Diaphragm installation structure and system

Abstract

The utility model provides a diaphragm mounting structure and system. The diaphragm mounting structure comprises a gear lens frame, a fixing piece, a gear adjusting wheel and M first fasteners, wherein M is a natural number greater than 1; the gear lens frame comprises a lens and a gear frame body, and the lens is fixed on the gear frame body; the gear lens frame is arranged on the fixing piece through each first fastening piece; the gear adjusting wheel is arranged on the outer side wall of the fixing piece, and a gear on the gear adjusting wheel is meshed with a gear on the gear lens frame. According to the utility model, the gear adjusting wheel is arranged on the outer side wall of the fixing frame, so that the gear on the gear lens frame corresponds to the gear on the gear adjusting wheel, and the gear lens frame can be finely adjusted so as to finely adjust the position of the lens. And the bearing piece is further arranged to be matched with the gear to rotate, friction generated in the adjusting process is further reduced, stability is improved, the installing and adjusting difficulty is further reduced, and working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of optical equipment, in particular to an aperture installation structure and system. Background Art

[0002] In semiconductor manufacturing, precision in the operation of optical equipment is crucial, especially within the limited space within the equipment. Precise adjustment of the lens position on the aperture is particularly crucial. Currently, adjusting lens position primarily relies on manual coarse adjustments, while fine adjustment is extremely difficult. Manual coarse adjustment is not only cumbersome and inconvenient, requiring repeated adjustments that waste manpower and time, impacting work efficiency, but also places extremely high demands on the operator's technical proficiency and experience. This not only reduces production efficiency but also increases the risk of operational errors.

[0003] The Gaussian aperture installation structure in the prior art is as follows: Figure 1 As shown, the Gaussian aperture mounting structure 1 includes: a lens 10, a fixing bracket 11, an adjustment handle 12, a fixing screw 13 and a mounting base 14; the lens 10 is evenly adhered to the fixing bracket 11 by optical glue until the optical glue is cured to complete the fixation of the lens. A fixing screw 13 is provided on the circumference of the fixing bracket 11. The fixing bracket 11 with the lens 10 installed is installed on the aperture mounting base 14 in the direction indicated by the arrow, and the fixing bracket 11 with the lens is fixed to the mounting base 14 based on the fixing screw 13. Based on this Gaussian aperture mounting structure 1, it can be seen that when adjusting the angle position of the lens 10, it is necessary to slightly loosen the fixing screw 13, adjust the angle of the lens 10 by adjusting the handle 12, and then fix the lens 10 by fixing the fixing screw 13 after adjusting the angle. However, the adjustment handle 12 can only be adjusted manually, and cannot accurately control the angle that needs to be adjusted. At the same time, continuously tightening or loosening the fixing screw 13 causes the Gaussian diaphragm to be affected by force, resulting in a change in the position of the installed Gaussian diaphragm, which increases the difficulty of adjusting the lens on the Gaussian diaphragm to the best position.

[0004] Therefore, it is necessary to improve the diaphragm installation structure to reduce the installation difficulty and further improve the efficiency and accuracy of adjusting the lens to the optimal position.

[0005] It should be noted that the above technical background is merely for the purpose of providing a clear and complete description of the technical solutions of the present invention and to facilitate understanding by those skilled in the art. It should not be assumed that the above technical solutions are well known to those skilled in the art simply because they are described in the background technology section of the present invention. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the prior art, the present invention aims to provide an aperture mounting structure and system to address the existing problem that adjusting the lens position on a Gaussian aperture primarily relies on coarse manual adjustment by the operator, while achieving fine adjustment of the lens is extremely difficult. Manual coarse adjustment is not only cumbersome and inconvenient, but also wastes manpower and time, reducing work efficiency due to repeated adjustments. It also places extremely high demands on the operator's technical expertise and experience. This not only reduces production efficiency but also increases the risk of operational errors.

[0007] To achieve the above-mentioned and other related purposes, the present invention provides an aperture mounting structure, comprising: a gear lens holder, a fixing member, a gear adjustment wheel, and M first fasteners; wherein M is a natural number greater than 1;

[0008] The gear lens frame includes a lens and a gear frame body, and the lens is fixed on the gear frame body; the gear lens frame is arranged on the fixing member through each first fastener;

[0009] The gear adjusting wheel is arranged on the outer side wall of the fixing member, and the gear on the gear adjusting wheel is meshed with the gear on the gear lens frame.

[0010] Optionally, the aperture mounting structure further includes an annular protrusion, which is arranged between the fixing member and the gear lens frame.

[0011] Optionally, the aperture mounting structure further includes a bearing member and a second fastener, wherein the bearing member is surrounded by the second fastener and arranged on the outer side wall of the annular protrusion member and contacts the gear lens frame.

[0012] Optionally, the first fastener is configured as a first top screw.

[0013] Optionally, the second fastener is configured as an adhesive.

[0014] Optionally, the bearing member is configured as a neck bearing.

[0015] The utility model also provides an aperture mounting system, which comprises: a mounting seat and the aperture mounting structure;

[0016] The aperture mounting structure is fixedly mounted on the mounting seat.

[0017] Optionally, the aperture mounting system further includes N third fasteners, and each third fastener for fixing the mounting seat is arranged on the outer side wall of the fixing member; wherein N is a natural number greater than 1.

[0018] Optionally, the third fastener is configured as a second top screw.

[0019] As described above, the present invention provides an aperture installation structure and system, which has the following beneficial effects:

[0020] The iris mounting structure and system of the present invention utilizes a geared lens holder, formed by placing the lens on a gear holder. A gear adjustment wheel is provided on the outer wall of a fixed frame, allowing the gears on the geared lens holder to align with the gears on the gear adjustment wheel. This allows the geared lens holder to be adjusted clockwise or counterclockwise to fine-tune the lens position. The amplitude and angle of lens adjustment during adjustment are controlled by the gear's rotational range. The iris mounting structure also incorporates a bearing that rotates in conjunction with the gear, further reducing friction during adjustment, improving stability, lowering the risk of device damage, and saving costs. This iris mounting system allows for more convenient and accurate lens adjustment to the optimal position, further reducing the difficulty of installation and adjustment, and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Shown is a structural schematic diagram of a Gaussian aperture mounting structure in the prior art.

[0022] Figure 2 Shown is a structural schematic diagram of the aperture mounting structure of the present invention.

[0023] Figure 3 Shown is a structural schematic diagram of the aperture mounting system of the present invention.

[0024] Component number description

[0025] 1 Gaussian aperture installation structure

[0026] 10 lenses

[0027] 11 Fixing bracket

[0028] 12 Adjustment handle

[0029] 13 Fixing screw

[0030] 14 Install the base

[0031] 2 Aperture mounting structure

[0032] 20 gear lens holder

[0033] 200 lenses

[0034] 201 gear rack body

[0035] 21 Fixing parts

[0036] 22 annular protrusion

[0037] 23 Gear adjustment wheel

[0038] 24 First Fastener

[0039] 25 bearing parts

[0040] 26 Second fastener

[0041] 3 Aperture mounting system

[0042] 30 Mount

[0043] 31 Third fastener DETAILED DESCRIPTION

[0044] The following describes the implementation of the present invention through specific examples. People familiar with this technology can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

[0045] See also Figures 2 to 3 . It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of this utility model. Therefore, they have no substantial technical significance. Any structural decoration, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed by this utility model without affecting the efficacy and purpose that can be achieved by this utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of this utility model. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of this utility model without substantially changing the technical content.

[0046] like Figure 2 As shown, this embodiment provides an aperture mounting structure 2, comprising: a gear lens frame 20, a fixing member 21, a gear adjustment wheel 22 and M first fasteners 23; wherein M is a natural number greater than 1.

[0047] like Figure 2 As shown, the gear lens frame 20 includes a lens 200 and a gear frame body 201 , and the lens 200 is fixed on the gear frame body 201 ; the gear lens frame 20 is set on the fixing member 21 through a first fastener 23 .

[0048] Specifically, in this embodiment, the lens 200 is evenly adhered to the gear frame body 201 using optical glue until the glue solidifies to fix the lens 200 to the gear frame body 201. In actual use, any method that can fix the lens to the gear frame body is applicable to the present invention and will not be described in detail here.

[0049] More specifically, in this embodiment, the first fastener 23 is configured as a first screw that secures the gear rack lens holder 20, providing positioning, preventing loosening, facilitating disassembly, high precision, ease of adjustment, and convenient installation. In actual use, any device capable of securing the gear rack lens holder to a fixing member is suitable for use with this utility model, and is not limited to this embodiment. Furthermore, the number of first fasteners 23 is set to three, evenly distributed on the outer wall of the gear rack. Fixation or removal is achieved by contacting one end of the first fastener 23 with the outer wall of the fixing member 21. In actual use, the number of first fasteners can be arbitrarily set as needed, and a detailed description is not provided here.

[0050] like Figure 2 As shown, the gear adjustment wheel 22 is disposed on the outer side wall of the fixing member 21 , and the gear on the gear adjustment wheel 22 is engaged with the gear on the gear lens holder 20 .

[0051] Specifically, in this embodiment, the gear adjustment wheel 22 is positioned on the outer wall of the fixing member 21, enabling quick and precise adjustments without interfering with the operation of other mechanical components, while also facilitating maintenance and inspection. Furthermore, the gears on the gear adjustment wheel 22 are ensured to mesh with the gears on the gear lens holder 20. Gear meshing refers to the process by which the gears of the gear adjustment wheel 22 and the gear lens holder contact and transmit motion and power. This allows for direct adjustment of the gear adjustment wheel 22 for fine-tuning. By varying the meshing position or speed ratio between the gears on the gear adjustment wheel 22 and the gear lens holder 20, the entire adjustment process is both fast and efficient, and adjustment accuracy is further improved.

[0052] More specifically, in this embodiment, the aperture mounting structure 2 further includes an annular protrusion 24 disposed between the fixing member 21 and the gear lens holder 20. This means that the annular protrusion 24 is integrally formed with the fixing member 21. The annular protrusion 24 separates the fixing member 21 from the gear lens holder 20, preventing direct contact between the gear lens holder 20 and the fixing member 21. This reduces the contact area between the gear lens holder 20 and the fixing member 21, thereby reducing friction. Furthermore, the annular protrusion 24 not only enhances the structural stability of the fixing member 21 but also provides an additional support point, further strengthening the connection of the entire aperture mounting structure 2.

[0053] More specifically, in this embodiment, the aperture mounting structure 2 further includes a bearing 25 and a second fastener. The bearing 25 is disposed around the outer wall of the annular protrusion 24 via the second fastener and contacts the gear lens holder 20. Specifically, the gear lens holder 20 is secured to the bearing 25 via the first fastener 24, and the gear on the gear lens holder 20 meshes with the gear on the gear adjustment wheel 23. The bearing 25 is configured as a neck bearing. The neck bearing replaces sliding friction with rolling friction, thereby reducing frictional resistance generated during fine-tuning of the gear lens holder 20 and improving adjustment accuracy and stability. Specifically, by fine-tuning the gear adjustment wheel 22, the gear of the gear adjustment wheel 22 meshes with the gear on the gear lens holder 20. Therefore, when the gear adjustment wheel 22 is fine-tuned, the gear lens holder 20 is fine-tuned, and the bearing 25 beneath the gear lens holder 20 rotates accordingly. This reduces friction, further improving fine-tuning accuracy and enhancing work efficiency. Among them, the neck bearing has the characteristics of less wear, longer service life, impact and vibration resistance, and easy maintenance. The maintenance of the neck bearing is relatively simple and does not require frequent adjustment and maintenance. In actual use, any bearing component that can reduce friction is applicable to the present utility model, and they are not described here one by one. The second fastener is set to an adhesive with the characteristics of durability, bonding strength, high stability, uniform stress distribution, flexibility, etc., and the product structure and processing technology connected by the adhesive are simple and have small deformation. In actual use, any device that can fix the bearing component on the annular protrusion is applicable to the present utility model, and is not limited to this embodiment.

[0054] The present invention also provides an aperture mounting system 3 for fixing the aperture mounting structure 2. Figure 3 As shown, the aperture mounting system 3 includes a mounting seat 30 and an aperture mounting structure 2 .

[0055] like Figure 3 As shown, the aperture mounting structure 2 is fixedly mounted on the mounting seat 30 .

[0056] Specifically, in this embodiment, the aperture mounting system 3 further includes N third fasteners 31. Each third fastener 31, which secures the mounting seat 30, is disposed on the outer wall of the fixing member 21; N is a natural number greater than 1. The third fasteners 31 are configured as second set screws, which provide positioning, prevent loosening, facilitate disassembly, high precision, easy adjustment, and convenient installation. These second set screws secure the aperture mounting structure 2 to the mounting seat 30. In practice, any device capable of securing the aperture mounting structure to the mounting seat is suitable for use in this utility model, and is not limited to this embodiment. The number of third fasteners 31 is set to three, and these three third fasteners 31 are evenly distributed on the outer wall of the fixing member 21, ensuring uniform force on the mounting seat 30. Disassembly of the aperture mounting structure 2 from the mounting seat 30 is accomplished by tightening or loosening the third fasteners 31. In practice, the number of third fasteners can be arbitrarily adjusted as needed and is not detailed here.

[0057] In summary, the present invention provides an aperture mounting structure and system. The aperture mounting structure includes: a gear lens holder, a fixing member, a gear adjustment wheel, and M first fasteners; wherein M is a natural number greater than 1; the gear lens holder includes a lens and a gear holder body, with the lens fixed to the gear holder body; the gear lens holder is mounted on the fixing member via first fasteners; the gear adjustment wheel is mounted on the outer wall of the fixing member, and the gear on the gear adjustment wheel meshes with the gear on the gear lens holder. The present invention forms a gear lens holder by mounting the lens on the gear holder, and a gear adjustment wheel is mounted on the outer wall of the fixing member, so that the gear on the gear lens holder corresponds to the gear on the gear adjustment wheel, thereby enabling the gear lens holder to be adjusted clockwise or counterclockwise to fine-tune the position of the lens. The adjustment amplitude and angle during the adjustment process are controlled by the gear rotation range. The aperture mounting structure also includes a bearing that rotates in conjunction with the gear, further reducing friction generated during the adjustment process, improving stability, reducing the risk of device damage, and saving costs. At the same time, based on this diaphragm installation system, the lens can be adjusted to the optimal position more conveniently and accurately, and the installation and adjustment difficulty is further reduced, thereby improving work efficiency. Therefore, the utility model effectively overcomes various shortcomings of the prior art and has high industrial application value.

[0058] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed in the present invention are intended to be covered by the claims of the present invention.

Claims

1. A diaphragm mounting structure, characterized in that: The aperture mounting structure includes: a gear lens frame, a fixing member, a gear adjustment wheel and M first fasteners; wherein M is a natural number greater than 1; The gear lens frame includes a lens and a gear frame body, and the lens is fixed on the gear frame body; the gear lens frame is arranged on the fixing member through each first fastener; The gear adjusting wheel is arranged on the outer side wall of the fixing member, and the gear on the gear adjusting wheel is meshed with the gear on the gear lens frame.

2. The aperture mounting structure according to claim 1, wherein: The aperture mounting structure further includes an annular protrusion, which is arranged between the fixing member and the gear lens frame.

3. The aperture mounting structure according to claim 2, wherein: The aperture mounting structure further includes a bearing component and a second fastener. The bearing component is surrounded by the second fastener and disposed on the outer side wall of the annular protrusion component and contacts the gear lens frame.

4. The aperture mounting structure according to claim 1, wherein: The first fastener is configured as a first top screw.

5. The aperture mounting structure according to claim 3, wherein: The second fastener is configured as an adhesive.

6. The aperture mounting structure according to claim 3, wherein: The bearing member is configured as a neck bearing.

7. A diaphragm mounting system, characterized in that: The aperture mounting system comprises: a mounting seat and the aperture mounting structure according to any one of claims 1 to 6; The aperture mounting structure is fixedly mounted on the mounting seat.

8. The aperture mounting system according to claim 7, wherein: The aperture mounting system further includes N third fasteners, and each third fastener for fixing the mounting seat is arranged on the outer side wall of the fixing member; wherein N is a natural number greater than 1.

9. The aperture mounting system according to claim 8, characterized in that: The third fastener is configured as a second top screw.

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