Roll-milling equipment for silicon single crystal rod

Abstract

The utility model discloses a tumbling device for a silicon single crystal rod, which comprises a tumbling machine tool main body, a processing cavity is arranged in the tumbling machine tool main body, at least two groups of positioning mechanisms are fixedly assembled in the processing cavity, and the two groups of positioning mechanisms are symmetrically distributed in the processing cavity left and right. The clamping position of the silicon rod is judged in the mode that a laser emitter is adopted in the positioning mechanism to emit laser in the opposite direction, when the clamping position of the silicon rod in the clamp inclines, the barreling machine tool is stopped, the clamping position of the silicon rod is adjusted in time, traditional repeated stopping is not needed any more, and the machining efficiency is improved. The detection mode that the vernier caliper is used for measuring the clamping position of the silicon rod is adopted, the step of detecting the clamping position in the barreling process of the silicon rod is omitted, and the barreling machining efficiency of the silicon rod is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon rod processing, in particular to a rolling grinding device for single crystal silicon rods. Background Art

[0002] Single crystal silicon rod rolling is a precision machining method for processing single crystal silicon rods. By using rolling equipment, single crystal silicon rods can be rolled according to size. Most of the existing equipment and machine tools for rolling single crystal silicon rods use clamps at both ends to clamp the silicon rod, and then roll the silicon rod according to the crystal lines drawn on the end face of the silicon rod. During the processing, in order to keep the left and right ends of the silicon rod in the same horizontal position in the clamp, it is necessary to pause the rolling equipment from time to time and use a vernier caliper to measure the two ends of the silicon rod to ensure that the two ends of the silicon rod in the clamp are in a horizontal position, so as to avoid the clamping position of the silicon rod from offset during the rolling process, thereby resulting in poor quality of subsequent rolling of the silicon rod. The measurement method of measuring the two ends of the silicon rod with a vernier caliper is cumbersome, time-consuming and labor-intensive. To this end, we propose a rolling equipment for single crystal silicon rods. Utility Model Content

[0003] The purpose of the present invention is to provide a rolling grinding device for single crystal silicon rods to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned object, the present invention provides the following technical solution: a tumbling device for a single crystal silicon rod, comprising a tumbling machine body, wherein a processing chamber is defined within the tumbling machine body, wherein a positioning mechanism is fixedly mounted within the processing chamber, wherein the positioning mechanism comprises at least two groups, and the two groups of positioning mechanisms are symmetrically distributed on the left and right sides within the processing chamber;

[0005] The positioning mechanism includes a fixing frame, a side wall of the fixing frame is fixedly equipped with an electric telescopic rod, an output end of the electric telescopic rod is fixedly connected to a mounting frame via a connecting frame, and a laser emitter is fixedly equipped in the mounting frame.

[0006] Preferably, the number of the electric telescopic rods is four, and the four electric telescopic rods are evenly distributed in a circle around the center of the fixing frame.

[0007] Preferably, the fixing frame is annular.

[0008] Preferably, the connecting frame is L-shaped, and a reinforcing frame is fixedly connected to the connecting frame.

[0009] Preferably, a limiting sliding groove is provided on the side wall of the connecting frame, a limiting sliding rail is fixedly assembled on the side wall of the fixing frame, and the limiting sliding groove is slidably connected to the limiting sliding rail.

[0010] Compared with the prior art, the beneficial effects of the present invention are: a rolling and grinding device for single crystal silicon rods, compared with traditional rolling and grinding devices for single crystal silicon rods, the present invention is provided with relatively distributed positioning mechanisms in the processing chamber, and the positioning mechanism uses a laser emitter to emit lasers in opposite directions to judge the clamping position of the silicon rod. When the clamping position of the silicon rod in the fixture is tilted, the rolling and grinding machine is stopped and the clamping position of the silicon rod is adjusted in time. There is no need to use the traditional repeated stopping of the machine. The clamping position of the silicon rod is measured by a vernier caliper, which saves the inspection steps of the clamping position during the rolling of the silicon rod and improves the rolling processing efficiency of the silicon rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional diagram of the present utility model.

[0012] Figure 2 It is a structural diagram of the positioning mechanism of the utility model.

[0013] Figure 3 for Figure 2 Detail of point a in the figure.

[0014] Figure 4 This is a schematic diagram of the crystal wire structure of the silicon rod to be processed in the present invention.

[0015] In the figure: 1. Roller grinding machine body; 2. Processing chamber; 3. Positioning mechanism; 31. Fixed frame; 32. Electric telescopic rod; 33. Connecting frame; 34. Mounting frame; 35. Laser transmitter; 4. Reinforcement frame; 5. Limiting slide; 6. Limiting slide rail; 7. Silicon rod. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0017] See also Figure 1 、 Figure 2 、 Figure 3 and Figure 4 The utility model provides a technical solution: a rolling and grinding device for a single crystal silicon rod, comprising a rolling and grinding machine body 1, a processing chamber 2 being opened in the rolling and grinding machine body 1, a fixture for clamping a silicon rod 7 being installed in the processing chamber 2, and a grinding wheel for rolling and grinding the silicon rod 7 being installed on the inner side wall of the processing chamber 2, the outer wall of the silicon rod 7 is rolled and ground by the grinding wheel to process the silicon rod 7 to a specified size.

[0018] The inner side wall of the processing chamber 2 is fixedly equipped with a positioning mechanism 3. There are two groups of positioning mechanisms 3. The two groups of positioning mechanisms 3 are symmetrically distributed on the left and right sides of the processing chamber 2 with the silicon rod 7 as the center. During the processing of the silicon rod 7, the two ends of the silicon rod 7 are clamped and fixed by the clamp in the processing chamber 2. If the silicon rod 7 is tilted to a certain extent during the rolling process, resulting in the two ends of the silicon rod 7 not being in the same horizontal position, the grinding wheel will roll the silicon rod 7 inaccurately. Through the mutual cooperation of the positioning mechanisms 3 on both sides, the clamping position of the silicon rod 7 can be maintained. If the silicon rod 7 is tilted during the rolling process of the silicon rod 7, the two ends of the silicon rod 7 are not in the same horizontal position. The position can be adjusted in time after observation, thereby improving the quality of the finished product of the silicon rod 7 after processing.

[0019] like Figure 2 As shown in the figure, the positioning mechanism 3 includes a fixing frame 31, which is fixedly assembled on the inner cavity side wall of the processing chamber 2 by fixing bolts. The fixing frame 31 is annular, and the side wall of the fixing frame 31 is fixedly assembled with an electric telescopic rod 32. The output end of the electric telescopic rod 32 is fixedly connected to one end of the connecting frame 33, and the other end of the connecting frame 33 is fixedly connected to the mounting frame 34. The connecting frame 33 is L-shaped, and a laser emitter 35 is fixedly assembled in the mounting frame 34. The number of the electric telescopic rods 32 is at least four, and the four electric telescopic rods 32 are evenly distributed in a circle around the center of the fixing frame 31. The electric telescopic rods 32 are respectively electrically connected to an external power supply and an external controller. The movements of the output ends of the electric telescopic rods 32 at relative positions in the positioning mechanisms 3 on both sides are synchronously controlled by the external controller. The laser emitter 35 is driven to move by the electric telescopic rod 32, and the laser emission position of the laser emitter 35 can be adjusted.

[0020] like Figure 4As shown in , before the silicon rod 7 is barrel-grinded, it is necessary to use a vernier caliper to measure the center of the end face of the silicon rod 7 and then use a marker to draw lines to construct a crystal line. The end face size of the polished silicon rod 7 is drawn at the center of the crystal line, and the silicon rod 7 with the crystal line marked is clamped into the fixture. The laser emission position of the laser emitter 35 is adjusted according to the position of the intersection of the crystal line and the side wall of the silicon rod 7. Since the laser emission positions of the laser emitters 35 on both sides are adjusted synchronously, if the lasers emitted by the laser emitters 35 on both sides are blocked by the crystal rod and cannot be emitted in the opposite direction, it means that the position of the silicon rod 7 clamped in the fixture is horizontal and no offset occurs. In the subsequent barrel-grinding process of the silicon rod 7, the operator The external controller controls the output end of the electric telescopic rod 32 to operate respectively, so that the position of the laser emitted by the laser emitter 35 is kept relative to the position of the intersection of the crystal line and the side wall of the silicon rod 7. During the rolling process, if the laser is not blocked by the silicon rod 7 and is emitted to the other side, it means that the clamping position of the silicon rod 7 is tilted during the processing. The rolling of the rolling machine tool body 1 is paused, and the protective cover located outside the processing chamber 2 is opened in time to adjust the clamping position of the silicon rod 7. Through this device, the clamping position of the silicon rod 7 can be positioned in time during the rolling process of the silicon rod 7, avoiding multiple pauses in the processing during the processing. The clamping position of the silicon rod 7 is measured with a vernier caliper, which improves the processing efficiency.

[0021] like Figure 2 As shown in the figure, a reinforcing frame 4 is welded and fixed to the side wall of the connecting frame 33. The reinforcing frame 4 is provided to strengthen the overall strength of the connecting frame 33, thereby preventing the connecting frame 33 from being deformed when the laser emitter 35 is clamped and fixed for a long time, resulting in inaccurate emission position of the laser emitter 35 and deviation in the monitoring and positioning of the silicon rod 7.

[0022] like Figure 3 As shown in the figure, a limiting slide groove 5 is provided on the side wall of the connecting frame 33, and a limiting slide rail 6 is welded and fixed to the side wall of the fixing frame 31. The limiting slide groove 5 is slidably connected to the limiting slide rail 6. The cooperation between the limiting slide groove 5 and the limiting slide rail 6 increases the accuracy of the moving stroke of the connecting frame 33 driven by the electric telescopic rod 32.

[0023] Working principle: During the use of this device, the crystal line is first drawn on the end face of the silicon rod 7 to be rolled and processed, and the center point of the end face of the silicon rod 7 and the rolling size of the finished rod are determined according to the crystal line. The silicon rod 7 with the crystal line drawn is clamped in the clamp of the processing chamber 2, and the center point of the end face of the silicon rod 7 corresponds to the center point of the clamp. Then, according to the size of the silicon rod 7, the position of the laser emitter 35 in the positioning mechanism 3 is adjusted so that the positions of the lasers emitted by the laser emitters 35 on both sides correspond to the intersection of the crystal line and the outer wall of the silicon rod 7 respectively. During the rolling process, the silicon rod 7 being processed is observed from the visual window outside the rolling machine body 1. As the rolling progresses, the position of the laser emitter 35 is adjusted. When the laser on one side is not blocked and is emitted to the other side, it means that the clamping position of the silicon rod 7 has tilted during the processing. The rolling of the rolling machine body 1 is paused, and the protective cover located outside the processing chamber 2 is opened in time to adjust the clamping position of the silicon rod 7.

Claims

1. A tumbling device for a single crystal silicon rod, comprising a tumbling machine body (1), wherein a processing chamber (2) is provided in the tumbling machine body (1), and characterized in that: A positioning mechanism (3) is fixedly installed in the processing chamber (2), and the number of the positioning mechanisms (3) is at least two groups, and the two groups of positioning mechanisms (3) are symmetrically distributed on the left and right sides of the processing chamber (2); The positioning mechanism (3) comprises a fixing frame (31), a side wall of the fixing frame (31) is fixedly mounted with an electric telescopic rod (32), an output end of the electric telescopic rod (32) is fixedly connected to a mounting frame (34) via a connecting frame (33), and a laser emitter (35) is fixedly mounted in the mounting frame (34).

2. The tumbling device for a single crystal silicon rod according to claim 1, characterized in that: The number of the electric telescopic rods (32) is four, and the four electric telescopic rods (32) are evenly distributed in a circle around the center of the fixing frame (31).

3. The tumbling equipment for single crystal silicon rods according to claim 1, characterized in that: The fixing frame (31) is annular.

4. The tumbling device for a single crystal silicon rod according to claim 1, characterized in that: The connecting frame (33) is L-shaped, and a reinforcing frame (4) is fixedly connected inside the connecting frame (33).

5. The tumbling equipment for single crystal silicon rods according to claim 1, characterized in that: The side wall of the connecting frame (33) is provided with a limiting sliding groove (5), the side wall of the fixing frame (31) is fixedly equipped with a limiting sliding rail (6), and the limiting sliding groove (5) is slidably connected to the limiting sliding rail (6).

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