber strip, fully completing the contact and extrusion.

[0031] The longitudinal cross-section of the profiling groove 51 is a three-quarter circular arc groove. The profiling groove can accommodate approximately three-quarters of the volume of the sealing ring strip, leaving the remaining 1 / 4 to 1 / 3 of the arc portion of the sealing ring strip protruding upward, simulating the assembly of an actual sealing ring and ensuring that the pressure plate can first contact and squeeze the exposed portion.

[0032] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the implementation methods of the present invention. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the implementation methods here. All obvious changes or modifications derived from the technical solution of the present invention are still within the scope of protection of the present invention.

Claims

1. A device for testing the extrusion resistance of a sealing ring, characterized in that: The invention comprises a base (1), a heating plate (2) and an extrusion mechanism located above the heating plate (2) are arranged on the top of the base (1), a placement plate (5) is arranged on the top of the heating plate (2), and a contour groove (51) is arranged in a recessed manner on the surface of the placement plate (5); the extrusion mechanism comprises a bracket (11) fixed on the base (1) and an extrusion cylinder (3) vertically arranged on the bracket (11), and the extrusion cylinder (3) is connected to a counter, and the output end of the extrusion cylinder (3) is downwardly connected to a pressure plate (4), the pressure plate (4) and the placement plate (5) are parallel to each other in the vertical direction, and the extension direction of the pressure plate (4) and the contour groove (51) are consistent; wherein the centers of the extrusion cylinder (3), the pressure plate (4) and the contour groove (51) are on the same vertical line.

2. A device for testing the extrusion resistance of a sealing ring according to claim 1, characterized in that: The placement plate (5) and the heating plate (2) are detachably connected; at least four screw inner holes (24) are provided on the surface of the heating plate (2), and through-holes (52) corresponding to the screw inner holes (24) are provided on the placement plate (5); the through-holes (52) and the screw inner holes (24) are matched and connected by screws.

3. The device for testing the extrusion resistance of a sealing ring according to claim 2, characterized in that: The placement plate (5) is embedded in the heating plate (2); the surface of the heating plate (2) is recessed to receive a groove (21) for the placement plate (5), and the screw inner hole (24) is opened inward along the bottom end surface of the groove (21).

4. The device for testing the extrusion resistance of a sealing ring according to claim 3, characterized in that: The heating plate (2) includes reserved mounting holes (22) respectively opened inwardly along both sides of the heating plate (2), the reserved mounting holes (22) are distributed on both sides of the groove (21), and the opening direction of the reserved mounting holes (22) is perpendicular to the extension direction of the groove (21), and a heating tube (23) is arranged in the reserved mounting hole (22).

5. The device for testing the extrusion resistance of a sealing ring according to claim 3, characterized in that: The depth of the groove (21) is no greater than the height of the placement plate (5).

6. The device for testing the extrusion resistance of a sealing ring according to claim 1, characterized in that: The longitudinal section of the profiling groove (51) is a three-quarter circular arc groove.

7. The device for testing the extrusion resistance of a sealing ring according to claim 1, characterized in that: The length of the pressure plate (4) is not less than the length of the contoured groove (51).

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