Suspension device and detection equipment

Abstract

The utility model belongs to the technical field of detection equipment, and discloses a suspension device and detection equipment. The suspension device comprises a cross beam assembly which can be connected with an equipment sealing plate; the support comprises a first plate and a second plate which are arranged at an included angle, at least part of the first plate is attached to the cross beam assembly, and a first kidney-shaped hole extending in the first direction is formed in the first plate; at least part of the adjusting part is attached to the second plate, a second kidney-shaped hole extending in the second direction is formed in the adjusting part or the second plate, a third kidney-shaped hole extending in the third direction is formed in the adjusting part, and the first direction, the second direction and the third direction are perpendicular to one another; the fastening assembly comprises a first fastening piece, a second fastening piece and a third fastening piece, the first fastening piece is arranged in the first kidney-shaped hole in a penetrating mode and connected with the cross beam assembly, the second fastening piece is arranged in the second kidney-shaped hole in a penetrating mode and connected with the second plate or the adjusting piece, and the third fastening piece is arranged in the third kidney-shaped hole in a penetrating mode and connected with the sensor. And the flexibility of the installation position of the sensor is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of detection equipment, in particular to a suspension device and detection equipment. Background Art

[0002] During the production of silicon wafers, photoelectric sensors are used to detect the integrity of silicon wafers to ensure product quality. In the prior art, the device for installing photoelectric sensors is composed of aluminum profiles, fasteners, and photoelectric sensors. The aluminum profiles are fixed to the cover of the photovoltaic equipment. Because the effective sensing range of the photoelectric sensor is limited, the position where the aluminum profile is fixed should not be too high, which means that the distance between the photoelectric sensor and the silicon wafer is limited. The photoelectric sensor is fixedly installed on the aluminum profile, which is not convenient for timely removal of defective silicon wafers or cleaning of broken silicon wafers.

[0003] Therefore, there is an urgent need for a suspension device and a detection device to solve the above problems. Utility Model Content

[0004] The purpose of the present utility model is to provide a hanging device, which is convenient for picking up defective products or cleaning product fragments, improves the flexibility of the sensor installation position, and ensures that the sensor is accurately aligned with the product to be inspected.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A suspension device for suspending a sensor, comprising:

[0007] Crossbeam assembly, capable of connecting to the equipment cover plate;

[0008] The bracket includes a first plate and a second plate arranged at an angle, at least a portion of the first plate is attached to the beam assembly, and a first waist-shaped hole extending along a first direction is provided on the first plate;

[0009] an adjusting member, at least a portion of which is affixed to the second plate, the adjusting member or the second plate being provided with a second waist-shaped hole extending along a second direction, the adjusting member being provided with a third waist-shaped hole extending along a third direction, the first direction, the second direction, and the third direction being perpendicular to each other;

[0010] The fastening assembly includes a first fastener, a second fastener and a third fastener. The first fastener is passed through the first waist-shaped hole and connected to the beam assembly, the second fastener is passed through the second waist-shaped hole and connected to the second plate or the adjusting member, and the third fastener is passed through the third waist-shaped hole and connected to the sensor.

[0011] Preferably, the bracket further includes an oblique beam portion, which is arranged at an angle between the first plate and the second plate, and the oblique beam portion is connected to the first plate and the second plate respectively.

[0012] Preferably, the length of the second plate is greater than the length of the adjusting member.

[0013] Preferably, the crossbeam assembly includes a crossbeam, the crossbeam is connected to the equipment cover plate, the first plate is attached to the crossbeam, and the first fastener passes through the first waist-shaped hole and is connected to the crossbeam.

[0014] Preferably, the crossbeam assembly further comprises a reinforcing rib, one of two adjacent side surfaces of the reinforcing rib is connected to the equipment cover plate, and the other of two adjacent side surfaces of the reinforcing rib is connected to a side of the crossbeam facing away from the bracket.

[0015] Preferably, the crossbeam is connected to the reinforcement rib by welding; or,

[0016] The crossbeam is fixed to the reinforcing rib via a fourth fastener.

[0017] Preferably, the suspension device further comprises a wire trough box, which is installed on a side of the beam assembly close to the bracket, and the wire trough box is configured to place cables.

[0018] Preferably, the crossbeam assembly is made of non-metallic material.

[0019] Preferably, the suspension device includes a plurality of the brackets and a plurality of the adjusting members, the plurality of the brackets are arranged on the beam assembly at intervals, each of the brackets is provided with an adjusting member, and each of the adjusting members is connected to one of the sensors.

[0020] Another object of the present invention is to provide a detection device that can easily pick up products that have been poorly detected and clean up product fragments, and improves the flexibility of the sensor installation position, thereby improving detection accuracy and detection efficiency.

[0021] To achieve this purpose, the present invention adopts the following technical solutions:

[0022] A detection device includes a detection table, a device cover, a sensor and a suspension device. The detection table is used to place products. The suspension device is connected to the device cover. The sensor is arranged on the suspension device and is configured to detect the product.

[0023] Beneficial effects:

[0024] The utility model provides a suspension device, in which a first waist-shaped hole extending along a first direction is provided on the first plate of the bracket, a second waist-shaped hole extending along a second direction is provided on the second plate of the adjusting member or the bracket, a third waist-shaped hole extending along a third direction is provided on the adjusting member, a first fastener passes through the first waist-shaped hole and is connected to the beam assembly, a second fastener passes through the second waist-shaped hole and is connected to the second plate or the adjusting member, and a third fastener passes through the third waist-shaped hole and is connected to the sensor. When picking up products that have failed inspection or cleaning product fragments, the position of the sensor can be adjusted along the first direction, the second direction, and the third direction respectively through the suspension device, which is convenient for picking up products that have failed inspection and cleaning product fragments, and also improves the flexibility of the sensor installation position, ensuring that the sensor is accurately aligned with the product to be inspected.

[0025] The detection equipment provided by the utility model, by adopting the above-mentioned hanging device, can facilitate the removal of products with poor detection and the cleaning of product fragments, and improves the flexibility of the sensor installation position, thereby improving the detection accuracy and detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a first schematic diagram of a suspension device provided by an embodiment of the present utility model;

[0027] Figure 2 This is a second schematic diagram of the suspension device provided by an embodiment of the present utility model;

[0028] Figure 3 This is a third schematic diagram of the suspension device provided by an embodiment of the present utility model;

[0029] Figure 4 This is a fourth schematic diagram of the suspension device provided by an embodiment of the present utility model;

[0030] Figure 5 is a schematic diagram of a first plate of a bracket provided by an embodiment of the present utility model;

[0031] Figure 6 Schematic diagram of an adjusting member provided by an embodiment of the present utility model;

[0032] Figure 7 It is a schematic diagram of the end of the adjusting member provided by an embodiment of the present invention with a sensor fixed thereon.

[0033] In the picture:

[0034] 1. Crossbeam assembly; 11. Reinforcement ribs; 12. Crossbeam;

[0035] 2. Bracket; 21. First plate; 22. Second plate; 23. Oblique beam;

[0036] 211, first waist-shaped hole;

[0037] 3, adjustment member;

[0038] 31, second waist hole; 32, third waist hole;

[0039] 4, sensor; 5, wire slot box;

[0040] 6, fastening assembly;

[0041] 61, first fastener; 62, second fastener; 63, third fastener; 64, fourth fastener;

[0042] 7, equipment sealing plate; 8, product. DETAILED DESCRIPTION

[0043] The utility model will be described in further detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0044] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; It can be mechanically connected, or it can be electrically connected; It can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements or the interaction between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0045] In the utility model, unless otherwise explicitly specified and limited, the first feature is "on" or "below" the second feature, which can include direct contact between the first and second features, or indirect contact between the first and second features through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0046] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0047] This embodiment provides a detection device, such as Figures 1-4 As shown, it includes an equipment cover plate 7, a sensor 4 and a hanging device provided in this embodiment. The detection table is used to place the product 8. The hanging device is connected to the equipment cover plate 7. The sensor 4 is arranged on the hanging device. The sensor 4 is used to detect the product 8. The hanging device can adjust the position of the sensor 4 in the first direction, the second direction, and the third direction. The first direction, the second direction, and the third direction are perpendicular to each other, so as to adjust the detection range of the sensor 4. When a defective product 8 is detected, the position of the sensor 4 is adjusted by the hanging device, which can facilitate the removal of the defective product 8 and the cleaning of the fragments of the product 8, and improves the flexibility of the installation position of the sensor 4, thereby improving the detection accuracy and detection efficiency.

[0048] like Figures 1-4 As shown, in this embodiment, the testing device includes multiple brackets 2 and multiple adjustment members 3. Multiple brackets 2 are spaced apart on the crossbeam assembly 1. Each bracket 2 is provided with an adjustment member 3, and each adjustment member 3 is connected to a sensor 4. The multiple sets of brackets 2 and adjustment members 3 provided on the testing device enable simultaneous testing of multiple groups of products 8 on the testing table, thereby improving testing efficiency.

[0049] like Figures 1-4 As shown, the suspension device includes a crossbeam assembly 1, a bracket 2, an adjustment member 3 and a fastening assembly 6. The crossbeam assembly 1 can be connected to the equipment cover 7, and the bracket 2 includes a first plate 21 and a second plate 22 arranged at an angle, and at least a portion of the first plate 21 is attached to the crossbeam assembly 1. Figures 5-7As shown, the first plate 21 is provided with a first waist-shaped hole 211 extending along the first direction, at least part of the adjustment member 3 is attached to the second plate 22, the adjustment member 3 is provided with a second waist-shaped hole 31 extending along the second direction, and a third waist-shaped hole 32 extending along the third direction, and the first direction, the second direction and the third direction are perpendicular to each other. The fastening assembly 6 includes a first fastener 61, a second fastener 62 and a third fastener 63. The first fastener 61 is inserted through the first waist-shaped hole 211 and connected to the beam assembly 1, the second fastener 62 is inserted through the second waist-shaped hole 31 and connected to the second plate 22, and the third fastener 63 is inserted through the third waist-shaped hole 32 and connected to the sensor 4. When picking up a product 8 that has been inspected poorly or cleaning up fragments of the product 8, the position of the sensor 4 can be adjusted along the first direction, the second direction and the third direction respectively through the suspension device, which facilitates the removal of the product 8 that has been inspected poorly and the cleaning of fragments of the product 8. At the same time, it also improves the flexibility of the installation position of the sensor 4, ensuring that the sensor 4 is accurately aligned with the product 8 to be inspected.

[0050] In other embodiments, a second waist-shaped hole 31 extending along the second direction is opened on the second plate 22, and a second fastener 62 is passed through the second waist-shaped hole 31 and connected to the adjusting member 3, so that the adjusting member 3 can move along the second direction relative to the second plate 22, thereby adjusting the position of the sensor 4 in the second direction. The second waist-shaped hole 31 on the second plate 22 cooperates with the first waist-shaped hole 211 on the first plate 21 and the third waist-shaped hole 32 on the adjusting member 3 to adjust the position of the sensor 4 in the first direction, the second direction, and the third direction, so as to facilitate the picking up of defective products 8 for inspection and the cleaning of product 8 fragments, and at the same time improves the flexibility of the installation position of the sensor 4, ensuring that the sensor 4 is accurately aligned with the product 8 to be inspected.

[0051] like Figure 4 As shown, in this embodiment, the bracket 2 further includes an oblique beam portion 23, which is disposed at the angle between the first plate 21 and the second plate 22. The oblique beam portion 23 is connected to the first plate 21 and the second plate 22, respectively, thereby improving the structural strength of the bracket 2. The bracket 2 has a triangular structure, which provides stability, making the suspension device stable, firm, and pressure-resistant, thereby increasing the service life of the suspension device.

[0052] like Figures 5-7As shown, in the embodiment, the first plate 21 is provided with two first waist-shaped holes 211 extending along the first direction, and the two first waist-shaped holes 211 are parallel and have the same length, so that the bracket 2 moves smoothly along the first direction relative to the beam assembly 1. One end of the adjusting member 3 is provided with two second waist-shaped holes 31 extending along the second direction, and the two second waist-shaped holes 31 are parallel and have the same length, so that the adjusting member 3 moves smoothly along the second direction relative to the bracket 2. The other end of the adjusting member 3 is provided with two third waist-shaped holes 32 extending along the third direction, and the two third waist-shaped holes 32 are collinear, so that the sensor 4 moves smoothly along the third direction relative to the adjusting member 3. In other embodiments, the number of the first waist-shaped holes 211, the second waist-shaped holes 31 and the third waist-shaped holes 32 is not unique, which is not limited here.

[0053] In the embodiment, the length of the second plate 22 is greater than the length of the adjusting member 3. When the adjusting member 3 moves upward along the second direction, the length of the second plate 22 is not too short to cause interference between the adjusting member 3 and the beam assembly 1, affecting the adjusting range of the adjusting member 3; the length of the second plate 22 is greater than the length of the adjusting member 3, and the adjusting range of the adjusting member 3 is the full length range of the second waist-shaped holes 31.

[0054] As shown, Figures 1-4 The beam assembly 1 includes a beam 12, the beam 12 is connected with the equipment sealing plate 7, the first plate 21 is attached to the beam 12, and the first fastener 61 passes through the first waist-shaped hole 211 and is connected with the beam 12. The first plate 21 can move along the first direction relative to the beam 12 to adjust the position of the sensor 4 in the first direction, so as to ensure that the sensor 4 is installed in a suspended manner and improve the flexibility of the installation position of the sensor 4.

[0055] Optionally, the beam 12 is a rectangular plate. In other embodiments, the beam 12 is a circular plate, a triangular plate, a trapezoidal plate, etc., and the shape of the beam 12 is selected according to actual detection needs, which is not limited here.

[0056] In the embodiment, the beam assembly 1 further includes a reinforcing rib 11, one of the two adjacent sides of the reinforcing rib 11 is connected with the equipment sealing plate 7, and the other of the two adjacent sides of the reinforcing rib 11 is connected with the side of the beam 12 away from the bracket 2, so as to increase the strength of the connecting surface between the beam 12 and the equipment sealing plate 7, increase the safety and stability of the suspension device, and facilitate the subsequent suspension installation of the sensor 4.

[0057] Optionally, the reinforcing rib 11 is a triangular plate with a chamfer, which can reduce the weight of the reinforcing rib 11 and stabilize the connection relationship among the reinforcing rib 11, the beam 12 and the equipment sealing plate 7. In other embodiments, the reinforcing rib 11 can be a sector plate, a rectangular plate with a missing corner, etc., which is not limited here.

[0058] Optionally, the cross beam 12 is welded to the reinforcement rib 11, or the cross beam 12 is fixed to the reinforcement rib 11 via a fourth fastener 64, so as to achieve the stability of the suspension device structure.

[0059] Preferably, in this embodiment, the crossbeam 12 is fixed to the reinforcing rib 11 by a fourth fastener 64, the reinforcing rib 11 is welded to the equipment cover plate 7, and the places where the crossbeam 12 contacts the equipment cover plate 7 are also welded.

[0060] Optionally, the first fastener 61, the second fastener 62, the third fastener 63, and the fourth fastener 64 in the fastening assembly 6 are all hexagon socket head cap screws, which can be used in conjunction with flat washers to prevent the hexagon socket head cap screws from moving left and right in the holes. The connection between the fastening components stabilizes the suspension device structure. In other embodiments, the first fastener 61, the second fastener 62, the third fastener 63, and the fourth fastener 64 can be bolts, studs, etc., which are not specifically limited here.

[0061] Optionally, the crossbeam assembly 1 is made of non-metallic material, which effectively prevents the crossbeam assembly 1 from affecting the performance of the sensor 4 and improves the detection accuracy of the sensor 4. Specifically, the crossbeam assembly 1 can be made of plastic, which is not specifically limited here.

[0062] In this embodiment, the bracket 2 includes a first plate 21 and a second plate 22 set at an angle. The first plate 21 is attached to the beam assembly 1 along the first direction, and the second plate 22 extends along the second direction. The angle between the first plate 21 and the second plate 22 is 90 degrees, which can stabilize the structure of the suspension device and improve the safety and reliability of the suspension equipment.

[0063] In other embodiments, the angle between the first plate 21 and the second plate 22 can be 15 degrees, 30 degrees, 45 degrees, 60 degrees, 75 degrees, 90 degrees, 105 degrees, 120 degrees, 135 degrees, 150 degrees, 165, etc. The angle between the first plate 21 and the second plate 22 can be set according to actual detection requirements, and no specific limitation is made here.

[0064] like Figure 4 As shown, in this embodiment, the suspension device also includes a wire trough box 5, which is mounted on the side of the crossbeam assembly 1 near the bracket 2 and is used to store cables. This placement of the wire trough box 5 on the side of the crossbeam assembly 1 near the bracket 2 organizes the cables, improving the overall aesthetics of the suspension device. It also facilitates wiring of the sensor 4. Optionally, the wire trough box 5 is made of a non-metallic material to effectively prevent the suspension device from affecting the performance of the sensor 4.

[0065] Specifically, the process of adjusting the installation position of the sensor 4 by the suspension device in this embodiment is roughly as follows:

[0066] Adjust the position of the sensor 4 in the first direction: loosen the first fastener 61, and the first plate 21 moves relative to the crossbeam 12 along the first direction within the length of the first waist-shaped hole 211. After reaching the appropriate position, the first plate 21 is locked to the crossbeam 12 by the first fastener 61;

[0067] Adjust the position of the sensor 4 in the second direction: loosen the second fastener 62, and move the adjusting member 3 relative to the second plate 22 along the second direction within the length of the second waist-shaped hole 31. After reaching the appropriate position, lock the adjusting member 3 on the second plate 22 by the second fastener 62;

[0068] Adjust the position of the sensor 4 in the third direction: loosen the third fastener 63, and the sensor 4 moves relative to the adjusting member 3 along the third direction within the range of the third waist-shaped hole 32. After reaching the appropriate position, the sensor 4 is locked on the adjusting member 3 by the third fastener 63.

[0069] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A suspension device for suspending a sensor (4), characterized in that: include: A crossbeam assembly (1) capable of being connected to a device cover plate (7); The bracket (2) comprises a first plate (21) and a second plate (22) arranged at an angle, wherein at least a portion of the first plate (21) is attached to the crossbeam assembly (1), and a first waist-shaped hole (211) extending in a first direction is provided on the first plate (21); An adjusting member (3), at least a portion of the adjusting member (3) is attached to the second plate (22), a second waist-shaped hole (31) extending along a second direction is provided on the adjusting member (3) or the second plate (22), and a third waist-shaped hole (32) extending along a third direction is provided on the adjusting member (3), wherein the first direction, the second direction and the third direction are perpendicular to each other; A fastening assembly (6) comprises a first fastener (61), a second fastener (62) and a third fastener (63), wherein the first fastener (61) is provided through the first waist-shaped hole (211) and is connected to the beam assembly (1), the second fastener (62) is provided through the second waist-shaped hole (31) and is connected to the second plate (22) or the adjusting member (3), and the third fastener (63) is provided through the third waist-shaped hole (32) and is connected to the sensor (4).

2. The suspension device according to claim 1, characterized in that The bracket (2) further comprises an oblique beam portion (23), the oblique beam portion (23) being arranged at an angle between the first plate (21) and the second plate (22), and the oblique beam portion (23) being connected to the first plate (21) and the second plate (22) respectively.

3. The suspension device according to claim 1, characterized in that The length of the second plate (22) is greater than the length of the adjusting member (3).

4. The suspension device according to claim 1, characterized in that The crossbeam assembly (1) includes a crossbeam (12), the crossbeam (12) is connected to the equipment cover plate (7), the first plate (21) is attached to the crossbeam (12), and the first fastener (61) passes through the first waist-shaped hole (211) and is connected to the crossbeam (12).

5. The suspension device according to claim 4, characterized in that The crossbeam assembly (1) further includes a reinforcing rib (11), one of the two adjacent side surfaces of the reinforcing rib (11) being connected to the equipment cover plate (7), and the other of the two adjacent side surfaces of the reinforcing rib (11) being connected to a side of the crossbeam (12) facing away from the bracket (2).

6. The suspension device according to claim 5, characterized in that The crossbeam (12) is connected to the reinforcing rib (11) by welding; or, The crossbeam (12) is fixed to the reinforcing rib (11) via a fourth fastener (64).

7. The suspension device according to any one of claims 1 to 6, characterized in that: The suspension device further comprises a wire trough box (5), which is installed on a side of the crossbeam assembly (1) close to the bracket (2), and the wire trough box (5) is configured to place cables.

8. The suspension device according to any one of claims 1 to 6, characterized in that: The crossbeam assembly (1) is made of non-metallic material.

9. The suspension device according to any one of claims 1 to 6, characterized in that: The suspension device comprises a plurality of brackets (2) and a plurality of adjusting members (3), wherein the plurality of brackets (2) are arranged at intervals on the crossbeam assembly (1), each bracket (2) is provided with an adjusting member (3), and each adjusting member (3) is connected to a sensor (4).

10. A detection device, characterized in that: The invention comprises a detection table, an equipment cover plate (7), a sensor (4) and a hanging device according to any one of claims 1 to 9, wherein the detection table is used to place a product (8), the hanging device is connected to the equipment cover plate (7), the sensor (4) is arranged on the hanging device, and the sensor (4) is configured to detect the product (8).

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