Precise microscope lens group mechanism for realizing high-magnification and low-magnification switching of single camera
By designing a high- and low-magnification switching microscope head group mechanism for a single camera and utilizing L-shaped and U-shaped optical path channels as well as beam splitters and reflectors, the problems of large space occupation and high cost of high- and low-magnification microscopes in semiconductor equipment are solved, achieving compact installation and cost reduction.
Patent Information
- Application Number
- CN202422824328.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-20
- Publication Date
- 2025-10-10
- Estimated Expiration
- 2034-11-20
AI Technical Summary
In semiconductor equipment, high-power and low-power microscopes correspond to two cameras respectively, which results in large space occupation and high cost, and is difficult to install in a small space.
A precision microscope head group mechanism is designed that can realize high and low magnification switching with a single camera. The switching between high and low magnification microscopes is realized through the cooperation of L-shaped and U-shaped optical path channels and the beam splitter prism and the reflector. High and low magnification microscope observation can be completed with a single camera.
This enables compact installation in a small space, reduces costs, and reduces the number of cameras.
Smart Images
Figure CN223426935U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of precision optical system, concretely is a single camera realizes high low switch precision microscope lens group mechanism. BACKGROUND
[0002] In the semiconductor equipment, generally use high power lens and low power lens combination, but due to the difference of high low power lens in magnification, depth of field, field of view, optical resolution and application scene, generally high low power lens corresponds to a camera respectively, this structure has two cameras and occupies large space, the shortcoming of high cost, two semiconductor equipment pursues the small footprint, compact structure, therefore in many small space occasion cannot use. SUMMARY
[0003] In order to solve the above problem, the utility model provides a single camera realizes high low switch precision microscope lens group mechanism, its compact structure can be installed in small space and reduce the cost of a camera.
[0004] Its technical scheme is such: a single camera realizes high low switch precision microscope lens group mechanism, it includes camera shell, is provided with high power lens, low power lens, camera interface and light source interface on the camera shell, its characterized in that, the camera interface sets up one, the light source interface includes low power lens light source interface and high power lens light source interface, the high power lens, low power lens, low power lens light source interface are arranged in parallel and in order on the top of the camera shell; It is located close to the high power lens side, the high power lens light source interface, camera interface are sequentially arranged from top to bottom in the side of the camera shell, the L-shaped light path channel that communicates the high power lens with the high power lens light source interface, the U-shaped light path channel that communicates the low power lens with the low power lens light source interface are arranged in the camera shell, the first light splitting prism is arranged in the L-shaped light path channel, the first reflecting mirror corresponding the low power lens light source interface, the second light splitting prism corresponding the low power lens are arranged in the U-shaped light path channel, the third light splitting prism is arranged below the first light splitting prism, the second reflecting mirror is arranged below the second light splitting prism, the second reflecting mirror, the third light splitting prism position corresponds the camera interface, the first light splitting prism, second light splitting prism, third light splitting prism can realize the transmission and emission of light.
[0005] Its further features are that the low power lens is provided with ring light source.
[0006] After adopting the present invention, the setting of the L-shaped optical path channel and the U-shaped optical path channel can realize the switching of high-power and low-power microscopes by switching the high-power and low-power microscope light sources. By utilizing the cooperation of the dichroic prism and the reflector, only one camera is needed to switch between the high-power and low-power microscopes, and the internal optical path is generally L-shaped. Compared with the straight-tube design, the structure is more compact, can be installed in a small space, and reduces the cost of a camera. BRIEF DESCRIPTION OF THE DRAWINGS
[0007] Figure 1 This is the main view of the external structure of the utility model;
[0008] Figure 2 for Figure 1 Top view;
[0009] Figure 3 for Figure 1 Middle AA section;
[0010] Figure 4 Schematic diagram of the light principle. DETAILED DESCRIPTION
[0011] See Figure 1 , Figure 2 , Figure 3 As shown, a single-camera precision microscope head group mechanism for realizing high-low magnification switching includes a camera housing 1, on which a high-power lens 2, a low-power lens 3, a camera interface 4 and two light source interfaces are provided. The two light source interfaces include a low-power lens light source interface 5 and a high-power lens light source interface 6. The top of the camera housing 1 is provided with the high-power lens 2, the low-power lens 3, and the low-power lens light source interface 5 in sequence and side by side; on the side close to the high-power lens 2, the side of the camera housing 1 is provided with the high-power lens light source interface 6 and the camera interface 4 in sequence from top to bottom, and an L-shaped connecting hole connecting the high-power lens 2 and the high-power lens light source interface 6 is provided in the camera housing 1. The optical path channel 7 and the U-shaped optical path channel 8 connecting the low-power lens 3 and the low-power lens light source interface 5 are provided. A first beam splitter prism 9 is provided within the L-shaped optical path channel 7. A first reflector 10 corresponding to the low-power lens light source interface 5 and a second beam splitter prism 11 corresponding to the low-power lens 3 are provided within the U-shaped optical path channel 8. A third beam splitter prism 12 is provided below the first beam splitter prism 9, and a second reflector 13 is provided below the second beam splitter prism 11. The positions of the second reflector 13 and the third beam splitter prism 12 correspond to the camera interface 4. The first beam splitter prism 9, the second beam splitter prism 11, and the third beam splitter prism 12 can all achieve light transmission and emission. A ring light source 15 is also provided at the low-power lens 3. The third beam splitter prism 12 is a non-polarizing stereo beam splitter prism.
[0012] The following is a detailed description of the camera principle: Figure 4As shown in the figure, 14 is the observation target. When a high-power microscope 2 is used, the high-power light source is connected to the high-power microscope light source interface 6, and the light path of the high-power light source passes through the first beam splitter prism 9 and then passes through the high-power microscope 2 to illuminate the observation target 14. The image of the observation target 14 passes through the high-power microscope 2, the first beam splitter prism 9, and the third beam splitter prism 12 and enters the camera; when a low-power microscope 3 is used, the low-power light source is connected to the low-power microscope light source interface 5, and the light path of the low-power light source passes through the first reflector 10 and the second beam splitter prism 11 and then passes through the low-power microscope 3 to illuminate the observation target 14. The image of the observation target 14 passes through the second beam splitter prism 11, is emitted by the second reflector 13, and passes through the third beam splitter prism 12 and enters the camera.
Claims
1. A precision microscope lens group mechanism for switching between high and low magnification with a single camera, comprising a camera housing, on which a high-magnification lens, a low-magnification lens, a camera interface, and a light source interface are provided, characterized in that: One camera interface is set, and the light source interface includes a low-power lens light source interface and a high-power lens light source interface. The high-power lens, low-power lens, and low-power lens light source interface are arranged side by side and in sequence on the top of the camera housing; on the side close to the high-power lens, the side of the camera housing is sequentially provided with the high-power lens light source interface and the camera interface from top to bottom, and an L-shaped optical path channel connecting the high-power lens and the high-power lens light source interface, and a U-shaped optical path channel connecting the low-power lens and the low-power lens light source interface are provided in the camera housing. A first beam splitter prism is provided in the L-shaped optical path channel, and a first reflector corresponding to the low-power lens light source interface and a second beam splitter prism corresponding to the low-power lens are provided in the U-shaped optical path channel. A third beam splitter prism is provided below the first beam splitter prism, and a second reflector is provided below the second beam splitter prism. The positions of the second reflector and the third beam splitter prism correspond to the camera interface, and the first beam splitter prism, the second beam splitter prism, and the third beam splitter prism can all realize the transmission and emission of light.
2. A single-camera precision microscope lens assembly mechanism for switching between high and low magnification according to claim 1, characterized in that: A ring light source is provided at the low-power lens.