Positive and negative pressure cleaning device for porous ceramic vacuum chuck

Abstract

The utility model discloses a positive and negative pressure cleaning device for a porous ceramic vacuum chuck, which belongs to the field of cleaning devices and comprises a carrier used for fixing the porous ceramic vacuum chuck, a channel, a positive pressure inlet and a negative pressure outlet which are communicated with one another are arranged in the carrier, and the channel is used for being communicated with a plurality of through holes of the porous ceramic vacuum chuck; the diaphragm pump, the first water supply assembly and the second water supply assembly are communicated with the channel; a first connector of the first three-way valve is communicated with an inlet of the diaphragm pump, a second connector of the first three-way valve is communicated with the first water supply assembly, and a third connector of the first three-way valve is communicated with the negative pressure outlet; a first interface II of the three-way valve II is communicated with the outlet of the diaphragm pump, and a second interface II of the three-way valve II is communicated with the positive pressure inlet. The cleaning device has the technical effect that a plurality of through holes of the related porous ceramic vacuum chuck can be conveniently and thoroughly cleaned.

Description

Technical Field

[0001] The utility model relates to a cleaning device, in particular to a positive and negative pressure cleaning device for a porous ceramic vacuum suction cup. Background Art

[0002] The porous ceramic vacuum chuck is an adsorption component used in the semiconductor field. The porous ceramic vacuum chuck is provided with multiple through holes. When working, one end of the porous ceramic vacuum chuck is connected to the chemical mechanical polishing (CMP) equipment, and the other end is used to place the wafer. As the negative pressure component of the CPM equipment is started, the other end of the porous ceramic vacuum chuck tightly and evenly adsorbs the wafer.

[0003] In order to ensure good adsorption performance, the multiple through holes of the relevant porous ceramic vacuum suction cup need to be cleaned regularly, but the cleaning performance of the relevant cleaning device is poor, and it is difficult to thoroughly clean the multiple through holes of the relevant porous ceramic vacuum suction cup. Utility Model Content

[0004] Purpose of the utility model: The purpose of the utility model is to provide a positive and negative pressure cleaning device for a porous ceramic vacuum suction cup, which is convenient for thoroughly cleaning multiple through holes of the relevant porous ceramic vacuum suction cup.

[0005] Technical solution:

[0006] A porous ceramic vacuum cup positive and negative pressure cleaning device, comprising:

[0007] A carrier for fixing the porous ceramic vacuum chuck, wherein the carrier is provided with interconnected channels, a positive pressure inlet, and a negative pressure outlet, wherein the channels are used to communicate with the multiple through holes of the porous ceramic vacuum chuck;

[0008] a diaphragm pump, a first water supply assembly, and a second water supply assembly, wherein the second water supply assembly is in communication with the channel;

[0009] Three-way valve 1, wherein the first interface 1 of the three-way valve 1 is connected to the inlet of the diaphragm pump, the second interface 1 of the three-way valve 1 is connected to the first water supply component, and the third interface 1 of the three-way valve 1 is connected to the negative pressure outlet;

[0010] Three-way valve 2, the first interface 2 of the three-way valve 2 is connected to the outlet of the diaphragm pump, and the second interface 2 of the three-way valve 2 is connected to the positive pressure inlet.

[0011] Optionally, the carrier includes:

[0012] A platform, wherein the channel, the positive pressure inlet and the negative pressure outlet are all provided on the platform;

[0013] A plurality of fixing components, one end of each of the fixing components is movably locked to the platform, and the other end of each of the fixing components is used to contact the porous ceramic vacuum suction cup.

[0014] Optionally, the fixing assembly includes a fixing plate and a handle screw, wherein the handle screw passes through one end of the fixing plate, the handle screw is threadedly connected to the platform, and the other end of the fixing plate is used to contact the porous ceramic vacuum suction cup.

[0015] Optionally, the vehicle further includes a plurality of supporting legs each connected to the platform.

[0016] Optionally, also include:

[0017] Air supply components;

[0018] an on-off valve connected between the air supply assembly and the air source input port of the diaphragm pump;

[0019] A switching valve, one end of which is connected to the air supply assembly, and the other end of which is connected to both the three-way valve 1 and the three-way valve 2.

[0020] Optionally, a pressure regulating valve is further included, one end of the pressure regulating valve is connected to the air supply assembly, and the other end of the pressure regulating valve is connected to both the switch valve and the switching valve.

[0021] Optionally, it further includes a first water tank connected to the second water supply component and the third interface 2 of the three-way valve 2, and the carrier is located in the first water tank.

[0022] Optionally, the first water supply component includes a water tank 1, and the water tank 1 is connected to the second interface 1 of the three-way valve 1.

[0023] Beneficial effect: This solution facilitates bidirectional cleaning of multiple through holes of the porous ceramic vacuum suction cup through the diaphragm pump, three-way valve 1 and three-way valve 2, thereby ensuring thorough cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is one of the connection diagrams of the porous ceramic vacuum chuck positive and negative pressure cleaning device of Example 1 of the present utility model;

[0025] Figure 2 This is the second connection diagram of the porous ceramic vacuum chuck positive and negative pressure cleaning device of Example 1 of the present utility model;

[0026] Figure 3 This is the third connection diagram of the porous ceramic vacuum chuck positive and negative pressure cleaning device of Example 1 of the present utility model;

[0027] Figure 4This is an axonometric view of the porous ceramic vacuum chuck positive and negative pressure cleaning device of Example 1 of the present utility model;

[0028] In the figure: 1. Carrier; 11. Platform; 111. Channel; 112. Positive pressure inlet; 113. Negative pressure outlet; 12. Fixing assembly; 121. Fixing plate; 122. Handle screw; 13. Support foot; 2. Diaphragm pump; 21. Inlet; 22. Outlet; 23. Air source input port; 3. First water supply assembly; 31. Water tank one; 4. Second water supply assembly; 5. Three-way valve one; 51. First interface one; 52. Second interface one; 53. Third interface one; 6. Three-way valve two; 61. First interface two; 62. Second interface two; 63. Third interface two; 71. Air supply assembly; 72. Switch valve; 73. Switch valve; 74. Pressure regulating valve; 8. First water tank; 9. Porous ceramic vacuum suction cup. DETAILED DESCRIPTION

[0029] In order to make the technical solution of the present invention clearer, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] like Figure 1 , this embodiment provides a positive and negative pressure cleaning device for a porous ceramic vacuum suction cup, comprising: a carrier 1 for fixing a porous ceramic vacuum suction cup 9, the carrier 1 being provided with a channel 111, a positive pressure inlet 112 and a negative pressure outlet 113 which are interconnected, the channel 111 being used to be connected to multiple through holes of the porous ceramic vacuum suction cup 9; a diaphragm pump 2, a first water supply component 3 and a second water supply component 4, the second water supply component 4 being connected to the channel 111; a three-way valve 15, the first interface 151 of the three-way valve 15 being connected to the inlet 21 of the diaphragm pump 2, the second interface 152 of the three-way valve 15 being connected to the first water supply component 3, the third interface 153 of the three-way valve 15 being connected to the negative pressure outlet 113; a three-way valve 26, the first interface 261 of the three-way valve 26 being connected to the outlet 22 of the diaphragm pump 2, the second interface 262 of the three-way valve 26 being connected to the positive pressure inlet 112.

[0031] Specifically, such as Figure 2When performing positive pressure cleaning, first, fix the porous ceramic vacuum suction cup 9 on the carrier 1; then, adjust the three-way valve 1 5 and the three-way valve 2 6 so that the first interface 1 51 of the three-way valve 1 5 is connected to the inlet 21 of the diaphragm pump 2, the second interface 1 52 of the three-way valve 1 5 is connected to the first water supply component 3, and the third interface 1 53 of the three-way valve 1 5 is closed. At the same time, the first interface 2 61 of the three-way valve 2 6 is connected to the outlet 22 of the diaphragm pump 2, and the second interface 2 62 of the three-way valve 2 6 is connected to the positive pressure inlet 11. 2 is connected, and the third interface 2 63 of the three-way valve 2 6 is closed; then, the diaphragm pump 2 is turned on, so that the water in the first water supply assembly 3 flows in sequence through the second interface 1 52 of the three-way valve 1 5, the first interface 1 51 of the three-way valve 1 5, the inlet 21 of the diaphragm pump 2, the outlet 22 of the diaphragm pump 2, the first interface 2 61 of the three-way valve 2 6, the second interface 2 62 of the three-way valve 2 6, the positive pressure inlet 112 and the channel 111, and finally cleans the multiple through holes of the porous ceramic vacuum chuck 9 along the first direction;

[0032] like Figure 3 When performing negative pressure cleaning, first, fix the porous ceramic vacuum suction cup 9 on the carrier 1; then, adjust the three-way valve 1 5 and the three-way valve 2 6 so that the first interface 1 51 of the three-way valve 1 5 is connected to the inlet 21 of the diaphragm pump 2, the second interface 1 52 of the three-way valve 1 5 is closed, and the third interface 1 53 of the three-way valve 1 5 is connected to the negative pressure outlet 113. At the same time, the first interface 2 61 of the three-way valve 2 6 is connected to the outlet 22 of the diaphragm pump 2, the second interface 2 62 of the three-way valve 2 6 is closed, and the third interface 2 63 of the three-way valve 2 6 is opened; Then, the diaphragm pump 2 and the second water supply assembly 4 are synchronously turned on, so that the water in the second water supply assembly 4 flows in sequence through the multiple through holes of the porous ceramic vacuum suction cup 9, the channel 111, the negative pressure outlet 113, the third interface 1 53 of the three-way valve 1 5, the first interface 1 51 of the three-way valve 1 5, the inlet 21 of the diaphragm pump 2, the outlet 22 of the diaphragm pump 2 and the first interface 2 61 of the three-way valve 2 6, and is finally discharged from the third interface 2 63 of the three-way valve 2 6, thereby completing the cleaning of the multiple through holes of the porous ceramic vacuum suction cup 9 along the second direction;

[0033] In summary, this solution facilitates bidirectional cleaning of multiple through holes of the porous ceramic vacuum suction cup 9 through the diaphragm pump 2, three-way valve 1 5 and three-way valve 2 6, so as to ensure thorough cleaning; wherein, the diaphragm pump 2 can be pneumatic, electric, etc., preferably pneumatic; the three-way valve 1 5 and three-way valve 2 6 can be pneumatic, electric, etc., preferably pneumatic.

[0034] Further, such as Figure 1The carrier 1 includes a platform 11, a channel 111, a positive pressure inlet 112, and a negative pressure outlet 113, all of which are located on the platform 11; and a plurality of fixing assemblies 12, each of which has one end movably locked with the platform 11 and the other end of each fixing assemblies 12 configured to contact the porous ceramic vacuum chuck 9. Specifically, the platform 11 is configured to support the porous ceramic vacuum chuck 9; the fixing assemblies 12 are configured to secure the porous ceramic vacuum chuck 9 to the platform 11. The number of fixing assemblies 12 is not limited, but preferably two are provided, and the two fixing assemblies 12 are preferably symmetrically disposed on either side of the porous ceramic vacuum chuck 9.

[0035] Further, such as Figure 4 The fixing assembly 12 includes a fixing plate 121 and a handle screw 122. The handle screw 122 passes through one end of the fixing plate 121 and is threadedly connected to the platform 11. The other end of the fixing plate 121 is used to contact the porous ceramic vacuum suction cup 9. Specifically, the fixing plate 121 and the handle screw 122 are used together to fix the porous ceramic vacuum suction cup 9 on the platform 11.

[0036] Further, such as Figure 4 The carrier 1 further includes a plurality of supporting legs 13 connected to the platform 11. Specifically, the plurality of supporting legs 13 are used to support the platform 11. The number of supporting legs 13 is not limited, and is preferably two.

[0037] Further, such as Figure 1 , further comprising: an air supply assembly 71; an on-off valve 72 connected between the air supply assembly 71 and the air source input port 23 of the diaphragm pump 2; and a switching valve 73, one end of which is connected to the air supply assembly 71, and the other end of which is connected to both the three-way valve 1 5 and the three-way valve 2 6. Specifically, the air supply assembly 71 and the on-off valve 72 are used together to achieve pneumatic on / off control of the diaphragm pump 2. The on-off valve 72 can be a ball valve, a butterfly valve, or the like. The air supply assembly 71 and the switching valve 73 are used together to achieve pneumatic switching control of the three-way valve 1 5 and the three-way valve 2 6.

[0038] Further, such as Figure 1 , further comprising a pressure regulating valve 74, one end of which is connected to the gas supply assembly 71, and the other end of which is connected to both the switch valve 72 and the switching valve 73. Specifically, the pressure regulating valve 74 is used to adjust the pressure of the gas from the gas supply assembly 71.

[0039] Further, such as Figure 1 , further comprising a first water tank 8 connected to both the second water supply assembly 4 and the third port 2 63 of the three-way valve 2 6, with the vehicle 1 being located within the first water tank 8. Specifically, the first water tank 8 is used to collect water from the positive pressure inlet 112, the third port 2 63 of the three-way valve 2 6, and a portion of the water from the second water supply assembly 4.

[0040] Further, such as Figure 1 The first water supply component 3 includes a water tank 1 31, which is connected to the second interface 1 52 of the three-way valve 1 5. Specifically, the water tank 1 31 is used for water supply.

[0041] The above embodiments merely illustrate several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the concept of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A porous ceramic vacuum suction cup positive and negative pressure cleaning device, characterized in that: include: A carrier for fixing the porous ceramic vacuum chuck, wherein the carrier is provided with interconnected channels, a positive pressure inlet, and a negative pressure outlet, wherein the channels are used to communicate with the multiple through holes of the porous ceramic vacuum chuck; a diaphragm pump, a first water supply assembly, and a second water supply assembly, wherein the second water supply assembly is in communication with the channel; Three-way valve 1, wherein the first interface 1 of the three-way valve 1 is connected to the inlet of the diaphragm pump, the second interface 1 of the three-way valve 1 is connected to the first water supply component, and the third interface 1 of the three-way valve 1 is connected to the negative pressure outlet; Three-way valve 2, the first interface 2 of the three-way valve 2 is connected to the outlet of the diaphragm pump, and the second interface 2 of the three-way valve 2 is connected to the positive pressure inlet.

2. The porous ceramic vacuum chuck positive and negative pressure cleaning device according to claim 1, characterized in that: The carrier includes: A platform, wherein the channel, the positive pressure inlet and the negative pressure outlet are all provided on the platform; A plurality of fixing components, one end of each of the fixing components is movably locked to the platform, and the other end of each of the fixing components is used to contact the porous ceramic vacuum suction cup.

3. The porous ceramic vacuum chuck positive and negative pressure cleaning device according to claim 2, characterized in that: The fixing assembly includes a fixing plate and a handle screw, wherein the handle screw passes through one end of the fixing plate and is threadedly connected to the platform, and the other end of the fixing plate is used to contact the porous ceramic vacuum suction cup.

4. The porous ceramic vacuum chuck positive and negative pressure cleaning device according to claim 2, characterized in that: The carrier also includes a plurality of support legs each connected to the platform.

5. A porous ceramic vacuum chuck positive and negative pressure cleaning device according to any one of claims 1 to 4, characterized in that: Also includes: Air supply components; an on-off valve connected between the air supply assembly and the air source input port of the diaphragm pump; A switching valve, one end of which is connected to the air supply assembly, and the other end of which is connected to both the three-way valve 1 and the three-way valve 2.

6. The porous ceramic vacuum chuck positive and negative pressure cleaning device according to claim 5, characterized in that: It also includes a pressure regulating valve, one end of which is connected to the air supply assembly, and the other end of which is connected to both the switch valve and the switching valve.

7. A porous ceramic vacuum chuck positive and negative pressure cleaning device according to any one of claims 1 to 4, characterized in that: It also includes a first water tank that is connected to the second water supply component and the third interface 2 of the three-way valve 2, and the carrier is located in the first water tank.

8. A porous ceramic vacuum chuck positive and negative pressure cleaning device according to any one of claims 1 to 4, characterized in that: The first water supply component includes a water tank 1, and the water tank 1 is connected to the second interface 1 of the three-way valve 1.

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